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    Method of storing or decoding a stream of bits
    32.
    发明授权
    Method of storing or decoding a stream of bits 失效
    存储或解码比特流的方法

    公开(公告)号：US07174497B2

    公开(公告)日：2007-02-06

    申请号：US09933791

    申请日：2001-08-21

    申请人： Constant Paul Marie Jozef Baggen ,  Marten Erik Van Dijk ,  Willem Marie Julia Marcel Coene

    发明人： Constant Paul Marie Jozef Baggen ,  Marten Erik Van Dijk ,  Willem Marie Julia Marcel Coene

    IPC分类号： H03M13/00

    CPC分类号： H03M13/27 ,  G11B20/1426 ,  H03M5/14 ,  H03M5/145 ,  H03M13/1515

    摘要： The invention relates to a method of storing a number of data bits of a secondary channel (30) in the frame of a main channel (20) and to a method of decoding a stream of bits relating to a secondary channel (30) embedded in the frames of a main channel (20) into a stream of data bits (62). In order to enable a certain synchronization and to guarantee a fixed amount of storage capacity in the secondary channel as well as to be able to correct deletions or insertions of bits in the secondary channel it is proposed according to the invention to form a secondary frame (11) having a fixed number of frame bits, to fill a fixed part of the secondary frame (11) with data bits (113), an end-bit (114) set to a first bit-value and, if necessary, with filling bits (115) set to a second bit-value, to encode the secondary frame (11) producing encoded data bits (113) and parity bits (112), which are finally embedded in the frame of the main channel (20). The invention relates also to a device for storing a number of data bits of the secondary channel (30) in the frame of a main channel (20) and to a device for decoding a stream of bits of relating to a secondary channel (30) embedded in the frames of a main channel (20).

    摘要翻译： 本发明涉及一种在主信道（20）的帧中存储辅助信道（30）的多个数据位的方法，以及一种解码与嵌入在第二信道（30）中的辅助信道（30）有关的位流的方法 主通道（20）的帧转换成数据位流（62）。 为了实现一定的同步并且保证次级信道中的固定量的存储容量以及能够纠正次级信道中的位的删除或插入，根据本发明提出了形成辅助帧（ 11）具有固定数量的帧比特，以数据比特（113）填充辅助帧（11）的固定部分，将终端位（114）设置为第一比特值，并且如果需要，填充 位（115）被设置为第二位值，以编码产生编码数据位（113）和奇偶校验位（112）的辅助帧（11），其最终嵌入在主通道（20）的帧中。 本发明还涉及一种用于在主信道（20）的帧中存储辅助信道（30）的多个数据比特的装置和用于解码与次信道（30）有关的比特流的装置， 嵌入在主通道（20）的框架中。

    Converting information words into different length code words depending on a property of a code signal
    33.
    发明授权
    Converting information words into different length code words depending on a property of a code signal 失效

    公开(公告)号：US07119721B2

    公开(公告)日：2006-10-10

    申请号：US10648920

    申请日：2003-08-27

    申请人： Willem Marie Julia Marcel Coene

    发明人： Willem Marie Julia Marcel Coene

    IPC分类号： H03M7/00

    CPC分类号： H03M13/31 ,  G11B20/1426

    摘要： The invention relates to a method of converting a stream of databits of a binary information signal into a stream of databits of a constrained binary channel signal. This stream of databits of the binary information signal is divided into n-bit information words. These information words are converted into m1-bit channel words, in accordance with a channel code C1, or m2-bit channel words, in accordance with a channel code C2, where m1, m2 and n are integers for which it holds that m2>m1≧n. The m2-bit channel word is chosen from of at least two m2-bit channel words, at least two of which have opposite parities, the concatenated m1-bit channel words and the m2-bit channel words complying with a runlength constraint of the binary channel signal. The method comprises the repetitive and/or alternate steps of: selecting the m1-bit channel word from a set out of a plurality of sets of m1-bit channel words, each set comprising only m1-bit channel words having a beginning part out of a subset of beginning parts of the m1-bit channel words, each set being associated with a coding state of channel code C1, the coding state being established in dependence upon an end part of the preceding channel word, or: selecting the m2-bit channel word from a set out of a plurality of sets of m2-bit channel words, which selection depends on the end part of the preceding channel word, each set comprising only m2-bit channel words having a beginning part out of a subset of beginning parts of the m2-bit channel words belonging to said set, each set being associated with a coding state of channel code C2, the coding state being established in dependence upon an end part of the preceding channel word. The end parts of the m1-bit channel words in a coding state of channel code C1 and the beginning parts of the m2-bit channel words in a set of channel code C2 are arranged to comply with said runlength constraint. The invention further relates to a device for encoding, a signal comprising a stream of databits of a constrained binary channel signal, a record carrier and a device for decoding.

