公开(公告)号：US20070214622A1

公开(公告)日：2007-09-20

申请号：US11743793

申请日：2007-05-03

申请人： Kenji NISHIYAMA ,  Takeshi NAKAO ,  Michio KADOTA

发明人： Kenji NISHIYAMA ,  Takeshi NAKAO ,  Michio KADOTA

IPC分类号： H01L41/00 ,  H05K3/10

CPC分类号： H03H9/02929 ,  H03H3/10 ,  H03H9/02559 ,  H03H9/14538 ,  Y10T29/42 ,  Y10T29/49016 ,  Y10T29/4913 ,  Y10T29/49135 ,  Y10T29/49155

摘要： In a manufacturing method for a SAW apparatus a first insulating layer is formed on the entire surface of a piezoelectric LiTaO3 substrate. By using a resist pattern used for forming an IDT electrode, the first insulating layer in which the IDT electrode is to be formed is removed. An electrode film made of a metal having a density higher than Al or an alloy primarily including such a metal is disposed in the area in which the first insulating layer is removed so as to form the IDT electrode. The resist pattern remaining on the first insulating layer is removed. A second insulating layer is formed to cover the first insulating layer and the IDT electrode.

摘要翻译： 在SAW器件的制造方法中，在压电LiTaO 3衬底的整个表面上形成第一绝缘层。 通过使用用于形成IDT电极的抗蚀剂图案，去除其中将形成IDT电极的第一绝缘层。 在除去第一绝缘层的区域中设置由密度高于Al的金属或主要包含金属的合金制成的电极膜，以形成IDT电极。 去除残留在第一绝缘层上的抗蚀剂图案。 形成第二绝缘层以覆盖第一绝缘层和IDT电极。

公开(公告)号：US20060290233A1

公开(公告)日：2006-12-28

申请号：US11469505

申请日：2006-09-01

申请人： Kenji NISHIYAMA ,  Eiichi TAKATA ,  Takeshi NAKAO ,  Michio KADOTA

发明人： Kenji NISHIYAMA ,  Eiichi TAKATA ,  Takeshi NAKAO ,  Michio KADOTA

IPC分类号： H03H9/25

CPC分类号： H03H3/08 ,  H03H9/02984 ,  H03H9/14538 ,  H03H9/25

摘要： A surface acoustic wave device includes a piezoelectric substrate made of LiTaO3 or LiNbO3 having an electromechanical coefficient of about 15% or more, at least one electrode which is disposed on the piezoelectric substrate and which is a laminate film having a metal layer defining a primary metal layer primarily composed of a metal having a density higher than that of Al or an alloy of the metal and a metal layer which is laminated on the primary metal layer and which is composed of another metal, and a first SiO2 layer which is disposed in a remaining area other than that at which the at least one electrode is located and which has a thickness approximately equivalent to that of the electrode. In the surface acoustic wave device described above, the density of the electrode is at least about 1.5 times that of the first SiO2 layer. In addition, a second SiO2 layer disposed so as to cover the electrode and the first SiO2 layer and a silicon nitride compound layer disposed on the second SiO2 layer are further provided.

摘要翻译： 表面声波装置包括由机电系数为约15％以上的由LiT 3 O 3或LiNbO 3 3制成的压电基板，至少一个电极设置在 压电基板，其是具有金属层的层压膜，该金属层限定主要由密度高于Al的金属或金属和金属层的合金的主金属层构成的金属层，所述金属层与层叠在所述主金属层上的金属层的合金， 由另一种金属和第一SiO 2层构成，第一SiO 2层设置在除了至少一个电极所位于的其余区域之外的其余区域中，并且具有与电极的厚度大致相等的厚度 。 在上述表面声波装置中，电极的密度为第一SiO 2层的密度的至少约1.5倍。 此外，设置成覆盖电极和第一SiO 2层的第二SiO 2层和设置在第二SiO 2层上的氮化硅化合物层 进一步提供层。

