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31.发明授权Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same 有权图案转印模具，图案转印装置和使用其的装置制造方法公开(公告)号：US07690912B2
公开(公告)日：2010-04-06
申请号：US11364631
申请日：2006-02-27
CPC分类号： B82Y10/00 , B81C99/009 , B81C2201/0152 , B81C2201/036 , B82Y40/00 , G03F7/0002
摘要： One object of the present invention is to provide a pattern transferring mold which can provide a starting area of mold release easily and certainly and a pattern transferring apparatus with the same. A pattern transferring mold is disclosed which is used in a pattern transferring apparatus that brings the mold into contact with a photo-curing resin on a substrate and cures the photo-curing resin by light irradiation to transfer a pattern formed on the mold onto the photo-curing resin. The mold comprises a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area. The mold has a mold-releasing shape in the second area, the mold-releasing shape providing a starting area of mold release from the cured photo-curing resin.
摘要翻译： 本发明的一个目的是提供一种图案转印模具，其可以容易且确定地提供脱模的起始区域和具有该图案转印模具的图案转印装置。 公开了一种图案转印模具，其用于使模具与基板上的光固化树脂接触的图案转印装置，并通过光照射固化光固化树脂，以将形成在模具上的图案转印到照片上 固化树脂。 模具包括与光固化树脂接触的底面，底面部分包括形成图案的第一区域和形成在第一区域外部的第二区域。 模具在第二区域具有脱模形状，脱模形状提供了从固化的光固化树脂脱模的起始区域。
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公开(公告)号：US20100072664A1
公开(公告)日：2010-03-25
申请号：US12566572
申请日：2009-09-24
申请人： Eigo Kawakami , Hideki Ina , Junichi Seki , Atsunori Terasaki , Shingo Okushima , Motoki Okinaka
发明人： Eigo Kawakami , Hideki Ina , Junichi Seki , Atsunori Terasaki , Shingo Okushima , Motoki Okinaka
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/00
摘要： An imprint apparatus for pressing resin and a mold to each other in a Z-axis direction to form a resin pattern on a shot region includes: a mold chuck; an X-Y stage; a reference mark formed on the stage; a first scope configured to measure a positional deviation in an x-y plane between a mold mark and the reference mark; a second scope configured to measure a position of a substrate mark in the plane not via the mold mark; and a dispenser configured to dispense resin. In the plane, the dispenser center is deviated in position from the mold chuck center by a first distance in a first direction, and the second scope center is deviated in position from the dispenser center by a distance smaller than twice the first distance in the first direction or a second direction opposite thereto.
摘要翻译： 在Z轴方向上按压树脂和模具以在射出区域形成树脂图案的压印装置包括：模具卡盘; X-Y舞台; 在舞台上形成参考标记; 第一范围，被配置为测量模具标记和参考标记之间的x-y平面中的位置偏差; 第二范围，被配置为不经由模具标记来测量所述平面中的基板标记的位置; 以及配置成分配树脂的分配器。 在平面中，分配器中心从第一方向偏离模具卡盘中心第一距离，并且第二范围中心从分配器中心偏离距离小于第一距离的距离的距离 方向或与其相反的第二方向。
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33.发明申请Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same 有权图案转印模具，图案转印装置和使用其的装置制造方法公开(公告)号：US20060192320A1
公开(公告)日：2006-08-31
申请号：US11364631
申请日：2006-02-27
IPC分类号： B29C59/02
CPC分类号： B82Y10/00 , B81C99/009 , B81C2201/0152 , B81C2201/036 , B82Y40/00 , G03F7/0002
摘要： One object of the present invention is to provide a pattern transferring mold which can provide a starting area of mold release easily and certainly and a pattern transferring apparatus with the same. A pattern transferring mold is disclosed which is used in a pattern transferring apparatus that brings the mold into contact with a photo-curing resin on a substrate and cures the photo-curing resin by light irradiation to transfer a pattern formed on the mold onto the photo-curing resin. The mold comprises a bottom face which contacts the photo-curing resin, the bottom face portion including a first area in which the pattern is formed and a second area formed outside the first area. The mold has a mold-releasing shape in the second area, the mold-releasing shape providing a starting area of mold release from the cured photo-curing resin.
