公开(公告)号：US07233279B2

公开(公告)日：2007-06-19

申请号：US11019378

申请日：2004-12-23

申请人： Masayoshi Moriya ,  Satoshi Ishii ,  Tetsuo Seki ,  Kazuaki Hamada ,  Kenji Oka ,  Akihiro Ohta

发明人： Masayoshi Moriya ,  Satoshi Ishii ,  Tetsuo Seki ,  Kazuaki Hamada ,  Kenji Oka ,  Akihiro Ohta

IPC分类号： G01S13/08 ,  G01S13/12

CPC分类号： G01S13/20 ,  G01S13/18 ,  G01S13/227 ,  G01S13/24

摘要： In order to provide the method and the device for distance measurement by pulse radar that securely eliminates the false echo from the distance over the detectable limit determined by the pulse generation cycle, the pulse radar comprises the pulse signal sending unit that generates the pulse signals with different cycles at OSC 9a˜9c, switches to the predetermined intervals by OSC switch 10, and sends the pulse signal to targets, the reflected signal receiving unit that receives the reflected signals and stores the data in the RAM 25, the reflected signal data acquisition unit that obtains the data of each reflected signal, and the reflected signal identification unit that compares the intensity of the reflected signals obtained at the same lag time point during a certain time period after sending the pulse signal for reference and identifies the reflected signals of the sent pulse signal for reference.

摘要翻译： 为了提供通过脉冲雷达进行距离测量的方法和装置，从脉冲发生周期确定的可检测限度的距离安全地消除假回波，脉冲雷达包括产生脉冲信号的脉冲信号发送单元， 在OSC 9 a〜9 c处的不同周期，由OSC开关10切换到预定间隔，并将脉冲信号发送到目标，反射信号接收单元接收反射信号并将数据存储在RAM 25中，反射信号 数据获取单元，其获得每个反射信号的数据;以及反射信号识别单元，其在发送用于参考的脉冲信号之后的特定时间段内比较在相同滞后时间点获得的反射信号的强度，并且识别反射信号 的发送脉冲信号供参考。

公开(公告)号：US07221486B2

公开(公告)日：2007-05-22

申请号：US10265659

申请日：2002-10-08

申请人： Hiroshi Makihira ,  Shunji Maeda ,  Kenji Oka ,  Minoru Yoshida ,  Yasuhiko Nakayama

发明人： Hiroshi Makihira ,  Shunji Maeda ,  Kenji Oka ,  Minoru Yoshida ,  Yasuhiko Nakayama

IPC分类号： H04N1/04

CPC分类号： G06T7/0004 ,  G06T2207/30148

摘要： A method and apparatus for sensing by a linear image sensor a two-dimensional image of an object to be sensed includes detecting a position of the object by a position sensor having a first resolution, picking up an image of the object being projected in a direction (V-scan direction) generally perpendicular to an internal scan (H-scan) direction of the linear image sensor in synchronism with relative movement between the object and the linear image sensor, periodically switching a pixel size along the V-scan direction between a plurality of predefined pixel sizes during the relative movement between the object and the linear image sensor in accordance with information of the relative movement detected by the position sensor, and producing from an output of the linear image sensor a two-dimensional image of the projected image having a second resolution of the object to be sensed. The second resolution is a higher resolution than the first resolution.

摘要翻译： 一种用于通过线性图像传感器检测待检测物体的二维图像的方法和装置包括通过具有第一分辨率的位置传感器检测物体的位置，拾取沿着方向投影的物体的图像 （V扫描方向），与物体和线性图像传感器之间的相对运动同步地与线性图像传感器的内部扫描（H扫描）方向大致垂直，周期性地沿着V扫描方向切换像素尺寸， 根据由位置传感器检测到的相对运动的信息，在物体和线性图像传感器之间的相对运动期间的多个预定像素尺寸，并且从线性图像传感器的输出产生投影图像的二维图像 具有要被感测的物体的第二分辨率。 第二项决议是比第一项决议更高的决议。

