摘要:
A SIMOX wafer is produced at an oxygen ion implantation step and a high-temperature annealing step, wherein an oxide film is formed on a surface of a wafer prior to the oxygen ion implantation and then the oxygen ion implantation is conducted through the oxide film.
摘要:
A thermal processing operation is performed for a silicon wafer W (silicon single-crystal layer) in an atmosphere gas which is formed by a hydrogen gas or an inert gas or a mixture gas of these gases at a temperature in a range of 600° C. to 950° C. (here, the temperature should not be greater than 950° C.). By doing this, a quality of a surface of the silicon single-crystal layer is improved.
摘要:
A lubrication system for a bearing of a machine. The system comprises an oil tank, and an oil supply pipe for supplying the lubricant oil from the oil tank to the bearing. The system further comprises an outlet pipe for guiding the lubricant oil from the bearing substantially vertically downward so that an outlet pipe oil level may be formed in the outlet pipe. The system further comprises an oil returning mother pipe for guiding the lubricant oil from the outlet pipe to the tank. The oil returning mother pipe includes a substantially horizontal part and a weir or a flow resistance disposed close to the tank so that substantially all portion of the substantially horizontal part may be maintained full of lubricant oil.
摘要:
A method and apparatus are disclosed for detecting the presence of very fine leaks through the walls of an enclosure which include a sniffer nozzle (1) open to the atmosphere, a vessel (5) having molecular sieves (4) therein for adsorbing substantially all gaseous products which have entered the sniffer nozzle (1) with the exception of the probe gas which has been pressurized within the enclosure being tested, a pump system (8, 9) for creating vacuum conditions within the system, a mass spectrometer (12) for detecting the presence of the probe gas, and a capillary tube (2) interconnecting the nozzle sniffer (1) and the molecular sieve assembly whereby the probe gas draw rate, and sensitivity of the apparatus of the present invention, are significantly increased.
摘要:
A cathode consisting essentially of a base material of copper, iron or nickel and formed thereon, a sintered coating composed mainly of at least one metal of Group VIII of the periodic table, said sintered coating having been prepared by coating said base material with a solution or suspension of a compound of said metal of Group VIII and heating the coating.
摘要:
An impeller type pump has a pump body defining a pump chamber therein, and an impeller disposed in the pump chamber having a center shaft. A hollow cylindrical connector is mounted in the center shaft having internal screw threads engageable with external screw threads on the end of a drive shaft for rotating the impeller. The connector is provided with thermal expansion-absorbing slits arranged in equally spaced relation along the circumference of the connector which extend lengthwise of the connector with an unslit portion left on that end of the connector which is close to the other end of the drive shaft.
摘要:
An activated gas reaction apparatus which comprises an activation chamber; feeding means for conducting feed gas into the activation chamber; microwave power-generating means for activating raw gas received in the activation chamber; and a reaction chamber provided apart from the activation chamber for reaction of activated gas, the activated gas reaction apparatus so constructed as to satisfy the following formula:2.pi.fpl .gtoreq. 4 .times. 10.sup.9wheref = frequency (Hz) of microwavesp = gas pressure (torr) in the activation chamberL = length (cm) of the activation chamber extending in the direction in which the electromagnetic field provided by the microwave source is applied.
摘要:
This silicon wafer production process has a step of cutting a silicon wafer from a silicon single crystal ingot in a perfect region which includes a perfect region P free of agglomerates of interstitial-silicon-type point defects and agglomerates of vacancy-type point defects and/or a region R in which there is occurrence of ring-shaped oxidation induced stacking faults, and a step of performing rapid thermal annealing on the silicon wafer in a hydrogen atmosphere, an argon atmosphere or an atmosphere containing a mixed gas thereof.
摘要:
A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.
摘要:
An ointment comprising a tricyclic compound such as FK 506 substance which is 17-allyl-1,14-dihydroxy-12-[2-(4-hydroxy-3-methoxycyclohexyl)-1-methylvinyl]-23,25-dimethoxy-13,19,21,27-tetramethyl-11,28-dioxa-4-azatricyclo[22.3.1.0.sup.4,9 ]octacos-18-ene-2,3,10,16-tetraone, or the like, a solubilizing and/or absorption-promoting agent and an ointment base, which is useful for treating various skin diseases.