Probe for a scanning microscope
    32.
    发明授权
    Probe for a scanning microscope 失效
    探针扫描显微镜

    公开(公告)号:US07398678B2

    公开(公告)日:2008-07-15

    申请号:US11145869

    申请日:2005-06-06

    IPC分类号: G01B5/28

    摘要: A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.

    摘要翻译: 扫描显微镜探针,其中在悬臂的突出部分的表面上形成钯覆盖膜,并且纳米管的基端部设置成与钯覆盖膜接触,其中纳米管的末端部突出到 从而允许尖端用作检测信号的探针针端。 形成涂膜以覆盖该基端部的全部或部分表面,并且因此将纳米管牢固地固定在悬臂上。 由于基端部紧密地附着在钯覆盖膜上,所以两者都是电连续的。 这种钯覆膜可以作为电极膜,对纳米管施加电压或使电流通过纳米管,对纳米管和悬臂也表现出良好的粘附性。

    Probe for a scanning microscope
    33.
    发明申请
    Probe for a scanning microscope 失效
    探针扫描显微镜

    公开(公告)号:US20060150720A1

    公开(公告)日:2006-07-13

    申请号:US11145869

    申请日:2005-06-06

    IPC分类号: G01B5/28

    摘要: A scanning microscope probe in which a palladium covering film is formed on the surface of the protruding portion of a cantilever, and the base end portion of a nanotube is disposed in contact with the palladium covering film with the tip end portion of the nanotube protruding to the outside, thus allowing the tip end to be used as a probe needle end for detecting signals. A coating film is formed to cover all or part of the surface of this base end portion, and the nanotube is thus firmly fastened to the cantilever. Since the base end portion adheres tightly to the palladium covering film, both of them are electrically continuous. This palladium covering film allows, as an electrode film, the application of a voltage to the nanotube or the passage of an electric current through the nanotube, showing also good adhesion to the nanotube and cantilever.

    摘要翻译: 扫描显微镜探针,其中在悬臂的突出部分的表面上形成钯覆盖膜,并且纳米管的基端部设置成与钯覆盖膜接触,其中纳米管的末端部突出到 从而允许尖端用作检测信号的探针针端。 形成涂膜以覆盖该基端部的全部或部分表面,并且因此将纳米管牢固地固定在悬臂上。 由于基端部紧密地附着在钯覆盖膜上,所以两者都是电连续的。 这种钯覆膜可以作为电极膜,对纳米管施加电压或使电流通过纳米管,对纳米管和悬臂也表现出良好的粘附性。

    Micromechanical sensor and sensor fabrication process
    34.
    发明授权
    Micromechanical sensor and sensor fabrication process 失效
    微机械传感器和传感器制造工艺

    公开(公告)号:US5455419A

    公开(公告)日:1995-10-03

    申请号:US189221

    申请日:1994-01-31

    摘要: A method for producing micromechanical sensors for the AFM/STM/MFM profilometry is described in which a multiple step mask of cantilever beam and tip is transferred step by step into the wafer substrate by reactive ion etching. A particular highly anisotropic etching step is used for etching and shaping of the tip. This process step uses an Ar/Cl2 ambient at a pressure of about 100 .sup.6 bar and a self bias voltage of about 300 V DC. The ratio of pressure to self bias voltage determines the concave shape of the tip side- walls. This etching step is followed by a thermal oxidation step. The oxidation is carried out for a time until the oxidation fronts at the thinnest point of the tip shaft touch each other. A stripping process with buffered hydrofluoric acid gently removes the thermally grown oxide. The oxidation process allows--via oxidation time--a modification of tip height and angle in an extremely controllable manner. To prevent sticking of the tip to the structure to be profiled the ratio of tip diameter to tip height should be about 1:10. Should this ratio be exceeded the tip has to be arranged on a pedestal. The structure, comprising a cantilever beam and a tip on pedestal, can be produced with the same but slightly modified process of the invention.

