Method of producing simox wafer
    31.
    发明申请
    Method of producing simox wafer 审中-公开
    生产simox晶圆的方法

    公开(公告)号:US20070224773A1

    公开(公告)日:2007-09-27

    申请号:US11729229

    申请日:2007-03-27

    IPC分类号: H01L21/76

    CPC分类号: H01L21/26533 H01L21/76243

    摘要: A SIMOX wafer is produced at an oxygen ion implantation step and a high-temperature annealing step, wherein an oxide film is formed on a surface of a wafer prior to the oxygen ion implantation and then the oxygen ion implantation is conducted through the oxide film.

    摘要翻译: 在氧离子注入步骤和高温退火步骤中制备SIMOX晶片,其中在氧离子注入之前在晶片的表面上形成氧化膜,然后氧离子注入通过氧化膜。

    Lubrication system and its modification method
    33.
    发明授权
    Lubrication system and its modification method 有权
    润滑系统及其修改方法

    公开(公告)号:US06845847B2

    公开(公告)日:2005-01-25

    申请号:US10354029

    申请日:2003-01-30

    CPC分类号: F01D25/16 F01D25/18 F01D25/20

    摘要: A lubrication system for a bearing of a machine. The system comprises an oil tank, and an oil supply pipe for supplying the lubricant oil from the oil tank to the bearing. The system further comprises an outlet pipe for guiding the lubricant oil from the bearing substantially vertically downward so that an outlet pipe oil level may be formed in the outlet pipe. The system further comprises an oil returning mother pipe for guiding the lubricant oil from the outlet pipe to the tank. The oil returning mother pipe includes a substantially horizontal part and a weir or a flow resistance disposed close to the tank so that substantially all portion of the substantially horizontal part may be maintained full of lubricant oil.

    摘要翻译: 一种用于机器轴承的润滑系统。 该系统包括油箱和用于从油箱向轴承供给润滑油的供油管。 该系统还包括用于从基本上垂直向下的轴承引导润滑油的出口管,使得可以在出口管中形成出口管油面。 该系统还包括用于将润滑油从出口管引导到罐的回油母管。 回油母管包括基本上水平的部分和靠近油箱设置的堰或流动阻力,使得大致水平部分的基本上所有部分可以保持充满润滑油。

    Device and method for leak location
    34.
    发明授权
    Device and method for leak location 失效
    泄漏位置的设备和方法

    公开(公告)号:US4583394A

    公开(公告)日:1986-04-22

    申请号:US638421

    申请日:1984-08-07

    IPC分类号: G01M3/20 G01M3/22

    CPC分类号: G01M3/202

    摘要: A method and apparatus are disclosed for detecting the presence of very fine leaks through the walls of an enclosure which include a sniffer nozzle (1) open to the atmosphere, a vessel (5) having molecular sieves (4) therein for adsorbing substantially all gaseous products which have entered the sniffer nozzle (1) with the exception of the probe gas which has been pressurized within the enclosure being tested, a pump system (8, 9) for creating vacuum conditions within the system, a mass spectrometer (12) for detecting the presence of the probe gas, and a capillary tube (2) interconnecting the nozzle sniffer (1) and the molecular sieve assembly whereby the probe gas draw rate, and sensitivity of the apparatus of the present invention, are significantly increased.

    摘要翻译: 公开了一种用于检测通过外壳的壁的非常细小的泄漏的存在的方法和装置,其包括向大气开放的嗅探喷嘴(1),在其中具有分子筛(4)的容器(5),用于吸收基本上所有的气体 已经进入嗅探喷嘴(1)的产品除了被测试的外壳内被加压的探针气体外,用于在系统内产生真空条件的泵系统(8,9),质谱仪(12),用于 检测探针气体的存在,以及将喷嘴嗅探器(1)和分子筛组件相互连接的毛细管(2),从而显着提高本发明装置的探针气体抽出速率和灵敏度。

    Impeller type pump having seal means and protective means
    36.
    发明授权
    Impeller type pump having seal means and protective means 失效
    叶轮式泵具有密封装置和保护装置

    公开(公告)号:US4147468A

    公开(公告)日:1979-04-03

    申请号:US845963

    申请日:1977-10-27

    摘要: An impeller type pump has a pump body defining a pump chamber therein, and an impeller disposed in the pump chamber having a center shaft. A hollow cylindrical connector is mounted in the center shaft having internal screw threads engageable with external screw threads on the end of a drive shaft for rotating the impeller. The connector is provided with thermal expansion-absorbing slits arranged in equally spaced relation along the circumference of the connector which extend lengthwise of the connector with an unslit portion left on that end of the connector which is close to the other end of the drive shaft.

    摘要翻译: 叶轮型泵具有在其中限定泵室的泵体,以及设置在具有中心轴的泵室内的叶轮。 一个中空圆柱形连接器安装在中心轴上,内部螺纹可与驱动轴端部的外螺纹接合,用于旋转叶轮。 连接器设置有沿着连接器的圆周等距间隔布置的热膨胀吸收狭缝,该连接器的长度方向以连接器的该端部上靠近驱动轴的另一端的未点亮部分延伸。

    Thread groove type vacuum pump
    39.
    发明授权
    Thread groove type vacuum pump 失效
    螺纹槽式真空泵

    公开(公告)号:US5632597A

    公开(公告)日:1997-05-27

    申请号:US623014

    申请日:1996-03-28

    IPC分类号: F04D19/04 F01D1/36

    CPC分类号: F04D19/044

    摘要: A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.

    摘要翻译: 螺旋槽型真空泵,其中转子和定子之间的间隙不受转子温度的任何影响,因此泵送性能在核聚变反应堆的等离子体燃烧期间不会劣化。 螺纹槽泵送部分形成为圆锥体,使得转子的膨胀和收缩沿着圆锥体的母线发生。 由于转子和定子之间的间隙由于不同的转子引起的转子温度变化导致的热膨胀变化,因此转子和定子之间的间隙保持恒定,泵在整个运行模式下表现出最高的泵送性能 气体负荷。