公开(公告)号：US07385266B2

公开(公告)日：2008-06-10

申请号：US10844883

申请日：2004-05-12

申请人： Brent M. Segal ,  Thomas Rueckes ,  Bernhard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

发明人： Brent M. Segal ,  Thomas Rueckes ,  Bernhard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

IPC分类号： H01L29/66

CPC分类号： G01N27/4146 ,  B82Y15/00 ,  G11C13/025 ,  Y10S977/902 ,  Y10S977/904 ,  Y10S977/92 ,  Y10S977/921 ,  Y10S977/922 ,  Y10S977/924 ,  Y10T29/43 ,  Y10T29/49082

摘要： Sensor platforms and methods of making them are described. A platform having a non-horizontally oriented sensor element comprising one or more nanostructures such as nanotubes is described. Under certain embodiments, a sensor element has or is made to have an affinity for an analyte. Under certain embodiments, such a sensor element comprises one or more pristine nanotubes. Under certain embodiments, the sensor element comprises derivatized or functionalized nanotubes. Under certain embodiments, a sensor is made by providing a support structure; providing one or more nanotubes on the structure to provide material for a sensor element; and providing circuitry to electrically sense the sensor element's electrical characterization. Under certain embodiments, the sensor element comprises pre-derivatized or pre-functionalized nanotubes. Under other embodiments, sensor material is derivatized or functionalized after provision on the structure or after patterning. Under certain embodiments, a large-scale array of sensor platforms includes a plurality of sensor elements.

摘要翻译： 介绍传感器平台及其制作方法。 描述了具有包括一个或多个纳米结构如纳米管的非水平定向的传感器元件的平台。 在某些实施方案中，传感器元件具有或被制成对分析物具有亲和性。 在某些实施例中，这种传感器元件包括一个或多个原始纳米管。 在某些实施方案中，传感器元件包括衍生的或功能化的纳米管。 在某些实施例中，通过提供支撑结构来制造传感器; 在所述结构上提供一个或多个纳米管以提供用于传感器元件的材料; 以及提供用于电感测传感器元件电特性的电路。 在某些实施方案中，传感器元件包括预衍生的或预功能化的纳米管。 在其它实施例中，传感器材料在结构上提供之后或在图案化之后被衍生化或功能化。 在某些实施例中，传感器平台的大规模阵列包括多个传感器元件。

公开(公告)号：US07268044B2

公开(公告)日：2007-09-11

申请号：US11541834

申请日：2006-10-02

申请人： Claude L. Bertin ,  Thomas Rueckes ,  Brent M. Segal ,  Bernhard Vogeli ,  Darren K. Brock ,  Venkatachalam C. Jaiprakash

发明人： Claude L. Bertin ,  Thomas Rueckes ,  Brent M. Segal ,  Bernhard Vogeli ,  Darren K. Brock ,  Venkatachalam C. Jaiprakash

IPC分类号： H01L21/336 ,  H01L21/8234

CPC分类号： H01L29/78 ,  B82Y10/00 ,  B82Y99/00 ,  G11C7/065 ,  G11C13/025 ,  G11C16/0416 ,  G11C17/16 ,  G11C17/165 ,  G11C23/00 ,  G11C2213/16 ,  G11C2213/17 ,  G11C2213/79 ,  H01H1/0094 ,  H01L27/10 ,  H01L27/1052 ,  H01L27/112 ,  H01L27/11206 ,  H01L27/115 ,  H01L27/286 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/42324 ,  H01L51/0048 ,  H01L51/0052 ,  H01L51/0508 ,  Y10S977/708 ,  Y10S977/724 ,  Y10S977/742 ,  Y10S977/762 ,  Y10S977/936 ,  Y10S977/938 ,  Y10S977/94 ,  Y10S977/943

摘要： Under one aspect, a field effect device includes a gate, a source, and a drain, with a conductive channel between the source and the drain; and a nanotube switch having a corresponding control terminal, said nanotube switch being positioned to control electrical conduction through said conductive channel. Under another aspect, a field effect device includes a gate having a corresponding gate terminal; a source having a corresponding source terminal; a drain having a corresponding drain terminal; a control terminal; and a nanotube switching element positioned between one of the gate, source, and drain and its corresponding terminal and switchable, in response to electrical stimuli at the control terminal and at least one of the gate, source, and drain terminals, between a first non-volatile state that enables current flow between the source and the drain and a second non-volatile state that disables current flow between the source and the drain.

