Substrate processing apparatus, substrate processing method and storage medium
    31.
    发明授权
    Substrate processing apparatus, substrate processing method and storage medium 有权
    基板处理装置,基板处理方法和存储介质

    公开(公告)号:US09337070B2

    公开(公告)日:2016-05-10

    申请号:US13605052

    申请日:2012-09-06

    申请人: Hideaki Sato

    发明人: Hideaki Sato

    IPC分类号: H01L21/67

    CPC分类号: H01L21/67248 H01L21/67057

    摘要: A particle level varied depending on a drying processing condition can be suppressed to be stably lowered. A batch type substrate processing apparatus include a cleaning processing unit 62 having a cleaning tank 69 that stores therein a cleaning solution for cleaning a substrate, and a drying processing unit 61 disposed above the cleaning tank 69 and having a drying chamber 65 configured to perform therein a drying process on the substrate. Based on a previously investigated relationship, an internal temperature of the drying chamber is set as an internal temperature of the drying chamber when loading the substrate thereinto corresponding to the batch size of a next batch process performed in the drying chamber, and the internal temperature of the drying chamber is adjusted to be identical to the set internal temperature of the drying chamber before loading the substrate into the drying chamber.

    摘要翻译: 可以抑制根据干燥处理条件而变化的颗粒水平以稳定降低。 分批式基板处理装置包括具有清洗槽69的清洗处理单元62,清洗槽69内装有用于清洗基板的清洗液;干燥处理单元61,设置在清洗槽69的上方,并具有配置成在其中进行的干燥室65 在基材上的干燥过程。 基于以前研究的关系,将干燥室的内部温度设定为干燥室的内部温度,对应于在干燥室中进行的下一次批次处理的批次尺寸,并将内部温度设定为 在将基材装入干燥室之前,将干燥室调整为与干燥室的设定内部温度相同。

    Method for operating blast furnace
    33.
    发明授权
    Method for operating blast furnace 有权
    高炉操作方法

    公开(公告)号:US08945274B2

    公开(公告)日:2015-02-03

    申请号:US13388786

    申请日:2010-08-10

    IPC分类号: C21B15/00 C21B5/00

    CPC分类号: C21B5/008 C21B5/007

    摘要: A coke layer and an ore layer are formed in a blast furnace. The coke layer is formed of conventional coke and the ore layer is formed of carbon iron composite, conventional coke, and ore. The mixing percentage of the conventional coke in the ore layer with respect to the ore is 0.5 mass % or more. Slowing of the gasification reaction of carbon iron composite in the cohesive zone can be suppressed.

    摘要翻译: 在高炉中形成焦炭层和矿石层。 焦炭层由常规焦炭形成,矿石层由碳铁复合材料,常规焦炭和矿石形成。 矿石层中常规焦炭相对于矿石的混合比例为0.5质量%以上。 可以抑制碳纤维复合材料在内聚区中气化反应的降低。

    Heating unit, substrate processing apparatus, and method for heating fluid
    34.
    发明授权
    Heating unit, substrate processing apparatus, and method for heating fluid 有权
    加热单元,基板处理装置和加热流体的方法

    公开(公告)号:US08803039B2

    公开(公告)日:2014-08-12

    申请号:US12509725

    申请日:2009-07-27

    IPC分类号: F27D11/00

    摘要: In a heating unit, based on a required output amount Q, a control part 50 performs: (A) when the required output amount Q is not more than a predetermined set value, a control in which none of the heating devices 24a is continuously kept on throughout a heating cycle, and all or one or more heating devices 24a are controlled in a periodically divided manner; and (B) when the required output amount is larger than the predetermined set value, a control in which all or one or more heating devices 24a are continuously kept on throughout the heating cycle, and all or one or more heating devices 24a among the remaining heating devices 24a are controlled in the periodically divided manner during this heating cycle. At this time, a difference between the maximum number and the minimum number of the heating devices 24a that are simultaneously kept on during the heating cycle is made not more than 1.

    摘要翻译: 在加热单元中,基于要求的输出量Q,控制部50执行以下操作:(A)当所需输出量Q不大于预定设定值时,不进行连续保持加热装置24a的控制 在整个加热循环中,并且以周期性分割的方式控制全部或一个或多个加热装置24a; 和(B)当所需输出量大于预定设定值时,在整个加热循环中连续保持全部或一个以上加热装置24a的控制,以及剩余的全部或一个以上的加热装置24a 在该加热循环期间,加热装置24a以周期性分割的方式被控制。 此时,在加热循环中同时保持的加热装置24a的最大数量和最小数量之差不大于1。

    Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method
    35.
    发明授权
    Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method 有权
    超声波清洗装置,超声波清洗方法和存储用于执行超声波清洗方法的计算机程序的存储介质

