公开(公告)号：US20090113997A1

公开(公告)日：2009-05-07

申请号：US12273657

申请日：2008-11-19

Applicant: Kenjiro OKAGUCHI ,  Takuo HADA ,  Michio KADOTA

Inventor： Kenjiro OKAGUCHI ,  Takuo HADA ,  Michio KADOTA

IPC: G01N29/02

CPC classification number: G01N29/022 ,  G01N2291/014 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423 ,  G01N2291/0425

Abstract: A sensor for detecting a substance in liquid includes a sensing oscillation circuit and a reference oscillation circuit. The sensing oscillation circuit includes a sensing SAW element in which a reaction film arranged so as to cover at least one IDT and to react with a substance in liquid is disposed and a first amplifier circuit. The reference oscillation circuit includes a reference SAW element and a second amplifier circuit. The reference SAW element includes at least one IDT and no reaction film. The oscillation frequency of the sensing oscillation circuit and the oscillation frequency of the reference oscillation circuit are separated by at least about 200×k2 (ppm), where k2 (%) is the electromechanical coupling coefficient of a piezoelectric substrate used in each of the sensing SAW element and the reference SAW element.

Abstract translation: 用于检测液体中的物质的传感器包括感测振荡电路和参考振荡电路。 感测振荡电路包括感测SAW元件，其中布置成覆盖至少一个IDT并与液体中的物质反应的反应膜和第一放大器电路。 参考振荡电路包括参考SAW元件和第二放大器电路。 参考SAW元件包括至少一个IDT并且没有反应膜。 感测振荡电路的振荡频率和参考振荡电路的振荡频率分开至少约200xk2（ppm），其中k2（％）是在每个感测SAW元件中使用的压电基板的机电耦合系数 和参考SAW元件。

公开(公告)号：US20090060790A1

公开(公告)日：2009-03-05

申请号：US12273569

申请日：2008-11-19

Applicant: Kenjiro OKAGUCHI ,  Takuo HADA ,  Michio KADOTA

Inventor： Kenjiro OKAGUCHI ,  Takuo HADA ,  Michio KADOTA

IPC: B01J19/00

CPC classification number: G01N29/022 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

Abstract: A sensor for detecting a substance in liquid includes a sensing circuit including a sensing surface acoustic wave (SAW) element in which a reaction film to react with a substance in liquid, a reference circuit including a reference SAW element including an IDT and not including a reaction film, a first signal source driving the sensing circuit, a second signal source driving the reference circuit and being independent of the first signal source, and a differential circuit arranged to output a differential output between an output of the sensing circuit and an output of the reference circuit. The frequency of a first frequency signal output from the first signal source is different from the frequency of a second frequency signal output from the second signal source, thereby making a driving frequency for the sensing SAW element and a driving frequency for the reference SAW element substantially the same as or different from one another.

Abstract translation: 用于检测液体中的物质的传感器包括感测电路，其包括感测声表面波（SAW）元件，其中反应膜与液体中的物质反应，参考电路包括包括IDT的参考SAW元件，并且不包括 反应膜，驱动感测电路的第一信号源，驱动参考电路并独立于第一信号源的第二信号源，以及差分电路，布置成在感测电路的输出和输出之间输出差分输出 参考电路。 从第一信号源输出的第一频率信号的频率与从第二信号源输出的第二频率信号的频率不同，从而使感测用SAW元件的驱动频率和基准SAW元件的驱动频率基本上 彼此相同或不同。

公开(公告)号：US20090272193A1

公开(公告)日：2009-11-05

申请号：US12505571

申请日：2009-07-20

Applicant: Kenjiro OKAGUCHI ,  Michio KADOTA ,  Koji FUJIMOTO

Inventor： Kenjiro OKAGUCHI ,  Michio KADOTA ,  Koji FUJIMOTO

IPC: G01N29/036 ,  H01L41/04

CPC classification number: G01N29/022 ,  G01N5/02 ,  G01N29/036 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

Abstract: A surface acoustic wave sensor detects a mass load on a resonator-type surface acoustic wave filter on the basis of a change in frequency and includes an IDT electrode arranged on a piezoelectric substrate to excite surface waves, an insulating film arranged so as to cover the IDT electrode, and a reaction film which is disposed on the insulating film and which reacts with a target substance to be detected or a binding substance that binds to a target substance to be detected. The reaction film is composed of a metal or a metal oxide.

