摘要:
A method for the laser processing of a wafer having a plurality of devices which are composed of a laminate consisting of an insulating film and a functional film on the front surface of a substrate, the method comprising applying a pulse laser beam along streets for sectioning the plurality of devices to form grooves along the streets, wherein a pulse width of the pulse laser beam is set to 100 to 1,000 ns.
摘要:
A processing apparatus using a laser beam, which comprises holding means for holding a workpiece, and laser beam application means for irradiating the workpiece, held by the holding means, with a pulsed laser beam capable of passing through the workpiece, thereby deteriorating the workpiece. The laser beam application means includes pulsed laser beam oscillation means and transmitting/focusing means for transmitting and focusing the pulsed laser beam oscillated by the pulsed laser beam oscillation means. The transmitting/focusing means focuses the pulsed laser beam, with a time difference provided, to at least two focus points displaced in the optical axis direction.
摘要:
A laser beam machine comprising a chuck table for holding a workpiece and a laser beam application means for applying a laser to the workpiece held on the chuck table, wherein the machine further comprises a processing sound wave detection means for detecting processing sound waves generated when a laser beam is applied to the workpiece from the laser beam application means and a control means for judging whether a detection signal from the processing sound wave detection means falls within a predetermined permissible range.
摘要:
A laser beam machine comprising a workpiece holding means for holding a workpiece, a laser beam application means comprising a condenser for applying a laser beam to the workpiece held on the workpiece holding means, and a focusing point position adjusting means for adjusting the position of the focusing point of the laser beam applied by the condenser, wherein the machine further comprises a temperature detection means for detecting a temperature of the condenser and a control means for controlling the focusing point position adjusting means based on the temperature of the condenser detected by the temperature detection means.
摘要:
A method which can divide a semiconductor wafer sufficiently precisely along a street by use of a laser beam, while fully avoiding or suppressing contamination of circuits formed in rectangular regions on the face of the semiconductor water, and without causing chipping to the rectangular regions on the face. A laser beam is applied from beside one of the back and the face of a semiconductor substrate and focused onto the other of the back and the face of the semiconductor substrate, or the vicinity thereof, to partially deteriorate at least a zone ranging from the other of the back and the face of the semiconductor substrate to a predetermined depth.
摘要:
A negative working radiation sensitive resin composition comprising; an alkali-soluble novolak resin treated by fractionation and having 1,000 to 10,000 of weight average molecular weight as determined by polystyrene standard, where the portion with molecular weight of 500 or less is 5% or less in the total resin; a crosslinking agent; and a photo acid generator. This negative working radiation sensitive resin composition can be used preferably as etching resist, ion implantation resist, plating resist, LCD panel structural material such as spacer and electrode insulation material for an organic EL display because of having wide process margin, high heat resistance, high sensitivity, high resolution and good pattern shape.
摘要:
An optical waveguide apparatus comprises a substrate (1), a patterned waveguide as a core (4), and an upper cladding layer (10) formed on the substrate. The core is surrounded by a cladding comprising the substrate as a lower cladding layer and the upper cladding layer and smaller in refractive index than the core. The core and the cladding are integrally coupled to each other in a manner such that temperature-dependent expansion or contraction is performed substantially in accordance the characteristic of the cladding. The core and the cladding are made of materials selected so that the variation in optical path length according to the temperature-dependent expansion or contraction of the cladding is canceled by the variation in optical path length according to temperature-dependent variation in refractive index of the core.
摘要:
An immunological assay for quantifying PEG-modified human granulocyte colony stimulating factor or derivatives thereof in a sample comprising bringing into contact with said sample an antibody which reacts with the human granulocyte colony stimulating factor or its derivative and with PEG-modified human granulocyte colony stimulating factor or its derivative and a monoclonal antibody which reacts specifically with the human granulocyte colony stimulating factor or its derivative but not with the PEG-modified human granulocyte-colony stimulating factor or its derivative.
摘要:
A symmetric multiprocessor system connecting a plurality of CPUs by a common bus initializes itself while defective CPUs are set aside to use only the remaining CPUs when the power is turned on, thereby maintaining the predetermined CPU numbers and giving a minimum influence with the existing software thereof. The multiprocessor system includes an identifier setting register to designate in a predetermined order the CPU numbers only to normal CPUs, and a reset controller to cut off the defective CPUs from the common bus. The multiprocessor system can automatically start re-setting up where the defective CPUs are detected during the processing of setting-up based on the time-out detection, can release an abnormal state of the hardware, and can control the setting-up processing in use of any CPU based on the level of a reset status input port and contents of a reset information register.
摘要:
A deep ultraviolet absorbent comprising at least one compound having one or more glycidyl groups in the molecule and at least one anthracene derivative, and a solvent capable of dissolving these compounds is effective for preventing reflection of deep ultraviolet light from a substrate during formation of resist pattern, resulting in forming ultra-fine patterns without causing notching and halation.