    摘要翻译: 描述了用于AFM / STM / MFM轮廓测量法的微机械传感器的制造方法,其中悬臂梁和尖端的多步骤掩模通过反应离子蚀刻逐步转移到晶片衬底中。 特别是高度各向异性的蚀刻步骤用于尖端的蚀刻和成型。 该工艺步骤在约100 6bar的压力和约300V DC的自偏压下使用Ar / Cl2环境。 压力与自偏压的比率决定了顶端侧壁的凹形。 该蚀刻步骤之后是热氧化步骤。 氧化进行一段时间,直到尖端轴的最薄点处的氧化前沿相互接触。 用缓冲氢氟酸的汽提过程轻轻地除去热生长的氧化物。 氧化过程允许通过氧化时间 - 以极其可控的方式改变尖端高度和角度。 为了防止尖端粘附到待成型的结构上,尖端直径与尖端高度的比率应为约1:10。 如果超过该比率,则必须将尖端布置在基座上。 包括悬臂梁和基座上的尖端的结构可以用本发明的相同但略微改进的方法制造。

    AFM-COUPLED MICROSCALE RADIOFREQUENCY PROBE FOR MAGNETIC RESONANCE IMAGING AND SPECTROSCOPY
    35.
    发明申请
    AFM-COUPLED MICROSCALE RADIOFREQUENCY PROBE FOR MAGNETIC RESONANCE IMAGING AND SPECTROSCOPY 有权
    用于磁共振成像和光谱的AFM耦合微结构无线电探头

    公开(公告)号:US20140237690A1

    公开(公告)日:2014-08-21

    申请号:US14351055

    申请日:2012-10-10

    IPC分类号: G01R33/48 G01Q70/16 G01Q30/02

    摘要: The present disclosure is discloses the development of a new device, system, and method that combines advantages of magnetic resonance and atomic force microscopy technologies, and the utility of the new device, system, and method for a wide range of biomedical and clinical researchers. According to one aspect of the present disclosure, a device for micro-scale spectroscopy is disclosed. The micro-scale spectroscopy device includes a beam having a distal end, a proximal end, a top surface and a bottom surface, where the beam is attached to an anchor at the proximal end and further includes a tip extending substantially perpendicular from the bottom surface at or near the distal end, and a coil having at least one turn mounted to the top surface of the beam at or near the distal end opposite the tip, where the coil is capable of both transmitting and sensing electromagnetic radiation.

    摘要翻译: 本公开公开了一种结合磁共振和原子力显微技术的优点的新器件,系统和方法的开发,以及用于广泛的生物医学和临床研究人员的新器件,系统和方法的实用性。 根据本公开的一个方面,公开了一种用于微尺度光谱的装置。 微型光谱装置包括具有远端,近端,顶表面和底表面的光束,其中光束附接到近端处的锚固件,并且还包括从底表面基本垂直延伸的尖端 在远端处或附近,以及具有至少一个匝的线圈,其安装到梁的顶表面处,或者与尖端相对的远端附近,其中线圈能够传输和感测电磁辐射。

    Atomic force microscopy system and method for nanoscale measurement
    36.
    发明授权
    Atomic force microscopy system and method for nanoscale measurement 有权
    原子力显微镜系统和纳米尺度测量方法

    公开(公告)号:US08726410B2

    公开(公告)日:2014-05-13

    申请号:US13194422

    申请日:2011-07-29

    IPC分类号: G01Q60/50 G01Q60/56

    CPC分类号: G01Q60/08

    摘要: An atomic force microscope (AFM) system capable of imaging multiple physical properties of a sample material at the nanoscale level. The system provides an apparatus and method for imaging physical properties using an electromagnetic coil placed under the sample. Excitation of the coil creates currents in the sample, which may be used to image a topography of the sample, a physical property of the sample, or both.

    摘要翻译: 原子力显微镜(AFM)系统能够在纳米尺度上对样品材料的多种物理特性进行成像。 该系统提供了使用放置在样品下方的电磁线圈对物理性质进行成像的装置和方法。 线圈的激发在样品中产生电流,其可用于对样品的形貌进行成像,样品的物理性质或两者。

    Spin microscope based on optically detected magnetic resonance
    37.
    发明授权
    Spin microscope based on optically detected magnetic resonance 有权
    基于光学检测的磁共振的旋转显微镜

    公开(公告)号:US07608820B1

    公开(公告)日:2009-10-27

    申请号:US11845931

    申请日:2007-08-28

    IPC分类号: G01N13/16 G01V3/00

    摘要: The invention relates to scanning magnetic microscope which has a photoluminescent nanoprobe implanted in the tip apex of an atomic force microscope (AFM), a scanning tunneling microscope (STM) or a near-field scanning optical microscope (NSOM) and exhibits optically detected magnetic resonance (ODMR) in the vicinity of unpaired electron spins or nuclear magnetic moments in the sample material. The described spin microscope has demonstrated nanoscale lateral resolution and single spin sensitivity for the AFM and STM embodiments.

