公开(公告)号：US07594040B2

公开(公告)日：2009-09-22

申请号：US11607648

申请日：2006-12-01

申请人： Yasuhiro Oshima ,  Yoji Takada

发明人： Yasuhiro Oshima ,  Yoji Takada

IPC分类号： H04L12/28 ,  H04L12/56 ,  G06F3/00

CPC分类号： H04L67/16 ,  H04L12/281 ,  H04L67/28 ,  H04L67/2823 ,  H04L69/40

摘要： A network relay device compliant with network plug-and-play protocols is presented. The relay device relays messages between a network and a device unit having N service devices that provide a service in response to a request from a client on the network. In one embodiment the relay device has a description creating module configured to create a device description which describes service devices included in the device unit connected to the relay device. If one or more service devices of the device unit are inoperative, the description creating module creates a device description that does not include a description portion of the inoperative service devices and forwards the created device description to the client. In another embodiment, the relay device has a response module configured to respond to a device search request sent from a client. The response module responds to a device search request sent from a client if at least one service device in the device unit is in operative condition, while the response module does not respond to a device search request if all of the service devices in the device unit are in inoperative condition.

摘要翻译： 提出了一种符合网络即插即用协议的网络中继设备。 中继设备在网络和具有N个服务设备的设备单元之间中继消息，响应于来自网络上的客户端的请求来提供服务。 在一个实施例中，中继设备具有描述创建模块，其被配置为创建描述连接到中继设备的设备单元中包括的服务设备的设备描述。 如果设备单元的一个或多个服务设备不工作，则描述创建模块创建不包括不工作服务设备的描述部分的设备描述，并将创建的设备描述转发给客户端。 在另一个实施例中，中继设备具有响应模块，其被配置为响应从客户端发送的设备搜索请求。 如果设备单元中的至少一个服务设备处于操作状态，响应模块响应于从客户端发送的设备搜索请求，而如果设备单元中的所有服务设备都是响应模块，则响应模块不响应设备搜索请求 处于不工作状态。

公开(公告)号：US20090173715A1

公开(公告)日：2009-07-09

申请号：US12162617

申请日：2007-01-29

申请人： Yasuhiro Oshima ,  Nobuaki Takahashi

发明人： Yasuhiro Oshima ,  Nobuaki Takahashi

IPC分类号： H01L21/306 ,  C23C14/28

CPC分类号： H01J37/32192 ,  H01J65/044

摘要： A light source device is formed by a plasma formation chamber including a plasma formation region where plasma is formed by electrodeless discharge to generate light and an optical window defining the lower end of the plasma region in the plasma formation chamber and transmitting the light. A microwave transmitting window is formed in the plasma chamber for introducing microwaves for generating the plasma. Furthermore, outside of the microwave transmitting window, a microwave antenna is connected to the microwave window for introducing the microwaves.

摘要翻译： 光源装置由等离子体形成室形成，该等离子体形成室包括等离子体形成区域，其中通过无电极放电形成等离子体以产生光，以及限定等离子体形成室中的等离子体区域的下端并传输光的光学窗口。 在等离子体室中形成微波传输窗，用于引入用于产生等离子体的微波。 此外，在微波发射窗外，将微波天线连接到微波窗口以引入微波。

公开(公告)号：US20090152686A1

公开(公告)日：2009-06-18

申请号：US12086030

申请日：2006-12-05

申请人： Shinji Ide ,  Yasuhiro Oshima ,  Yusaku Kashiwagi

发明人： Shinji Ide ,  Yasuhiro Oshima ,  Yusaku Kashiwagi

IPC分类号： H01L23/58 ,  H01L21/47 ,  C23C16/52

CPC分类号： H01L23/5329 ,  C23C16/401 ,  C23C16/56 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02211 ,  H01L21/02274 ,  H01L21/0228 ,  H01L21/02304 ,  H01L21/0234 ,  H01L21/31633 ,  H01L21/7682 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76834 ,  H01L23/53223 ,  H01L23/53295 ,  H01L2221/1047 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： The present invention is a film forming method for an SiOCH film, comprising a unit-film-forming step including: a deposition step of depositing an SiOCH film element by using an organic silicon compound as a raw material and by using a plasma CVD method; and a hydrogen plasma processing step of providing a hydrogen plasma process to the deposited SiOCH film element, wherein the unit-film-forming step is repeated several times so as to form an SiOCH film on a substrate.

