公开(公告)号：US20090174885A1

公开(公告)日：2009-07-09

申请号：US12348262

申请日：2009-01-02

Applicant: Chian Chiu Li

Inventor： Chian Chiu Li

IPC: G01N21/45 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01B9/02051 ,  G01B9/02027 ,  G01B9/02072 ,  G01B9/02092 ,  G01B2290/45 ,  G01J1/0214 ,  G01J9/0246 ,  G01J2005/583 ,  G01K11/00 ,  G01P15/093 ,  G01P2015/0828

Abstract: Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.

Abstract translation: 公开了一种低成本的高分辨率紧凑型加速度计，其使用多个自混合光学干涉仪。 该器件还是微光电机械系统（MOEMS）传感器。 干涉仪用于检测加速度以及监测波长，温度和折射率，并进行差分测量。 此外，光电探测器用于监视输入光功率。

公开(公告)号：US09677949B1

公开(公告)日：2017-06-13

申请号：US14526168

申请日：2014-10-28

Applicant: The Board of Regents of the University of Nebraska

Inventor： Ming Han

IPC: G01K11/32 ,  G01K1/26 ,  G01K11/12 ,  G01J3/45

CPC classification number: G01K11/3206 ,  G01J3/45 ,  G01J5/0821 ,  G01J5/602 ,  G01J2005/583 ,  G01K1/26 ,  G01K11/125

Abstract: An in-line fiber-optic temperature sensor is disclosed. In an implementation, the in-line fiber-optic temperature sensor includes an optically transmissive fiber, a reflector, a microstructured fiber defining a channel therein for receiving a fluid, and a Fabry-Perot cavity in fluid communication with the microstructured fiber. The microstructured fiber can be retained between the optically transmissive fiber and the reflector. The Fabry-Perot cavity defined by a material and configured to receive a gas having an index of refraction that changes in a known way with temperature and pressure changes in fluid communication with the channel of the microstructured fiber. The in-line fiber-optic temperature sensor also includes a chamber defined between the optically transmissive fiber and the microstructured fiber for connecting in fluid communication with a vacuum/pressure source for changing pressure. The in-line fiber-optic temperature sensor also includes a sensor for determining an optical interferometric reflection spectrum associated with the Fabry-Perot cavity.

公开(公告)号：US09335218B2

公开(公告)日：2016-05-10

申请号：US14312338

申请日：2014-06-23

Applicant: Raytheon Company

Inventor： Darin S. Williams

IPC: G01J5/20 ,  G01J5/24 ,  G01J5/00

CPC classification number: G01J5/20 ,  G01J5/24 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/583

Abstract: A digital bolometer architecture provides dynamic control of a simultaneous integration time for all pixels, with a temporal response that is more uniform than conventional bolometers and lacks frame cross-talk from decay tails, and which supports sub-frame measurement for on readout computational imaging. This is accomplished by replacing resistive pixel temperature sensing with continuous optical interferometric measurement and subsequent signal accumulation. Balanced reference sensors allow rejection of temperature differences across the thermal sink. The thermal time constant of the pixels is substantially reduced and the lost SNR is recovered by integration of the measured signals, using a programmable integration time.

Abstract translation: 数字测辐射热计结构提供对所有像素的同时积分时间的动态控制，其时间响应比传统测辐射热谱仪更均匀，并且缺乏衰减尾部的帧串扰，并且支持读出计算成像的子帧测量。 这是通过用连续光学干涉测量和随后的信号积累代替电阻像素温度感测来实现的。 平衡参考传感器允许排除散热器两端的温差。 使用可编程积分时间，像素的热时间常数显着降低，并通过集成测量信号来恢复丢失的SNR。

公开(公告)号：US20150369670A1

公开(公告)日：2015-12-24

申请号：US14312338

申请日：2014-06-23

Applicant: Raytheon Company

Inventor： Darin S. Williams

IPC: G01J5/20 ,  G01J5/24

CPC classification number: G01J5/20 ,  G01J5/24 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/202 ,  G01J2005/583

Abstract: A digital bolometer architecture provides dynamic control of a simultaneous integration time for all pixels, with a temporal response that is more uniform than conventional bolometers and lacks frame cross-talk from decay tails, and which supports sub-frame measurement for on readout computational imaging. This is accomplished by replacing resistive pixel temperature sensing with continuous optical interferometric measurement and subsequent signal accumulation. Balanced reference sensors allow rejection of temperature differences across the thermal sink. The thermal time constant of the pixels is substantially reduced and the lost SNR is recovered by integration of the measured signals, using a programmable integration time.