公开(公告)号：US20120194032A1

公开(公告)日：2012-08-02

申请号：US13442899

申请日：2012-04-10

申请人： Michio KADOTA

发明人： Michio KADOTA

IPC分类号： H01L41/04 ,  H01L41/18

CPC分类号： H03H9/02559 ,  H03H9/02574

摘要： An inexpensive surface acoustic wave device that increases an acoustic velocity of a surface acoustic wave and an electromechanical coupling coefficient includes a piezoelectric substrate in which a LiNbO3 single-crystal plate having Euler angles (0°, 67° to 160°, −5° to +5°) or (90°, 51° to 133°, −5° to +5°) is provided on a high acoustic-velocity substrate in which an acoustic velocity of a transverse wave is in a range of about 5400 m/sec to about 8660 m/sec or lower, and an electrode provided on the piezoelectric substrate and made of metal.

摘要翻译： 提高表面声波的声速和机电耦合系数的廉价的表面声波装置包括压电基板，其中具有欧拉角（0°，67°至160°，-5°至 + 5°）或（90°，51°〜133°，-5°〜+ 5°）设置在高音速基板上，其中横波的声速在约5400m / sec至约8660m / sec或更低，以及设置在压电基板上并由金属制成的电极。

公开(公告)号：US20110133599A1

公开(公告)日：2011-06-09

申请号：US13020064

申请日：2011-02-03

申请人： Shigeo ITO ,  Michio KADOTA ,  Yoshihiro ITO ,  Yuri HOSHINO

发明人： Shigeo ITO ,  Michio KADOTA ,  Yoshihiro ITO ,  Yuri HOSHINO

IPC分类号： H01L41/00

CPC分类号： H01L41/1132 ,  G01N29/022 ,  G01N29/036 ,  G01N29/2462 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A surface acoustic wave sensor is capable of detecting a specific detection object with high accuracy and is excellent in economy. The surface acoustic wave sensor includes a piezoelectric substrate and a comb shaped electrode disposed on the piezoelectric substrate to detect a specific detection object on the basis of a change in output signal. At least a portion of the comb shaped electrode is electrically conductive and is made of a sensitive material which responds to the above-described specific detection object.

摘要翻译： 表面声波传感器能够高精度地检测特定的检测对象，经济性优异。 表面声波传感器包括压电基板和设置在压电基板上的梳状电极，以基于输出信号的变化来检测特定的检测对象。 梳状电极的至少一部分是导电的，并且由对上述特定检测对象作出响应的敏感材料制成。

公开(公告)号：US20100072856A1

公开(公告)日：2010-03-25

申请号：US12629924

申请日：2009-12-03

申请人： Michio KADOTA ,  Takeshi NAKAO

发明人： Michio KADOTA ,  Takeshi NAKAO

IPC分类号： H01L41/047

CPC分类号： H03H9/02834 ,  H03H9/02559 ,  H03H9/02653

摘要： A surface acoustic wave device includes a LiTaO3 substrate, and an IDT having a high reflection coefficient, which has a relatively high electromechanical coupling coefficient k2, and which can obtain superior resonance characteristics and/or filter characteristics. In a surface acoustic wave device in which a plurality of grooves is provided in an upper surface of a LiTaO3 substrate and an IDT having a plurality of electrode fingers made of a metal filled in the plurality of grooves, the following equation is satisfied:(ρ3×C44)1/2>1.95×1011, where ρ represents the density of the metal defining the IDT, and C44 represents the stiffness thereof.

摘要翻译： 表面声波装置包括LiTaO 3衬底和具有高反射系数的IDT，其具有相对较高的机电耦合系数k2，并且其可以获得优异的谐振特性和/或滤波器特性。 在其中在LiTaO 3基板的上表面设置有多个槽的ID声表面波装置和具有由填充在多个槽中的金属制成的多个电极指的IDT，满足以下等式：（＆rgr ; 3×C44）1/2> 1.95×1011，其中＆rgr; 表示限定IDT的金属的密度，C44表示其刚度。

