Method of manufacturing flash memory device
    34.
    发明申请
    Method of manufacturing flash memory device 审中-公开
    制造闪存设备的方法

    公开(公告)号:US20070141769A1

    公开(公告)日:2007-06-21

    申请号:US11491589

    申请日:2006-07-24

    申请人: Byoung Lee

    发明人: Byoung Lee

    IPC分类号: H01L21/8234 H01L21/336

    CPC分类号: H01L27/115 H01L27/11521

    摘要: A method of manufacturing a flash memory device, including the steps of sequentially forming a tunnel oxide film, a first polysilicon layer, a nitride film, and a hard mask film on a semiconductor substrate, etching the hard mask film, the nitride film, the first polysilicon layer, and a predetermined region of the tunnel oxide films and then etching the exposed semiconductor substrate by a predetermined depth, thereby forming trenches, forming an oxide film on the entire structure so that the trenches are buried, polishing the oxide film and stripping the hard mask film, forming isolation films, etching the isolation films by a predetermined thickness, wherein when the nitride film is etched, the first polysilicon layer is also etched to form a trapezoid profile, stripping the nitride film remaining after the nitride film is etched, and forming a dielectric layer, and burying the entire top surface with a second polysilicon layer and a gate conductive film.

    摘要翻译: 一种制造闪速存储器件的方法,包括在半导体衬底上依次形成隧道氧化膜,第一多晶硅层,氮化物膜和硬掩模膜的步骤,蚀刻硬掩模膜,氮化物膜, 第一多晶硅层和隧道氧化物膜的预定区域,然后以预定深度蚀刻暴露的半导体衬底,从而形成沟槽,在整个结构上形成氧化膜,使得沟槽被埋入,抛光氧化膜和剥离 硬掩模膜,形成隔离膜,以预定厚度蚀刻隔离膜,其中当蚀刻氮化物膜时,还蚀刻第一多晶硅层以形成梯形轮廓,剥离在氮化物膜蚀刻之后残留的氮化物膜 并形成电介质层,并且将整个顶表面与第二多晶硅层和栅极导电膜进行掩埋。

    Blower and cleaner including the same
    35.
    发明申请
    Blower and cleaner including the same 审中-公开
    鼓风机和清洁器包括相同

    公开(公告)号:US20060280596A1

    公开(公告)日:2006-12-14

    申请号:US11331053

    申请日:2006-01-13

    IPC分类号: F04D29/66

    摘要: A blower designed to reduce noise generated between impeller blades and diffuser blades positioned around the impeller blades upon rotation of an impeller, and a cleaner including the same are disclosed. The diffuser blades are non-uniformly spaced from each other in a circumferential direction such that interaction between the plurality of impeller blades and the plurality of diffuser blades become irregular upon rotation of the impeller. Distances between the impeller blades and the diffuser blades are non-uniform. With this construction, the blower and the cleaner are reduced in BPF noise, thereby enhancing performance thereof.

    摘要翻译: 公开了一种鼓风机,其被设计成在叶轮旋转时减小叶轮叶片与叶轮叶片周围的扩散叶片之间产生的噪声,以及包括该叶轮的清洁器。 扩散器叶片在圆周方向上彼此不均匀地分开,使得当叶轮旋转时,多个叶轮叶片和多个扩散器叶片之间的相互作用变得不规则。 叶轮叶片和扩散器叶片之间的距离是不均匀的。 通过这种结构,鼓风机和清洁器的BPF噪音降低,从而提高其性能。

    Adhesives having advanced flame-retardant property
    36.
    发明申请
    Adhesives having advanced flame-retardant property 审中-公开
    具有先进阻燃性能的胶粘剂

    公开(公告)号:US20050192392A1

    公开(公告)日:2005-09-01

    申请号:US10986654

    申请日:2004-11-12

    摘要: The present invention provides an adhesive comprising an acrylic polymer resin and a flame-retardant filler, in which the content of unreacted residual monomers in the adhesive, which are parts of monomers for forming the acrylic polymer resin and remain unreacted after a preparation process of the adhesive, is 2% or less by weight. Also, the present invention provides an adhesive sheet formed by applying the adhesive to one or both sides of a substrate. In addition, the present invention provides a method of controlling the flame retardancy of the adhesive by adjusting the content of the unreacted residual monomers in the adhesive.

