公开(公告)号：US5975112A

公开(公告)日：1999-11-02

申请号：US853347

申请日：1997-05-08

申请人： Tadahiro Ohmi ,  Keiji Hirao ,  Yukio Minami ,  Michio Yamaji ,  Takashi Hirose ,  Nobukazu Ikeda

发明人： Tadahiro Ohmi ,  Keiji Hirao ,  Yukio Minami ,  Michio Yamaji ,  Takashi Hirose ,  Nobukazu Ikeda

IPC分类号： F15B11/00 ,  F15B13/00 ,  F15B13/02 ,  F15B13/08 ,  F16K27/00 ,  H01L21/02 ,  F16K11/20

CPC分类号： F16K27/003 ,  Y10T137/4259 ,  Y10T137/87684

摘要： A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.

摘要翻译： 流体控制装置在阀主体中形成有与质量流量控制器内的通道的入口连通的主通道，以及与主通道连通的相对长的子通道和相对短的子通道。 要保证高纯度的工艺气体通过较长的子通道。

公开(公告)号：US5983933A

公开(公告)日：1999-11-16

申请号：US974550

申请日：1997-11-19

申请人： Tadahiro Ohmi ,  Yuji Kawano ,  Keiji Hirao ,  Hisashi Tanaka ,  Naoya Masuda ,  Yukio Minami ,  Masayuki Hatano ,  Shigeaki Tanaka ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Michio Kuramochi ,  Nobukazu Ikeda ,  Shigeru Itoi ,  Michihiro Kashiwa

发明人： Tadahiro Ohmi ,  Yuji Kawano ,  Keiji Hirao ,  Hisashi Tanaka ,  Naoya Masuda ,  Yukio Minami ,  Masayuki Hatano ,  Shigeaki Tanaka ,  Michio Yamaji ,  Hiroshi Morokoshi ,  Michio Kuramochi ,  Nobukazu Ikeda ,  Shigeru Itoi ,  Michihiro Kashiwa

IPC分类号： F16K27/00 ,  F15B13/00 ,  F15B13/08 ,  F17D1/02 ,  F16K3/00

CPC分类号： F15B13/0832 ,  F15B13/0817 ,  F15B13/0871 ,  F15B13/0892 ,  F15B13/0896 ,  F16K27/003 ,  Y10T137/87249 ,  Y10T137/87684 ,  Y10T137/87917

摘要： A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.

摘要翻译： 具有两个可自由拆卸地安装在其上的阀的阀座具有一个流入通道形成构件，该流入通道形成构件具有与设置在其一端的阀的入口连通的通道;连通通道形成构件，具有通道， 所述阀的端部的出口与与其相邻的另一阀的入口连通，具有与所述另一个阀的出口连通的通道的流出通道形成构件，以及具有与入口连通的通道的子通道形成构件 - 出口端口形成在另一个阀门中。

公开(公告)号：US06387158B2

公开(公告)日：2002-05-14

申请号：US09848208

申请日：2001-05-04

申请人： Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Teruo Honiden ,  Kouji Kawada ,  Katunori Komehana ,  Touru Hirai ,  Michio Yamaji

发明人： Nobukazu Ikeda ,  Akihiro Morimoto ,  Yukio Minami ,  Teruo Honiden ,  Kouji Kawada ,  Katunori Komehana ,  Touru Hirai ,  Michio Yamaji

IPC分类号： F17D314

CPC分类号： B01D53/26 ,  F17D3/14

摘要： A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than a minimum pressure at which the gas flow becomes viscous and not higher than a water saturated vapor pressure at a flow temperature of the gas to remove moisture. The gas to remove moisture achieves a viscous flow when a mean free path of gas molecules is smaller than a diameter of piping of the gas supply system. If the gas for removing moisture is evacuated at normal temperature under such conditions, the adsorbed moisture on an inside surface of the piping and in the valves and filters can be removed effectively.

摘要翻译： 一种通过在常温抽真空而不使用烘烤方法在气体供给系统中有效除去水分的方法。 该方法包括使气体流动以除去气体的流量的气体中的水分，以除去在不低于气体流变粘度的最低压力并且不高于水的饱和蒸气压的水分 气体的流动温度去除水分。 当气体分子的平均自由程小于气体供应系统的管道直径时，去除水分的气体达到粘性流动。 如果用于除去水分的气体在这样的条件下在常温下抽真空，则能够有效地除去管道内表面和阀门和过滤器中的吸附水分。

公开(公告)号：US07815872B2

公开(公告)日：2010-10-19

申请号：US11570667

申请日：2005-07-04

申请人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

发明人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

IPC分类号： B01J8/02 ,  C01B5/00

CPC分类号： B01J12/007 ,  B01J2219/00078 ,  B01J2219/00087 ,  B01J2219/00096 ,  B01J2219/00135 ,  C01B5/00 ,  F28D2021/0029 ,  F28F3/02 ,  H01L21/67017

摘要： A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.