公开(公告)号：US07075141B2

公开(公告)日：2006-07-11

申请号：US10811191

申请日：2004-03-26

申请人： Thomas Rueckes ,  Brent M. Segal ,  Bernard Vogeli ,  Darren K. Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

发明人： Thomas Rueckes ,  Brent M. Segal ,  Bernard Vogeli ,  Darren K. Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

IPC分类号： H01L27/10 ,  H01L29/788

CPC分类号： G11C23/00 ,  B82Y10/00 ,  G11C13/025 ,  G11C16/0416 ,  G11C2213/17 ,  H01L27/115 ,  H01L29/7881 ,  Y10S977/708 ,  Y10S977/932

摘要： A four terminal non-volatile transistor device. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and each in electrical communication with a respective terminal. A channel region of a second semiconductor type of material is disposed between the source and drain region. A floating gate structure is made of at least one of semiconductive or conductive material and is disposed over the channel region. A control gate is made of at least one of semiconductive or conductive material and is in electrical communication with a respective terminal. An electromechanically-deflectable nanotube switching element is in electrical communication with one of the floating gate structure and the control gate structure, and is positioned to be electromechanically deflectable into contact with the other of the floating gate structure and the control gate structure. When the nanotube switching element is in communication with both the control gate and the floating gate, the control gate may be used to modulate the conductivity of the channel region. The nanotube switching element may be formed from a porous fabric of a monolayer of single-walled carbon nanotubes. Under certain embodiments, the nanotube article is suspended vertically in relation to the horizontal substrate. Under certain embodiments, a release gate and release node are positioned in spaced relation to the nanotube switching element, and, in response to a signal on the release node, the release gate electromechanically deflects the nanotube switching element out of contact with the one of the control gate and floating gate. Under certain embodiments, the contact between the nanotube switching element and the one of the control gate and floating gate is a non-volatile state. Under certain embodiments, the device occupies an area of 8F2.

摘要翻译： 四端非易失性晶体管器件。 非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域，并且各自与相应的端子电连通。 第二半导体类型的材料的沟道区域设置在源区和漏区之间。 浮栅结构由半导体或导电材料中的至少一种制成，并且设置在沟道区域上。 控制门由半导体或导电材料中的至少一种制成，并与相应的端子电连通。 机电可偏转的纳米管开关元件与浮动栅极结构和控制栅极结构中的一个电连通，并且被定位成机电可偏转地与浮动栅极结构和控制栅极结构中的另一个接触。 当纳米管开关元件与控制栅极和浮置栅极两者连通时，控制栅极可用于调制沟道区的导电性。 纳米管切换元件可以由单壁碳纳米管单层的多孔织物形成。 在某些实施例中，纳米管制品相对于水平基底垂直悬挂。 在某些实施例中，释放栅极和释放节点以与纳米管开关元件隔开的关系定位，并且响应于释放节点上的信号，释放门电磁机械地使纳米管开关元件偏转与 控制门和浮动门。 在某些实施例中，纳米管开关元件与控制栅极和浮置栅极之间的接触是非易失性状态。 在某些实施例中，该装置占据8F 2的面积。

公开(公告)号：US06809368B2

公开(公告)日：2004-10-26

申请号：US09832605

申请日：2001-04-11

申请人： Rama Divakaruni ,  Thomas W. Dyer ,  Rajeev Malik ,  Jack A. Mandelman ,  Venkatachalam C. Jaiprakash

发明人： Rama Divakaruni ,  Thomas W. Dyer ,  Rajeev Malik ,  Jack A. Mandelman ,  Venkatachalam C. Jaiprakash

IPC分类号： H01L27108

CPC分类号： H01L27/10864 ,  H01L21/31612 ,  H01L21/3185 ,  H01L27/10867

摘要： A structure and method which enables the deposit of a thin nitride liner just before Trench Top Oxide TTO (High Density Plasma) HDP deposition during the formation of a vertical MOSFET DRAM cell device. This liner is subsequently removed after TTO sidewall etch. One function of this liner is to protect the collar oxide from being etched during the TTO oxide sidewall etch and generally provides lateral etch protection which is not realized in the current processing scheme. The process sequence does not rely on previously deposited films for collar protection, and decouples TTO sidewall etch protection from previous processing steps to provide additional process flexibility, such as allowing a thinner strap Cut Mask nitride and greater nitride etching during node nitride removal and buried strap nitrided interface removal. Advantageously, the presence of the nitride liner beneath the TTO reduces possibility of TTO dielectric breakdown between the gate and capacitor node electrode of the vertical MOSFET DRAM cell, while assuring strap diffusion to gate conductor overlap.