    Method and device for adding or extracting a secondary information signal to/from a RLL code sequence
    34.
    发明授权
    Method and device for adding or extracting a secondary information signal to/from a RLL code sequence 失效
    用于向/从RLL码序列添加或提取辅助信息信号的方法和装置

    公开(公告)号：US07038600B2

    公开(公告)日：2006-05-02

    申请号：US09929265

    申请日：2001-08-14

    申请人： Willem Marie Julia Marcel Coene ,  Johan Cornelis Talstra ,  Antonius Adriaan Maria Staring ,  Jacobus Petrus Josephus Heemskerk

    发明人： Willem Marie Julia Marcel Coene ,  Johan Cornelis Talstra ,  Antonius Adriaan Maria Staring ,  Jacobus Petrus Josephus Heemskerk

    IPC分类号： H03M7/00 ,  G06Q99/00 ,  H04K1/00 ,  H04L9/00

    CPC分类号： H03M5/145 ,  G11B20/00086 ,  G11B20/00579 ,  G11B20/0063 ,  G11B20/1426 ,  G11B2020/1461 ,  G11B2020/1469 ,  H03M5/14 ,  H03M7/46

    摘要： A method and device for adding or extracting a secondary information signal to/from a runlength-limited code sequence, includes detecting a polarity of a runlength at a first predetermined position of the runlength-limited code sequence and setting a parameter reflecting the degree of freedom that is present in the runlength-limited channel code, e.g., the selection of a merging bit pattern in the CD-standard, on the basis of the detected polarity so as to obtain a predetermined polarity of a runlength at a subsequent second predetermined position of the runlength-limited code sequence. The predetermined polarity then corresponds to a binary value of the secondary information. Thus, a side-channel with a small capacity is provided, which is positioned very close to the physical channel such that the secondary information is hard to be detected from the EFM bit stream. Therefore, the side-channel can be used as a hidden channel for copy protection purposes.

    摘要翻译： 一种用于向游程长度限制代码序列添加或提取辅助信息信号的方法和装置，包括检测游程受限码序列的第一预定位置处的游程长度的极性，并设置反映自由度的参数 存在于游程长度限制信道码中，例如，基于检测到的极性来选择CD标准中的合并位模式，以便获得在随后的第二预定位置处的游程长度的预定极性 运行长度限制代码序列。 预定的极性然后对应于辅助信息的二进制值。 因此，提供了具有小容量的侧信道，其被定位成非常接近物理信道，使得从EFM比特流难以检测到辅助信息。 因此，侧信道可以用作隐藏通道，用于复制保护。

    METHOD OF CONVERTING A STREAM OF DATABITS OF A BINARY INFORMATION SIGNAL INTO A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, DEVICE FOR ENCODING, SIGNAL COMPRISING A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, RECORD CARRIER, METHOD FOR DECODING, DEVICE FOR DECODING
    36.
    发明授权
    METHOD OF CONVERTING A STREAM OF DATABITS OF A BINARY INFORMATION SIGNAL INTO A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, DEVICE FOR ENCODING, SIGNAL COMPRISING A STREAM OF DATABITS OF A CONSTRAINED BINARY CHANNEL SIGNAL, RECORD CARRIER, METHOD FOR DECODING, DEVICE FOR DECODING 失效
    将二进制信息信号的数据流转换为约束二进制信道信号的数据流的方法，用于编码的信号，包含受约束的二进制信道信号的数据流的信号，记录载体，解码方法，装置 解码