摘要翻译： 本发明是一种SiOCH膜的成膜方法，包括：单位成膜步骤，包括：通过使用有机硅化合物作为原料沉积SiOCH膜元素并通过使用等离子体CVD法沉积步骤; 以及向沉积的SiOCH膜元件提供氢等离子体处理的氢等离子体处理步骤，其中重复数次单元成膜步骤，以在基板上形成SiOCH膜。

公开(公告)号：US20080241385A1

公开(公告)日：2008-10-02

申请号：US10547784

申请日：2004-02-26

申请人： Yasuhiro Oshima ,  Yasuhiko Kojima ,  Takashi Shigeoka ,  Hiroshi Kannan ,  Tadahiro Ishizaka

发明人： Yasuhiro Oshima ,  Yasuhiko Kojima ,  Takashi Shigeoka ,  Hiroshi Kannan ,  Tadahiro Ishizaka

IPC分类号： C23C16/08 ,  C23C16/44

CPC分类号： C23C16/45523 ,  C23C16/34 ,  C23C16/45525 ,  H01L21/28556 ,  H01L21/28562 ,  H01L21/76843

摘要： A method of rapidly forming a thin film of high quality through film formation by alternate feeding of raw gases. In particular, a method of forming a TiN thin film, comprising repeating operations including causing TiCl4 gas as a raw gas to be adsorbed on a substrate or TiCl4 molecules adsorbed on a substrate and feeding NH3 gas as a reactant gas in a treating chamber so as to effect reaction of TiCl4 and NH3 leading to formation of a TiN film, which method further comprises an operation of, prior to the adsorption of TiCl4 gas on the substrate, feeding reducing H2 gas in the treating chamber (30) so as to change TiCl4 to a state of enhanced likelihood of adsorption on the substrate (e.g., TiCl3).

摘要翻译： 通过交替进料原料气体，通过成膜快速形成高质量的薄膜的方法。 特别是，形成TiN薄膜的方法，包括重复操作，包括使TiCl 4气体作为原料气体吸附在吸附在基底上的TiCl 4分子上 底物并在处理室中加入作为反应气体的NH 3气体，以使TiCl 4和NH 3反应形成，形成 的TiN膜，该方法还包括在衬底上吸附TiCl 4气体之前，在处理室（30）中进料还原H 2气体 ），以便将TiCl 4改变为增加在衬底上的吸附可能性（例如TiCl 3 3）的状态。

公开(公告)号：US20080109328A1

公开(公告)日：2008-05-08

申请号：US12003015

申请日：2007-12-19

申请人： Junji Suzuki ,  Yasuo Shibusawa ,  Yasuhiro Oshima ,  Satoshi Shimoda ,  Hironori Yoshizaki ,  Miho Yamazaki

发明人： Junji Suzuki ,  Yasuo Shibusawa ,  Yasuhiro Oshima ,  Satoshi Shimoda ,  Hironori Yoshizaki ,  Miho Yamazaki

IPC分类号： G06Q30/00

CPC分类号： H04L41/22 ,  G06Q20/203 ,  G06Q30/0633 ,  G06Q30/0641

摘要： An order data obtaining device displays a list of components on a Web page, and recognizes components selected on the Web page, thereby obtaining order data of a product that is formed of a plurality of components. A turnaround time display control device obtains turn-around time information of each of the components selected on the Web page, and displays on the Web page the longest turn-around time in the turn-around time information as a turn-around time of the product. An accurate turn-around time is calculated in accordance with the selection of components, and a customer is immediately notified of the accurate turn-around time of the product. Thus, loss of competitiveness in the market due to display of a turn-around time being fixed and too long because of its inclusion of leeway is prevented. In addition, since an accurate turn-around time notification is immediately provided to the customer, customer notification of the turn-around time and handling of queries over the phone regarding turn-around time can be reduced, thereby reducing management cost.