公开(公告)号：US6150231A

公开(公告)日：2000-11-21

申请号：US97784

申请日：1998-06-15

申请人： Karl Paul Muller ,  Venkatachalam C. Jaiprakash ,  Christopher J. Gould

发明人： Karl Paul Muller ,  Venkatachalam C. Jaiprakash ,  Christopher J. Gould

IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  H01L21/66 ,  H01L21/76

CPC分类号： G03F7/70633

摘要： Misalignment between two masking steps used in the manufacture of semiconductive devices in a wafer is determined by having a special alignment pattern on each of two masks used in the process and forming images of the masks on the semiconductor devices with the images of the alignment patterns being superimposed over one another to form a Moire pattern. The Moire pattern is compared with other Moire patterns known to correspond to particular amounts of misalignment of the masks to see if it corresponds to an acceptable alignment.

摘要翻译： 通过在工艺中使用的两个掩模中的每一个上具有特殊的对准图案并且在半导体器件上形成掩模的图像，其中对准图案的图像为 叠加在一起形成莫尔图案。 将莫尔图案与已知对应于掩模的特定量的未对准的其它莫尔图案进行比较，以查看它是否对应于可接受的对准。

公开(公告)号：US07780918B2

公开(公告)日：2010-08-24

申请号：US10844913

申请日：2004-05-12

申请人： Brent M. Segal ,  Thomas Rueckes ,  Bernhard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

发明人： Brent M. Segal ,  Thomas Rueckes ,  Bernhard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

IPC分类号： G01N27/00

CPC分类号： G01N27/4146 ,  B82Y15/00 ,  G11C13/025 ,  Y10S977/902 ,  Y10S977/904 ,  Y10S977/92 ,  Y10S977/921 ,  Y10S977/922 ,  Y10S977/924 ,  Y10T29/43 ,  Y10T29/49082

摘要： Sensor platforms and methods of making them are described, and include platforms having horizontally oriented sensor elements comprising nanotubes or other nanostructures, such as nanowires. Under certain embodiments, a sensor element has an affinity for an analyte. Under certain embodiments, such a sensor element comprises one or more pristine nanotubes, and, under certain embodiments, it comprises derivatized or functionalized nanotubes. Under certain embodiments, a sensor is made by providing a support structure; providing a collection of nanotubes on the structure; defining a pattern within the nanotube collection; removing part of the collection so that a patterned collection remains to form a sensor element; and providing circuitry to electrically sense the sensor's electrical characterization. Under certain embodiments, the sensor element comprises pre-derivatized or pre-functionalized nanotubes. Under certain embodiments, sensor material is derivatized or functionalized after provision on the structure or after patterning. Under certain embodiments, a large-scale array includes multiple sensors.

摘要翻译： 描述了传感器平台及其制造方法，并且包括具有包括纳米管或其他纳米结构（例如纳米线）的水平定向的传感器元件的平台。 在某些实施方案中，传感器元件对分析物具有亲和力。 在某些实施方案中，这种传感器元件包括一个或多个原始纳米管，并且在某些实施方案中，其包含衍生化或官能化的纳米管。 在某些实施例中，通过提供支撑结构来制造传感器; 在结构上提供纳米管的集合; 定义纳米管集合内的图案; 去除部分集合，使得图案化的集合保持形成传感器元件; 以及提供用于电感测传感器电特性的电路。 在某些实施方案中，传感器元件包括预衍生的或预功能化的纳米管。 在某些实施方案中，传感器材料在提供在结构上或在图案化之后被衍生化或官能化。 在某些实施例中，大规模阵列包括多个传感器。

公开(公告)号：US20100012927A1

公开(公告)日：2010-01-21

申请号：US11526364

申请日：2006-09-25

申请人： Venkatachalam C. Jaiprakash ,  Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

发明人： Venkatachalam C. Jaiprakash ,  Jonathan W. Ward ,  Thomas Rueckes ,  Brent M. Segal

