公开(公告)号：US10705158B2

公开(公告)日：2020-07-07

申请号：US16290778

申请日：2019-03-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giacomo Laghi ,  Giacomo Langfelder ,  Gabriele Gattere ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/02 ,  G01R33/028 ,  G01R33/00 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

公开(公告)号：US20190097127A1

公开(公告)日：2019-03-28

申请号：US16201264

申请日：2018-11-27

Applicant: STMicroelectronics S.r.l.

Inventor： Dario Paci ,  Marco Morelli ,  Caterina Riva

IPC: H01L43/12 ,  H01L43/08 ,  G01R33/02 ,  G01R33/09

Abstract: An integrated magnetoresistive device includes a substrate of semiconductor material that is covered, on a first surface, by an insulating layer. A magnetoresistor of ferromagnetic material extends within the insulating layer and defines a sensitivity plane of the sensor. A concentrator of ferromagnetic material includes at least one arm that extends in a transversal direction to the sensitivity plane and is vertically offset from the magnetoresistor. The concentrator concentrates deflects magnetic flux lines perpendicular to the sensitivity plane so as to generate magnetic-field components directed in a parallel direction to the sensitivity plane.

公开(公告)号：US10054471B2

公开(公告)日：2018-08-21

申请号：US14498966

申请日：2014-09-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Dario Paci ,  Francesco Procopio ,  Carlo Valzasina ,  Paolo Angelini ,  Francesco Diazzi ,  Roberto Pio Baorda ,  Danilo Karim Kaddouri

IPC: G01N25/18 ,  G01D18/00 ,  G01K13/00 ,  H05B3/16 ,  B81C99/00 ,  G01R33/00 ,  G01R33/09

CPC classification number: G01D18/00 ,  B81B2207/012 ,  B81B2207/03 ,  B81C99/003 ,  G01K13/00 ,  G01R33/0017 ,  G01R33/09 ,  H05B3/16

Abstract: An integrated sensor device including a first die, housing a sensor element to detect a quantity external to the sensor device and transduce the external quantity into an electrical sensing signal; a second die mechanically coupled to the first die so that the first and second dies are stacked on one another along one and the same axis; and at least one heater of a resistive type integrated in the first die and/or in the second die, having a first conduction terminal and a second conduction terminal configured to couple respective first and second conduction terminals of a signal generator for causing an electric current to flow, in use, between the first and second conduction terminals of the heater and generate heat by the Joule effect. It is possible to carry out calibration in temperature of the sensor element.

公开(公告)号：US20180188336A1

公开(公告)日：2018-07-05

申请号：US15638204

申请日：2017-06-29

Applicant: STMICROELECTRONICS S.R.L. ,  Politecnico Di Milano

Inventor： Giacomo Laghi ,  Giacomo Langfelder ,  Gabriele Gattere ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/02 ,  G01R33/038

CPC classification number: G01R33/0206 ,  G01R33/0286 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

公开(公告)号：US20180180649A1

公开(公告)日：2018-06-28

申请号：US15586903

申请日：2017-05-04

Applicant: STMicroelectronics S.r.l.

Inventor： Dario Paci ,  Paolo Angelini ,  Marco Del Sarto

IPC: G01R15/20 ,  G01R19/00

CPC classification number: G01R15/202 ,  G01R15/205 ,  G01R15/207 ,  G01R19/0092

Abstract: An integrated current sensor device includes a supporting structure of conductive material, arranged within a package, and an integrated circuit die including a first and second magnetic-field sensor elements that are arranged along a sensor axis. An electronic circuit operatively coupled to the first and second magnetic-field sensor elements performs a differential detection of electric current. The supporting structure defines a current path for the electric current. The current path includes: a first path portion extending at the first magnetic-field sensor element; a second path portion extending at the second magnetic-field sensor element; and a third path portion that connects the first and second path portions. The first path portion and the second path portion are arranged on opposite sides of the sensor axis, and the third path portion crosses the sensor axis along a transverse axis.

公开(公告)号：US20170234940A1

公开(公告)日：2017-08-17

申请号：US15584672

申请日：2017-05-02

Applicant: STMicroelectronics S.r.l.

