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公开(公告)号：US10352811B2
公开(公告)日：2019-07-16
申请号：US15712916
申请日：2017-09-22
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US20180010977A1
公开(公告)日：2018-01-11
申请号：US15712916
申请日：2017-09-22
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US09593996B2
公开(公告)日：2017-03-14
申请号：US14377449
申请日：2013-02-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。
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公开(公告)号：US09383286B2
公开(公告)日：2016-07-05
申请号：US14582750
申请日：2014-12-24
Applicant: MKS Instruments, Inc.
Inventor： Larry K. Carmichael , Jesse A. Weber , John H. Henry , Michael N. Schott , Gerardo A. Brucker
Abstract: An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
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公开(公告)号：US20150028882A1
公开(公告)日：2015-01-29
申请号：US14384782
申请日：2013-03-13
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , G. Jeffery Rathbone
CPC classification number: G01N27/64 , G01N1/405 , G01N27/60 , H01J49/06 , H01J49/162 , H01J49/4245
Abstract: A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.
Abstract translation: 一种在离子阱中检测特定气体种类的方法，特定气体种类最初是气体体积中第一低浓度的微量成分，包括电离包括特定气体种类的气体，从而产生特定的离子物质。 该方法还包括产生静电电位，其中特定离子种类被限制在离子阱中的轨迹上。 该方法还包括具有激发频率的AC激发源的激发约束特定离子种类，扫描AC激发源的激发频率以从离子阱中排出特定离子种类，并检测喷出的特定离子种类。 该方法还包括在扫描喷射特定气体物质的离子的激发频率之前相对于第一低浓度增加离子阱内的特定离子种类的浓度。
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Patent Agency Ranking
公开(公告)号：US12055452B2
公开(公告)日：2024-08-06
申请号：US18475515
申请日：2023-09-27
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
CPC classification number: G01L21/12 , B81B3/0018 , G01L9/0055 , G01L13/025 , G01L27/005 , B81B2201/0264
Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
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公开(公告)号：US11802806B2
公开(公告)日：2023-10-31
申请号：US17154698
申请日：2021-01-21
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker
CPC classification number: G01L21/12 , B81B3/0018 , G01L9/0055 , G01L13/025 , G01L27/005 , B81B2201/0264
Abstract: A load lock pressure gauge comprises a housing configured to be coupled to a load lock vacuum chamber. The housing supports an absolute vacuum pressure sensor that provides instantaneous high vacuum pressure signal over a range of high vacuum pressures and a differential diaphragm pressure sensor that provides an instantaneous differential pressure signal between load lock pressure and ambient pressure. The housing further supports an absolute ambient pressure sensor. A low vacuum absolute pressure is computed from the instantaneous differential pressure signal and the instantaneous ambient pressure signal. A controller in the housing is able to recalibrate the differential diaphragm pressure sensor based on measured voltages of the sensor and a measured ambient pressure during normal operation of the pressure gauge with routine cycling of pressure in the load lock.
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公开(公告)号：US11656139B2
公开(公告)日：2023-05-23
申请号：US16953923
申请日：2020-11-20
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
CPC classification number: G01L9/025 , G01L9/00 , G01L9/0002 , G01L21/10 , G01L21/14
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US11366036B2
公开(公告)日：2022-06-21
申请号：US17119804
申请日：2020-12-11
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
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公开(公告)号：US10928265B2
公开(公告)日：2021-02-23
申请号：US16397436
申请日：2019-04-29
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Clinton L. Percy
Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.
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