公开(公告)号：US20100330722A1

公开(公告)日：2010-12-30

申请号：US12490318

申请日：2009-06-24

Applicant: Tsung-Min Hsieh ,  Chien-Hsing Lee

Inventor： Tsung-Min Hsieh ,  Chien-Hsing Lee

IPC: H01L21/30

CPC classification number: B81C1/00246 ,  B81B2201/0235 ,  B81C2203/0714 ,  G01L9/0042 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: A method for fabricating the MEMS device includes providing a substrate. Then, a structural dielectric layer is formed over the substrate at a first side, wherein a diaphragm is embedded in the structural dielectric layer. The substrate is patterned from a second side to form a cavity in corresponding to the diaphragm and a plurality of venting holes in the substrate. An isotropic etching process is performed from the first side and the second side of the substrate via vent holes to remove a dielectric portion of the structural dielectric layer for exposing a central portion of the diaphragm while an end portion is held by a residue portion of the structural dielectric layer.

Abstract translation: 一种用于制造MEMS器件的方法包括提供衬底。 然后，在第一面上在基板上形成结构介电层，其中隔膜嵌入在结构介电层中。 衬底从第二侧构图，以形成对应于隔膜的空腔和衬底中的多个排气孔。 从衬底的第一侧和第二侧经由通气孔进行各向同性蚀刻处理，以去除结构介质层的电介质部分，用于暴露隔膜的中心部分，同时端部被残留部分保持 结构介电层。

公开(公告)号：US20100237909A1

公开(公告)日：2010-09-23

申请号：US12599779

申请日：2009-01-27

Applicant: Fumihito Inukai ,  Yoichi Kaino

Inventor： Fumihito Inukai ,  Yoichi Kaino

IPC: H03K3/00 ,  G06G7/16

CPC classification number: G01C19/5607 ,  G01P15/125 ,  G01P2015/0828

Abstract: A physical quantity detection circuit (12) is used for a physical quantity sensor (10) that outputs a sensor signal according to a physical quantity given externally. In the physical quantity detection circuit (12), an analog-to-digital converter (104) converts an analog sensor signal (Ssnc) to a digital sensor signal (Dsnc). A digital filter (100) attenuates a frequency component of the digital sensor signal (Dsnc) that is higher than a predetermined cutoff frequency. A multiplier (106) multiplies a digital sensor signal (Dps) having passed the digital filter (100) by a digital detection signal (Ddet) to detect a digital physical quantity signal (Dphy).

Abstract translation: 物理量检测电路（12）用于根据外部给出的物理量输出传感器信号的物理量传感器（10）。 在物理量检测电路（12）中，模拟数字转换器（104）将模拟传感器信号（Ssnc）转换为数字传感器信号（Dsnc）。 数字滤波器（100）衰减高于预定截止频率的数字传感器信号（Dsnc）的频率分量。 乘法器（106）将通过数字滤波器（100）的数字传感器信号（Dps）乘以数字检测信号（Ddet）以检测数字物理量信号（Dphy）。

公开(公告)号：US07738110B2

公开(公告)日：2010-06-15

申请号：US12269087

申请日：2008-11-12

Applicant: Menachem Nathan ,  Ben Zion Steinberg ,  Oren Levy ,  Amir Boag

Inventor： Menachem Nathan ,  Ben Zion Steinberg ,  Oren Levy ,  Amir Boag

IPC: G01B9/02

CPC classification number: G02B6/1225 ,  B82Y20/00 ,  G01D5/266 ,  G01P15/0802 ,  G01P15/093 ,  G01P2015/0828 ,  G02B6/3508 ,  G02B6/3594 ,  G02B6/3596

Abstract: A displacement sensor comprising at least one pair of co-planar photonic crystal waveguide (PCWG) sections aligned along or parallel to a common axis and separated by a gap, one PCWG section of a pair operative to perform a displacement relative to the other section of the pair. In some embodiments, the sensor is linear, comprising two PCWG sections separated by a gap that forms a cross PCWG, the displacement sensing performed preferrably differentially between two edges of the cross PCWG. In other embodiments, the sensor includes Mach Zehnder Interferometer (MZI) configurations with gaps between fixed and moving PCWG sections. Displacement induced changes in the gap widths are reflected in changes in an output parameter of the MZI.

