公开(公告)号：US20030106647A1

公开(公告)日：2003-06-12

申请号：US10345294

申请日：2003-01-16

Inventor： Akira Koshiishi ,  Shinji Himori

IPC: B05C013/00 ,  H01L021/3065 ,  C23C016/00

CPC classification number: H01L21/6835 ,  C23C16/4585 ,  H01L21/6831 ,  H01L21/6833 ,  H01L24/90 ,  H01L2924/01004 ,  H01L2924/01013 ,  H01L2924/01023 ,  H01L2924/01033 ,  H01L2924/01074 ,  H01L2924/01078 ,  H01L2924/01082

Abstract: An apparatus for holding an object to be processed, according to this invention is mounted in a plasma processing apparatus and includes a convex-shaped holder main body, first dielectric film, and second dielectric film. The holder main body has a holding portion which holds an object to be processed placed on it and a flange formed on the peripheral portion of the holding portion to fit with a focus ring. The first dielectric film attracts the object to be processed placed on the holding portion to the holder main body by a Coulomb force. The second dielectric film attracts the focus ring fitted on the flange to the holder main body by an attracting force larger than that of the first dielectric film using a Johnson-Rahbek force. The electrostatic attracting force of the focus ring for the holder main body is increased, so that the cooling effect is increased. A change in plasma processing characteristics over time in the vicinity of the focus ring can be eliminated, and the entire surface of the object to be processed can be processed uniformly.

Abstract translation: 根据本发明的用于保持待处理物体的装置安装在等离子体处理装置中，并且包括凸形保持器主体，第一电介质膜和第二电介质膜。 保持器主体具有保持放置在其上的待加工物体的保持部分和形成在保持部分的周边部分上以与聚焦环配合的凸缘。 第一电介质膜通过库仑力吸引放置在保持部上的待处理物体到保持器主体。 使用Johnson-Rahbek力，第二电介质膜通过大于第一电介质膜的吸引力将安装在凸缘上的聚焦环吸引到保持器主体。 用于保持器主体的聚焦环的静电吸引力增加，从而增加了冷却效果。 可以消除焦点环附近的等离子体处理特性随时间的变化，并且可以均匀地处理被处理物体的整个表面。

公开(公告)号：US20030101928A1

公开(公告)日：2003-06-05

申请号：US09998493

申请日：2001-11-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chih-Chen Chuang ,  Cheng-Hsiang Huang ,  Der-Yun Liu

IPC: B05C013/00

CPC classification number: H01L21/6715

Abstract: A dual cup spin coating system for capturing a discharged flowable coating material in a spin coating process including a first outer cup and a second outer cup said first outer cup concentrically disposed around the second outer cup forming a first capture space arranged for capturing at least a portion of a discharged flowable coating material discharged from a process substrate at a first positive angle with respect to the process substrate in a spin coating process; and, an inner cup disposed concentrically within the second outer cup forming a second capture space arranged for capturing at least a second portion of the discharged flowable coating material discharged from the process substrate at a second positive angle less than about the first positive angle with respect to the process substrate in a spin coating process.

Abstract translation: 一种双杯旋涂系统，用于在包括第一外杯和第二外杯的旋涂工艺中捕获排出的可流动涂层材料，所述第一外杯同时设置在第二外杯周围，形成第一捕获空间，其设置成用于捕获至少一个 在旋转涂布工艺中，从处理衬底以相对于处理衬底的第一正角度排出的可排出的可流动涂层材料的一部分; 以及同心地设置在所述第二外杯内的内杯，其形成第二捕获空间，所述第二捕获空间被布置成捕获从所述处理基板排出的排出的可流动涂层材料的至少第二部分，所述第二部分以小于约第一正角度的第二正角度相对于 在旋涂工艺中加工成基材。

公开(公告)号：US20030084841A1

公开(公告)日：2003-05-08

申请号：US10011460

申请日：2001-11-05

Inventor： Christian Coddet ,  Bernard Hansz

IPC: B05C011/00 ,  B05C013/00 ,  B05C013/02 ,  B05B001/24 ,  B05C005/04 ,  B05C005/00 ,  B05B015/04

CPC classification number: B05B13/0442 ,  B05B7/226 ,  B05B12/36 ,  C23C4/12 ,  C23C4/14

Abstract: The invention concerns a method which consists in maintaining the two ends (2, 4) of the bar (1) on the end supports (3, 5) of a frame (10), one of the ends (2) being maintained fixed, and in driving the bar in rotation. The invention is characterised in that it consists further in drawing the bar (1) while spraying a coat on the bar, the drawing of the bar corresponding to an elongation of about 0.2 to 0.001%.

Abstract translation: 本发明涉及一种方法，其包括将杆（1）的两端（2,4）保持在框架（10）的端部支撑件（3,5）上，其中一个端部（2）保持固定， 并在旋转中驱动杆。 本发明的特征在于，它进一步在拉伸棒材（1）的同时在棒材上喷涂涂层，拉伸棒材对应于约0.2至0.001％的伸长率。

公开(公告)号：US20030049380A1

公开(公告)日：2003-03-13

申请号：US10234605

申请日：2002-09-04

Applicant: METSO PAPER, INC.

