Organic siloxane copolymer film, method and deposition apparatus for producing same, and semiconductor device using such copolymer film
    31.
    发明授权
    Organic siloxane copolymer film, method and deposition apparatus for producing same, and semiconductor device using such copolymer film 有权
    有机硅氧烷共聚物膜,其制造方法和沉积装置以及使用这种共聚物膜的半导体装置

    公开(公告)号:US07270849B2

    公开(公告)日:2007-09-18

    申请号:US10521238

    申请日:2003-07-15

    申请人: Yoshihiro Hayashi

    发明人: Yoshihiro Hayashi

    IPC分类号: C23C14/06

    摘要: An insulated organic copolymer is provided, having the excellent mechanical strength and deposition property at an interface contacting the lower base or the upper layer of the inorganic insulation film, and the effective dielectric constant is low as the whole film, which is suitable as the interlayer insulation film that separates the multi-layer copper wirings of the semiconductor device. The organosiloxane copolymer film is obtained by the polymerization of the cyclosiloxane and the straight-chain siloxane as the raw materials by the plasma excitation of both. At the interfaces contacting the inorganic insulation films, the interface layers having a film quality that is intricate and excellent in deposition property are prepared whereby the main component of the film composition is the straight-chain siloxane. The inner section of the copolymer film mixes the cyclosiloxane component having pores surrounded by the cyclosiloxane backbone and the straight-chain siloxane components, has the network structure layer relatively suppressing the density, and has the composition changing in the thickness direction whereby the multi-layer wirings embedding the copper thin film is formed.

    摘要翻译: 提供了一种绝缘的有机共聚物,其在与无机绝缘膜的下基底或上层接触的界面处具有优异的机械强度和沉积性能,并且作为整个膜的有效介电常数低,适合作为中间层 隔离半导体器件的多层铜布线的绝缘膜。 有机硅氧烷共聚物膜是通过以二等离子体激发作为原料的环硅氧烷和直链硅氧烷的聚合而得到的。 在与无机绝缘膜接触的界面处制备具有复杂且成膜性优异的膜质量的界面层,由此膜组合物的主要成分为直链硅氧烷。 共聚物膜的内部将具有由环硅氧烷主链包围的孔的环硅氧烷成分和直链状硅氧烷成分混合,使网络结构层相对地抑制密度,并且在厚度方向上具有组成变化,由此多层 形成嵌入铜薄膜的布线。

    Wiring structure and method for manufacturing the same
    33.
    发明申请
    Wiring structure and method for manufacturing the same 有权
    接线结构及其制造方法

    公开(公告)号:US20070013069A1

    公开(公告)日:2007-01-18

    申请号:US10558367

    申请日:2004-05-28

    IPC分类号: H01L23/52 H01L23/48 H01L29/40

    摘要: A multilayer wiring structure for connecting a semiconductor device is disclosed which is obtained by forming metal wirings on a substrate in which the semiconductor device is formed. The wiring structure free from such conventional problems that insulation between wirings next to each other is damaged or insulation resistance between wirings next to each other is deteriorated by generation of leakage current when fine metal wirings are formed in a porous insulating film. A method for producing such a wiring structure is also disclosed. In the metal wiring structure on the substrate in which the semiconductor device is formed, a insulating barrier layer (413) containing an organic matter is formed between an interlayer insulating film and a metal wiring. This insulating barrier layer reduces leakage current between wirings next to each other, thereby improving insulation reliability.