Inventor： Giacomo Langfelder ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/028 ,  G01R33/02 ,  G01R33/00 ,  H01L41/08 ,  H01L41/113

CPC classification number: G01R33/0283 ,  G01R33/0064 ,  G01R33/0213 ,  G01R33/028 ,  G01R33/0286 ,  G01R33/038 ,  H01L41/08 ,  H01L41/1132

Abstract: A magnetic field sensor includes a die and a current generator in the die. The current generator generates a driving current. A Lorentz force transducer is also formed in the die and coupled to the current generator to obtain measurements of a magnetic field based upon the Lorentz force. The magnetic field has a resonance frequency and the current generator drives the Lorentz force sensor with the driving current having a non-zero frequency different from the resonance frequency.

公开(公告)号：US20160202329A1

公开(公告)日：2016-07-14

申请号：US14947835

申请日：2015-11-20

Applicant: STMicroelectronics S.R.L.

Inventor： Dario Paci

IPC: G01R33/09 ,  G01R33/00

CPC classification number: G01R33/0011 ,  G01R33/093 ,  G01R33/096 ,  H01L43/08 ,  H01L43/12

Abstract: An AMR-type integrated magnetoresistive sensor sensitive to perpendicular magnetic fields is formed on a body of semiconductor material covered by an insulating region. The insulating region houses a set/reset coil and a magnetoresistor arranged on the set/reset coil. The magnetoresistor is formed by a magnetoresistive strip of an elongated shape parallel to the preferential magnetization direction. A concentrator of ferromagnetic material is arranged on top of the insulating region as the last element of the sensor and is formed by a plurality of distinct ferromagnetic regions aligned parallel to the preferential magnetization direction.

Abstract translation: 在绝缘区域覆盖的半导体材料体上形成对垂直磁场敏感的AMR型集成磁阻传感器。 绝缘区域容纳设置/复位线圈和布置在固定/复位线圈上的磁电阻器。 磁阻电阻由平行于优先磁化方向的细长形状的磁阻条形成。 铁磁材料的集中器被布置在绝缘区域的顶部上，作为传感器的最后一个元件，并且由平行于优先磁化方向排列的多个不同的铁磁区域形成。

公开(公告)号：US20150035526A1

公开(公告)日：2015-02-05

申请号：US14446248

申请日：2014-07-29

Applicant: STMicroelectronics S.r.l.

Inventor： Giacomo Langfelder ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/028

CPC classification number: G01R33/0283 ,  G01R33/0064 ,  G01R33/0213 ,  G01R33/028 ,  G01R33/0286 ,  G01R33/038 ,  H01L41/08 ,  H01L41/1132

Abstract: A magnetic-field sensor, including: a die, a current generator in the die. The current generator generating a driving current. A Lorentz force transducer also in the die and being configured to obtain measurements of magnetic field based upon the Lorentz force is coupled to the current generator. The transducer having a resonance frequency. The current generator is such that the driving current has a non-zero frequency different from the resonance frequency.

Abstract translation: 一种磁场传感器，包括：模具，模具中的电流发生器。 电流发生器产生驱动电流。 也在模具中并被配置为基于洛伦兹力获得磁场的测量值的洛伦兹力传感器耦合到电流发生器。 换能器具有共振频率。 电流发生器使得驱动电流具有与谐振频率不同的非零频率。

公开(公告)号：US20140015525A1

公开(公告)日：2014-01-16

申请号：US13929635

申请日：2013-06-27

Applicant: STMicroelectronics S.r.l.

Inventor： Dario Paci ,  Sarah Zerbini ,  Benedetto Vigna

IPC: G01R33/09

CPC classification number: G01R33/096 ,  G01R33/0017 ,  G01R33/0052 ,  G01R33/0206

Abstract: A magnetic-field sensor includes: a chip including a substrate having a first surface and an insulating layer covering the first surface; first and second magnetoresistors each extending into the insulating layer and having a main axis of magnetization and a secondary axis of magnetization; a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor; a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor. The main axes of magnetization extending transversely to each other and the secondary axes of magnetization extending transversely to each other. The first and second magnetoresistors extend into the insulating layer at a first distance and a second distance, respectively, that differ from one another, from the first surface.

Abstract translation: 磁场传感器包括：芯片，其包括具有覆盖第一表面的第一表面和绝缘层的基板; 第一和第二磁阻器各自延伸到绝缘层中并且具有主轴的磁化和次级磁化轴; 第一磁场发生器，被配置为产生具有沿着所述第一磁电阻的主磁化轴的场线的第一磁场; 第二磁场发生器被配置为产生具有沿着第二磁阻的主磁化轴的场线的第二磁场。 磁化的主轴线彼此横向延伸，磁化的副轴相互横向延伸。 第一和第二磁阻器分别从第一表面延伸到彼此不同的第一距离和第二距离处的绝缘层。