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31.
公开(公告)号:US20230238428A1
公开(公告)日:2023-07-27
申请号:US17582550
申请日:2022-01-24
Applicant: GlobalFoundries U.S. Inc.
Inventor: Rong-Ting Liou , Man Gu , Jeffrey B. Johnson , Wang Zheng , Jagar Singh , Haiting Wang
IPC: H01L29/06 , H01L29/78 , H01L29/66 , H01L21/762
CPC classification number: H01L29/0653 , H01L29/7816 , H01L29/66681 , H01L21/76224
Abstract: An IC structure that includes a trench isolation (TI) in a substrate having three portions of different dielectric materials. The portions may also have different widths. The TI may include a lower portion including a first dielectric material and having a first width, a middle portion including the first dielectric material and an outer second dielectric material, and an upper portion including a third dielectric material and having a second width greater than the first width. The first, second and third dielectric materials are different.
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32.
公开(公告)号:US20230083044A1
公开(公告)日:2023-03-16
申请号:US17457325
申请日:2021-12-02
Applicant: GlobalFoundries U.S. Inc.
Inventor: Alexander M. Derrickson , John L. Lemon , Haiting Wang , Judson R. Holt
IPC: H01L29/735 , H01L29/10 , H01L29/66
Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with inner and outer spacers, and related methods. A lateral bipolar transistor structure may have an emitter/collector (E/C) layer over an insulator. The E/C layer has a first doping type. A first base layer is on the insulator and adjacent the E/C layer. The first base layer has a second doping type opposite the first doping type. A second base layer is on the first base layer and having the second doping type. A dopant concentration of the second base layer is greater than a dopant concentration of the first base layer. An inner spacer is on the E/C layer and adjacent the second base layer. An outer spacer is on the E/C layer and adjacent the inner spacer.
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33.
公开(公告)号:US20230067523A1
公开(公告)日:2023-03-02
申请号:US17456943
申请日:2021-11-30
Applicant: GlobalFoundries U.S. Inc.
Inventor: Haiting Wang , Hong Yu , Zhenyu Hu , Alexander M. Derrickson
IPC: H01L29/10 , H01L29/735 , H01L29/66
Abstract: Embodiments of the disclosure provide a lateral bipolar transistor with a base layer of varying horizontal thickness, and related methods to form the same. A lateral bipolar transistor may include an emitter/collector (E/C) layer on a semiconductor layer. A first base layer is on the semiconductor layer and horizontally adjacent the E/C layer. The first base layer has a lower portion having a first horizontal width from the E/C layer. The first base layer also has an upper portion on the lower portion, with a second horizontal width from the E/C layer greater than the first horizontal width. A second base layer is on the first base layer and adjacent a spacer. The upper portion of the first base layer separates a lower surface of the second base layer from the E/C layer.
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公开(公告)号:US11456382B2
公开(公告)日:2022-09-27
申请号:US16664056
申请日:2019-10-25
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Laertis Economikos , Shesh Mani Pandey , Hui Zang , Haiting Wang , Jinping Liu
IPC: H01L29/49 , H01L29/423 , H01L29/78 , H01L21/02 , H01L29/66
Abstract: A transistor device disclosed herein includes, among other things, a gate electrode positioned above a semiconductor material region, a sidewall spacer positioned adjacent the gate electrode, a gate insulation layer having a first portion positioned between the gate electrode and the semiconductor material region and a second portion positioned between a lower portion of the sidewall spacer and the gate electrode along a portion of a sidewall of the gate electrode, an air gap cavity located between the sidewall spacer and the gate electrode and above the second portion of the gate insulation layer, and a gate cap layer positioned above the gate electrode, wherein the gate cap layer seals an upper end of the air gap cavity so as to define an air gap positioned adjacent the gate electrode.
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35.