摘要翻译： 订单数据获取装置显示网页上的组件列表，并且识别在网页上选择的组件，从而获得由多个组件形成的产品的订单数据。 周转时间显示控制装置获取在网页上选择的每个组件的周转时间信息，并且在网页上显示周转时间信息中最长的周转时间作为周转时间信息的周转时间 产品。 根据组件的选择计算准确的周转时间，并立即通知客户准确的产品周转时间。 因此，由于包含余地，由于显示周转时间固定和太长而导致的市场竞争力的丧失被阻止。 此外，由于能够立即向客户提供正确的周转时间通知，所以可以减少顾客通知周转时间，通过电话处理关于周转时间的查询，从而降低管理成本。

公开(公告)号：US20070263248A1

公开(公告)日：2007-11-15

申请号：US11652246

申请日：2007-01-10

申请人： Yasuhiro Oshima ,  Yoji Takada

发明人： Yasuhiro Oshima ,  Yoji Takada

IPC分类号： G06F3/12

CPC分类号： G06F3/1288 ,  G06F3/1204 ,  G06F3/1206 ,  G06F3/1246 ,  H04N1/00222 ,  H04N1/00233 ,  H04N2201/001

摘要： A network relay device, which is compliant with network plug-and-play, is used for relaying between a network and a device unit having one or more service devices that provide a service in response to a request from a client on the network. The network relay device includes a data conversion module that, upon receiving from a client a print request message describing in markup language an image for printing, converts the print request message to data for use by the device unit and supplies the converted data to the device unit. The data conversion module creates, as the data for use by the device unit, printer data according to a universal standard acceptable by the device unit.

摘要翻译： 符合网络即插即用的网络中继设备用于在具有一个或多个服务设备的网络和设备单元之间进行中继，该服务设备响应于来自网络上的客户端的请求来提供服务。 网络中继装置包括：数据转换模块，其在从客户端接收到以标记语言描述的打印请求消息的图像的情况下，将打印请求消息转换为由设备单元使用的数据，并将转换的数据提供给设备 单元。 数据转换模块根据设备单元可接受的通用标准创建打印机数据作为设备单元使用的数据。

公开(公告)号：US20070160757A1

公开(公告)日：2007-07-12

申请号：US11717183

申请日：2007-03-13

申请人： Tadahiro Ishizaka ,  Hiroshi Kannan ,  Yasuhiko Kojima ,  Takashi Shigeoka ,  Yasuhiro Oshima ,  Kohei Kawamura

发明人： Tadahiro Ishizaka ,  Hiroshi Kannan ,  Yasuhiko Kojima ,  Takashi Shigeoka ,  Yasuhiro Oshima ,  Kohei Kawamura

IPC分类号： C23C16/00

CPC分类号： C23C16/45544 ,  C23C16/34 ,  C23C16/4401 ,  C23C16/4412

摘要： In a processing apparatus which performs a film deposition by alternately supplying a plurality of source gases, the source gases are prevented from reacting within an exhaust pipe so as to prevent the exhaust pipe from clogging due to a reaction by-product. A gas supply to a processing container is switched between a TiCl4 supply system and a NH3 supply system. Additionally, a gas exhaust from the processing container is switched between a TiCl4 exhaust system and a NH3 exhaust system. The gas exhaust is switched to the TiCl4 exhaust system when the gas supply is switched to the TiCl4 supply system, and the gas exhaust is switched to the NH3 exhaust system when the gas supply is switched to the NH3 supply system. The switching is performed by a stop valve provided to each of the supply system and the exhaust system.