IPC分类号： H01L29/84 ,  H01L51/30

CPC分类号： G11C23/00 ,  B82Y10/00 ,  G11C13/025 ,  G11C2213/16 ,  G11C2213/81 ,  H01H1/0094 ,  H01L21/76838 ,  H01L27/10 ,  Y10S977/724 ,  Y10S977/742 ,  Y10S977/796 ,  Y10S977/856 ,  Y10S977/888 ,  Y10S977/943 ,  Y10T428/24893 ,  Y10T428/24917

摘要： Electro-mechanical switches and memory cells using vertically-oriented nanofabric articles and methods of making the same. Under one aspect, a nanotube device includes a substantially horizontal substrate having a vertically oriented feature; and a nanotube film substantially conforming to a horizontal feature of the substrate and also to at least the vertically oriented feature. Under another aspect, an electromechanical device includes a structure having a major horizontal surface and a channel formed therein, the channel having first and second wall electrodes defining at least a portion of first and second vertical walls of the channel; first and second nanotube articles vertically suspended in the channel and in spaced relation to a corresponding first and second wall electrode, and electromechanically deflectable in a horizontal direction toward or away from the corresponding first and second wall electrode in response to electrical stimulation.

摘要翻译： 使用垂直取向的纳米制品的机电开关和存储单元及其制造方法。 在一个方面，纳米管装置包括具有垂直取向特征的基本水平的基底; 以及基本上符合衬底的水平特征以及至少垂直取向的特征的纳米管膜。 在另一方面，机电装置包括具有主要水平表面和形成在其中的通道的结构，所述通道具有限定通道的第一和第二垂直壁的至少一部分的第一和第二壁电极; 垂直悬挂在通道中并且与对应的第一和第二壁电极间隔开的第一和第二纳米管制品，并且响应于电刺激而在水平方向上以机电方式偏向或远离对应的第一和第二壁电极。

公开(公告)号：US20080164541A1

公开(公告)日：2008-07-10

申请号：US11827393

申请日：2007-07-11

申请人： Brent M. Segal ,  Thomas Rueckes ,  Bernhard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

发明人： Brent M. Segal ,  Thomas Rueckes ,  Bernhard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

IPC分类号： H01L29/00

CPC分类号： G01N27/4146 ,  B82Y15/00 ,  G11C13/025 ,  Y10S977/902 ,  Y10S977/904 ,  Y10S977/92 ,  Y10S977/921 ,  Y10S977/922 ,  Y10S977/924 ,  Y10T29/43 ,  Y10T29/49082

摘要： Sensor platforms and methods of making them are described. A platform having a non-horizontally oriented sensor element comprising one or more nanostructures such as nanotubes is described. Under certain embodiments, a sensor element has or is made to have an affinity for an analyte. Under certain embodiments, such a sensor element comprises one or more pristine nanotubes. Under certain embodiments, the sensor element comprises derivatized or functionalized nanotubes. Under certain embodiments, a sensor is made by providing a support structure; providing one or more nanotubes on the structure to provide material for a sensor element; and providing circuitry to electrically sense the sensor element's electrical characterization. Under certain embodiments, the sensor element comprises pre-derivatized or pre-functionalized nanotubes. Under other embodiments, sensor material is derivatized or functionalized after provision on the structure or after patterning. Under certain embodiments, a large-scale array of sensor platforms includes a plurality of sensor elements.

公开(公告)号：US07294877B2

公开(公告)日：2007-11-13

申请号：US10811373

申请日：2004-03-26

申请人： Thomas Rueckes ,  Brent M. Segal ,  Bernard Vogeli ,  Darren K. Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

发明人： Thomas Rueckes ,  Brent M. Segal ,  Bernard Vogeli ,  Darren K. Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

IPC分类号： H01L51/30

CPC分类号： H01L51/055 ,  B82Y10/00 ,  G11C13/025 ,  G11C16/0416 ,  G11C23/00 ,  G11C2213/17 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/42324 ,  H01L51/0048 ,  H01L51/0052

