公开(公告)号：US20060105273A1

公开(公告)日：2006-05-18

申请号：US10523247

申请日：2002-07-30

申请人： Hiroshi Fukuda ,  Yoshiyuki Yokoyama ,  Takashi Hattori ,  Toshio Sakamizu ,  Tadashi Arai ,  Hiroshi Shiraishi

发明人： Hiroshi Fukuda ,  Yoshiyuki Yokoyama ,  Takashi Hattori ,  Toshio Sakamizu ,  Tadashi Arai ,  Hiroshi Shiraishi

IPC分类号： G03C5/00

CPC分类号： G03F7/0382 ,  G03F7/0045 ,  G03F7/0392 ,  G03F7/0755 ,  G03F7/0757 ,  H01L21/31144 ,  H01L21/32139 ,  H01L21/76808 ,  H01L27/10

摘要： There is a problem in that when the demand accuracy with respect to a semiconductor pattern dimension comes close to a resist molecule size with miniaturization, the device performance is deteriorated due to edge roughness of a resist pattern to exert a bad influence on the system performance. The present invention overcomes the problem by the procedure in which super-molecules which are small in dimension as compared with the conventional polymers are used as main components, the reaction number required for the change of molecule solubility is made constant and as large as possible, and an acid generator is made clathrate or combinatory n super molecules to make an acid catalyst concentration large. As a result, it is possible to form a pattern of molecular accuracy with high productivity even with respect to the pattern dimension less than 50 nm, thereby realizing the high performance system.

摘要翻译： 存在的问题在于，当半导体图案尺寸的需求精度接近于小型化的抗蚀剂分子尺寸时，由于抗蚀剂图案的边缘粗糙度而导致器件性能劣化，从而对系统性能产生不良影响。 本发明通过使用与常规聚合物相比尺寸小的超分子作为主要成分的方法克服了该问题，使分子溶解度变化所需的反应数量保持恒定且尽可能大， 使酸发生剂成为包合物或组合的超分子，使酸催化剂浓度变大。 结果，即使相对于图案尺寸小于50nm，也可以以高生产率形成分子精度图案，从而实现高性能系统。

公开(公告)号：US20060036409A1

公开(公告)日：2006-02-16

申请号：US11185852

申请日：2005-07-21

申请人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

发明人： Atsuko Yamaguchi ,  Hiroshi Fukuda ,  Hiroki Kawada ,  Tatsuya Maeda

IPC分类号： G06F17/00

CPC分类号： G01B15/08 ,  G01N23/2251 ,  G03F7/70625 ,  H01J2237/223 ,  H01J2237/2817

摘要： Equipment extracts components of spatial frequency that need to be evaluated in manufacturing a device or in analyzing a material or process out of edge roughness on fine line patterns and displays them as indexes. The equipment acquires data of edge roughness over a sufficiently long area, integrates a components corresponding to a spatial frequency region being set on a power spectrum by the operator, and displays them on a length measuring SEM. Alternatively, the equipment divides the edge roughness data of the sufficiently long area, computes long-period roughness and short-period roughness that correspond to an arbitrary inspection area by performing statistical processing and fitting based on theoretical calculation, and displays them on the length measuring SEM.

摘要翻译： 设备提取在制造设备时需要评估的空间频率的组件，或者在细线图案上分析材料或工艺的边缘粗糙度并将其显示为索引。 设备在足够长的区域上获取边缘粗糙度的数据，对与操作者在功率谱上设置的空间频率区域相对应的分量进行积分，并将其显示在长度测量SEM上。 或者，设备对足够长的区域的边缘粗糙度数据进行分割，通过进行基于理论计算的统计处理和拟合来计算与任意检查区域相对应的长周期粗糙度和短周期粗糙度，并将其显示在长度测量 SEM。

公开(公告)号：US06833309B2

公开(公告)日：2004-12-21

申请号：US10832392

申请日：2004-04-27

申请人： Hiroshi Fukuda

发明人： Hiroshi Fukuda

IPC分类号： H01L2176

CPC分类号： H01L23/544 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2924/0002 ,  Y10S438/975 ,  H01L2924/00

摘要： Upon formation of semiconductor micro patterns, an interlayer alignment error occurs due to asymmetry of each alignment mark. Prior to alignment of a mask with a wafer, the asymmetry of each alignment mark is measured according to the principle of a scatterometry, and the alignment is performed in consideration of the result of measurement to execute exposure. Thus, high-accuracy alignment can be carried out without sacrificing throughput, and the performance of a semiconductor device is improved. Further, manufacturing yields can be enhanced and a reduction in cost can be realized.