    公开(公告)号:US08777695B2

    公开(公告)日:2014-07-15

    申请号:US12876566

    申请日:2010-09-07

    IPC分类号: B24B31/06 B08B3/12

    CPC分类号: B08B3/12 H01L21/67057

    摘要: An ultrasonic cleaning apparatus according to the present invention comprises a plurality of cleaning tanks configured to store a cleaning liquid, an object-to-be-processed holder capable of being inserted into each cleaning tank, the object-to-be-processed holder being configured to hold an object to be processed and to immerse the object to be processed into the cleaning liquid, a vibrator disposed on each cleaning tank, a single ultrasonic oscillator configured to make each vibrator ultrasonically vibrate, an output switch interposed between the ultrasonic oscillator and the vibrator of each respective cleaning tank, the output switch being configured to switch the vibrator that is connected to the ultrasonic oscillator, and a control device configured to control the ultrasonic oscillator and the output switch, wherein the control device controls the ultrasonic oscillator and the output switch such that a timing at which the vibrator of one of the cleaning tanks is made to ultrasonically vibrate, and a timing at which the vibrator of another cleaning tank is made to ultrasonically vibrate are not overlapped with each other.

    摘要翻译: 根据本发明的超声波清洗装置包括:多个清洗槽,其配置成存储清洁液体,能够插入到每个清洗槽中的待处理物体的保持器,被处理物体为 被配置为保持要处理的物体并将待处理物体浸入清洗液中,设置在每个清洗槽上的振动器,构造成使每个振动器超声波振动的单个超声波振荡器,插入超声波振荡器和 每个相应清洁槽的振动器,输出开关被配置为切换连接到超声波振荡器的振动器;以及控制装置,被配置为控制超声波振荡器和输出开关,其中控制装置控制超声波振荡器和 输出开关,使得清洗槽中的一个的振动器的超声波的定时 振动,另一个清洗槽的振动器超声波振动的时间彼此不重叠。

    COMMUNICATION APPARATUS AND KEY MANAGING METHOD
    36.
    发明申请
    COMMUNICATION APPARATUS AND KEY MANAGING METHOD 有权
    通信设备和主要管理方法

    公开(公告)号:US20130259233A1

    公开(公告)日:2013-10-03

    申请号:US13596279

    申请日:2012-08-28

    IPC分类号: H04L9/08

    摘要: According to an embodiment, a communication apparatus includes a key storage unit configured to store therein a cryptographic key; a receiving unit configured to receive a message; an analyzing unit configured to analyze whether the message includes an access request for the cryptographic key; a generating unit configured to, when the message includes the access request, generate request information used to request an access to the cryptographic key requested by the access request; and an access controller configured to control the access to the cryptographic key based on the request information.

    摘要翻译: 根据实施例,通信装置包括密钥存储单元,配置为在其中存储密码密钥; 接收单元,被配置为接收消息; 分析单元,被配置为分析所述消息是否包括对所述密码密钥的访问请求; 生成单元,被配置为当所述消息包括所述访问请求时,生成用于请求访问由所述访问请求请求的密码的请求信息; 以及访问控制器,被配置为基于所述请求信息来控制对所述密码密钥的访问。

    Evaporator unit
    37.
    发明授权
    Evaporator unit 失效
    蒸发器单元

    公开(公告)号:US08099978B2

    公开(公告)日:2012-01-24

    申请号:US12286868

    申请日:2008-10-02

    IPC分类号: F25B39/02

    摘要: An evaporator unit includes a first heat exchanger configured to perform heat exchange between refrigerant flowing thereinto from a refrigerant inlet and air, a bypass passage through which the refrigerant flowing from the refrigerant inlet flows while bypassing the first heat exchanger, a second heat exchanger configured to perform heat exchange between air and mixed refrigerant in which the refrigerant after passing through the first heat exchanger and the refrigerant having passed through the bypass passage are mixed, and a flow amount adjustment portion configured to adjust a flow amount of the refrigerant flowing through the first heat exchanger and a flow amount of the refrigerant flowing through the bypass passage. Accordingly, the first heat exchanger and the second heat exchanger can be configured to have respectively portions in which a dryness of the refrigerant is in a range between 0.6 and 0.9.

    摘要翻译: 蒸发器单元包括:第一热交换器,被配置为执行从制冷剂入口流到其中的制冷剂与空气之间的热交换;旁路通道,制冷剂入口流动的制冷剂绕过第一热交换器流动;第二热交换器, 进行空气与通过第一热交换器的制冷剂和通过旁通通路的制冷剂混合的混合制冷剂之间的热交换;流量调整部,被配置为调节流过第一热交换器的制冷剂的流量, 热交换器和流过旁路通路的制冷剂的流量。 因此,第一热交换器和第二热交换器可以被构造成分别具有在0.6至0.9之间的范围内的制冷剂的干燥部分。