摘要翻译： 本发明的一个目的是提供一种图案转印模具，其可以容易且确定地提供脱模的起始区域和具有该图案转印模具的图案转印装置。 公开了一种图案转印模具，其用于使模具与基板上的光固化树脂接触的图案转印装置，并通过光照射固化光固化树脂，以将形成在模具上的图案转印到照片上 固化树脂。 模具包括与光固化树脂接触的底面，底面部分包括形成图案的第一区域和形成在第一区域外部的第二区域。 模具在第二区域具有脱模形状，脱模形状提供了从固化的光固化树脂脱模的起始区域。
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公开(公告)号：US20050275125A1
公开(公告)日：2005-12-15
申请号：US11149046
申请日：2005-06-08
IPC分类号： G03F7/20 , G03F7/00 , H01L21/027 , B29C31/00 , B29C35/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, and an irradiation of light for exposing the resist onto the resist includes a mold chuck for holding the mold and for compressing the mold against the resist, and a deformation reducing part for reducing a deformation of the mold when the mold chuck applies a compression force to the mold.
摘要翻译： 一种处理装置，用于通过将模具压靠在抗蚀剂上将模具上的浮雕图案转印到基板上的抗蚀剂上，以及用于将抗蚀剂暴露于抗蚀剂上的光的照射包括用于保持模具并压缩的模具卡盘 抵抗抗蚀剂的模具，以及用于当模具卡盘向模具施加压缩力时减小模具的变形的变形减小部件。
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35.发明申请Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance method 审中-公开曝光装置和方法，装置制造方法，图案发生器和维护方法公开(公告)号：US20050248659A1
公开(公告)日：2005-11-10
申请号：US11112901
申请日：2005-04-22
IPC分类号： G03F9/00 , G03F7/20 , H01L21/027 , H04N5/225
CPC分类号： G03F9/7015 , G03F7/70291
摘要： An exposure apparatus includes a projection optical system for projecting a predetermined pattern onto an object to be exposed, and a pattern generating unit that includes plural pixels, and generates the predetermined pattern by driving the plural pixels, wherein the pattern generating unit has an alignment mark used for an alignment between the predetermined pattern and the object, on approximately the same surface as a surface on which the predetermined pattern is formed.
摘要翻译： 曝光装置包括：投影光学系统，用于将预定图案投射到要曝光的物体上;以及图案生成单元，包括多个像素，并通过驱动多个像素产生预定图案，其中，图案生成单元具有对准标记 用于在与预定图案形成的表面大致相同的表面上的预定图案和物体之间的对准。
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公开(公告)号：US20050230346A1
公开(公告)日：2005-10-20
申请号：US11092228
申请日：2005-03-28
CPC分类号： B29C43/021 , B29C43/003 , B29C43/04 , B29C43/14 , B29C2043/025 , B29C2043/142 , B29C2043/3438 , B29C2043/3634 , B29L2011/0016 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A processing apparatus for transferring a relief pattern on a mold to a resist on a substrate through a compression of the mold against the resist, includes a supplier for supplying the resist between the substrate and the mold, and a recovery unit for recovering the resist.
摘要翻译： 一种处理装置，用于通过将模具压靠在抗蚀剂上将模具上的浮雕图案转移到基板上的抗蚀剂上，包括用于在基板和模具之间供应抗蚀剂的供应商和用于回收抗蚀剂的回收单元。
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公开(公告)号：US4985186A
公开(公告)日：1991-01-15
申请号：US35773
申请日：1987-04-08
申请人： Noriyuki Nose , Toshiyuki Nakajima , Eigo Kawakami , Takeshi Baba , Nobuo Kushibiki , Masakazu Matsugu , Yukichi Niwa
发明人： Noriyuki Nose , Toshiyuki Nakajima , Eigo Kawakami , Takeshi Baba , Nobuo Kushibiki , Masakazu Matsugu , Yukichi Niwa
CPC分类号： B29D11/00855 , B29C33/46 , B29C37/0007 , B29C43/50 , B29D11/00432 , B29D11/00548 , B29L2011/0016 , Y10S425/808
摘要： A process for producing an optical element wherein an optical molding is formed by using a mold and thereafter released from the mold by supplying a gas to the boundary between the mold surface and the optical molding. In the process, no localized external force is applied to the optical molding during the release thereof, and therefore undesirable deformation or flaws of the optical molding are not caused.