公开(公告)号：US06787459B2

公开(公告)日：2004-09-07

申请号：US10294700

申请日：2002-11-15

申请人： Akemi Moniwa ,  Takuya Hagiwara ,  Keitaro Katabuchi ,  Hiroshi Fukuda ,  Mineko Adachi

发明人： Akemi Moniwa ,  Takuya Hagiwara ,  Keitaro Katabuchi ,  Hiroshi Fukuda ,  Mineko Adachi

IPC分类号： H01C2144

CPC分类号： G03F1/70 ,  G03F1/26 ,  Y10S438/942

摘要： There is provided a method of fabricating a semiconductor device whereby fine patterns are formed with high dimensional accuracy by means of multiple exposures, using a phase shift mask and a trim mask. Phases are periodically assigned to shifter patterns within a given range from patterns generated with the phase shift mask, respectively.

摘要翻译： 提供一种制造半导体器件的方法，由此通过使用相移掩模和修剪掩模，通过多次曝光以高尺寸精度形成精细图案。 相位分别定期地分配给给定范围内的移相器图案，从用相移掩模生成的图案。

公开(公告)号：US06780781B2

公开(公告)日：2004-08-24

申请号：US10445068

申请日：2003-05-27

申请人： Takahiro Odaka ,  Toshihiko Tanaka ,  Takashi Hattori ,  Hiroshi Fukuda

发明人： Takahiro Odaka ,  Toshihiko Tanaka ,  Takashi Hattori ,  Hiroshi Fukuda

IPC分类号： H01L21302

CPC分类号： G03F1/32 ,  G03F1/56 ,  G03F7/405 ,  H01L21/76802 ,  Y10S438/942 ,  Y10S438/945 ,  Y10S438/947 ,  Y10S438/948 ,  Y10S438/949

摘要： A method for manufacturing an electronic device is provided. In one example of the method, the method prevents deformation of a resist mask caused by the irradiation of exposure light. The resist mask has a resist as an opaque element, and can afford mask patterns undergoing little change even with an increase in the number of wafers subjected to exposure processing. The resist mask maintains a high dimensional accuracy. A photomask pattern is formed using as an opaque element a resist comprising a base resin and Si incorporated therein or a resist with a metal such as Si incorporated thereby by a silylation process, to improve the resistance to active oxygen. The deformation of a resist opaque pattern in a photomask is prevented. The dimensional accuracy of patterns transferred onto a Si wafer is improved in repeated use of the photomask.

摘要翻译： 提供了一种用于制造电子设备的方法。 在该方法的一个示例中，该方法防止由曝光光的照射引起的抗蚀剂掩模的变形。 抗蚀剂掩模具有作为不透明元素的抗蚀剂，并且即使随着经受曝光处理的晶片数量的增加，也可以提供几乎没有变化的掩模图案。 抗蚀剂掩模保持高尺寸精度。 使用作为不透明元件的抗蚀剂形成光掩模图案，该抗蚀剂包含掺入其中的基础树脂和Si，或通过甲硅烷基化方法掺入其中的诸如Si的金属的抗蚀剂，以提高对活性氧的耐受性。 防止光掩模中的抗蚀剂不透明图案的变形。 转移到Si晶片上的图案的尺寸精度在光掩模的重复使用中得到改善。

公开(公告)号：US06624876B2

公开(公告)日：2003-09-23

申请号：US09740936

申请日：2000-12-21

申请人： Hiroshi Fukuda ,  Takashi Ebato

发明人： Hiroshi Fukuda ,  Takashi Ebato

IPC分类号： G03B2900

CPC分类号： G03B27/73

摘要： A printer prints a calibration pattern on a leading end portion of a roll of recording paper when the recording paper is loaded in the printer. A cutter cuts the leading end portion off the recording sheet so as to make an end edge rectangular to side edges of the recording sheet. A photometric device measures densities of the printed calibration pattern, and a system controller derives correction values for correcting density or color from the measured densities. After the calibration process, an image is printed in an image recording area on the recording paper following the leading end portion. For a printer that prints an image on a cut sheet recording paper, a calibration pattern is printed on a margin outside an image recording area. After densities of the calibration pattern are measured, the margin with the calibration pattern is cut off the recording paper.