    公开(公告)号：US06486804B2

    公开(公告)日：2002-11-26

    申请号：US09853185

    申请日：2001-05-10

    申请人： Willem Marie Julia Marcel Coene

    发明人： Willem Marie Julia Marcel Coene

    IPC分类号： H03M700

    CPC分类号： G11B20/1426 ,  H03M5/145

    摘要： A method of converting a stream of databits of a binary information signal into a stream of databits of a constrained binary channel signal, a device for encoding, a signal, a record carrier, a method for decoding, and a device for decoding. The signal is constructed by repetitively or alternately using channel codes C1 and C2. Since two channel words with opposite parities are available in the channel code C2 for each information word, and the same state is established, predetermined properties of the constrained binary channel signal can be influenced. Since the method further comprises the step of substituting, in dependence upon a value of a predetermined property of the binary channel signal, a channel word for a substitute channel word, wherein the substituted channel word and the substitute channel word establish the same state, predetermined properties of the constrained binary channel signal can be further influenced.

    摘要翻译： 一种将二进制信息信号的数据位流转换为受限二进制信道信号的数据位流，用于编码的设备，信号，记录载体，解码方法以及用于解码的设备的方法。 信号通过重复地或者交替地使用信道码C1和C2构成。 由于具有相反奇偶校验的两个通道字在每个信息字的通道代码C2中可用，并且建立相同的状态，所以可以影响受限二进制信道信号的预定属性。 由于该方法还包括根据二进制信道信号的预定属性的值代替替代信道字的信道字，其中替代信道字和替代信道字建立相同状态，预定 受限二进制信道信号的属性可以进一步受到影响。

    Metrology method and inspection apparatus, lithographic system and device manufacturing method
    37.
    发明授权
    Metrology method and inspection apparatus, lithographic system and device manufacturing method 有权
    计量方法和检验仪器，光刻系统和器件制造方法

    公开(公告)号：US09140998B2

    公开(公告)日：2015-09-22

    申请号：US13294057

    申请日：2011-11-10

    申请人： Hendrik Jan Hidde Smilde ,  Arno Jan Bleeker ,  Patrick Warnaar ,  Willem Marie Julia Marcel Coene ,  Michael Kubis

    发明人： Hendrik Jan Hidde Smilde ,  Arno Jan Bleeker ,  Patrick Warnaar ,  Willem Marie Julia Marcel Coene ,  Michael Kubis

    IPC分类号： G06F17/00 ,  G06F15/18 ,  G01N21/55 ,  G03F7/20

    CPC分类号： G03F7/70633 ,  G03F7/70483 ,  G03F7/70625 ,  G03F7/70641 ,  G06N99/005

    摘要： Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The optical system has a first branch leading to a pupil plane imaging sensor and a second branch leading to a substrate plane imaging sensor. A spatial light modulator is arranged in an intermediate pupil plane of the second branch of the optical system. The SLM imparts a programmable pattern of attenuation that may be used to correct for asymmetries between the first and second modes of illumination or imaging. By use of specific target designs and machine-learning processes, the attenuation patterns may also be programmed to act as filter functions, enhancing sensitivity to specific parameters of interest, such as focus.

    摘要翻译： 公开了用于测量由基板上的光刻工艺形成的目标结构的方法。 目标内的光栅结构小于测量光学系统的照明点和视场。 光学系统具有通向光瞳平面成像传感器的第一分支和通向基板平面成像传感器的第二分支。 空间光调制器被布置在光学系统的第二分支的中间光瞳平面中。 SLM赋予可编程的衰减模式，其可用于校正第一和第二照明模式或成像之间的不对称性。 通过使用特定的目标设计和机器学习过程，衰减模式也可以被编程为充当滤波器功能，增强对诸如焦点的特定参数的敏感性。

    Calibration method and apparatus
    38.
    发明授权
    Calibration method and apparatus 有权
    校准方法和仪器

