公开(公告)号：US20110283794A1

公开(公告)日：2011-11-24

申请号：US13120276

申请日：2009-08-05

Applicant: Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56 ,  B23P11/00

CPC classification number: G01C19/56 ,  Y10T29/49826

Abstract: A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

Abstract translation: 一种用于旋转速率传感器装置的联接结构，具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架，所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件，每个角度元件具有至少一个第一分支和一个第二分支，并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置，旋转速率传感器装置，用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。

公开(公告)号：US20100186505A1

公开(公告)日：2010-07-29

申请号：US12637171

申请日：2009-12-14

Applicant: Robert SATTLER ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert SATTLER ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable, by way of excitation means, to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.

Abstract translation: 旋转速率传感器包括具有主延伸面的基板和可相对于基板移动的科里奥利斯元件，科里奥利元件通过激励装置被设置为可激发的，以执行基本上平行于主延伸平面的振荡偏转 ; 并且科里奥利元素进一步通过作用在科里奥利元件上的科里奥利力来提供偏转，以执行垂直于主延伸平面的可检测科里奥利偏转; 并且所述旋转速率传感器还包括至少一个补偿电极，所述至少一个补偿电极用于作为所述科里奥利元件的悬浮力的至少部分补偿作为所述振荡偏转的函数。

公开(公告)号：US09266720B2

公开(公告)日：2016-02-23

申请号：US14059202

申请日：2013-10-21

Applicant: Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: B81C1/00

CPC classification number: B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

Abstract: A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

Abstract translation: 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。

公开(公告)号：US08783105B2

公开(公告)日：2014-07-22

申请号：US13305292

申请日：2011-11-28

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

Abstract translation: 横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和 第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线 垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

公开(公告)号：US08607632B2

公开(公告)日：2013-12-17

申请号：US13057045

申请日：2009-08-03

Applicant: Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01P15/125 ,  G01P1/02 ,  G01C19/56

CPC classification number: G01P15/125 ,  B81B3/0086 ,  B81B2201/0235

Abstract: A micromechanical sensor having at least one movably mounted measuring element which is opposite at least one stationary electrode, the electrode being situated in a first plane, and being contacted by at least one printed conductor track which is situated in a second plane. A third plane is located between the first plane and the second plane, the third plane including an electrically conductive material.

Abstract translation: 一种微机械传感器，其具有至少一个可移动地安装的测量元件，其与至少一个固定电极相对，所述电极位于第一平面中，并且被位于第二平面中的至少一个印刷导体轨道接触。 第三平面位于第一平面和第二平面之间，第三平面包括导电材料。

公开(公告)号：US20120104978A1

公开(公告)日：2012-05-03

申请号：US13259976

申请日：2010-01-28

Applicant: Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

Inventor： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC: H02N1/00

CPC classification number: G01C19/5755

Abstract: A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

Abstract translation: 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US20110185813A1

公开(公告)日：2011-08-04

申请号：US12987732

申请日：2011-01-10

Applicant: Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.

Abstract translation: 在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构， 第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有 第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线 第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

公开(公告)号：US20110079080A1

公开(公告)日：2011-04-07

申请号：US12924756

申请日：2010-10-05

Applicant: Daniel Christoph Meisel

Inventor： Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.

Abstract translation: 微机械摆动速率传感器包括具有主平面延伸的基板和两个科里奥利元件。 第一科里奥利元件可以沿着平行于延伸主平面的第二方向被驱动到第一振动。 第二科里奥利元件可被驱动到与第一振动反平行的第二振动。 可以检测第一科里奥利元件的第一偏转和第二科里奥利元件的第二偏转，在每种情况下沿着平行于延伸的主平面并垂直于第二方向的第一方向。 微机械传感器还具有间接或直接耦合到第一科里奥利元件和第二科里奥利元件的摇杆元件，该摇臂元件具有基本上平行于第二方向的扭转轴。

公开(公告)号：US09110090B2

公开(公告)日：2015-08-18

申请号：US13635581

申请日：2011-01-19

Applicant: Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

Inventor： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

IPC: G01P15/12 ,  G01P15/09 ,  G01P15/08

CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/123

Abstract: A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

Abstract translation: 压阻微机电传感器部件包括基板，抗震块，至少一个压阻棒和测量装置。 地震质量从基板悬挂使其能够偏转。 所述至少一个压阻棒设置在所述基底和所述抗震块之间，并且当所述地震质量被偏转时，所述至少一个压阻棒经受阻力的变化。 至少一个压阻棒具有至少部分地覆盖压阻棒并延伸到衬底的区域中的横向和/或上部和/或下部导体轨道。 测量装置电连接到基板和导体轨道，并且被配置成测量电路的电阻变化，该电阻通过基板通过压阻棒和从压阻棒通过横向和/或上部和/ 或下导体轨道。

公开(公告)号：US08875574B2

公开(公告)日：2014-11-04

申请号：US13120276

申请日：2009-08-05

Applicant: Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56 ,  B23P11/00

CPC classification number: G01C19/56 ,  Y10T29/49826

Abstract: A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

Abstract translation: 一种用于旋转速率传感器装置的联接结构，具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架，所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件，每个角度元件具有至少一个第一分支和一个第二分支，并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置，旋转速率传感器装置，用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。