摘要翻译： 当记录纸被装载到打印机中时，打印机将标记图案打印在一卷记录纸的前端部分上。 切割器将记录片材的前端部分切割成使得端部边缘与记录片材的侧边缘成矩形。 测光装置测量印刷校准图案的密度，并且系统控制器从测量的密度获得用于校正密度或颜色的校正值。 在校准处理之后，在跟随前端部分的记录纸上的图像记录区域中打印图像。 对于在切纸记录纸上打印图像的打印机，在图像记录区域外的边缘上印刷校准图案。 在测量校准图案的密度之后，用记录纸切断校准图案的余量。

公开(公告)号：US06533477B2

公开(公告)日：2003-03-18

申请号：US09775625

申请日：2001-02-05

申请人： Hiroshi Fukuda

发明人： Hiroshi Fukuda

IPC分类号： B41J2315

CPC分类号： B41J2/355

摘要： There is disclosed a thermosensitive line printer, wherein a heating element array of a thermal head is pressed on a thermosensitive recording paper at a distance L2 from a nipping position by a pair of conveyer rollers, and is driven to record an image frame line by line from a print starting end, as the recording paper is conveyed by the conveyer rollers in a direction from the thermal head to the conveyer rollers. Based on image data of an upper zone of an image frame that is to be recorded around the distance L2 from the print starting end if the image frame is recorded from its top side, an image analyzer calculates a first estimation value that represents conspicuousness of potential density deviation in the upper zone that could be caused by a thermal deformation of the thermosensitive recording paper at the print starting end if the image frame is recorded from the top side. The image analyzer calculates a second estimation value based on image data of a lower zone that is to be located at the distance L2 from the print starting end if the image frame is recorded from its bottom side. If the first estimation value is smaller than the second estimation value, the image frame is recorded from the top side, and vise versa.

摘要翻译： 公开了一种热敏线打印机，其中热敏头的加热元件阵列通过一对输送辊以与夹持位置L2的距离压在热敏记录纸上，并被驱动以逐行记录图像帧 因为记录纸由输送辊沿从热敏头到输送辊的方向传送。 如果从其顶侧记录图像帧，则基于要从打印开始端到达距离L2周围的图像帧的上部区域的图像数据，图像分析器计算表示潜在的显着性的第一估计值 如果从顶侧记录图像帧，则可能由热敏记录纸在打印开始端的热变形引起的上区域中的浓度偏差。 如果从其底侧记录图像帧，则图像分析器基于将位于距离打印开始端的距离L2的下区域的图像数据来计算第二估计值。 如果第一估计值小于第二估计值，则从顶侧记录图像帧，反之亦然。

公开(公告)号：US5832169A

公开(公告)日：1998-11-03

申请号：US869677

申请日：1997-06-05

申请人： Keiji Kanota ,  Tadashi Ezaki ,  Masaki Oguro ,  Naofumi Yanagihara ,  Hiroshi Fukuda

发明人： Keiji Kanota ,  Tadashi Ezaki ,  Masaki Oguro ,  Naofumi Yanagihara ,  Hiroshi Fukuda

IPC分类号： G11B20/12 ,  G11B23/087 ,  G11B27/036 ,  G11B27/11 ,  G11B27/30 ,  H04N5/7826 ,  H04N7/00 ,  H04N7/087 ,  H04N9/804 ,  H04N9/806 ,  H04N9/82 ,  H04N9/83 ,  H04N9/885 ,  H04N9/79

CPC分类号： G11B27/036 ,  G11B20/1208 ,  G11B23/08714 ,  G11B27/11 ,  G11B27/3027 ,  G11B27/3063 ,  H04N7/007 ,  H04N7/087 ,  H04N9/8047 ,  H04N9/8063 ,  H04N9/8205 ,  H04N9/8233 ,  H04N9/832 ,  G11B2220/655 ,  H04N5/78266 ,  H04N9/885

摘要： The television signal recording/reproducing system digitally records and reproduces television signals composed of a luminance signal, a chrominance signal and a resolution compensation signal included in predetermined television scanning lines. The system includes a Y/C separating circuit for separating the luminance signal Y from the chrominance signal C. The luminance signal Y and the resolution compensation signal are combined onto a first signal line. A demodulating circuit demodulates the chrominance signal into a color difference signal and outputs the demodulated signal to a second signal line. A digital video signal recorder digitally process the signals on the first signal line separately from the signals on the second signal line and records the digitally processed signals. In this manner, the resolution compensation signal is processed with the luminance signal and the resolution compensation signal can be accurately recorded.