摘要翻译： 一种用于产生水分的反应器，通过该反应器将进入反应器的氢气和氧气与铂涂层催化剂层接触以激活反应性，使氢气和氧气在非燃烧条件下反应，其中反应器包括一个包含散热体基体 其中在中心处制造加热器插入孔以固定到出口侧的反应堆结构部件的外表面和出口侧的冷却器，该多个散热体垂直并排安装在部件上 不包括存在散热体基板的上述加热器插入孔的区域，并且将加热器的加热器的一部分插入加热器插入孔中，以便将反应器结构部件的外表面固定在 出口侧。

公开(公告)号：US20080241022A1

公开(公告)日：2008-10-02

申请号：US11570667

申请日：2005-07-04

申请人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

发明人： Toshirou Nariai ,  Kouji Kawada ,  Keiji Hirao ,  Yukio Minami ,  Akihiro Morimoto ,  Nobukazu Ikeda

IPC分类号： B01J12/00

CPC分类号： B01J12/007 ,  B01J2219/00078 ,  B01J2219/00087 ,  B01J2219/00096 ,  B01J2219/00135 ,  C01B5/00 ,  F28D2021/0029 ,  F28F3/02 ,  H01L21/67017

摘要： A reactor for generating moisture, with which hydrogen and oxygen fed into the reactor contact with a platinum coating catalyst layer to activate reactivity so that hydrogen and oxygen react under conditions of non-combustion, wherein the reactor includes a cooler comprising a heat dissipation body substrate in which a heater insertion hole is made in the center to fix to the outer surface of the reactor structural component on the outlet side and a cooler on the outlet side made up of a plural number of heat dissipation bodies installed vertically in parallel on the part excluding the area where the afore-mentioned heater insertion hole of the heat dissipation body substrate exists, and a part of the heater to heat the reactor is inserted in the heater insertion hole so as to fix to the outer surface of the reactor structural component on the outlet side.

摘要翻译： 一种用于产生水分的反应器，通过该反应器将进入反应器的氢气和氧气与铂涂层催化剂层接触以激活反应性，使氢气和氧气在非燃烧条件下反应，其中反应器包括一个包含散热体基体 其中在中心处制造加热器插入孔以固定到出口侧的反应堆结构部件的外表面和出口侧的冷却器，该多个散热体垂直并排安装在部件上 不包括存在散热体基板的上述加热器插入孔的区域，并且将加热器的加热器的一部分插入加热器插入孔中，以便将反应器结构部件的外表面固定在 出口侧。

公开(公告)号：US6060691A

公开(公告)日：2000-05-09

申请号：US062831

申请日：1998-04-20

申请人： Yukio Minami ,  Nobukazu Ikeda ,  Michio Yamaji ,  Tsutomu Tanigawa

发明人： Yukio Minami ,  Nobukazu Ikeda ,  Michio Yamaji ,  Tsutomu Tanigawa

IPC分类号： F16K49/00 ,  H05B1/00

CPC分类号： F16K49/002 ,  Y10T137/6606

摘要： A device for heating a fluid controller comprises a pair of platelike side heaters pressed respectively against a pair of opposite side faces of a body of the fluid controller with an insulating layer provided between each heater and each side face, a pair of side holding members each having a recessed portion for fitting the side heater therein and fastened to each other with screws to hold the controller body therebetween from opposite sides of the body, and a cushion member interposed between each side heater and a bottom face of the recessed portion for pressing the side heater against the controller body side face.