Inventor： Jorma Kinnunen ,  Silvo Mikkonen ,  Jukka Linnonmaa

IPC: B05C013/00

CPC classification number: B65H19/107 ,  B65H26/00 ,  B65H2301/41361 ,  B65H2301/4148 ,  B65H2301/41734

Abstract: The invention concerns a method and a device in a paper machine, coating machine, intermediate winder, unwind stand of a slitter-winder, or in any other device for treatment of a web. In the event of disturbance, the web (P) is made to be wound in a controlled way around at least one web guide roll (18a).

公开(公告)号：US20020174829A1

公开(公告)日：2002-11-28

申请号：US10196787

申请日：2002-07-17

Applicant: LSI Logic Corporation

Inventor： Richard C. Gimmi ,  James E. Cossitt

IPC: B05C013/00

CPC classification number: G03F7/162

Abstract: A method of applying a layer of a flowable material to a substrate. The substrate is received with a rotatable chuck, and an amount of the flowable material is dispensed on to the substrate. The substrate is spun on the rotatable chuck, thereby spreading the flowable material across the substrate and conveying a surplus amount of the flowable material away from the substrate. An exhaust stream is created with a vacuum source. At least a portion of the surplus amount of the flowable material conveyed away from the substrate is entrained into the exhaust stream, which exhaust stream is conveyed into an exhaust system. A pressure drop is created in the exhaust stream across a vane anemometer within the exhaust system. The blow back of the entrained portion of the surplus amount of the flowable material from a downstream position in the exhaust system to the substrate is thereby reduced. Thus, positioning the vane anemometer in the exhaust system tends to create a sudden and distinct pressure drop across the vane anemometer, which tends to reduce the occurrence of blow back of the flowable material from the portion of the exhaust system that is downstream from the vane anemometer, and which is at a relatively lower pressure, to the portion of the exhaust system that is upstream from the vane anemometer, and which is at a relatively higher pressure, and which is where the substrate is processed.

Abstract translation: 将可流动材料层施加到基材的方法。 用可旋转卡盘接收基板，并将一定量的可流动材料分配到基板上。 基板在可旋转卡盘上旋转，从而将可流动材料铺展在基板上，并将多余的可流动材料输送离开基板。 用真空源产生排气流。 从基板输送的剩余量的可流动材料的至少一部分被夹带到排气流中，该排气流被输送到排气系统中。 在排气系统内的叶片风速计排气流中产生压降。 从而排气系统的下游位置到基板的剩余量的可流动材料的夹带部分的吹回减少。 因此，将叶片风速计定位在排气系统中倾向于在叶片风速计上产生突然且明显的压降，这倾向于减少可流动材料从叶片下游的排气系统的部分的吹回的发生 风速计，其处于相对较低的压力下，与位于叶片风速计上游的排气系统的部分相对较高的压力下，并且其中衬底被处理。

公开(公告)号：US20020150680A1

公开(公告)日：2002-10-17

申请号：US10089573

申请日：2002-03-29

Inventor： Jan Gajdosik ,  Jaroslav Trtik

IPC: C23C016/00 ,  B05D001/36 ,  B05D007/00 ,  B05C013/00 ,  B05C021/00

CPC classification number: C03C17/001 ,  A47G33/08 ,  C03C17/09 ,  C03C2217/25 ,  C03C2217/27 ,  C03C2217/72 ,  C03C2218/15

Abstract: A manufacturing process of Christmas tree decorations where glass half-products are first blown to required dimensions and shapes, including the process stem. This glass half-product is fixed into the rack and placed into the metal-coating device where, under vacuum conditions, a thin (1 to 7 microns) layer of metals and/or their alloys is coated on its surface by vacuum plating or vacuum powder coating processes. The metal-coated surfaces created this way may be finished in various colors using clear and color varnishes either gloss or matt. The glass half-products for Christmas tree decorations may be provided with shading in the place of intended decor before the half-product is put into the vacuum metal-coating device. After the shading elements are removed, clear non-coated spots are created on the decoration surfaces. The rack accommodating the glass half-products of decorations is for their placement into the metal-coating device when above methods are performed.

Abstract translation: 圣诞树装饰的制造过程，其中玻璃半成品首先被吹制成所需的尺寸和形状，包括工艺杆。 将这种玻璃半成品固定在机架上并放置在金属涂层装置中，在真空条件下，通过真空电镀或真空将薄（1至7微米）的金属和/或其合金涂覆在其表面上 粉末涂料工艺。 以这种方式制造的金属涂层表面可以用各种颜色完成，使用透明和彩色清漆，无论是光泽还是无光泽。 圣诞树装饰品的玻璃半制品在半成品放入真空金属涂层装置之前，可以在预期装饰的地方设置阴影。 在去除遮光元件之后，在装饰表面上形成清晰的未涂覆的斑点。 当进行上述方法时，容纳玻璃半装饰品的架子被放置在金属涂覆装置中。