    摘要翻译: 本发明涉及扫描磁显微镜,其具有植入原子力显微镜(AFM)尖端顶点的光致发光纳米探针,扫描隧道显微镜(STM)或近场扫描光学显微镜(NSOM),并显示出光学检测的磁共振 (ODMR)在样品材料中未配对的电子自旋或核磁矩附近。 所描述的旋转显微镜已经证明了AFM和STM实施例的纳米尺度横向分辨率和单自旋灵敏度。

    Magnetic resonance force microscope
    38.
    发明授权
    Magnetic resonance force microscope 失效
    磁共振力显微镜

    公开(公告)号:US07400144B2

    公开(公告)日:2008-07-15

    申请号:US11712840

    申请日:2007-03-01

    IPC分类号: G01V3/00 G01B5/28

    CPC分类号: G01Q60/08 G01Q60/52

    摘要: A magnetic resonance force microscope (MRFM) generator for producing an RF magnetic field uniformly over the whole of a sample. A cantilever with magnetic probe tip is self-excited. Under this condition, spins in the sample are controlled to produce a magnetic resonance force. A frequency demodulator measures the resonant frequency of the cantilever from the output detection signal from a cantilever displacement-measuring instrument based on the magnetic resonance force.

    摘要翻译: 一种用于在整个样品上均匀地产生RF磁场的磁共振力显微镜(MRFM)发生器。 具有磁性探针尖端的悬臂是自激的。 在这种条件下,控制样品中的自旋以产生磁共振力。 频率解调器基于磁共振力从悬臂位移测量仪器的输出检测信号测量悬臂的谐振频率。

    Magnetic resonance force microscope
    39.
    发明申请
    Magnetic resonance force microscope 失效
    磁共振力显微镜

    公开(公告)号:US20070216412A1

    公开(公告)日:2007-09-20

    申请号:US11712840

    申请日:2007-03-01

    IPC分类号: G01V3/00

    CPC分类号: G01Q60/08 G01Q60/52

    摘要: A magnetic resonance force microscope (MRFM) generator for producing an RF magnetic field uniformly over the whole of a sample. A cantilever with magnetic probe tip is self-excited. Under this condition, spins in the sample are controlled to produce a magnetic resonance force. A frequency demodulator measures the resonant frequency of the cantilever from the output detection signal from a cantilever displacement-measuring instrument based on the magnetic resonance force.

    摘要翻译: 一种用于在整个样品上均匀地产生RF磁场的磁共振力显微镜(MRFM)发生器。 具有磁性探针尖端的悬臂是自激的。 在这种条件下,控制样品中的自旋以产生磁共振力。 频率解调器基于磁共振力从悬臂位移测量仪器的输出检测信号测量悬臂的谐振频率。

    Cantilever probes for nanoscale magnetic and atomic force microscopy
    40.
    发明申请
    Cantilever probes for nanoscale magnetic and atomic force microscopy 有权
    用于纳米级磁力和原子力显微镜的悬臂探头

    公开(公告)号:US20050241375A1

    公开(公告)日:2005-11-03

    申请号:US11119859

    申请日:2005-05-02

    申请人: Michael Naughton

    发明人: Michael Naughton

    摘要: The various embodiments discloses a cantilever probe comprising a first electrode and a second electrode engaged to a substrate and a branched cantilever wherein the cantilever comprises a nanostruture. Furthermore, the probe comprises a first arm of the cantilever engaged to the first electrode and a second arm of the cantilever engaged to the second electrode. Additionally, the cantilever probe comprises an electrical circuit coupled to the cantilever wherein the electrical circuit is capable of measuring a change in piezoresistance of the cantilever resulting from an atomic force and/or a magnetic force applied to the cantilever. Additionally, the invention discloses a method of performing atomic force microscopy, magnetic force microscopy, or magnetic resonance force microscopy. The nanostructures may comprise carbon or non-carbon materials. Additionally, the nanostructures may include nanotubes, nanowire, nanofibers and various other types of nanostructures.

    摘要翻译: 各种实施例公开了一种悬臂探头,其包括接合到基底的第一电极和第二电极以及分支悬臂,其中悬臂包括纳米级缝合物。 此外,探针包括接合到第一电极的悬臂的第一臂和接合到第二电极的悬臂的第二臂。 此外,悬臂探头包括耦合到悬臂的电路,其中电路能够测量由施加到悬臂的原子力和/或磁力产生的悬臂的压阻变化。 此外,本发明公开了一种执行原子力显微镜,磁力显微镜或磁共振力显微镜的方法。 纳米结构可以包括碳或非碳材料。 另外,纳米结构可以包括纳米管,纳米线,纳米纤维和各种其他类型的纳米结构。