摘要翻译： 在通过交替供给多个源气体进行膜沉积的处理装置中，防止源气体在排气管内发生反应，以防止排气管因反应副产物而堵塞。 供给到处理容器的气体在TiCl 4供应系统和NH 3供应系统之间切换。 此外，来自处理容器的排气在TiCl 4排气系统和NH 3排气系统之间切换。 当气体供应切换到TiCl 4供应系统时，排气被切换到TiCl 4排气系统，并且排气被切换到NH 3 3气体供应系统切换到NH 3供应系统时。 通过设置在供给系统和排气系统中的每一个的截止阀进行切换。

公开(公告)号：US07172657B2

公开(公告)日：2007-02-06

申请号：US09801825

申请日：2001-03-09

申请人： Yasuhiko Kojima ,  Yasuhiro Oshima

发明人： Yasuhiko Kojima ,  Yasuhiro Oshima

IPC分类号： B08B3/10 ,  B08B9/00

CPC分类号： C23C16/4405

摘要： In a state of the inside of a treatment chamber of treatment equipment being evacuated, therein a cleaning gas containing trifluoroaceticacid (TFA) as a cleaning agent is supplied. Metal such as copper used in the formation of an interconnection or an electrode and stuck on an inner wall surface of the treatment chamber, when coming into contact with the cleaning agent (TFA) in the cleaning gas, without forming an oxide or a metallic salt, is directly complexed. The complex is sublimed due to the evacuation and is exhausted outside the treatment chamber. Accordingly, at less labor and low cost, the cleaning can be efficiently implemented.

摘要翻译： 在处理设备的处理室的内部被抽真空的状态下，其中提供含有三氟乙酸（TFA）作为清洁剂的清洁气体。 当形成互连或电极并且在与清洁气体中的清洁剂（TFA）接触时粘附在处理室的内壁表面上的金属，例如铜，而不形成氧化物或金属盐 ，直接复合。 复合体由于排空而升华，并在处理室外排出。 因此，以较少的劳动力和低成本，可以有效地实施清洁。

公开(公告)号：US20060150236A1

公开(公告)日：2006-07-06

申请号：US11269555

申请日：2005-11-09

申请人： Kenji Sakuda ,  Hideki Morozumi ,  Yasuhiro Oshima ,  Tsutomu Motegi

发明人： Kenji Sakuda ,  Hideki Morozumi ,  Yasuhiro Oshima ,  Tsutomu Motegi

IPC分类号： H04N7/16 ,  H04N7/173

CPC分类号： H04L12/281 ,  H04L41/0809 ,  H04L41/0886 ,  H04L67/16

摘要： The network device 200 includes the device unit 400 having service devices 404, 406 to execute a service, and the network protocol controller 302. The device unit 400 holds a device description defining a configuration of each service device according to the network plug-and-play protocol architecture. The network protocol controller 302, responsive to startup or connection of the network protocol controller and the device unit, obtains the device description of the service devices from the device unit, and creates a total device description defining a device configuration of the entire network device.

摘要翻译： 网络设备200包括具有用于执行服务的服务设备404,406的设备单元400和网络协议控制器302。 设备单元400根据网络即插即用协议架构保存定义每个服务设备的配置的设备描述。 响应于网络协议控制器和设备单元的启动或连接，网络协议控制器302从设备单元获得服务设备的设备描述，并创建定义整个网络设备的设备配置的总设备描述。

公开(公告)号：US20050140711A1

公开(公告)日：2005-06-30

申请号：US10965216

申请日：2004-10-15

申请人： Yasuhiro Oshima

发明人： Yasuhiro Oshima

IPC分类号： B41J29/38 ,  B41J5/30 ,  G06F3/12 ,  H04N1/00

CPC分类号： G06F3/1207 ,  G06F3/1203 ,  G06F3/121 ,  G06F3/1229 ,  G06F3/1259 ,  G06F3/128 ,  G06F3/1284 ,  G06F3/1285 ,  H04N1/00236 ,  H04N1/00238 ,  H04N2201/0034

摘要： The printer 10 includes a user interface UI and a PC interface PIF that register specification information that specifies necessary status information, as well as a status management module DSM that, when status information regarding which the specification information is registered is changed, supplies the changed status information to the interface that carried out the registration of such information.

摘要翻译： 打印机10包括用户界面UI和PC接口PIF，其登记指定必要状态信息的指定信息，以及状态管理模块DSM，当状态信息关于哪个登记的状态信息被改变时，提供改变的状态 信息到进行这种信息登记的界面。