摘要： Nanotube on gate FET structures and applications of such, including n2 crossbars requiring only 2n control lines. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and a channel region of a second semiconductor type of material disposed between the source and drain region. A gate structure is made of at least one of semiconductive or conductive material and is disposed over an insulator over the channel region. A control gate is made of at least one of semiconductive or conductive material. An electromechanically-deflectable nanotube switching element is in fixed contact with one of the gate structure and the control gate structure and is not in fixed contact with the other of the gate structure and the control gate structure. The device has a network of inherent capacitances, including an inherent capacitance of an undeflected nanotube switching element in relation to the gate structure. The network is such that the nanotube switching element is deflectable into contact with the other of the gate structure and the control gate structure in response to signals being applied to the control gate and one of the source region and drain region. Certain embodiments of the device have an area of about 4 F2. Other embodiments include a release line is positioned in spaced relation to the nanotube switching element, and having a horizontal orientation that is parallel to the orientation of the source and drain diffusions. Other embodiments provide an n2 crossbar array having n2 non-volatile transistor devices, but require only 2n control lines.

摘要翻译： 纳米管栅极FET结构及其应用，包括只需要2n条控制线的n 2条交叉。 非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域以及设置在源极和漏极区域之间的第二半导体类型的材料的沟道区域。 栅极结构由半导体或导电材料中的至少一种制成，并且设置在沟道区域上方的绝缘体上。 控制门由半导体或导电材料中的至少一种制成。 机电偏转型纳米管开关元件与栅极结构和控制栅极结构中的一个固定接触，并且不与栅极结构和控制栅极结构中的另一个固定接触。 该器件具有固有电容的网络，包括相对于栅极结构的未折射的纳米管开关元件的固有电容。 网络使得纳米管开关元件响应于施加到控制栅极和源极区域和漏极区域之一的信号而偏转成与栅极结构和控制栅极结构中的另一个接触。 该装置的某些实施例具有约4F 2的面积。 其他实施例包括释放线与纳米管开关元件间隔开定位，并且具有平行于源极和漏极扩散的取向的水平取向。 其他实施例提供了具有n 2个非易失性晶体管器件的n≥2的交叉开关阵列，但是仅需要2n个控制线。

公开(公告)号：US07113426B2

公开(公告)日：2006-09-26

申请号：US10810963

申请日：2004-03-26

申请人： Thomas Rueckes ,  Brent M. Segal ,  Bernard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

发明人： Thomas Rueckes ,  Brent M. Segal ,  Bernard Vogeli ,  Darren Brock ,  Venkatachalam C. Jaiprakash ,  Claude L. Bertin

IPC分类号： G11C11/34 ,  G11C11/00

CPC分类号： G11C23/00 ,  B82Y10/00 ,  G11C13/025

摘要： Non-Volatile RAM Cell and Array using Nanotube Switch Position for Information State. A non-volatile memory array includes a plurality of memory cells, each cell receiving a bit line, word line, and release line. Each memory cell includes a cell selection transistor with first, second and third nodes. The first and second nodes are in respective electrical communication with the bit line and the word line. Each cell further includes an electromechanically deflectable switch, having a first, second and third node. The first node is in electrical communication with the release line, and a third node is in electrical communication with the third node of the cell selection transistor. The electromechanically deflectable switch includes a nanotube switching element physically positioned between the first and third nodes of the switch and in electrical communication with the second node of the switch. The second node of the switch is in communication with a reference signal. Each nanotube switching element is deflectable into contact with the third node of the switch in response to signals at the first and second node of the cell selection transistor and is releasable from such contact in response to a signal at the release line. In preferred embodiments, the cell selection transistor is a FET and the second node of the transistor is a gate of the FET.

摘要翻译： 非易失性RAM单元和阵列使用纳米管切换位置信息状态。 非易失性存储器阵列包括多个存储器单元，每个单元接收位线，字线和释放线。 每个存储单元包括具有第一，第二和第三节点的单元选择晶体管。 第一和第二节点与位线和字线分别电气通信。 每个单元还包括具有第一，第二和第三节点的机电偏转开关。 第一节点与释放线电连通，第三节点与小区选择晶体管的第三节点电通信。 机电可偏转开关包括物理地位于开关的第一和第三节点之间并与开关的第二节点电通信的纳米管开关元件。 交换机的第二个节点与参考信号通信。 每个纳米管开关元件响应于电池选择晶体管的第一和第二节点处的信号而偏转成与开关的第三节点接触，并且响应于释放线处的信号而可从该接触件释放。 在优选实施例中，电池选择晶体管是FET，晶体管的第二节点是FET的栅极。