摘要翻译： 用于加热流体控制器的装置包括一对板状侧加热器，其分别压在流体控制器的主体的一对相对侧面上，其中每个加热器和每个侧面之间设置有绝缘层，每对侧保持构件 具有用于将侧面加热器安装在其中的凹部，并且用螺钉彼此紧固以将控制器主体从身体的相对侧保持在其间;以及缓冲构件，其插入在每个侧加热器和凹部的底面之间，用于按压 侧加热器抵靠控制器主体侧面。

公开(公告)号：US06014498A

公开(公告)日：2000-01-11

申请号：US35345

申请日：1998-03-05

申请人： Nobukazu Ikeda ,  Keiji Hirao ,  Yuji Kawano ,  Masayuki Hatano ,  Yukio Minami ,  Hiroshi Morokoshi

发明人： Nobukazu Ikeda ,  Keiji Hirao ,  Yuji Kawano ,  Masayuki Hatano ,  Yukio Minami ,  Hiroshi Morokoshi

IPC分类号： F16K27/00 ,  F16K49/00 ,  F24H1/10 ,  H05B3/06

CPC分类号： F16K49/00

摘要： A device for heating a fluid control apparatus comprises a tape heater disposed on at least one of opposite lateral sides of the fluid control apparatus, and a plurality of brackets each comprising a bottom wall fastened to a panel with a screw and at least one side wall for holding the tape heater in contact with a fluid controller. The bottom wall of each of the brackets is formed with a screw hole, and each bracket is attached to the panel and adjustable in position.

摘要翻译： 用于加热流体控制装置的装置包括设置在流体控制装置的相对侧面中的至少一个上的带式加热器，以及多个托架，每个托架包括用螺钉紧固到面板的底壁和至少一个侧壁 用于保持带式加热器与流体控制器接触。 每个托架的底壁形成有一个螺孔，并且每个支架附接到面板上并且可调整的位置。

公开(公告)号：US5950675A

公开(公告)日：1999-09-14

申请号：US800763

申请日：1997-02-13

申请人： Yukio Minami ,  Nobukazu Ikeda ,  Manohar L. Shrestha ,  Satoshi Kagatsume

发明人： Yukio Minami ,  Nobukazu Ikeda ,  Manohar L. Shrestha ,  Satoshi Kagatsume

IPC分类号： B01J4/00 ,  C23C16/44 ,  C23C16/455 ,  F17D1/04 ,  G05D11/13 ,  H01L21/205 ,  H01L21/302 ,  H01L21/3065 ,  F17D1/02

CPC分类号： G05D11/132 ,  F17D1/04 ,  Y10T137/87684

摘要： An apparatus for mixing and feeding plural gases flowing at different mass flow rates and having different molecular weights includes a plurality of gas feed lines connected to a mixing region having an outlet for feeding a mixture of the gases to a semiconductor production apparatus. The gas feed line carrying the lowest-flow-rate gas is connected to the mixing region at a location farther from the outlet than where any other feed line is connected to the mixing region. Feed lines carrying gases other than the lowest-flow-rate gas are connected to the mixing region according to (1) the relative mass flow rates of the gases carried by the lines (2) the relative molecular weights of the gases carried by the lines or (3) the product of the respective gas flow rates and molecular weights of the gases. At least the line carrying the lowest-flow-rate gas is provided with an apparatus for increasing the velocity of the gas flowing therein prior to entry of the gas into the mixing region.

摘要翻译： 用于混合和供给以不同质量流量流动并且具有不同分子量的多种气体的装置包括连接到具有用于将气体混合物供给到半导体生产装置的出口的混合区域的多个气体供给管线。 承载最低流量气体的气体供给管线在距离出口更远的位置处与混合区域连接，其中任何其它进料管线连接到混合区域。 携带除最低流量气体之外的气体的进料管线根据（1）线路（2）携带的气体的相对质量流量与管线携带的气体的相对分子量连接到混合区域 或（3）气体的相应气体流速和分子量的乘积。 至少带有最低流量气体的管线设置有用于在气体进入混合区域之前增加其中流动的气体的速度的装置。

公开(公告)号：US5488967A

公开(公告)日：1996-02-06

申请号：US327419

申请日：1994-10-21

申请人： Yukio Minami ,  Nobukazu Ikeda

发明人： Yukio Minami ,  Nobukazu Ikeda

IPC分类号： F17D1/02 ,  B01J4/00 ,  C23C16/44 ,  C23C16/455 ,  G05D16/00 ,  H01L21/205 ,  F16K11/12

CPC分类号： C23C16/45561 ,  B01J4/008 ,  C23C16/4412 ,  C23C16/455 ,  Y10T137/0318 ,  Y10T137/0396 ,  Y10T137/86083 ,  Y10T137/87249 ,  Y10T137/87499

