公开(公告)号：US06717717B2

公开(公告)日：2004-04-06

申请号：US09906530

申请日：2001-07-16

申请人： Keith A. Nelson

发明人： Keith A. Nelson

IPC分类号： G02F135

CPC分类号： G02F1/353

摘要： Methods and systems are disclosed that dynamically shift the wavelength of an electromagnetic (EM) beam by interacting the beam with a polariton wave having a selected polariton wave frequency.

摘要翻译： 公开了通过使光束与具有选定的极化子波频率的极化子波相互作用来动态地移动电磁（EM）波长的方法和系统。

公开(公告)号：US6069703A

公开(公告)日：2000-05-30

申请号：US86975

申请日：1998-05-28

申请人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers ,  Keith A. Nelson ,  Timothy F. Crimmins ,  Alexei Maznev

发明人： Matthew J. Banet ,  Martin Fuchs ,  John A. Rogers ,  Keith A. Nelson ,  Timothy F. Crimmins ,  Alexei Maznev

IPC分类号： G01B11/06 ,  G01B17/02 ,  G01N3/02 ,  G01N21/00 ,  G01N29/00 ,  G01N29/24 ,  G01N29/04

CPC分类号： G01N29/2418 ,  G01B11/0666 ,  G01B17/025 ,  G01N2021/1725 ,  G01N2203/0222 ,  G01N2203/0282 ,  G01N2291/0231 ,  G01N2291/0237 ,  G01N2291/02854

摘要： An apparatus for measuring a property of a structure comprising at least one layer, the appratus including a light source that produces an optical pulse having a duration of less than 10 ps; a diffractive element that receives the optical pulse and diffracts it to generate at least two excitation pulses; an optical system that spatially and temporally overlaps at least two excitation pulses on or in the structure to form an excitation pattern, containing at least two light regions, that launches an acoustic wave having an out-of-plane component that propagates through the layer, reflects off a lower boundary of the layer, and returns to a surface of the structure to modulate a property of the structure; a light source that produces a probe pulse that diffracts off the modulated property to generate at least one signal pulse; a detector that receives at least one signal pulse and in response generates a light-induced electrical signal; and an analyzer that analyzes the light-induced electrical signal to measure the property of the structure.

摘要翻译： 一种用于测量包括至少一层的结构的性质的装置，所述装置包括产生具有小于10ps的持续时间的光脉冲的光源; 衍射元件，其接收光脉冲并衍射以产生至少两个激励脉冲; 在该结构上或其结构中空间和时间上重叠至少两个激励脉冲以形成激发图案的光学系统，其包含至少两个光区域，该至少两个光区域发射具有传播通过该层的平面外部分的声波， 反射层的下边界，并返回到结构的表面以调节结构的性质; 产生探测脉冲的光源，其衍射出调制特性以产生至少一个信号脉冲; 接收至少一个信号脉冲并作为响应的检测器产生光诱导的电信号; 以及分析器，其分析光感应电信号以测量结构的性质。

公开(公告)号：US5734470A

公开(公告)日：1998-03-31

申请号：US844850

申请日：1997-04-22

申请人： John A. Rogers ,  Keith A. Nelson

发明人： John A. Rogers ,  Keith A. Nelson

IPC分类号： G01L1/00 ,  G01N21/17 ,  G01N21/27 ,  G01N21/63 ,  G01N21/64 ,  G01B9/02 ,  G01N21/00

CPC分类号： G01N21/636 ,  G01N21/1717

摘要： An optical modulating system which allows modulation of a single light beam with a spatially filtering mask to form a spatially periodic, time-dependent excitation field. Once generated, the field can be used to induce a transient grating in a sample. The optical modulating system is additionally configured to automatically orient a probe beam at the Bragg angle, thereby allowing the intensity of the probe beam diffracted off the induced grating to be maximized. Measurement of the diffracted probe beam allows, for example, determination of mechanical, thermal, electrical, and optical properties of the sample.

摘要翻译： 一种光调制系统，其允许用空间滤波掩模调制单个光束以形成空间周期性的时间依赖的激励场。 一旦生成，该场可用于诱导样品中的瞬态光栅。 光学调制系统另外配置成以布拉格角自动地定向探测光束，从而允许从感应光栅衍射的探测光束的强度最大化。 衍射探针光束的测量允许例如确定样品的机械，热，电和光学性质。

公开(公告)号：US5682262A

公开(公告)日：1997-10-28

申请号：US571523

申请日：1995-12-13

申请人： Marc M. Wefers ,  Keith A. Nelson

发明人： Marc M. Wefers ,  Keith A. Nelson

IPC分类号： H01S3/00 ,  G02F1/33

CPC分类号： H01S3/005 ,  G02F2203/12 ,  H01S3/0057

摘要： A method and device for shaping both the temporal and spatial profiles of an input optical pulse to generate an output optical waveform are described. The method includes the step of dispersing the spectral frequencies of the input pulse. These frequencies are then focused with a cylindrical lens to form a two-dimensional optical field. The field is imaged on a mask featuring a two-dimensional array of pixels. The amplitudes, phases, or phases and amplitudes of the two-dimensional optical field are then filtered with the mask. The filtered spectral frequencies are then recombined to form the collective temporal profile of the output waveform. The two-dimensional optical field is then imaged in a sample plane to form the spatially coherent regions.