    公开(公告)号：US08553218B2

    公开(公告)日：2013-10-08

    申请号：US12973248

    申请日：2010-12-20

    申请人： Patricius Aloysius Jacobus Tinnemans ,  Henricus Petrus Maria Pellemans ,  Gerbrand Van Der Zouw ,  Willem Marie Julia Marcel Coene

    发明人： Patricius Aloysius Jacobus Tinnemans ,  Henricus Petrus Maria Pellemans ,  Gerbrand Van Der Zouw ,  Willem Marie Julia Marcel Coene

    IPC分类号： G01N21/00

    CPC分类号： G01N21/93 ,  G01N21/4785 ,  G01N21/4788

    摘要： Calibration of an angularly resolved scatterometer is performed by measuring a target in two or more different arrangements. The different arrangements cause radiation being measured in an outgoing direction to be different combinations of radiation illuminating the target from ingoing directions. A reference mirror measurement may also be performed. The measurements and modeling of the difference between the first and second arrangements is used to estimate separately properties of the ingoing and outgoing optical systems. The modeling may account for symmetry of the respective periodic target. The modeling typically accounts for polarizing effects of the ingoing optical elements, the outgoing optical elements and the respective periodic target. The polarizing effects may be described in the modeling by Jones calculus or Mueller calculus. The modeling may include a parameterization in terms of basis functions such as Zernike polynomials.

    摘要翻译： 角度分辨散射仪的校准是通过以两种或多种不同布置测量目标进行的。 不同的布置导致在输出方向上测量的辐射是将目标与入射方向照射的辐射的不同组合。 还可以执行参考镜测量。 使用第一和第二布置之间的差异的测量和建模来分别估计输入和输出光学系统的特性。 建模可以考虑相应周期性目标的对称性。 该模型通常考虑入射光学元件，输出光学元件和相应周期性靶的偏振效应。 极化效应可以在由琼斯微积分或米勒微积分建模中描述。 该建模可以包括基于诸如Zernike多项式的基函数的参数化。

    Scatterometry method and measurement system for lithography
    39.
    发明授权
    Scatterometry method and measurement system for lithography 有权
    散光方法和光刻测量系统

    公开(公告)号：US08520212B2

    公开(公告)日：2013-08-27

    申请号：US13000212

    申请日：2009-07-10

    申请人： Willem Marie Julia Marcel Coene ,  Hugo Augustinus Joseph Cramer ,  Irwan Dani Setija

    发明人： Willem Marie Julia Marcel Coene ,  Hugo Augustinus Joseph Cramer ,  Irwan Dani Setija

    IPC分类号： G01N21/55

    CPC分类号： G01N21/55 ,  G03F7/70625

    摘要： Scatterometry method and apparatus are useful in a lithographic apparatus and device manufacturing. A back focal plane diffraction intensity image of a measurement projection system configured to project a radiation beam onto a target portion of a substrate is measured. A beam of radiation having a first wavelength is directed to the substrate. A diffraction image of a zeroth diffraction order and higher order diffraction from a diffraction structure in the substrate is provided. A first layer (4) of the diffractionstructure provides a diffraction image having only a zeroth diffraction order. A second layer (5) has a periodic structure (6a, 6b) configured such that a lowest spatial frequency of the periodic structure is lower than spatial frequencies of interest of the first structure. From the diffraction image originating from diffraction of the radiation beam in both the first and second layer a critical dimension metrology parameter is determined.

    摘要翻译： 散射测定方法和装置在光刻设备和器件制造中是有用的。 测量被配置为将辐射束投影到基板的目标部分上的测量投影系统的后焦平面衍射强度图像。 具有第一波长的辐射束被引导到基板。 提供了衍射图像的零衍射级和衍射结构的基底中的高阶衍射。 衍射结构的第一层（4）提供仅具有零级衍射级的衍射图像。 第二层（5）具有周期性结构（6a，6b），其被配置为使得周期性结构的最低空间频率低于第一结构的感兴趣的空间频率。 从第一和第二层中的辐射束的衍射衍射图像，确定临界尺寸计量参数。