摘要： A vacuum deposition chamber alternately receives a reactive gas and an inert gas during a process in which a thin film is formed on a wafer in the chamber. The inert gas flows through a first pressure regulator, a first feed line and a first changeover valve into the chamber. The reactive gas flows through a second pressure regulator, a second feed line and a second changeover valve into the chamber. A vent line is connected to a vacuum pump and a pressure regulating valve which vents to the atmosphere to thereby control the vacuum pressure in the vent line. A first shunt valve is connected between the vent line and the first feed line and a second shunt valve is connected between the vent line and the second feed line. When the first changeover valve is opened to permit flow of reactive gas into the chamber, the second shunt valve is opened to evacuate the second feed line and when the second changeover valve is opened to permit flow of inert gas into the chamber, the first shunt valve is opened to evacuate the first feed line. By alternately evacuating the feed lines, pressure fluctuations which usually occur in the chamber at the time of changeover from one gas to the other, are suppressed.

摘要翻译： 真空沉积室在室中的晶片上形成薄膜的过程中交替地接收反应性气体和惰性气体。 惰性气体通过第一压力调节器，第一供给管线和第一转换阀流入腔室。 反应性气体通过第二压力调节器，第二进料管线和第二转换阀流入室中。 排气管线连接到真空泵和通向大气的压力调节阀，从而控制排气管线中的真空压力。 第一分流阀连接在排气管线和第一进料管线之间，第二分流阀连接在排气管线和第二进料管线之间。 当第一转换阀打开以允许反应气体流入腔室时，第二分流阀打开以排出第二进料管线，并且当第二转换阀打开以允许惰性气体流入室中时，第一分流器 打开阀门以排出第一个进料管线。 通过交替地排出进料管线，抑制了在从一种气体切换到另一种气体时在室中通常发生的压力波动。

公开(公告)号：US5427357A

公开(公告)日：1995-06-27

申请号：US209906

申请日：1994-03-14

申请人： Mutsunori Koyomogi ,  Kunihiko Daido ,  Masahiko Nakazawa ,  Yukio Minami ,  Masahiko Sogao ,  Kazuhiro Yoshikawa ,  Shuhei Ogawa ,  Tetsuya Kojima

发明人： Mutsunori Koyomogi ,  Kunihiko Daido ,  Masahiko Nakazawa ,  Yukio Minami ,  Masahiko Sogao ,  Kazuhiro Yoshikawa ,  Shuhei Ogawa ,  Tetsuya Kojima

IPC分类号： F16K1/10 ,  F16K41/10 ,  F16K3/00

CPC分类号： F16K41/10 ,  F16K1/10 ,  Y10T137/6416

摘要： A control valve comprises a valve body having a fluid channel and a valve seat; a valve operating part; a valve stem supporting member having its upper end fixed to the valve operating part and its lower end fixed to the valve body; a valve stem penetrating the valve stem supporting member and having its upper end part connected to the valve operating part and its lower end part entering the valve body, the valve stem being movable upward or downward by the valve operating part; and a valve element attached to the lower end of the valve stem. The valve element is moved upward or downward by moving the valve stem upward or downward, the valve element being brought into contact with and seated in the valve seat to close a fluid channel as it is moved downward, the valve element being detached from the valve seat to open the fluid channel as it is moved upward. The valve stem supporting member has an upper tubular body and a lower tubular body, the upper tubular body having its upper end fixed to the valve operating part and its lower end detached from the valve body, the lower tubular body having its lower end fixed to the valve body and its upper end detached from the valve operating part, the two tubular bodies being spaced apart each other, the lower end part of the upper tubular body and the upper end part of the lower tubular body being connected by a connecting member.

摘要翻译： 控制阀包括具有流体通道和阀座的阀体; 阀门操作部分; 阀杆支撑构件，其上端固定到阀操作部分，其下端固定到阀体; 阀杆贯穿阀杆支撑构件，其上端部分连接到阀操作部分，其下端部分进入阀体，阀杆可由阀操作部件向上或向下移动; 以及附接到阀杆的下端的阀元件。 阀元件通过向上或向下移动阀杆而向上或向下移动，阀元件与阀座接触并安置在阀座中，以在其向下移动时闭合流体通道，阀元件从阀门拆下 座椅向上移动以打开流体通道。 阀杆支撑构件具有上管状体和下管状体，上管状体的上端固定到阀操作部分，其下端与阀体分离，下管状体的下端固定到 阀体及其上端与阀操作部分脱离，两个管状体彼此间隔开，上管状体的下端部和下管状体的上端部通过连接部件连接。