Abstract translation: 数字测辐射热计结构提供对所有像素的同时积分时间的动态控制，其时间响应比传统测辐射热谱仪更均匀，并且缺乏衰减尾部的帧串扰，并且支持读出计算成像的子帧测量。 这是通过用连续光学干涉测量和随后的信号积累代替电阻像素温度感测来实现的。 平衡参考传感器允许排除散热器两端的温差。 使用可编程积分时间，像素的热时间常数显着降低，并通过集成测量信号来恢复丢失的SNR。

公开(公告)号：US20150185092A1

公开(公告)日：2015-07-02

申请号：US14580460

申请日：2014-12-23

Applicant: TOKYO ELECTRON LIMITED

Inventor： Chishio KOSHIMIZU ,  Tatsuo MATSUDO

IPC: G01K17/20 ,  G01J9/02 ,  H05H1/24 ,  G01N21/17

CPC classification number: G01K17/20 ,  G01J2005/583 ,  H01J37/32724 ,  H01J37/32917 ,  H01J37/32935 ,  H05H1/0043 ,  H05H1/24

Abstract: In a heat-flux measuring method for measuring an ion flux of plasma generated in a substrate processing chamber using a heat flux, a heat-flux measuring member is exposed to the plasma and irradiatated with a low coherent light. The heat-flux measuring member has a three-layered structure in which a first length and a second length of optical paths of the low-coherent light in the first layer and the third layer are measured using optical interference of reflected lights from the heat-flux measuring member. Current temperatures of the first layer and the third layer are obtained based on the measured first length, the measured second length, and data representing thermal-optical path length relationship. A heat flux flowing through the heat-flux measuring member is calculated based on the obtained temperatures, and a thickness and a thermal conductivity of the second layer.

Abstract translation: 在利用热通量测量在基板处理室中产生的等离子体的离子通量的热通量测量方法中，将热量测量部件暴露于等离子体并用低相干光照射。 热通量测量部件具有三层结构，其中使用来自热交换器的反射光的光学干涉来测量第一层和第三层中的低相干光的第一长度和第二长度的光路， 焊剂测量部件。 基于所测量的第一长度，测量的第二长度和表示热 - 光路长度关系的数据，获得第一层和第三层的当前温度。 基于获得的温度，第二层的厚度和热导率计算流过热通量测量部件的热通量。

公开(公告)号：US07492439B1

公开(公告)日：2009-02-17

申请号：US10945753

申请日：2004-09-21

Applicant: Kenneth L. Marshall

Inventor： Kenneth L. Marshall

IPC: G02F1/13

CPC classification number: G02F1/1313 ,  G01J9/02 ,  G01J2005/583 ,  G01J2009/0223 ,  G02F1/133504 ,  G02F1/13394 ,  G02F1/13725 ,  G02F2001/133565 ,  G02F2203/22

Abstract: Liquid crystal point diffraction interferometer (LCPDI) systems that can provide real-time, phase-shifting interferograms that are useful in the characterization of static optical properties (wavefront aberrations, lensing, or wedge) in optical elements or dynamic, time-resolved events (temperature fluctuations and gradients, motion) in physical systems use improved LCPDI cells that employ a “structured” substrate or substrates in which the structural features are produced by thin film deposition or photo resist processing to provide a diffractive element that is an integral part of the cell substrate(s). The LC material used in the device may be doped with a “contrast-compensated” mixture of positive and negative dichroic dyes.

Abstract translation: 液晶点衍射干涉仪（LCPDI）系统可以提供实时，相移干涉图，可用于表征光学元件或动态，时间分辨事件中的静态光学性质（波前像差，透镜或楔形） 物理系统中的温度波动和梯度，运动）使用改进的LCPDI单元，其使用“结构化”衬底或衬底，其中通过薄膜沉积或光刻胶处理产生结构特征，以提供衍射元件，该衍射元件是 细胞底物。 在器件中使用的LC材料可以掺杂有正和负二色性染料的“对比度补偿”混合物。

公开(公告)号：US07265847B2

公开(公告)日：2007-09-04

申请号：US11333203

申请日：2006-01-18

Applicant: Gaetan Duplain ,  Richard Van Neste

Inventor： Gaetan Duplain ,  Richard Van Neste

IPC: G01B9/02

CPC classification number: G01J5/58 ,  G01J2005/583 ,  G01J2005/586 ,  G01K11/32 ,  G01K11/3213

Abstract: The invention concerns a tandem interferometer for temperature sensing. The low coherence interferometry (LCI) system comprises a polarization-based sensing interferometer comprising a birefringent crystal having a sensor temperature sensitivity and a birefringence dispersion, and a readout interferometer being either a Fizeau interferometer using an optical wedge or a polarization interferometer using a birefringent wedge. In one embodiment of the invention, the birefringent crystal has dispersion properties similar to that of the birefringent wedge or that of the optical wedge of the readout interferometer. The present invention also provides a signal processing method for correcting the dispersion effect and for noise filtering in LCI-based optical sensors of the tandem interferometer arrangement.