摘要翻译： 描述了用于整形输入光脉冲的时间和空间分布以产生输出光波形的方法和装置。 该方法包括分散输入脉冲的频谱频率的步骤。 然后将这些频率用柱面透镜聚焦以形成二维光场。 该场在具有二维像素阵列的掩模上成像。 然后用掩模过滤二维光场的幅度，相位或相位和振幅。 然后将滤波的频谱频率重新组合以形成输出波形的集合时间分布。 然后将二维光场在样品平面中成像以形成空间相干区域。

公开(公告)号：US20140061469A1

公开(公告)日：2014-03-06

申请号：US13933557

申请日：2013-07-02

申请人： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

发明人： Harold Y. Hwang ,  Mengkun Liu ,  Richard D. Averitt ,  Keith A. Nelson ,  Aaron Sternbach ,  Kebin Fan

IPC分类号： G01J5/28

CPC分类号： G01J5/28 ,  G01J5/20 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/283 ,  G01J2005/286 ,  H01L27/14636 ,  H01L27/1464 ,  H01L27/14669 ,  H01L31/09

摘要： An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.

摘要翻译： 提供一种用于检测目标频率范围内的电磁辐射的装置。 该装置包括衬底和设置在衬底上的一个或多个谐振器结构。 衬底可以是电介质或半导体材料。 一个或多个谐振器结构中的每一个具有小于目标频率范围内的目标电磁辐射的波长的至少一个维度，并且每个谐振器结构都包括由间隔隔开的至少两个导电结构。 当谐振器结构暴露于目标电磁辐射时，电荷载流子在衬底附近被感应。 由于感应的电荷载体导致的衬底的电导率变化的测量提供了目标电磁辐射的存在的指示。

公开(公告)号：US07387027B2

公开(公告)日：2008-06-17

申请号：US11186401

申请日：2005-07-21

申请人： Jaime D. Choi ,  Benjamin Paxton ,  Thomas Feurer ,  Masashi Yamaguchi ,  Keith A. Nelson

发明人： Jaime D. Choi ,  Benjamin Paxton ,  Thomas Feurer ,  Masashi Yamaguchi ,  Keith A. Nelson

IPC分类号： G01N29/00 ,  G01F2/02 ,  G01B11/02

CPC分类号： G01N29/343 ,  G01H13/00 ,  G01H17/00 ,  G01N29/07 ,  G01N29/11 ,  G01N29/2418 ,  G01N2291/018 ,  G01N2291/0231 ,  G01N2291/02827 ,  G01N2291/0421 ,  G10K15/046

摘要： A method for characterizing one or more properties of a sample using acoustic waveforms is disclosed, and comprises directing a sequence of at least three optical pulses to the sample to generate an acoustic response in the sample at a frequency corresponding to the pulse sequence, varying the timing of one or more of the pulses in the sequence to vary the frequency of the acoustic response in the sample, and measuring the strength of the acoustic response as a function of the varied frequency to determine information about the sample.

摘要翻译： 公开了一种使用声波形态来表征样本的一个或多个属性的方法，并且包括将至少三个光脉冲的序列指向样本以在对应于脉冲序列的频率处在样本中产生声响应， 序列中的一个或多个脉冲的定时以改变样本中的声响应的频率，并且根据变化的频率测量声响应的强度以确定关于样本的信息。

公开(公告)号：US06795198B1

公开(公告)日：2004-09-21

申请号：US09087141

申请日：1998-05-28

申请人： Martin Fuchs ,  Matthew J. Banet ,  Keith A. Nelson ,  John A. Rogers

发明人： Martin Fuchs ,  Matthew J. Banet ,  Keith A. Nelson ,  John A. Rogers

IPC分类号： G01B902

CPC分类号： G01N21/1717 ,  G01B11/0666 ,  G01N29/2418 ,  G01N2291/0423

摘要： The invention provides both a method and apparatus that measures a property of a structure that includes at least one layer. The apparatus features a laser (e.g., a microchip laser, described below) that generates an optical pulse, and a diffractive mask that receives the optical pulse and diffracts it to generate at least two excitation pulses. An optical system, (e.g., an achromat lens pair) receives the optical pulses and spatially and temporally overlaps them on or in the structure to form an excitation pattern that launches an acoustic wave. The acoustic wave modulates a property of the structure, e.g., it generates a time-dependent “surface ripple” or modulates an optical property such as the sample's refractive index or absorption coefficient. Surface ripple is defined as a time-dependent change in the morphology of the surface; its peak-to-null amplitude is typically a few angstroms or less. The apparatus also includes a light source that produces a probe beam that reflects off the modulated property to generate a signal beam. An optical detection system receives the reflected signal beam and in response generates a light-induced electrical signal. An analyzer analyzes the signal to measure the property of the structure.