Abstract translation: 表面声波传感器基于频率变化来检测谐振器型表面声波滤波器的质量负载，并且包括布置在压电基板上以激发表面波的IDT电极，布置成覆盖 IDT电极和设置在绝缘膜上并与待检测的目标物质或与要检测的目标物质结合的结合物质的反应膜。 反应膜由金属或金属氧化物构成。

公开(公告)号：US20090061529A1

公开(公告)日：2009-03-05

申请号：US12273571

申请日：2008-11-19

Applicant: Kenjiro OKAGUCHI ,  Michio KADOTA

Inventor： Kenjiro OKAGUCHI ,  Michio KADOTA

IPC: G01N29/036 ,  B01J19/10

CPC classification number: G01N29/022 ,  G01N29/036 ,  G01N29/30 ,  G01N29/32 ,  G01N29/4427 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0423

Abstract: A method for detecting a substance in a liquid with high accuracy and high sensitivity includes recording frequency drifts of output frequencies of oscillator circuit outputs of m sensing oscillator circuits respectively including sensing SAW elements and frequency drifts of output frequencies of oscillator circuit outputs of n reference oscillator circuits respectively including reference SAW elements; determining at least one of the sensing oscillator circuits whose frequency drifts fall within a predetermined range and at least one of the reference oscillator circuits whose frequency drifts fall within the predetermined range to be acceptable; selecting at least one of the sensing oscillator circuits from among the acceptable sensing oscillator circuits and at least one of the reference oscillator circuits from among the acceptable reference oscillator circuits; and comparing an oscillator circuit output of the selected at least one of sensing oscillator circuits with an oscillator circuit output of the selected at least one of reference oscillator circuits to thereby detect a detection target substance.

Abstract translation: 用于以高精度和高灵敏度检测液体中的物质的方法包括分别包括检测SAW元件的m个感测振荡器电路的振荡器电路输出的输出频率的频率漂移以及n个参考振荡器的振荡器电路输出的输出频率的频率漂移 分别包括参考SAW元件的电路; 确定其频率漂移落在预定范围内的感测振荡器电路中的至少一个以及其频率漂移落在预定范围内的可接受的参考振荡器电路中的至少一个; 从可接受的感测振荡器电路和可接受的参考振荡器电路中的至少一个参考振荡器电路中选择感测振荡器电路中的至少一个; 以及将所选择的感测振荡器电路中的至少一个选择的振荡器电路输出与所选择的至少一个参考振荡器电路的振荡器电路输出进行比较，从而检测检测目标物质。

公开(公告)号：US20110199169A1

公开(公告)日：2011-08-18

申请号：US13096026

申请日：2011-04-28

Applicant: Michio KADOTA

Inventor： Michio KADOTA

IPC: H03H9/25

CPC classification number: H03H9/02834 ,  H03H9/02653 ,  H03H9/25 ,  H03H9/6403 ,  H03H9/6483

Abstract: A tunable filter includes a surface acoustic wave resonator, in which an IDT electrode is defined by an electrode material provided in a recess in an upper surface of a piezoelectric substrate made of LiNbO3 or LiTaO3, and a ZnO film is arranged to cover the upper surface of the piezoelectric substrate, and variable capacitors connected with the surface acoustic wave resonator.

