摘要:
Disclosed ia a plasma etching apparatus in which an etching chamber accomodates a pair of parallel flat plate electrodes facing each other. The etching chamber is also provided with a device for applying high frequency power to one of the electrodes and a system for introducing a reactive gas. An after-treatment chamber is connected to the etching chamber and provided with a system for introducing a heated gas into the interior, a partition means for hermetically partitioning the etching chamber and after-treatment chamber, and a system for transporting the workpiece in the etching chamber into the after-treatment chamber.
摘要:
A semiconductor integrated circuit includes a protected circuit connected to two power supply lines that provide a supply voltage, a detecting circuit that includes a resistive element and a capacitive element connected in series between two power supply lines and detects a surge generated in the power supply line based on potential variation of an inter-element connecting node, and a protection transistor that is connected between two power supply lines and has a control electrode connected to an output of the detecting circuit. The protection transistor has the control electrode formed from a different electrode material having a work function difference from a transistor of the same channel conductivity type in the protected circuit, to have a different threshold voltage from the transistor so that the amount of leakage current per unit channel width may be smaller compared with the transistor.
摘要:
A signal processing device includes an excessive input estimating unit 102 that estimates excessive input of a target signal, a controller 105 that calculates frequency characteristics which will lessen the excessive input of the target signal from the excessive input information estimated by the excessive input estimating unit 102, and a frequency characteristic modification unit 103 that modifies the frequency characteristics of the target signal in accordance with the frequency characteristics the controller 105 calculates.
摘要:
A physical properties measuring method includes: acquiring an experimental convergent beam electron diffraction image of a sample by using a transmission electron microscope; calculating Zernike moment intensities of the experimental convergent beam electron diffraction image; and comparing the Zernike moment intensities of the experimental convergent beam electron diffraction image with Zernike moment intensities of calculated convergent beam electron diffraction images calculated on changed physical properties of the sample.
摘要:
Deterioration of the Q value caused by the thermoelastic effect is suppressed. Since a first depth of a first groove and a second depth of a second groove are smaller than a distance between a surface including a third surface and a surface including a fourth surface, the first and second grooves do not penetrate between the surface including the third surface and the surface including the fourth surface. In addition, the sum of the first depth of the first groove and the second depth of the second groove is greater than the distance between the third and fourth surfaces, a heat transfer path between a first expandable portion (the first surface) and a second expandable portion (the second surface) cannot be formed as a straight line. As such, the heat transfer path between the first expandable portion (the first surface) and a second expandable portion (the second surface) is made to detour to the first and second grooves and and thus be lengthened.
摘要:
An alloy for R-T-B-based rare earth sintered magnets which contains R which is a rare earth element; T which is a transition metal essentially containing Fe; a metallic element M containing one or more metals selected from Al, Ga and Cu; B and inevitable impurities, in which R accounts for 13 at % to 15 at %, B accounts for 4.5 at % to 6.2 at %, M accounts for 0.1 at % to 2.4 at %, T accounts for balance, a proportion of Dy in all rare earth elements is in a range of 0 at % to 65 at %, and the following Formula 1 is satisfied, 0.0049Dy+0.34≦B/TRE≦0.0049Dy+0.36 Formula 1 wherein Dy represents a concentration (at %) of a Dy element, B represents a concentration (at %) of a boron element, and TRE represents a concentration (at %) of all the rare earth elements.
摘要:
An apparatus includes: a retainer moving between a shuttle and a socket; a presser holding a component; an adjuster moving the presser; a socket mark near the socket; a hand mark near the socket mark when the retainer is at a component mounting position; a first camera photographing a first image including the component and hand mark; a second camera photographing a second image including the socket mark and socket, and a third image including the socket mark and hand mark; a first calculator obtaining a first relative position between the socket mark and socket from the second image; a second calculator obtaining a second relative position between the socket mark and hand mark from the third image; and a third calculator obtaining a third relative position between the hand mark and component from the first image. The adjuster corrects the component's position based on the relative positions.
摘要:
A manufacturing method of a semiconductor device includes: sealing a semiconductor chip with a sealing resin containing a filler; exposing a part of the filler; etching at least a part of the exposed filler; and forming a metal film at least at a part of a surface of the sealing resin including inner surfaces of holes formed at the surface of the sealing resin by the etching.
摘要:
An alloy material for an R-T-B-based rare earth permanent magnet, including (i) an R-T-B-based alloy composed of R being two or more members selected from rare earth elements, T being a transition metal that essentially contains Fe, B and unavoidable impurities, and in which the Dy content is more than 10% by mass and less than 31% by mass, and (ii) a metal powder. Also disclosed is a method for producing an R-T-B-based rare earth permanent magnet and a motor provided with the R-T-B-based rare earth permanent magnet.
摘要:
An R-T-B-based rare earth permanent magnet including a sintered body which is provided with a main phase mainly containing R2Fe14B, and with a grain boundary phase which has a greater R content than said main phase, wherein R denotes a rare earth element including Nd and Dy as an essential element, and the grain boundary phase includes a first grain boundary phase and a second grain boundary phase which have different atomic concentration of Dy to each other.
摘要翻译:一种RTB系稀土永磁体,其特征在于,具备烧结体,所述烧结体具有主要含有R 2 Fe 14 B的主相和具有比所述主相R含量更大的晶界相的烧结体,其中,R表示包含Nd的稀土元素, Dy作为必需元素,并且晶界相包括彼此具有不同的Dy原子浓度的第一晶界相和第二晶界相。