公开(公告)号：US20080160178A1

公开(公告)日：2008-07-03

申请号：US11960074

申请日：2007-12-19

申请人： Kenji NISHIYAMA ,  Eiichi TAKATA ,  Takeshi NAKAO ,  Michio KADOTA

发明人： Kenji NISHIYAMA ,  Eiichi TAKATA ,  Takeshi NAKAO ,  Michio KADOTA

IPC分类号： H01L41/24 ,  B05D5/12

CPC分类号： H03H3/08 ,  H03H9/02984 ,  H03H9/14538 ,  H03H9/25

摘要： A surface acoustic wave device includes a piezoelectric substrate made of LiTaO3 or LiNbO3 having an electromechanical coefficient of about 15% or more, at least one electrode which is disposed on the piezoelectric substrate and which is a laminate film having a metal layer defining a primary metal layer primarily composed of a metal having a density higher than that of Al or an alloy of the metal and a metal layer which is laminated on the primary metal layer and which is composed of another metal, and a first SiO2 layer which is disposed in a remaining area other than that at which the at least one electrode is located and which has a thickness approximately equivalent to that of the electrode. In the surface acoustic wave device described above, the density of the electrode is at least about 1.5 times that of the first SiO2 layer. In addition, a second SiO2 layer disposed so as to cover the electrode and the first SiO2 layer and a silicon nitride compound layer disposed on the second SiO2 layer are further provided.

摘要翻译： 表面声波装置包括由机电系数为约15％以上的由LiT 3 O 3或LiNbO 3 3制成的压电基板，至少一个电极设置在 压电基板，其是具有金属层的层压膜，该金属层限定主要由密度高于Al的金属或金属和金属层的合金的主金属层构成的金属层，所述金属层与层叠在所述主金属层上的金属层的合金， 由另一种金属和第一SiO 2层构成，第一SiO 2层设置在除了至少一个电极所位于的其余区域之外的其余区域中，并且具有与电极的厚度大致相等的厚度 。 在上述表面声波装置中，电极的密度为第一SiO 2层的密度的至少约1.5倍。 此外，设置成覆盖电极和第一SiO 2层的第二SiO 2层和设置在第二SiO 2层上的氮化硅化合物层 进一步提供层。

公开(公告)号：US20070108868A1

公开(公告)日：2007-05-17

申请号：US11623506

申请日：2007-01-16

申请人： Hajime KANDO ,  Daisuke YAMAMOTO ,  Michio KADOTA

发明人： Hajime KANDO ,  Daisuke YAMAMOTO ,  Michio KADOTA

IPC分类号： H03H9/25

CPC分类号： H03H9/02834 ,  H03H9/02559

摘要： A surface acoustic wave device includes a LiNbO3 substrate with a Euler angle in an area defined by a rectangle having four corners with coordinates (1) (0°, 7°, 101°), (2) (0°, 23°, 79°), (3) (0°, 23°, 79°), and (4) (0°, 7°, 79°), for example, and an electrode film made of Au, wherein surface acoustic waves including a longitudinal wave component as a main component are propagated thereon. The surface acoustic wave device uses longitudinal surface acoustic waves having a phase speed greater than with the “slow transverse wave”, and has a great electromechanical coupling coefficient and small propagation loss, and is suitable for handling high-frequency signals.

摘要翻译： 表面声波装置包括在由具有坐标（1）（0°，7°，101°），（2）的四个角的矩形限定的区域中具有欧拉角的LiNbO 3 3衬底， （0°，23°，79°），（3）（0°，23°，79°）和（4）（0°，7°，79°） 其中包括纵波成分作为主要成分的表面声波在其上传播。 表面声波装置使用相位速度大于“慢横波”的纵波表面波，具有很大的机电耦合系数和较小的传播损耗，适用于处理高频信号。

公开(公告)号：US20100219911A1

公开(公告)日：2010-09-02

申请号：US12781050

申请日：2010-05-17

申请人： Shunsuke KIDO ,  Takeshi NAKAO ,  Yasuharu NAKAI ,  Kenji NISHIYAMA ,  Michio KADOTA

发明人： Shunsuke KIDO ,  Takeshi NAKAO ,  Yasuharu NAKAI ,  Kenji NISHIYAMA ,  Michio KADOTA

IPC分类号： H03H9/15

CPC分类号： H03H9/02834 ,  H03H3/10 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49165

摘要： A surface acoustic wave device includes a piezoelectric substrate, at least one interdigital transducer (IDT) electrode provided on the piezoelectric substrate, and an insulator layer to improve a temperature characteristic arranged so as to cover the IDT electrode. When a surface of the insulator layer is classified into a first surface region under which the IDT electrode is positioned and a second surface region under which no IDT electrode is positioned, the surface of the insulator layer in at least one portion of the second surface region is higher than the surface of the insulator layer from the piezoelectric substrate in at least one portion of the first surface region by at least about 0.001λ, where the wavelength of an acoustic wave is λ.