公开(公告)号：US5699100A

公开(公告)日：1997-12-16

申请号：US389156

申请日：1995-02-15

申请人： Hiroshi Fukuda ,  Toshiaki Fujimaki ,  Kazuo Miyaji

发明人： Hiroshi Fukuda ,  Toshiaki Fujimaki ,  Kazuo Miyaji

IPC分类号： B41J2/32 ,  B41J2/36 ,  B41J2/38 ,  B41M5/34 ,  B41M5/28

CPC分类号： B41J2/38 ,  B41J2/32 ,  B41J2/36 ,  B41M5/34

摘要： A direct color thermal printing method supplements coloring density in a print start area for each color frame of a full-color image to be printed in a three color sequential fashion. A color thermosensitive recording sheet has cyan, magenta and yellow thermosensitive coloring layers formed on a base in this order. The heat sensitivities of the coloring layers become the lower the nearer to the base. Since the coloring density tends to be insufficient in the beginning of printing due to the temperature of the thermal head, supplementary drive pulses for supplementing coloring density is applied to each heating elements in addition to drive pulses for coloring. The supplementary heat energy is predetermined to be lower, the higher the line number from a print start position of the print area, and the higher the heat sensitivities of the thermosensitive coloring layers.

摘要翻译： 直接彩色热印打印法以三色顺序的方式补充要打印的全色图像的每个彩色帧的打印开始区域中的着色浓度。 彩色热敏记录片材依次形成在基底上的青色，品红色和黄色热敏着色层。 着色层的热敏性越低越接近底层。 由于由于热敏头的温度而在印刷开始时着色密度趋于不足，所以除了用于着色的驱动脉冲之外，补充着色浓度的补充驱动脉冲也被施加到每个加热元件。 补充热能被预先设定得较低，从打印区域的打印开始位置起的行数越高，热敏着色层的热敏性越高。

公开(公告)号：US5680168A

公开(公告)日：1997-10-21

申请号：US665367

申请日：1996-06-17

申请人： Hideyuki Kokubo ,  Hiroshi Fukuda ,  Satoshi Ueda

发明人： Hideyuki Kokubo ,  Hiroshi Fukuda ,  Satoshi Ueda

IPC分类号： B41J2/32 ,  B41J2/38 ,  B41J11/42 ,  B41M5/30 ,  B41M5/34

CPC分类号： B41M5/34 ,  B41J11/42 ,  B41J2/32 ,  B41J2/38 ,  B41M2205/04

摘要： A color thermal printing method capable of preventing a color registration shift and shading. A color thermosensitive recording sheet has cyan, magenta, and yellow thermosensitive coloring layers, respectively formed on a base in this order. A thermal sensitivity becomes lower the nearer the thermosensitive coloring layer is to the base. The thermosensitive coloring layer having a lower sensitivity is printed at an earlier timing to make the centers of three color print areas coincident with each other. According to a preferred embodiment, a preliminary pressed running section is provided in front of each print area. In the preliminary pressed running section, a thermal head is preheated and pressed against a color thermosensitive recording sheet. In order to reduce a change in the friction coefficient between the preliminary pressed running section and the print area, the heat energy for the preheating is set to a bias heat energy having a level just under a coloring energy. This bias heat energy having a level just under a coloring energy changes with color so that the preliminary pressed running section is set differently for each color. During the preliminary pressed running operation, a pulse motor for driving a platen drum is driven by the same predetermined number of drive pulses for all three colors.

摘要翻译： 一种能够防止着色偏移和着色的彩色热敏打印方法。 彩色热敏记录片材具有依次形成在基底上的青色，品红色和黄色热敏着色层。 热敏着色层越接近基底时，热敏感度越低。 在较早的时间打印具有较低灵敏度的热敏着色层，以使三个彩色印刷区域的中心彼此一致。 根据优选实施例，在每个打印区域的前面设置预压按行程部。 在初步挤压运行部分中，将热敏头预热并压在彩色热敏记录纸上。 为了减少初步挤压运行部分和打印区域之间的摩擦系数的变化，用于预热的热能被设定为具有刚好在着色能量下的水平的偏置热能。 具有刚好在着色能量下的水平的偏置热能随着颜色而变化，使得对于每种颜色设置不同的初步压榨运行部分。 在预压操作期间，用于驱动压盘滚筒的脉冲电机以对于所有三种颜色的相同的预定数量的驱动脉冲驱动。