Abstract translation: 可调滤波器包括表面声波谐振器，其中IDT电极由设置在由LiNbO 3或LiTaO 3制成的压电基板的上表面的凹部中的电极材料限定，并且ZnO膜被布置成覆盖上表面 的压电基板和与表面声波谐振器连接的可变电容器。

公开(公告)号：US20090320574A1

公开(公告)日：2009-12-31

申请号：US12555894

申请日：2009-09-09

Applicant: Hajime YAMADA ,  Naoko AIZAWA ,  Yoshihiro KOSHIDO ,  Koji FUJIMOTO ,  Toru YABE ,  Michio KADOTA

Inventor： Hajime YAMADA ,  Naoko AIZAWA ,  Yoshihiro KOSHIDO ,  Koji FUJIMOTO ,  Toru YABE ,  Michio KADOTA

IPC: G01N29/02

CPC classification number: G01N29/022 ,  G01N29/222 ,  G01N2291/022 ,  G01N2291/0423

Abstract: An in-liquid-substance detection sensor that achieves size reduction and detection accuracy improvement includes a piezoelectric substrate, at least two SAW devices provided on one major surface of the piezoelectric substrate and each having at least one IDT electrode defining a sensing portion, outer electrodes provided on the other major surface of the piezoelectric substrate and electrically connected to the SAW devices through vias extending through the piezoelectric substrate, a channel-defining member provided on the one major surface of the piezoelectric substrate so as to surround the SAW devices and a region connecting the SAW devices to each other, thereby defining sidewalls of a channel, and a protective member bonded to the one major surface of the piezoelectric substrate with the channel-defining member interposed therebetween, thereby sealing the channel, the protective member having at least two through holes communicating with the channel.

Abstract translation: 实现尺寸减小和检测精度提高的液体内物质检测传感器包括压电基板，设置在压电基板的一个主表面上的至少两个SAW器件，每个具有限定感测部分的至少一个IDT电极，外部电极 设置在压电基板的另一个主表面上，并且通过延伸穿过压电基板的通孔电连接到SAW器件，设置在压电基板的一个主表面上以便包围SAW器件的通道限定元件和区域 将所述SAW器件彼此连接，由此限定通道的侧壁，以及保护构件，其与所述压电基板的所述一个主表面接合，并且所述通道限定构件插入其间，从而密封所述通道，所述保护构件具有至少两个 通道与通道相通。

公开(公告)号：US20090096320A1

公开(公告)日：2009-04-16

申请号：US12341259

申请日：2008-12-22

Applicant: Mari YAOI ,  Tetsuya KIMURA ,  Michio KADOTA

Inventor： Mari YAOI ,  Tetsuya KIMURA ,  Michio KADOTA

IPC: H01L41/047

CPC classification number: H03H3/08 ,  H03H9/02559

Abstract: A surface acoustic wave device includes a LiNbO3 substrate having a plurality of grooves formed in the upper surface thereof, an IDT electrode formed by filling the grooves with a metal, and a SiO2 layer arranged to cover an upper surface of the LiNbO3 substrate and the IDT electrode and having a substantially flat surface. The surface acoustic wave device uses a response of a Rayleigh wave. The LiNbO3 substrate has Euler angles in the range of (0°±5°, 180° to 247°, 0°±5°).

Abstract translation: 表面声波装置包括：LiNbO 3基板，其上表面具有多个槽，通过用金属填充槽形成的IDT电极和覆盖LiNbO 3基板的上表面的IDT和IDT 电极并具有基本平坦的表面。 表面声波装置使用瑞利波的响应。 LiNbO3基板在（0°±5°，180°至247°，0°±5°）的范围内具有欧拉角。

公开(公告)号：US20080303379A1

公开(公告)日：2008-12-11

申请号：US12190618

申请日：2008-08-13

Applicant: Yasuharu NAKAI ,  Kenji NISHIYAMA ,  Takeshi NAKAO ,  Masanori KATO ,  Michio KADOTA

Inventor： Yasuharu NAKAI ,  Kenji NISHIYAMA ,  Takeshi NAKAO ,  Masanori KATO ,  Michio KADOTA

IPC: H01L41/107

CPC classification number: H03H9/02559 ,  H03H9/0222

Abstract: A surface acoustic wave device includes a LiNbO3 substrate having Euler angles (0°±5°, θ, 0°±10°), electrodes that are disposed on the LiNbO3 substrate, are primarily composed of Cu, and include an IDT electrode, a first silicon oxide film having substantially the same thickness as the electrodes and disposed in an area other than an area on which the electrodes including the IDT electrode are disposed, and a second silicon oxide film disposed on the electrodes and the first silicon oxide film, wherein the Euler angle θ and the normalized thickness H of the second silicon oxide film are selected to satisfy the formula 1 or 2: −50×H2−3.5×H+38.275≦{θ}≦10H+35 (wherein H 0.25)  Formula 2.