公开(公告)号:US11349030B2
公开(公告)日:2022-05-31
申请号:US16739299
申请日:2020-01-10
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Jiehui Shu , Haiting Wang , Hong Yu
IPC: H01L29/78 , H01L27/088 , H01L29/66 , H01L21/762 , H01L21/02
Abstract: A transistor device that includes a single semiconductor structure having an outer perimeter and a vertical height, wherein the single semiconductor structure is at least partially defined by a trench formed in a semiconductor substrate and a first layer of material positioned on the bottom surface of the trench and around the outer perimeter of the single semiconductor structure. The device also includes a second layer of material positioned on the first layer of material and around the outer perimeter of the single semiconductor structure, a gap between the outer perimeter of the single semiconductor structure and both the first and second layers of material (when considered collectively) and an insulating sidewall spacer positioned in the gap, wherein the insulating sidewall spacer has a vertical height that is less than the vertical height of the single semiconductor structure.
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公开(公告)号:US11264504B2
公开(公告)日:2022-03-01
申请号:US16751779
申请日:2020-01-24
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Yanping Shen , Haiting Wang , Hong Yu
IPC: H01L29/78 , H01L29/16 , H01L29/423
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a scheme of active and dummy fin structures and methods of manufacture. The structure includes: an active fin structure; at least one dummy fin structure running along at least one side of the active fin structure along its length; a fin cut separating the at least one dummy fin structure along its longitudinal axes; and a gate structure extending over the active fin structure and the fin cut.
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公开(公告)号:US20210399126A1
公开(公告)日:2021-12-23
申请号:US16906490
申请日:2020-06-19
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Sipeng Gu , Judson R. Holt , Haiting Wang , Yanping Shen
Abstract: An illustrative transistor device disclosed herein includes a gate structure positioned around a portion of a fin defined in a semiconductor substrate and epitaxial semiconductor material positioned on the fin in a source/drain region of the transistor device, wherein the epitaxial semiconductor material has a plurality of lower angled surfaces. In this example, the device further includes a first sidewall spacer positioned adjacent the gate structure, wherein a first portion of the first sidewall spacer is also positioned on and in physical contact with at least a portion of the lower angled surfaces of the epitaxial semiconductor material.
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公开(公告)号:US20210336126A1
公开(公告)日:2021-10-28
申请号:US16855745
申请日:2020-04-22
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
IPC: H01L43/02 , H01L27/24 , H01L27/22 , H01L27/1159 , H01L43/08 , H01L43/10 , H01L43/12 , H01L45/00
Abstract: An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.
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公开(公告)号:US11114466B2
公开(公告)日:2021-09-07
申请号:US16774087
申请日:2020-01-28
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Sipeng Gu , Jiehui Shu , Haiting Wang
IPC: H01L27/12 , H01L21/762 , H01L21/306 , H01L21/84 , H01L21/265 , H01L21/76
Abstract: One illustrative IC product disclosed herein includes an (SOI) substrate comprising a base semiconductor layer, a buried insulation layer and an active semiconductor layer positioned above the buried insulation layer. In this particular example, the IC product also includes a first region of localized high resistivity formed in the base semiconductor layer, wherein the first region of localized high resistivity has an electrical resistivity that is greater than an electrical resistivity of the material of the base semiconductor layer. The IC product also includes a first region comprising integrated circuits formed above the active semiconductor layer, wherein the first region comprising integrated circuits is positioned vertically above the first region of localized high resistivity in the base semiconductor layer.
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公开(公告)号:US20210273061A1
公开(公告)日:2021-09-02
申请号:US16803711
申请日:2020-02-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Haiting Wang , Tamilmani Ethirajan , Zhenyu Hu , Tung-Hsing Lee
IPC: H01L29/417 , H01L29/08 , H01L29/10 , H01L29/423 , H01L29/73
Abstract: One illustrative device disclosed herein includes a semiconductor substrate and a bipolar junction transistor (BJT) device that comprises a collector region, a base region and an emitter region. In this example, the device also includes a field effect transistor and at least one base conductive contact structure that conductively and physically contacts the base region.
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