摘要:
A particle level varied depending on a drying processing condition can be suppressed to be stably lowered. A batch type substrate processing apparatus include a cleaning processing unit 62 having a cleaning tank 69 that stores therein a cleaning solution for cleaning a substrate, and a drying processing unit 61 disposed above the cleaning tank 69 and having a drying chamber 65 configured to perform therein a drying process on the substrate. Based on a previously investigated relationship, an internal temperature of the drying chamber is set as an internal temperature of the drying chamber when loading the substrate thereinto corresponding to the batch size of a next batch process performed in the drying chamber, and the internal temperature of the drying chamber is adjusted to be identical to the set internal temperature of the drying chamber before loading the substrate into the drying chamber.
摘要:
A lens-equipped optical semiconductor device including: an optical semiconductor device including at least one optical semiconductor element mounted on a substrate and a transparent resin encapsulating body that encapsulates the optical semiconductor element; a resin lens having a recessed portion for housing the transparent resin encapsulating body; and a transparent resin layer filled into a space among the substrate, the recessed portion, and the transparent resin encapsulating body, wherein the recessed portion has a capacity that is at least 1.1 times a total volume of the optical semiconductor element and the transparent resin encapsulating body.
摘要:
A coke layer and an ore layer are formed in a blast furnace. The coke layer is formed of conventional coke and the ore layer is formed of carbon iron composite, conventional coke, and ore. The mixing percentage of the conventional coke in the ore layer with respect to the ore is 0.5 mass % or more. Slowing of the gasification reaction of carbon iron composite in the cohesive zone can be suppressed.
摘要:
In a heating unit, based on a required output amount Q, a control part 50 performs: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devices 24a is continuously kept on throughout a heating cycle, and all or one or more heating devices 24a are controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devices 24a are continuously kept on throughout the heating cycle, and all or one or more heating devices 24a among the remaining heating devices 24a are controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devices 24a that are simultaneously kept on during the heating cycle is made not more than 1.
摘要:
An ultrasonic cleaning apparatus according to the present invention comprises a plurality of cleaning tanks configured to store a cleaning liquid, an object-to-be-processed holder capable of being inserted into each cleaning tank, the object-to-be-processed holder being configured to hold an object to be processed and to immerse the object to be processed into the cleaning liquid, a vibrator disposed on each cleaning tank, a single ultrasonic oscillator configured to make each vibrator ultrasonically vibrate, an output switch interposed between the ultrasonic oscillator and the vibrator of each respective cleaning tank, the output switch being configured to switch the vibrator that is connected to the ultrasonic oscillator, and a control device configured to control the ultrasonic oscillator and the output switch, wherein the control device controls the ultrasonic oscillator and the output switch such that a timing at which the vibrator of one of the cleaning tanks is made to ultrasonically vibrate, and a timing at which the vibrator of another cleaning tank is made to ultrasonically vibrate are not overlapped with each other.
摘要:
According to an embodiment, a communication apparatus includes a key storage unit configured to store therein a cryptographic key; a receiving unit configured to receive a message; an analyzing unit configured to analyze whether the message includes an access request for the cryptographic key; a generating unit configured to, when the message includes the access request, generate request information used to request an access to the cryptographic key requested by the access request; and an access controller configured to control the access to the cryptographic key based on the request information.
摘要:
An evaporator unit includes a first heat exchanger configured to perform heat exchange between refrigerant flowing thereinto from a refrigerant inlet and air, a bypass passage through which the refrigerant flowing from the refrigerant inlet flows while bypassing the first heat exchanger, a second heat exchanger configured to perform heat exchange between air and mixed refrigerant in which the refrigerant after passing through the first heat exchanger and the refrigerant having passed through the bypass passage are mixed, and a flow amount adjustment portion configured to adjust a flow amount of the refrigerant flowing through the first heat exchanger and a flow amount of the refrigerant flowing through the bypass passage. Accordingly, the first heat exchanger and the second heat exchanger can be configured to have respectively portions in which a dryness of the refrigerant is in a range between 0.6 and 0.9.
摘要:
A carbonaceous support member for a high-temperature heat-treated metal molding object, particularly a setter for heat-treatment in powder metallurgy, is formed as a carbon-ceramic composite shaped product having a bulk density of 1.2-1.6 g/ml and including a carbonaceous matrix and 3-20 wt. % of ceramic particles which are uniformly dispersed in the carbonaceous matrix and partly exposed to the surface of the composite. The support member can effectively prevent carburization of a metal molding object supported thereby during the heat-treatment without causing a problem of peeling of coating layer as encountered in a ceramic-coated support member. The support member may be prepared by compression molding of a powdery mixture of a fine carbon precursor and ceramic particles, followed by heating at 1000-2000° C. to carbonize the fine carbon precursor.
摘要:
When data in one semiconductor memory device is corrupted during a padding process by a padding unit and the data cannot be recovered even by using an error correcting code for correcting a data error, a storage control device issues a data recovery request to a data recovery device. The data recovery device reads the data from other semiconductor memory device in response to the data recovery request to recover the data, and returns a recovery result to the padding unit in the storage control device to perform the padding process.
摘要:
A size storage unit stores therein a block size of a memory element. A buffering unit executes buffer processing configured to store data received from a RAID (Redundant Arrays of Inexpensive/Independent Disks) controller into a buffer, and to write the data stored in the buffer into the memory element. A stripe-size receiving unit receives a stripe size that indicates a size of a unit of access at time of access to the memory element by the RAID controller. Writing processing is configured to write data received from the RAID controller into the memory element without executing the buffer processing by the buffering unit, when the stripe size is n times of the block size (n is a positive integer).