摘要翻译： 本发明提供了一种测量包括至少一层的结构的性质的方法和装置。 该装置具有产生光脉冲的激光器（例如，下面描述的微芯片激光器），以及接收光脉冲并衍射以产生至少两个激励脉冲的衍射掩模。 光学系统（例如，消色差透镜对）接收光学脉冲，并且在结构中或结构中空间和时间上重叠它们以形成发射声波的激发图案。 声波调制结构的性质，例如，其产生时间依赖性的“表面纹波”或调制光学特性，例如样品的折射率或吸收系数。 表面波纹定义为表面形态的时间依赖性变化; 其峰到零幅度通常为几埃或更小。 该装置还包括产生探测光束的光源，其反射出调制的特性以产生信号光束。 光学检测系统接收反射的信号光束，并且响应于产生光诱导的电信号。 分析仪分析信号以测量结构的性质。

公开(公告)号：US06479822B1

公开(公告)日：2002-11-12

申请号：US09611834

申请日：2000-07-07

申请人： Keith A. Nelson ,  Timothy Crimmins

发明人： Keith A. Nelson ,  Timothy Crimmins

IPC分类号： G01N2163

CPC分类号： G01N21/3581 ,  G01N21/3563

摘要： A spectroscopic method for characterizing a sample including: positioning the sample adjacent to a non-centrosymmetric material; directing at least one temporal pulse of coherent EM radiation into the non-centrosymmetric material to generate a polariton therein and cause EM radiation from the polariton to propagate into the sample, wherein the polariton has a frequency less than or equal to the bandwidth of the pulse; and measuring a response of the sample to the EM radiation from the polariton.

摘要翻译： 一种用于表征样品的分光方法，包括：将样品邻近非中心对称材料定位; 将相干EM辐射的至少一个时间脉冲引导到非中心对称材料中以在其中产生极化子，并使来自极化子的EM辐射传播到样品中，其中极化子具有小于或等于脉冲带宽的频率 ; 并测量样品对来自极化子的EM辐射的响应。

公开(公告)号：US06356349B1

公开(公告)日：2002-03-12

申请号：US09350972

申请日：1999-07-09

申请人： Richard A. Koehl ,  Satoru Adachi ,  Keith A. Nelson

发明人： Richard A. Koehl ,  Satoru Adachi ,  Keith A. Nelson

IPC分类号： G01N2101

CPC分类号： G01N21/1717 ,  G01N21/21 ,  G01N21/41 ,  G01N2021/1725

摘要： A method for characterizing a polariton wave within a material includes: generating the polariton wave; and imaging the polariton wave with optical radiation to produce a spatially-resolved image of portions of the optical radiation affected by the polariton wave. The method can be used to identify inhomogeneities in the material, detect electrical signals within the material, or characterize a polariton wave propagating within a waveguide, e.g., a waveguide formed within a photonic crystal. The optical imaging can be based on diffraction, polarization rotation, or spectral filtering of optical probe radiation transmitted through, or reflected by, the material.

摘要翻译： 用于表征材料内的极化子波的方法包括：产生极化子波; 并用光学辐射成像极化子波，以产生受极化子波影响的光辐射的部分的空间分辨图像。 该方法可用于识别材料中的不均匀性，检测材料内的电信号，或表征在波导内传播的极化子波，例如在光子晶体内形成的波导。 光学成像可以基于通过材料透射或反射的光学探针辐射的衍射，偏振旋转或光谱滤波。

公开(公告)号：US5982482A

公开(公告)日：1999-11-09

申请号：US903901

申请日：1997-07-31

申请人： Keith A. Nelson ,  John A. Rogers

发明人： Keith A. Nelson ,  John A. Rogers

IPC分类号： G01N29/24 ,  G01N29/44 ,  G01N29/04

CPC分类号： G01N29/4427 ,  G01N29/2418 ,  G01N2291/011 ,  G01N2291/015 ,  G01N2291/0231 ,  G01N2291/2698

摘要： The invention features a method for detecting a subsurface defect in a thin film structure. The method includes: optically generating an acoustic wave in a first spatial region of the film; optically measuring a time-dependent reflection of the acoustic wave from subsurface features in the film to produce a time-dependent signal; and analyzing the signal to detect an existence of the defect. The optically measuring step can include measuring the diffraction of a probe beam from the reflected acoustic wave. The analyzing step can include comparing the measured signal to a reference signal for defect-free structure.

摘要翻译： 本发明的特征在于一种用于检测薄膜结构中的地下缺陷的方法。 该方法包括：在胶片的第一空间区域中光学地产生声波; 光学地测量来自薄膜中的地下特征的声波的时间依赖性反射以产生时间相关信号; 并分析信号以检测缺陷的存在。 光学测量步骤可以包括测量来自反射声波的探测光束的衍射。 分析步骤可以包括将测量的信号与用于无缺陷结构的参考信号进行比较。