Abstract translation: 一种位移传感器，包括至少一对共面光子晶体波导（PCWG）部分，其沿着或平行于公共轴线对齐并且由间隙分开，一对PCWG部分可操作以相对于另一部分 这对。 在一些实施例中，传感器是线性的，包括由形成交叉PCWG的间隙分开的两个PCWG部分，在交叉PCWG的两个边缘之间优选差异地进行位移检测。 在其他实施例中，传感器包括具有在固定和移动的PCWG部分之间的间隙的马赫曾德干涉仪（MZI）配置。 位移引起的间隙宽度的变化反映在MZI的输出参数的变化中。

公开(公告)号：US07716983B2

公开(公告)日：2010-05-18

申请号：US10774695

申请日：2004-02-10

Applicant: Tuomo Lehtonen

Inventor： Tuomo Lehtonen

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0828

Abstract: The invention relates to measuring devices used in the measuring of acceleration and, more specifically, to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention contains a movable electrode (5) supported at an axis of rotation (7). The capacitance change in the pair of electrodes of the acceleration sensor, according to the present invention, is enhanced. The acceleration sensor structure, according to the present invention, enables improving the capacitance sensitivity of the pair of electrodes based on rotational motion and measuring acceleration with good performance in capacitive acceleration sensor designs.

Abstract translation: 本发明涉及用于测量加速度的测量装置，更具体地说，涉及电容式加速度传感器。 根据本发明的电容式加速度传感器包括支撑在旋转轴线（7）处的可动电极（5）。 根据本发明的加速度传感器的一对电极中的电容变化增强。 根据本发明的加速度传感器结构能够基于旋转运动和在电容加速度传感器设计中具有良好性能的测量加速度来提高一对电极的电容灵敏度。

公开(公告)号：US20100107764A1

公开(公告)日：2010-05-06

申请号：US12529675

申请日：2008-03-06

Applicant: Takeshi Uemura ,  Toshiyuki Nozoe

Inventor： Takeshi Uemura ,  Toshiyuki Nozoe

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/0828 ,  G01P2015/0842

Abstract: An acceleration sensor includes a mount section arranged to be fixed to an object, a flexible section coupled to the mount section, a weight coupled to the mount section via the flexible section, and first and second opposed electrode unit. The first opposed electrode unit includes a first electrode placed on the weight and a second electrode spaced away from and facing the first electrode, and provides a first capacitance. The second opposed electrode unit includes a third electrode placed on the weight and a fourth electrode spaced away from and facing the third electrode, and provides a second capacitance. The first and third electrodes are arranged along a first direction. The second and fourth electrodes are spaced away from and face the first and third electrodes along a second direction perpendicular to the first direction, respectively. A component of an acceleration along the first direction applied to the object is detected based on the first and second capacitances. A control voltage is applied to the first and second opposed electrode units. The control voltage is changed when both of the first capacitance and the second capacitance simultaneously increase or decrease. This acceleration sensor detects the acceleration accurately.

Abstract translation: 一种加速度传感器，包括：被安装成固定到物体上的安装部分，连接到安装部分的柔性部分，经由柔性部分耦合到安装部分的重物以及第一和第二相对电极单元。 第一相对电极单元包括放置在配重上的第一电极和与第一电极间隔开并面向第一电极的第二电极，并提供第一电容。 第二相对电极单元包括放置在配重上的第三电极和与第三电极间隔开并面向第三电极的第四电极，并提供第二电容。 第一和第三电极沿第一方向布置。 第二和第四电极分别与垂直于第一方向的第二方向间隔开并面向第一和第三电极。 基于第一和第二电容检测沿着施加到物体的第一方向的加速度的分量。 控制电压施加到第一和第二相对电极单元。 当第一电容和第二电容同时增加或减小时，控制电压发生变化。 该加速度传感器可以准确地检测加速度。