公开(公告)号：US20060126991A1

公开(公告)日：2006-06-15

申请号：US11301565

申请日：2005-12-12

Applicant: Haiying Huang

Inventor： Haiying Huang

IPC: G02B6/26 ,  G01B9/02

CPC classification number: G01N21/45 ,  G01B11/026 ,  G01D5/35303 ,  G01J2005/583 ,  G01N2021/458 ,  G01N2201/08 ,  G01Q60/22 ,  G02B6/02095

Abstract: An optical fiber sensor is provided for displacement measurement, pressure measurement, refractive index measurement, bio/chemical detection, and/or microscopy.

Abstract translation: 提供光纤传感器用于位移测量，压力测量，折射率测量，生物/化学检测和/或显微镜检查。

公开(公告)号：US06462826B1

公开(公告)日：2002-10-08

申请号：US09462981

申请日：2000-03-06

Applicant: John Howard

Inventor： John Howard

IPC: G01B902

CPC classification number: G01J5/04 ,  G01J1/04 ,  G01J1/0429 ,  G01J3/45 ,  G01J3/453 ,  G01J5/0014 ,  G01J5/0018 ,  G01J5/0044 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0834 ,  G01J5/58 ,  G01J2005/583 ,  G01J2005/586

Abstract: A method and apparatus for measurement of at least one of brightness, flow velocity and temperature of radiant media are provided. A substantially collimated beam of light having a selected frequency is directed to a linear polariser. The linearly polarised output is directed to an electro-optically active birefringent crystal to separate the output into two characteristic waves and to introduce a first fixed phase delay between the characteristic waves. The birefringent crystal is selectively electro-optically modulated to introduce a second variable phase delay between the characteristic waves and the characteristic waves are combined to interfere prior to detection.

Abstract translation: 提供了用于测量辐射介质的亮度，流速和温度中的至少一个的方法和装置。 具有选定频率的基本上准直的光束被引导到线性偏振器。 线性偏振输出被引导到电光学上有效的双折射晶体，以将输出分离成两个特征波并且在特征波之间引入第一固定相位延迟。 双折射晶体被选择性地电光调制以在特征波之间引入第二可变相位延迟，并且特征波被组合以在检测之前被干扰。

公开(公告)号：US06297504B1

公开(公告)日：2001-10-02

申请号：US09324152

申请日：1999-06-02

Applicant: Michael Paul Andreou

Inventor： Michael Paul Andreou

IPC: G01N2135

CPC classification number: G01J5/0014 ,  G01J3/453 ,  G01J3/4535 ,  G01J2005/0077 ,  G01J2005/068 ,  G01J2005/583 ,  G01N21/3504 ,  G01N21/3518 ,  G01N2021/1765 ,  G01N2021/1774 ,  G01N2021/1793 ,  G01N2021/3595 ,  H04N5/33

Abstract: A method for imaging a quantity of gas present in the atmosphere of a selected area. The method comprises the steps of directing background infra-red radiation from the selected area into an interferometer; imaging the infra-red radiation emerging from the interferometer onto at least one infra-red detector: obtaining a plurality of Fouriertransform infra-red spectra in the 8-14 micrometer spectral region, each spectrum coitesponding to infra-red radiation collected from a different portion of the selected area; and displaying in a suitable form an infra-red image, the infra-red image comprising the plurality of infra-red spectra, or quantities derived therefrom. The temperature of the quantity of gas or ambient temperature is measured, the temperature of the background is measured, and the difference between the two measured temperatures is used to derive gas column densities from the infra-red spectra.

Abstract translation: 一种用于对选定区域的气氛中存在的气体成像的方法。 该方法包括将来自所选区域的背景红外辐射引导到干涉仪中的步骤; 将从干涉仪出射的红外辐射成像到至少一个红外检测器上：在8-14微米光谱区域中获得多个四变换红外光谱，每个光谱响应于从不同部分收集的红外辐射 的选区; 并以合适的形式显示红外图像，包括多个红外光谱的红外图像或从其衍生的量。 测量气体或环境温度的温度，测量背景温度，并且使用两个测量温度之间的差异从红外光谱导出气柱密度。