公开(公告)号：US20070070336A1

公开(公告)日：2007-03-29

申请号：US11605242

申请日：2006-11-29

申请人： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

发明人： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

IPC分类号： G01N21/00

CPC分类号： G01N21/95607 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95615 ,  G01N2201/0618 ,  G01N2201/0634

摘要： A method of inspecting a specimen, including: emitting a light from a lamp of a light source; illuminating a specimen on which plural patterns are formed with the light emitted from the light source and, passed through an objective lens; forming an optical image of the specimen by collecting light reflected from the specimen by the illuminating and passed through the objective lens and a image forming lens; detecting the optical image with a TDI image sensor; and processing a signal outputted from the TDI image sensor and detecting a defect of a pattern among the plural patterns formed on the specimen, wherein the image detected by the TDI image sensor is formed with light having a wavelength selected from the wavelengths of the light emitted from the light source.

摘要翻译： 一种检查样本的方法，包括：从光源的灯发射光; 用从光源发射的光照射形成有多个图案的样本，并通过物镜; 通过照射通过收集从样本反射的光并通过物镜和成像透镜来形成样本的光学图像; 用TDI图像传感器检测光学图像; 并处理从TDI图像传感器输出的信号，并且检测在样本上形成的多个图案之间的图案的缺陷，其中由TDI图像传感器检测到的图像由具有选自发射的光的波长的波长的光形成 从光源。

公开(公告)号：US07180584B2

公开(公告)日：2007-02-20

申请号：US10686584

申请日：2003-10-17

申请人： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

发明人： Shunji Maeda ,  Yasuhiko Nakayama ,  Minoru Yoshida ,  Hitoshi Kubota ,  Kenji Oka

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/95615 ,  G01N2201/0618 ,  G01N2201/0634

摘要： A pattern detection method and apparatus thereof for inspecting with high resolution a micro fine defect of a pattern on an inspected object and a semiconductor substrate manufacturing method and system for manufacturing semiconductor substrates such as semiconductor wafers with a high yield. A micro fine pattern on the inspected object is inspected by irradiating an annular-looped illumination through an objective lens onto a wafer mounted on a stage, the wafer having micro fine patterns thereon. The illumination light may be circularly or elliptically polarized and controlled according to an image detected on the pupil of the objective lens and image signals are obtained by detecting a reflected light from the wafer. The image signals are compared with reference image signals and a part of the pattern showing inconsistency is detected as a defect so that simultaneously, a micro fine defect or defects on the micro fine pattern are detected with high resolution. Further, process conditions of a manufacturing line are controlled by analyzing a cause of defect and a factor of defect which occurs on the pattern.

摘要翻译： 一种用于以高分辨率检查被检查物体上的图案的微细缺陷的图案检测方法及其装置以及以高产率制造半导体晶片等半导体基板的半导体基板的制造方法和系统。 通过将通过物镜的环形照明照射到安装在台架上的晶片上，检查被检查物体上的微细图案，晶片上具有微细精细图案。 照明光可以根据在物镜的光瞳上检测到的图像而被圆形或椭圆偏振并且被控制，并且通过检测来自晶片的反射光来获得图像信号。 将图像信号与参考图像信号进行比较，并且检测出显示不一致的图案的一部分作为缺陷，从而同时以高分辨率检测微细微图案或微细图案上的缺陷。 此外，通过分析缺陷的原因和在图案上发生的缺陷因素来控制生产线的工艺条件。

公开(公告)号：US07061602B2

公开(公告)日：2006-06-13

申请号：US11117336

申请日：2005-04-29

申请人： Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Kenji Oka ,  Takanori Ninomiya ,  Maki Tanaka ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Yoshio Morishige

发明人： Akira Hamamatsu ,  Minori Noguchi ,  Yoshimasa Ohshima ,  Hidetoshi Nishiyama ,  Kenji Oka ,  Takanori Ninomiya ,  Maki Tanaka ,  Kenji Watanabe ,  Tetsuya Watanabe ,  Yoshio Morishige