Abstract translation: 表面声波装置包括具有欧拉角（0°±5°，θ，0°±10°）的LiNbO 3基板，设置在LiNbO 3基板上的电极主要由Cu组成，并且包括IDT电极， 第一氧化硅膜具有与电极基本相同的厚度并且设置在除了包括IDT电极的电极的区域之外的区域中，以及设置在电极和第一氧化硅膜上的第二氧化硅膜，其中 选择第二氧化硅膜的欧拉角θ和标准化厚度H以满足公式1或2：<？in-line-formula description =“In-line formula”end =“lead”？> - 50xH2- 3.5xH + 38.275 <=θθ<= 10H + 35（其中H <0.25）式1 <？在线公式描述=“在线公式”end =“tail”？> <？in-line- 公式描述=“在线公式”end =“lead”？> - 50xH2-3.5xH + 38.275 <= {θ} = 37.5（其中H> 0.25）公式2 <？in-line-formula description =“ 一致 公式“end =”tail“？>

公开(公告)号：US20080296999A1

公开(公告)日：2008-12-04

申请号：US12191451

申请日：2008-08-14

Applicant: Shunsuke KIDO ,  Takeshi NAKAO ,  Yasuharu NAKAI ,  Kenji NISHIYAMA ,  Michio KADOTA

Inventor： Shunsuke KIDO ,  Takeshi NAKAO ,  Yasuharu NAKAI ,  Kenji NISHIYAMA ,  Michio KADOTA

IPC: H01L41/04 ,  H01L41/22

CPC classification number: H03H9/02834 ,  H03H3/10 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49165

Abstract: A surface acoustic wave device includes a piezoelectric substrate, at least one interdigital transducer (IDT) electrode provided on the piezoelectric substrate, and an insulator layer to improve a temperature characteristic arranged so as to cover the IDT electrode. When a surface of the insulator layer is classified into a first surface region under which the IDT electrode is positioned and a second surface region under which no IDT electrode is positioned, the surface of the insulator layer in at least one portion of the second surface region is higher than the surface of the insulator layer from the piezoelectric substrate in at least one portion of the first surface region by at least about 0.001λ, where the wavelength of an acoustic wave is λ.

Abstract translation: 表面声波装置包括压电基板，设置在压电基板上的至少一个叉指式换能器（IDT）电极和用于改善覆盖IDT电极的温度特性的绝缘体层。 当将绝缘体层的表面划分为IDT电极所在的第一表面区域和没有IDT电极的第二表面区域时，在第二表面区域的至少一部分中的绝缘体层的表面 在比第一表面区域的至少一部分中的压电衬底的绝缘体层的表面高至少约0.001λ，其中声波的波长为λ。

公开(公告)号：US20070284965A1

公开(公告)日：2007-12-13

申请号：US11835184

申请日：2007-08-07

Applicant: Michio KADOTA ,  Hajime KANDO

Inventor： Michio KADOTA ,  Hajime KANDO

IPC: H01L41/083

CPC classification number: H03H9/0222 ,  H03H3/04 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: In a method for producing a boundary acoustic wave device that includes a first medium, a second medium, and a third medium laminated in that order, and electrodes disposed at the interface between the first medium and the second medium, the method includes the steps of preparing a laminate including the first medium, the second medium, and the electrodes disposed at the interface between the first medium and the second medium, adjusting the thickness of the second medium after the step of preparing the laminate to regulate a frequency or the acoustic velocity of a surface acoustic wave, a pseudo-boundary acoustic wave, or a boundary acoustic wave, after the adjusting step, forming the third medium different from the second medium in terms of the acoustic velocity with which the boundary acoustic wave propagates therethrough and/or in terms of material.