    摘要翻译: 公开了一种用于连接半导体器件的多层布线结构,其通过在其中形成半导体器件的基板上形成金属布线而获得。 布线结构没有这样的常规问题,即在多孔绝缘膜中形成细金属布线时,通过产生漏电流而使彼此相邻的布线之间的绝缘损坏或彼此相邻的布线之间的绝缘电阻恶化。 还公开了一种用于制造这种布线结构的方法。 在形成了半导体器件的基板上的金属布线结构中,在层间绝缘膜和金属布线之间形成含有有机物质的绝缘阻挡层(413)。 该绝缘阻挡层减少彼此相邻的布线之间的漏电流,从而提高绝缘可靠性。

    Stencil printing machine
    36.
    发明申请
    Stencil printing machine 失效
    模版印刷机

    公开(公告)号:US20050160926A1

    公开(公告)日:2005-07-28

    申请号:US11039833

    申请日:2005-01-24

    IPC分类号: B41L13/04 B41L13/18 B41F15/40

    CPC分类号: B41L13/18

    摘要: A stencil printing machine includes: a drum which is freely rotatable and has an outer peripheral wall formed of an ink impermeable member, in which a stencil sheet is mounted on a surface of the outer peripheral wall; an ink supply device which has an ink supply port on the outer peripheral wall of the drum, and supplies ink to the surface of the outer peripheral wall from the ink supply port; a pressure roller which presses a print medium fed thereto to the outer peripheral wall; and a first cap device capable of closing the ink supply port. Moreover, the stencil printing machine further includes: an ink return device which has an ink return port on the outer peripheral wall, and returns the ink which flows into the ink return port; and a second cap device capable of closing the ink return port.

    摘要翻译: 模版印刷机包括:滚筒,其可自由旋转并具有由不透油部件形成的外周壁,其中,蜡纸安装在外周壁的表面上; 墨水供应装置,其在所述滚筒的外周壁上具有供墨口,并且从所述供墨口向所述外周壁的表面供墨; 压力辊,其将供给到其的打印介质按压到所述外周壁; 以及能够关闭供墨口的第一盖装置。 此外,模版印刷机还包括:回墨装置,其在外周壁上具有墨返回口,并且返回流入墨返回口的墨; 以及能够关闭墨返回口的第二盖装置。

    Organic polymer film and method for producing the same
    37.
    发明申请
    Organic polymer film and method for producing the same 审中-公开
    有机聚合物膜及其制造方法

    公开(公告)号:US20050059788A1

    公开(公告)日:2005-03-17

    申请号:US10901189

    申请日:2004-07-29

    IPC分类号: C08F2/52 C08F38/00

    CPC分类号: C08F2/52

    摘要: An organic polymer film with high mechanical strength, which is produced by a method comprising the steps of supplying a raw material gas containing an organic compound having at least one carbon-carbon triple bond in a molecule into a reaction chamber under reduced pressure, exciting the raw material gas in plasma generated in the reaction chamber, depositing the excited raw material gas on a surface of a substrate placed in the reaction chamber, and growing an organic polymer film on the surface of the substrate.

    摘要翻译: 一种具有高机械强度的有机聚合物膜,其通过包括以下步骤的方法制备:将分子内含有至少一个碳 - 碳三键的有机化合物的原料气体在减压下供给到反应室中, 在反应室中产生的等离子体中的原料气体,将被激发的原料气体沉积在放置在反应室中的基板的表面上,并在基板的表面上生长有机聚合物膜。

    Polyoxyalkylene monoalkyl ether, process for producing the same, polymerizable polyoxyalkylene monoalkyl ether derivative, polymer of said derivative and dispersant comprising said polymer
    38.
    发明授权
    Polyoxyalkylene monoalkyl ether, process for producing the same, polymerizable polyoxyalkylene monoalkyl ether derivative, polymer of said derivative and dispersant comprising said polymer 有权
    聚氧化烯单烷基醚,其制备方法,可聚合的聚氧化烯单烷基醚衍生物,所述衍生物的聚合物和包含所述聚合物

