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    Thermally assisted magnetic recording head inspection method and apparatus
    33.
    发明授权
    Thermally assisted magnetic recording head inspection method and apparatus 有权
    热辅助磁记录头检查方法和装置

    公开(公告)号：US08483035B2

    公开(公告)日：2013-07-09

    申请号：US13482065

    申请日：2012-05-29

    申请人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Shinji Homma ,  Tsuneo Nakagomi ,  Teruaki Tokutomi ,  Toshihiko Nakata ,  Takehiro Tachizaki

    发明人： Kaifeng Zhang ,  Takenori Hirose ,  Masahiro Watanabe ,  Shinji Homma ,  Tsuneo Nakagomi ,  Teruaki Tokutomi ,  Toshihiko Nakata ,  Takehiro Tachizaki

    IPC分类号： G11B7/00 ,  G11B5/09

    CPC分类号： G11B5/455 ,  G11B2005/0021

    摘要： In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.

    摘要翻译： 在用于检查热辅助磁记录头元件的方法和装置中，将样本安装在可在扫描探针显微镜装置的平面中移动的台上，从所述样本的渐逝光的发光部分产生ev逝光 通过在平面中移动台来检测ev逝光的散射光，同时具有探针的扫描探针显微镜的悬臂在试样的表面附近垂直振动，并且从from射光发射的ev逝光的强度分布 使用基于检测到的散射光的ev逝光的产生的位置信息来检查ev逝光的发光部分或试样的ev逝光的发光部分的表面轮廓。

    INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME
    34.
    发明申请
    INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME 有权
    内部缺陷检查方法及其设备

    公开(公告)号：US20130160552A1

    公开(公告)日：2013-06-27

    申请号：US13819355

    申请日：2011-06-01

    申请人： Toshihiko Nakata ,  Tetsuya Matsui ,  Takehiro Tachizaki ,  Kazushi Yoshimura ,  Masahiro Watanabe

    发明人： Toshihiko Nakata ,  Tetsuya Matsui ,  Takehiro Tachizaki ,  Kazushi Yoshimura ,  Masahiro Watanabe

    IPC分类号： G01N29/22 ,  G01N29/04

    CPC分类号： G01N29/221 ,  G01N29/04 ,  G01N29/043 ,  G01N29/0654 ,  G01N29/2418

    摘要： It is intended to provide an internal defect inspection method and an apparatus for implementing the method by which an ultrasonic wave is excited in a sample without contact with the sample and accordingly without damaging the sample, and an ultrasonic wave from any internal defect of the sample is detected without being affected by the sample surface, in a non-contact state and with high sensitivity.By the internal defect inspection method, an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, an ultrasonic wave reflected by the sample is detected as an interference signal with an imaging type common-path interferometer, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal.

    摘要翻译： 旨在提供一种内部缺陷检查方法和实现这样一种方法的装置，其中超声波在样品中被激发而不与样品接触，因此不损伤样品，并且来自样品的任何内部缺陷的超声波 被检测而不受样品表面的影响，处于非接触状态并具有高灵敏度。 通过内部缺陷检查方法，从超声波发射器向样品发射超声波，将由样本反射的超声波作为干涉信号与成像式共轨干涉仪进行检测，从超声波信号 从超声波信号中检测出干扰信号和样本内的任何缺陷。

    Method and its apparatus for measuring displacement of a specimen
    39.
    发明申请
    Method and its apparatus for measuring displacement of a specimen 有权
    测量样品位移的方法及其装置

    公开(公告)号：US20090073457A1

    公开(公告)日：2009-03-19

    申请号：US12153227

    申请日：2008-05-15

    申请人： Toshihiko Nakata ,  Masahiro Watanabe

    发明人： Toshihiko Nakata ,  Masahiro Watanabe

    IPC分类号： G01B11/02

    CPC分类号： G01B9/02081 ,  G01B9/02018 ,  G01B2290/30 ,  G01B2290/70

    摘要： In measuring the displacement of an object using the phase-shifting light interference, since three beam splitters were used for generating the four phase-shifting optical paths, an interferometer was increased in size, whereby the application objects were limited. Also, to solve an essential problem that if there is a disturbance such as a temperature distribution, a humidity distribution, an air pressure distribution, a density distribution or an air flow change on the phase-shifting optical paths, a measurement error occurs, the four phase-shifting optical paths are produced spatially in parallel by combining a four division prism with a photonic crystal λ/4 element and a photonic crystal polarizing element arranged like an array, constructing a small light interference displacement sensor in the invention, whereby the application objects are expanded, and the microscopic displacement or surface roughness of the object can be measured at a resolution of sub nanometer or less and with high reproducibility without influence of the disturbance.

    摘要翻译： 在使用相移光干涉来测量物体的位移时，由于使用三个分束器来产生四个移相光路，因此干涉仪的尺寸增加，由此施加物体受到限制。 此外，为了解决如果在移相光路上存在诸如温度分布，湿度分布，空气压力分布，密度分布或气流变化等干扰的测量误差，则发生测量误差， 通过组合四分割棱镜与光子晶体λ/ 4元件和排列成阵列的光子晶体偏振元件在本发明中构成小型光干涉位移传感器，四个相移光路被空间地产生，由此应用 物体被扩大，并且物体的微观位移或表面粗糙度可以以亚纳米或更小的分辨率测量，并且具有高重现性而不受干扰的影响。

    SCANNING PROBE MICROSCOPE
    40.
    发明申请
    SCANNING PROBE MICROSCOPE 有权
    扫描探针显微镜

    公开(公告)号：US20080223122A1

    公开(公告)日：2008-09-18

    申请号：US12023158

    申请日：2008-01-31

    申请人： Masahiro Watanabe ,  Toru KURENUMA ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Shuichi Baba ,  Toshihiko Nakata ,  Manabu Edamura ,  Yukio Kembo

    发明人： Masahiro Watanabe ,  Toru KURENUMA ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Shuichi Baba ,  Toshihiko Nakata ,  Manabu Edamura ,  Yukio Kembo

    IPC分类号： G01B5/28

    CPC分类号： G01Q70/04 ,  G01Q10/06

    摘要： A scanning probe microscope, capable of performing shape measurement not affected by electrostatic charge distribution of a sample, which: monitors an electrostatic charge state by detecting a change in a flexure or vibrating state of a cantilever due to electrostatic charges in synchronization with scanning during measurement with relative scanning between the probe and the sample, and makes potential adjustment so as to cancel an influence of electrostatic charge distribution, thus preventing damage of the probe or the sample due to discharge and achieving reduction in measurement errors due to electrostatic charge distribution.

    摘要翻译： 扫描探针显微镜，其能够执行不受样品静电荷分布影响的形状测量，其通过检测与测量同步的静电荷引起的静电荷的悬臂的挠曲或振动状态的变化来监测静电荷状态 通过探针和样品之间的相对扫描，进行电位调整，以消除静电电荷分布的影响，从而防止由于放电而引起的探针或样品的损伤，并实现由静电电荷分布引起的测量误差的降低。