    SUPPORT MEMBER FOR HIGH-TEMPERATURE HEAT-TREATED METAL MOLDING OBJECT AND PROCESS FOR PRODUCTION THEREOF
    38.
    发明申请
    SUPPORT MEMBER FOR HIGH-TEMPERATURE HEAT-TREATED METAL MOLDING OBJECT AND PROCESS FOR PRODUCTION THEREOF 审中-公开
    高温热处理金属成型对象及其生产工艺支持会员

    公开(公告)号:US20110116964A1

    公开(公告)日:2011-05-19

    申请号:US13014051

    申请日:2011-01-26

    IPC分类号: B22F3/16

    摘要: A carbonaceous support member for a high-temperature heat-treated metal molding object, particularly a setter for heat-treatment in powder metallurgy, is formed as a carbon-ceramic composite shaped product having a bulk density of 1.2-1.6 g/ml and including a carbonaceous matrix and 3-20 wt. % of ceramic particles which are uniformly dispersed in the carbonaceous matrix and partly exposed to the surface of the composite. The support member can effectively prevent carburization of a metal molding object supported thereby during the heat-treatment without causing a problem of peeling of coating layer as encountered in a ceramic-coated support member. The support member may be prepared by compression molding of a powdery mixture of a fine carbon precursor and ceramic particles, followed by heating at 1000-2000° C. to carbonize the fine carbon precursor.

    摘要翻译: 形成用于高温热处理的金属成型体的碳质支撑构件,特别是粉末冶金用热处理装置,其为堆积密度为1.2〜1.6g / ml的碳陶瓷复合成形体, 碳质基质和3-20重量% %的陶瓷颗粒均匀地分散在碳质基质中并且部分地暴露于复合材料的表面。 支撑构件可以有效地防止在热处理期间由其支撑的金属模制物体的渗碳,而不会引起如陶瓷涂覆的支撑构件中遇到的涂层剥落的问题。 支撑构件可以通过压缩成型细碳前体和陶瓷颗粒的粉末混合物,然后在1000-2000℃加热以使细碳前体碳化来制备。

    STORAGE CONTROL DEVICE, DATA RECOVERY DEVICE, AND STORAGE SYSTEM
    39.
    发明申请
    STORAGE CONTROL DEVICE, DATA RECOVERY DEVICE, AND STORAGE SYSTEM 有权
    存储控制设备,数据恢复设备和存储系统

    公开(公告)号:US20090327802A1

    公开(公告)日:2009-12-31

    申请号:US12398608

    申请日:2009-03-05

    IPC分类号: G06F11/20

    CPC分类号: G06F11/108 G06F11/1068

    摘要: When data in one semiconductor memory device is corrupted during a padding process by a padding unit and the data cannot be recovered even by using an error correcting code for correcting a data error, a storage control device issues a data recovery request to a data recovery device. The data recovery device reads the data from other semiconductor memory device in response to the data recovery request to recover the data, and returns a recovery result to the padding unit in the storage control device to perform the padding process.

    摘要翻译: 当一个半导体存储器件中的数据在填补单元的填充处理期间被破坏时,即使通过使用用于校正数据错误的纠错码也不能恢复数据,存储控制装置向数据恢复装置发出数据恢复请求 。 数据恢复装置响应于数据恢复请求从其他半导体存储装置读取数据以恢复数据,并将恢复结果返回到存储控制装置中的填充单元以执行填充处理。

    STORAGE DEVICE, CONTROL DEVICE, STORAGE SYSTEM, AND STORAGE METHOD
    40.
    发明申请
    STORAGE DEVICE, CONTROL DEVICE, STORAGE SYSTEM, AND STORAGE METHOD 失效
    存储设备,控制设备,存储系统和存储方法

    公开(公告)号:US20090327604A1

    公开(公告)日:2009-12-31

    申请号:US12396006

    申请日:2009-03-02

    IPC分类号: G06F12/06

    摘要: A size storage unit stores therein a block size of a memory element. A buffering unit executes buffer processing configured to store data received from a RAID (Redundant Arrays of Inexpensive/Independent Disks) controller into a buffer, and to write the data stored in the buffer into the memory element. A stripe-size receiving unit receives a stripe size that indicates a size of a unit of access at time of access to the memory element by the RAID controller. Writing processing is configured to write data received from the RAID controller into the memory element without executing the buffer processing by the buffering unit, when the stripe size is n times of the block size (n is a positive integer).

    摘要翻译: 大小存储单元存储存储元件的块大小。 缓冲单元执行缓冲处理,其被配置为将从RAID(廉价/独立磁盘的冗余阵列)控制器接收的数据存储到缓冲器中,并且将存储在缓冲器中的数据写入存储器元件。 条形尺寸接收单元接收指示由RAID控制器访问存储器元件时的访问单元的大小的条带大小。 写入处理被配置为当条带大小是块大小的n倍(n为正整数)时,将从RAID控制器接收的数据写入存储元件,而不执行缓冲单元的缓冲器处理。