    公开(公告)号:US06780928B1

    公开(公告)日:2004-08-24

    申请号:US10645508

    申请日:2003-08-22

    IPC分类号: C08J302

    摘要: A polyoxyalkylene monoalkyl ether which gives, in gel permeation chromatography, a chromatogram which satisfies a relation expressed by an equation: S1/S0≦0.15, wherein S1 represents the area under a portion of the chromatogram from the start of elution to the earliest elution time when the intensity of the refractive index has a value of L/3, L representing the shortest distance between the greatest maximum point of the intensity of the refractive index and the base line and S0 represents the area under a portion of the chromatogram from the start of elution to an elution time when the intensity of the refractive index has the greatest maximum value; a process for producing the above ether comprising adjusting the content of water in a reactor, which is used in addition polymerization of alkylene oxides with addition to a monohydric alcohol, so as to satisfy an equation: Wi×(Cf−Ci)/V≦10, wherein the content of water in the reactor is obtained by placing a solvent having a content of water Ci (ppm) in an amount Wi (g) in the reactor having an inner volume V (ml), stirring the solvent to clean the reactor, removing the solvent from the reactor and obtaining a content of water Cf (ppm) in the removed solvent; a polymerizable derivative of the above ether; a polymer of this derivative, and a dispersant comprising this polymer. A high purity polyoxyalkylene monoalkyl ether can be obtained and the dispersant comprising the polymer derived from this ether have an excellent dispersing property.

    摘要翻译: 聚氧化烯单烷基醚,其在凝胶渗透色谱法中得到满足由下式表示的关系的色谱图:S1 / S0 <= 0.15,WHEREIN S1表示从洗脱开始到最早洗脱的色谱图部分的面积 折射率的强度为L / 3的时间,L表示折射率的最大最大点与基线之间的最短距离,S0表示来自该折射率的部分色谱图的面积 当折射率的强度具有最大值时,开始洗脱至洗脱时间; 一种制备上述醚的方法,包括调节反应器中的水含量,该反应器用于加成环氧烷与一元醇的加成聚合,以满足下式:Wix(Cf-Ci)/ V <= 10,其中反应器中的水含量是通过将具有内容积V(ml)的反应器中具有含量为Wi(g)的水分量(ppm)的溶剂置于内部体积V(ml)中,搅拌溶剂来清洗 从反应器中除去溶剂,并在去除的溶剂中获得水含量Cf(ppm); 上述醚的可聚合衍生物; 该衍生物的聚合物和包含该聚合物的分散剂。可以获得高纯度的聚氧化烯单烷基醚,并且包含由该醚衍生的聚合物的分散剂具有优异的分散性。

    Controllable bending endoscope
    39.
    发明授权
    Controllable bending endoscope 有权
    可弯曲内窥镜

    公开(公告)号:US06569086B2

    公开(公告)日:2003-05-27

    申请号:US09817931

    申请日:2001-03-27

    IPC分类号: A61B100

    CPC分类号: A61B1/0052 A61B1/0016

    摘要: An operational remote controller integrates a joystick for bending a bending portion of an inserted portion in an endoscope. A bending lever stands on the joystick. For every automatically returning of the bending lever to a neutral position, a CPU of the operational remote controller detects the neutral position and sets an insensitive band within a predetermined range of the neutral position. Thus, the insensitive band can be set within a relatively narrow range irrespective of variation of neutral positions. The CPU supplies positional information of the bending lever to a control circuit for controlling a motor drive circuit. The control circuit controls a motor drive circuit based on the supplied positional information, and the motor drive circuit drives a motor to bend the bending portion of the inserted portion.

    摘要翻译: 操作遥控器集成了用于弯曲插入部分在内窥镜中的弯曲部分的操纵杆。 操纵杆上有弯曲杆。 为了将弯曲杆自动返回到中立位置,操作遥控器的CPU检测中立位置,并将不敏感带设置在中立位置的预定范围内。 因此,不管中性位置的变化,不敏感带可以设定在相对窄的范围内。 CPU将弯曲杆的位置信息提供给用于控制电动机驱动电路的控制电路。 控制电路基于所提供的位置信息来控制电动机驱动电路,并且电动机驱动电路驱动电动机弯曲插入部分的弯曲部分。