公开(公告)号：US20090061529A1

公开(公告)日：2009-03-05

申请号：US12273571

申请日：2008-11-19

申请人： Kenjiro OKAGUCHI ,  Michio KADOTA

发明人： Kenjiro OKAGUCHI ,  Michio KADOTA

IPC分类号： G01N29/036 ,  B01J19/10

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/30 ,  G01N29/32 ,  G01N29/4427 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A method for detecting a substance in a liquid with high accuracy and high sensitivity includes recording frequency drifts of output frequencies of oscillator circuit outputs of m sensing oscillator circuits respectively including sensing SAW elements and frequency drifts of output frequencies of oscillator circuit outputs of n reference oscillator circuits respectively including reference SAW elements; determining at least one of the sensing oscillator circuits whose frequency drifts fall within a predetermined range and at least one of the reference oscillator circuits whose frequency drifts fall within the predetermined range to be acceptable; selecting at least one of the sensing oscillator circuits from among the acceptable sensing oscillator circuits and at least one of the reference oscillator circuits from among the acceptable reference oscillator circuits; and comparing an oscillator circuit output of the selected at least one of sensing oscillator circuits with an oscillator circuit output of the selected at least one of reference oscillator circuits to thereby detect a detection target substance.

摘要翻译： 用于以高精度和高灵敏度检测液体中的物质的方法包括分别包括检测SAW元件的m个感测振荡器电路的振荡器电路输出的输出频率的频率漂移以及n个参考振荡器的振荡器电路输出的输出频率的频率漂移 分别包括参考SAW元件的电路; 确定其频率漂移落在预定范围内的感测振荡器电路中的至少一个以及其频率漂移落在预定范围内的可接受的参考振荡器电路中的至少一个; 从可接受的感测振荡器电路和可接受的参考振荡器电路中的至少一个参考振荡器电路中选择感测振荡器电路中的至少一个; 以及将所选择的感测振荡器电路中的至少一个选择的振荡器电路输出与所选择的至少一个参考振荡器电路的振荡器电路输出进行比较，从而检测检测目标物质。

公开(公告)号：US20090060790A1

公开(公告)日：2009-03-05

申请号：US12273569

申请日：2008-11-19

申请人： Kenjiro OKAGUCHI ,  Takuo HADA ,  Michio KADOTA

发明人： Kenjiro OKAGUCHI ,  Takuo HADA ,  Michio KADOTA

IPC分类号： B01J19/00

CPC分类号： G01N29/022 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

摘要： A sensor for detecting a substance in liquid includes a sensing circuit including a sensing surface acoustic wave (SAW) element in which a reaction film to react with a substance in liquid, a reference circuit including a reference SAW element including an IDT and not including a reaction film, a first signal source driving the sensing circuit, a second signal source driving the reference circuit and being independent of the first signal source, and a differential circuit arranged to output a differential output between an output of the sensing circuit and an output of the reference circuit. The frequency of a first frequency signal output from the first signal source is different from the frequency of a second frequency signal output from the second signal source, thereby making a driving frequency for the sensing SAW element and a driving frequency for the reference SAW element substantially the same as or different from one another.

摘要翻译： 用于检测液体中的物质的传感器包括感测电路，其包括感测声表面波（SAW）元件，其中反应膜与液体中的物质反应，参考电路包括包括IDT的参考SAW元件，并且不包括 反应膜，驱动感测电路的第一信号源，驱动参考电路并独立于第一信号源的第二信号源，以及差分电路，布置成在感测电路的输出和输出之间输出差分输出 参考电路。 从第一信号源输出的第一频率信号的频率与从第二信号源输出的第二频率信号的频率不同，从而使感测用SAW元件的驱动频率和基准SAW元件的驱动频率基本上 彼此相同或不同。