公开(公告)号：US20090301176A1

公开(公告)日：2009-12-10

申请号：US12096314

申请日：2006-12-12

Applicant: Alistair Rowe ,  Christoph Renner ,  Steve Arscott

Inventor： Alistair Rowe ,  Christoph Renner ,  Steve Arscott

IPC: G01N29/00 ,  H01L41/00 ,  G12B21/08 ,  G01N33/483 ,  B81B3/00

CPC classification number: G01L1/2293 ,  G01L9/0052 ,  G01P15/12 ,  G01P2015/0828 ,  G01Q20/04 ,  G01Q60/38

Abstract: A microelectromechanical system comprises a deformable portion and at least one stress sensor fixedly attached to the deformable portion. The sensor itself comprises a base portion and a shunt portion juxtaposed on the deformable portion, and connections arranged to detect a change of a distribution of an electric current in the base and shunt portions. Such a system is suitable for many applications, in particular for forming a portion of an arm of an atomic force microscope or for entering into the constitution of a bio sensor.

Abstract translation: 微机电系统包括可变形部分和固定地连接到可变形部分的至少一个应力传感器。 传感器本身包括基座部分和并置在可变形部分上的并联部分，以及布置成检测基部和分流部分中的电流分布变化的连接。 这种系统适用于许多应用，特别是用于形成原子力显微镜的臂的一部分或用于进入生物传感器的构造。

公开(公告)号：US07594438B2

公开(公告)日：2009-09-29

申请号：US11945052

申请日：2007-11-26

Applicant: Nicholas Jason Ackerley ,  Geoffrey Stewart Bainbridge

Inventor： Nicholas Jason Ackerley ,  Geoffrey Stewart Bainbridge

IPC: G01P15/10

CPC classification number: G01V1/181 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828

Abstract: A long-period weak-motion inertial sensor includes a frame having a frame mounting surface, a movable mass having a movable mass mounting surface, a transducer for sensing displacements of the movable mass with respect to the frame, and a monolithic flexure element for suspending the movable mass in the frame. The monolithic flexure element includes: a stiff frame integral clamp attachable to the frame mounting surface of the frame, a stiff movable mass integral clamp attachable to the movable mass mounting surface of the movable mass, and a stiffest flexible region for operatively connecting the frame integral clamp to the movable mass integral clamp. The frame and movable mass mounting surfaces do not overlap the stiffest flexible region, thereby minimizing the generation of creep and hysteresis noise. The variation in stiffness of the monolithic flexure element is controlled by varying thickness along the length of the flexure element.

Abstract translation: 长周期弱运动惯性传感器包括具有框架安装表面的框架，具有可移动质量安装表面的可移动质量块，用于感测可移动块体相对于框架的位移的换能器，以及用于悬挂的单片挠曲元件 框架中的可移动质量块。 整体式弯曲元件包括：刚性框架一体式夹具，可附接到框架的框架安装表面，刚性可移动质量一体式夹具，可附接到可移动质量块的可移动质量安装表面，以及最硬的柔性区域，用于可操作地连接框架整体 夹紧到可移动质量积分夹。 框架和可移动的质量安装表面不与最硬的柔性区域重叠，从而最小化蠕变和滞后噪声的产生。 单块挠曲元件的刚度变化通过沿挠曲元件的长度变化的厚度来控制。

公开(公告)号：US20090211359A1

公开(公告)日：2009-08-27

申请号：US11721029

申请日：2005-12-06

Applicant: Padraig O'Mahony ,  Frank Caris ,  Theo Kersjes ,  Christian Paquet

Inventor： Padraig O'Mahony ,  Frank Caris ,  Theo Kersjes ,  Christian Paquet

IPC: G01P3/04 ,  B23P11/00

CPC classification number: G01P15/08 ,  B81B7/02 ,  B81B2201/0235 ,  B81C2201/019 ,  G01P15/0802 ,  G01P2015/0828 ,  H04M2250/12 ,  Y10T29/49002