IPC分类号： G01N21/00 ,  G06K9/00

CPC分类号： G06T7/001 ,  G01N21/8851 ,  G01N21/9501 ,  G01N2021/8861 ,  G01N2021/8867 ,  G06T7/97 ,  G06T2207/10152 ,  G06T2207/30148

摘要： A method of inspecting a sample in which the sample is inspected under a plurality of inspection conditions and inspection data obtained by inspecting the sample under each of the plurality of inspection conditions and position information on the sample of the inspection date in correspondence with the respective inspection conditions are stored. The inspection data for each of the plurality of inspection conditions is against each other by the use of the position information on the sample to determine a position to be inspected in detail, and an image of the sample at a position to be inspected in detail is obtained. The obtained image is classified, the inspection condition of the sample by the use of information of classification of the image is determined.

摘要翻译： 检查在多个检查条件下检查样品的样品的检查方法以及根据多个检查条件中的每一个检查样品而获得的检查数据以及与检查日期对应的检查日期的样品的位置信息的方法 条件被存储。 多个检查条件中的每一个的检查数据通过使用关于样本的位置信息彼此相对来确定待检查的位置，并且在待检查位置处的样本的图像是详细的 获得。 对所获得的图像进行分类，确定通过使用图像分类信息的样本的检查条件。

公开(公告)号：US06947276B2

公开(公告)日：2005-09-20

申请号：US10502620

申请日：2003-10-24

申请人： Kazuki Hirata ,  Kenji Oka ,  Kazuhiro Komatsu ,  Atsuo Nagai

发明人： Kazuki Hirata ,  Kenji Oka ,  Kazuhiro Komatsu ,  Atsuo Nagai

IPC分类号： C04B35/468 ,  H01G4/06 ,  H01G4/12 ,  H01G4/228 ,  H01G4/30 ,  H01G7/00 ,  H05K3/36

CPC分类号： C04B35/4682 ,  B32B2311/22 ,  C04B2235/3206 ,  C04B2235/3224 ,  C04B2235/3263 ,  C04B2235/3418 ,  C04B2235/5409 ,  C04B2235/5445 ,  C04B2235/6025 ,  C04B2235/6582 ,  C04B2235/6587 ,  C04B2237/346 ,  C04B2237/405 ,  H01G4/1227 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49126 ,  Y10T29/49128

摘要： The present invention relates to a method of manufacturing a multilayer ceramic capacitor, having the steps of: (a) alternately layering internal electrodes and ceramic green sheets containing a ceramic material having barium titanate to form a laminated body; (b) sintering the laminated body to obtain a sintered body; and (c) forming an external electrode on end faces of the sintered body to obtain a multilayer ceramic capacitor. The barium titanate has a diffraction line derived from (002) plane and a diffraction line derived from (200) plane in an X-ray diffraction chart. The ratio I(200)/Ib of peak intensity I(200) at 2θ(200) to diffraction intensity Ib at a midpoint angle between peak angle 2θ(002) of the diffraction line derived from the (002) plane and peak angle 2θ(200) of the diffraction line derived from the (200) plane is 2 to 10. The product r·Sa of mean particle size r (μm) of the barium titanate and specific surface area Sa (m2/g) is 1 to 2.

摘要翻译： 本发明涉及一种制造多层陶瓷电容器的方法，具有以下步骤：（a）将包含具有钛酸钡的陶瓷材料的内部电极和陶瓷生坯交替层叠以形成层压体; （b）烧结层压体以获得烧结体; （c）在烧结体的端面上形成外部电极，得到多层陶瓷电容器。 在X射线衍射图中，钛酸钡具有衍生自（002）面的衍射线和衍生自（200）面的衍射线。 （2）（200）的峰强度I（200）的比值I（200）/ I B （002）面的衍射线的峰角2θ（002）与峰角2θ（200°）之间的中点角度处的衍射强度I 衍生自（200）面的衍射线的为2〜10。钛酸钡的平均粒径r（母体）与比表面积Sa（m <2） SUP> / g）为1〜2。