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    MEMS Actuation Systems and Methods
    32.
    发明申请
    MEMS Actuation Systems and Methods 审中-公开

    公开(公告)号：US20180076738A1

    公开(公告)日：2018-03-15

    申请号：US15699137

    申请日：2017-09-08

    Applicant: MEMS Drive, Inc.

    Inventor： Matthew Ng ,  Xiaolei Liu

    IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00

    Abstract: A micro-electrical-mechanical system (MEMS) assembly includes a stationary stage, a rigid stage, at least one flexure configured to slidably couple the stationary stage and the rigid stage, at least one flexible electrode coupled and essentially orthogonal to one of the stationary stage and the rigid stage, and at least one rigid electrode coupled and essentially orthogonal to the other of the stationary stage and the rigid stage.

    MEMS ACTUATION SYSTEMS AND METHODS
    33.
    发明申请
    MEMS ACTUATION SYSTEMS AND METHODS 审中-公开

    公开(公告)号：US20180076737A1

    公开(公告)日：2018-03-15

    申请号：US15698917

    申请日：2017-09-08

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Matthew Ng ,  Guiqin Wang

    IPC: H02N1/00 ,  B81B3/00 ,  B81C1/00

    Abstract: A micro-electrical-mechanical system (MEMS) actuator includes a first set of actuation fingers, a second set of actuation fingers, and a first spanning structure configured to couple at least two fingers of the first set of actuation fingers while spanning at least one finger of the second set of actuation fingers.

    Multi-directional actuator
    35.
    发明授权
    Multi-directional actuator 有权

    公开(公告)号：US11005392B2

    公开(公告)日：2021-05-11

    申请号：US16252091

    申请日：2019-01-18

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

    IPC: H02N1/00

    Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

    MEMS Actuation System
    37.
    发明申请
    MEMS Actuation System 审中-公开

    公开(公告)号：US20190227266A1

    公开(公告)日：2019-07-25

    申请号：US16256495

    申请日：2019-01-24

    Applicant: MEMS Drive, Inc.

    Inventor： GUIQIN WANG ,  Xiaolei Liu ,  Matthew Ng

    IPC: G02B13/00 ,  G02B7/09 ,  G03B13/32 ,  G03B17/00 ,  H01L41/09

    Abstract: A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.

    MULTI-DIRECTIONAL ACTUATOR
    38.
    发明申请
    MULTI-DIRECTIONAL ACTUATOR 审中-公开

    公开(公告)号：US20190157989A1

    公开(公告)日：2019-05-23

    申请号：US16252091

    申请日：2019-01-18

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Matthew Ng ,  Guiqin Wang

    IPC: H02N1/00

    Abstract: An apparatus is provided. The apparatus includes a bidirectional comb drive actuator. The apparatus may also include a cantilever. The cantilever includes a first end connected to the bidirectional comb drive actuator and a second end connected to an inner frame. In addition, the cantilever may include first and second conductive layers for routing electrical signals. Embodiments of the disclosed apparatuses, which may include multi-dimensional actuators, allow for an increased number of electrical signals to be routed to the actuators. Moreover, the disclosed apparatuses allow for actuation multiple directions, which may provide for increased control, precision, and flexibility of movement. Accordingly, the disclosed embodiments provide significant benefits with regard to optical image stabilization and auto-focus capabilities, for example in size- and power-constrained environments.

    Shock caging features for MEMS actuator structures
    39.
    发明授权
    Shock caging features for MEMS actuator structures 有权

    公开(公告)号：US10259702B2

    公开(公告)日：2019-04-16

    申请号：US15412488

    申请日：2017-01-23

    Applicant: MEMS Drive, Inc.

    Inventor： Xiaolei Liu ,  Matthew Ng ,  Robert Calvet ,  Gerardo Morabito

    IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00

    Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.

    Low stiffness flexure
    40.
    发明授权
    Low stiffness flexure 有权

    公开(公告)号：US10071903B2

    公开(公告)日：2018-09-11

    申请号：US14677730

    申请日：2015-04-02

    Applicant: MEMS DRIVE, INC.

    Inventor： Xiaolei Liu ,  Roman Gutierrez ,  Guiqin Wang ,  Benson Mai ,  Matthew Ng

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B3/007 ,  B81B2203/0163 ,  Y10T74/20

    Abstract: A flexure includes a support first end connected to a first frame; a support second end connected to a second frame; and a buckled section connecting the first support end to the second support end. The length of the flexure is substantially greater than its width, and the width of the flexure is substantially greater than its thickness. During operation, the flexure is maintained in a buckled state where the flexure's stiffness is significantly less than in the unbuckled state. In one implementation, a stage includes a flexure array joining a first frame and a second frame, where: the first frame and the second frame are substantially on a plane; the flexure array is substantially on the plane prior to buckling by the flexures of the flexure array; and the flexure array is bent substantially out of the plane after buckling by the flexures.

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