Abstract: One embodiment of the present application includes a multisensor assembly. This assembly has an electromechanical motion sensor member defined with one wafer layer, a first sensor carried with a first one or two or more other wafer layers, and a second sensor carried with a second one of the other wafer layers. The one wafer layer is positioned between the other wafer layers to correspondingly enclose the sensor member within a cavity of the assembly.

Abstract translation: 本申请的一个实施例包括多传感器组件。 该组件具有机电运动传感器构件，该机电运动传感器构件限定有一个晶片层，承载有第一或两个或更多个其它晶片层的第一传感器以及承载有第二其它晶片层的第二传感器。 一个晶片层位于其它晶片层之间，以将传感器构件相应地封闭在组件的空腔内。

公开(公告)号：US20090196543A1

公开(公告)日：2009-08-06

申请号：US12246761

申请日：2008-10-07

Applicant: Nicholas Lagakos ,  Joseph A. Bucaro ,  Jacek Jarzynski ,  Barbara Jarzynski

Inventor： Nicholas Lagakos ,  Joseph A. Bucaro ,  Jacek Jarzynski ,  Barbara Jarzynski

IPC: G02B6/00

CPC classification number: G02B6/3514 ,  G01D5/268 ,  G01D5/30 ,  G01P15/0802 ,  G01P15/093 ,  G01P2015/0828 ,  G02B6/3552 ,  G02B6/3558 ,  G02B6/3566 ,  G02B6/3594

Abstract: A fiber optic sensor for detecting acceleration or displacement includes a fiber optic probe with a multimode transmitting optical fiber, a multimode receiving optical fiber and a edge reflector spaced apart from the fiber probe. The reflector moves in a transverse direction substantially normal to the longitudinal axis of the fiber optic probe, so the amount of light received by the receiving fiber indicates a relative acceleration or a relative displacement of the reflective surface with respect to the fiber probe in the transverse direction of motion of the edge of the reflector. The reflector can be mounted on a cantilever beam. The sensor can have one transmitting fiber, two receiving fiber, and a reflector with two edges, each edge partially covering one of the receiving fibers. A triaxial sensor system has at least two two-fiber sensors.

Abstract translation: 用于检测加速度或位移的光纤传感器包括具有多模发射光纤的光纤探针，多模接收光纤和与光纤探针间隔开的边缘反射器。 反射器在基本上垂直于光纤探针的纵向轴线的横向方向上移动，因此由接收光纤接收的光量表示反射表面相对于光纤探头在横向上的相对加速度或相对位移 反射器边缘的运动方向。 反射器可以安装在悬臂梁上。 传感器可以具有一个发送光纤，两个接收光纤和一个具有两个边缘的反射器，每个边缘部分地覆盖一个接收光纤。 三轴传感器系统具有至少两个双纤维传感器。

公开(公告)号：US20090174885A1

公开(公告)日：2009-07-09

申请号：US12348262

申请日：2009-01-02

Applicant: Chian Chiu Li

Inventor： Chian Chiu Li

IPC: G01N21/45 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01B9/02051 ,  G01B9/02027 ,  G01B9/02072 ,  G01B9/02092 ,  G01B2290/45 ,  G01J1/0214 ,  G01J9/0246 ,  G01J2005/583 ,  G01K11/00 ,  G01P15/093 ,  G01P2015/0828

Abstract: Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.

Abstract translation: 公开了一种低成本的高分辨率紧凑型加速度计，其使用多个自混合光学干涉仪。 该器件还是微光电机械系统（MOEMS）传感器。 干涉仪用于检测加速度以及监测波长，温度和折射率，并进行差分测量。 此外，光电探测器用于监视输入光功率。