    摘要翻译: 本发明提供一种粘合剂,其包含丙烯酸类聚合物树脂和阻燃填料,其中粘合剂中未反应的残余单体的含量是形成丙烯酸类聚合物树脂的单体的一部分,并且在制备过程中保持未反应 粘合剂为2重量%以下。 此外,本发明提供了一种通过将粘合剂施加到基材的一侧或两侧而形成的粘合片。 此外,本发明提供了通过调节粘合剂中未反应的残余单体的含量来控制粘合剂的阻燃性的方法。

    Method for manufacturing flash memory device
    37.
    发明申请
    Method for manufacturing flash memory device 失效
    闪存器件制造方法

    公开(公告)号:US20050142741A1

    公开(公告)日:2005-06-30

    申请号:US10882451

    申请日:2004-06-30

    摘要: The present invention discloses a method for manufacturing a flash memory device including the steps of: sequentially forming a first polysilicon film for a floating gate electrode, a first oxide film, a polysilicon film for a hard mask and a second oxide film on a semiconductor substrate; etching and patterning the second oxide film and the polysilicon film for the hard mask, by forming photoresist patterns on a predetermined region of the second oxide film, and removing the photoresist patterns; forming spacers on the sidewalls of the polysilicon film for the hard mask, by forming and etching a polysilicon film for forming spacers on the whole surface of the resulting structure; removing the exposed first oxide film and a predetermined thickness of second oxide film formed on the patterned polysilicon film for the hard mask; forming floating gate electrode patterns by performing first and second etching processes by using the patterned polysilicon film for the hard mask and the spacers as an etch mask; performing a cleaning process on the whole surface of the resulting structure, and removing the residual second oxide film at the same time; and forming control gate electrode patterns, by sequentially forming and patterning an ONO film, a second polysilicon film for a control gate electrode, a metal silicide film and a hard mask on the resulting structure on which the floating gate electrode patterns have been formed.

    摘要翻译: 本发明公开了一种闪速存储器件的制造方法,包括以下步骤:顺序地形成用于浮置栅极的第一多晶硅膜,第一氧化膜,用于硬掩模的多晶硅膜和半导体衬底上的第二氧化物膜 ; 通过在第二氧化膜的预定区域上形成光致抗蚀剂图案,去除光致抗蚀剂图案,蚀刻和图案化第二氧化物膜和用于硬掩模的多晶硅膜; 在用于硬掩模的多晶硅膜的侧壁上形成间隔物,通过在所得结构的整个表面上形成和蚀刻用于形成间隔物的多晶硅膜; 去除暴露的第一氧化物膜和形成在用于硬掩模的图案化多晶硅膜上的预定厚度的第二氧化膜; 通过使用用于硬掩模的图案化多晶硅膜和间隔物作为蚀刻掩模,通过执行第一和第二蚀刻工艺来形成浮栅电极图案; 在所得结构的整个表面上进行清洁处理,同时去除残留的第二氧化膜; 以及通过在其上形成有浮栅电极图案的所得结构上顺序地形成和图案化ONO膜,用于控制栅电极的第二多晶硅膜,金属硅化物膜和硬掩模来形成控制栅电极图案。

    Method of manufacturing flash memory device
    38.
    发明申请
    Method of manufacturing flash memory device 审中-公开
    制造闪存设备的方法

    公开(公告)号:US20050130375A1

    公开(公告)日:2005-06-16

    申请号:US10874730

    申请日:2004-06-22

    申请人: Byoung Lee

    发明人: Byoung Lee

    摘要: The present invention relates to a method for manufacturing a flash memory device. In a flash memory device using a self-aligned shallow trench isolation (SA-STI) scheme, an amorphous silicon layer is formed on a gate oxide film and a SPG process is implemented to change the amorphous silicon layer to a first polysilicon layer having large grains. It is thus possible to improve a thinning condition of the gate oxide film.

    摘要翻译: 本发明涉及一种用于制造闪速存储器件的方法。 在使用自对准浅沟槽隔离(SA-STI)方案的闪存器件中,在栅极氧化膜上形成非晶硅层,并且实施SPG工艺以将非晶硅层改变为具有大的第一多晶硅层 谷物。 因此可以改善栅极氧化膜的薄化状态。