摘要翻译： 一种光学元件的制造方法，其中通过使用模具形成光学模制件，然后通过向模具表面和光学模制件之间的边界提供气体从模具中释放。 在该过程中，在光学成型件的释放过程中不会施加局部的外力，因此不会引起不期望的光学成型的变形或缺陷。
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公开(公告)号：US4971455A
公开(公告)日：1990-11-20
申请号：US485823
申请日：1990-02-27
申请人： Eigo Kawakami , Kazuya Matsumoto
发明人： Eigo Kawakami , Kazuya Matsumoto
摘要： A slider for guiding a movable article along a guide has an elastic guide member and a movable member which is movable along the guide and is in contact at least on a face with the guide. A standing surface elastic wave is generated on the face of the guide contacting the movable member for supporting the movable member on the peaks of the standing elastic wave.
摘要翻译： 用于沿着引导件引导可动物品的滑块具有弹性引导构件和可移动构件，所述弹性引导构件和可移动构件可沿引导件移动并且至少在与引导件的表面上接触。 在与弹性波的峰顶支撑活动部件的可动部件接触的导向器的面上产生立体弹性波。
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39.发明授权
公开(公告)号：US4802746A
公开(公告)日：1989-02-07
申请号：US832649
申请日：1986-02-25
申请人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
发明人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
摘要： A variable focus optical element comprises plural elastic members superposed in the axial direction and a deforming member having an aperture to cause the elastic member to protrude therefrom or descend therein thereby deforming the surface of the elastic members, and the modulus of elasticity of an elastic member at the protruding side is selected larger than that of another elastic member adjacent to first-mentioned elastic member at the protruding side. A focus detecting device comprises an imaging optical system having a variable-focus optical element, an image sensor provided at a determined image plane of the imaging optical system or an optically equivalent position, a sharpness detecting device for detecting the sharpness of the image from image signals obtained from the image sensor, and a device for varying the refractive power of the variable-focus optical element, and the focus state of the image on the image sensor is detected by comparing the sharpnesses detected by the sharpness detecting device at plural refractive powers of the variable-focus optical element.
摘要翻译： 可变焦距光学元件包括沿轴向重叠的多个弹性构件和具有孔的变形构件，以使弹性构件从其突出或下降，从而使弹性构件的表面变形，并且弹性构件的弹性模量 在突出侧的突出侧被选择为大于在突出侧与第一弹性构件相邻的另一个弹性构件的突出侧。 焦点检测装置包括具有可变焦点光学元件的成像光学系统，设置在成像光学系统的确定的图像平面上的图像传感器或光学等效位置，用于从图像中检测图像的清晰度的锐度检测装置 通过将由锐度检测装置检测的锐度与多个折射力进行比较来检测从图像传感器获得的信号和用于改变可变焦点光学元件的折射力的装置和图像在图像传感器上的聚焦状态 的可变焦光学元件。
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公开(公告)号：US4788596A
公开(公告)日：1988-11-29
申请号：US855732
申请日：1986-04-25
申请人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
发明人： Eigo Kawakami , Yukichi Niwa , Mitsutoshi Ohwada , Yasuo Ogino , Minoru Yoshii , Shigeyuki Suda
CPC分类号： H04N5/23254 , H04N5/23212 , H04N5/23248 , H04N5/23287
摘要： A characteristic point such as an image contrast of a target image in an image screen of an object produced by an image sensor is counted, a correlation between counts at two points in time is determined. A drive means for preventing vibration of an imaging lens is controlled in accordance with the correlation signal and imaging information such as in-focus or out-of-focus information.
摘要翻译： 计算特征点，例如由图像传感器产生的对象的图像画面中的目标图像的图像对比度，确定两个时间点的计数之间的相关性。 根据相关信号和诸如焦点内或焦点外信息的成像信息来控制用于防止成像镜头的振动的驱动装置。
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