公开(公告)号：US20020033133A1

公开(公告)日：2002-03-21

申请号：US09916643

申请日：2001-07-27

Inventor： Martin P. Klein ,  David Felsenthal ,  Piero Sferlazzo

IPC: B05C013/00

CPC classification number: H01L21/67346 ,  C23C14/50 ,  C23C14/568 ,  H01L21/68 ,  Y10S414/139

Abstract: A substrate processing pallet has a top surface and a plurality of side surfaces. The top surface has at least one recess adapted to receive a substrate. The recess includes a support structure adapted to contact a portion of a substrate seated in the recess and a plurality of apertures each adapted to accommodate a lift pin. Lift pins can extend through the apertures initially to support the substrate and retract to deposit the substrate onto the support structure. A side surface includes a process positioning feature adapted to engage with a feature located in a process chamber to position the pallet. A side surface includes a positioning feature adapted to engage with an end effector alignment feature to position the pallet with respect to the end effector during transport. A side surface includes support features adapted to engage with end effector support features to support the pallet during transport.

公开(公告)号：US20020005165A1

公开(公告)日：2002-01-17

申请号：US09886678

申请日：2001-06-21

Inventor： Thomas Matt

IPC: B05C013/00

CPC classification number: H01L21/67126 ,  C23C14/564 ,  C23C14/566

Abstract: Coating installation and method for disk-shaped workpieces having a transport chamber (3) with a workpiece transport configuration (11) and at least two linearly extendable and retractable transport rams (15) driven under control and connected to a rotational axis (A) that is also driven under control. The rams are within shell lines of a rotation body about the rotational axis (A) and can be extended and retracted in the same direction with respect to a direction on the rotational axis. A workpiece receiver (17) is at the ends of each ram (15) and at least two operating openings (19B, 19S) by which the transport chamber (3) communicates with stations (21, 23) are provided, of which one is a coating station and wherein the surface normals (N) of the operating openings are in the direction of shell lines of the rotation body. A pump unit (34) communicates via a pump opening (30) with the transport chamber (3) as well as for the coating station (21). At least one of the rams (15) has, at its end, a closure configuration (17) or can be equipped with one, orientable toward the pump opening and the closure configuration, and, with orientation of the ram (15) onto the pump opening (30) and subsequently its extension (F), enters into an operational connection forming a sealed closure.

Abstract translation: 具有具有工件输送构造（11）的输送室（3）和至少两个可直线驱动和可伸缩的输送柱塞（15）的盘形工件的涂覆装置和方法，所述输送室（15）在控制下被驱动并连接到旋转轴线（A） 也受到控制。 公制件围绕旋转轴线（A）旋转体的壳线内，并且可以相对于旋转轴线上的方向沿相同方向延伸和缩回。 工件接收器（17）位于每个压头（15）的端部，并且设置有运送室（3）与站（21,23）连通的至少两个操作开口（19B，19S），其中一个 涂覆站，并且其中操作开口的表面法线（N）在旋转体的外壳线的方向上。 泵单元（34）经由泵开口（30）与输送室（3）以及涂布站（21）连通。 所述柱塞（15）中的至少一个在其端部处具有闭合构造（17），或者可以配备有朝向泵开口和闭合构造定向的一个，并且随着冲头（15）的定向到 泵开口（30）和随后的其延伸部（F）进入形成密封盖的操作连接。

公开(公告)号：US20010050048A1

公开(公告)日：2001-12-13

申请号：US09848611

申请日：2001-05-03

Applicant: Duerr Systems GmbH

Inventor： Rolf Gutjahr ,  Edmund Krannich

IPC: B05C013/00

CPC classification number: C23G3/00 ,  B01D17/00 ,  B01D17/0208 ,  B01D17/0211 ,  B01D17/0214 ,  B01D17/12 ,  B01D21/02 ,  B01D21/2433 ,  B01D21/2488 ,  C23G1/36

Abstract: In order to produce a tank for accommodating a fluid used for the surface treatment of work pieces, especially vehicle bodies, wherein the fluid accommodated in the tank can be kept free of dirt particles with little outlay, it is proposed that the tank comprise dirt collecting compartments which are arranged in the base region of the tank.

Abstract translation: 为了生产用于容纳用于表面处理工件，特别是车体的流体的罐，其中容纳在罐中的流体可以保持没有少量污垢颗粒，因此建议罐包括污泥收集 隔室设置在罐的基部区域中。

公开(公告)号：US20010023821A1

公开(公告)日：2001-09-27

申请号：US09875424

申请日：2001-06-05

Inventor： Randy Harris ,  Daniel J. Woodruff

IPC: C25D017/00 ,  C25D017/04 ,  C25D017/06 ,  B05C013/00

CPC classification number: H01L21/67017 ,  C25D7/12 ,  C25D17/06

Abstract: A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotate assembly is removably and pivotally mounted to an exposed outer surface of the frame. The lift and rotate assembly has a body, a process head movably connected to the body, and control components mounted within the body and configured to move the process head relative to the body. The lift and rotate assembly in one embodiment is positionable in a forward, operating position with the body adjacent to the frame, and in a tilted, service position with the body tilted away from the frame.

Abstract translation: 用于工件加工台的升降和旋转组件。 提升和旋转组件包括具有细长轮廓的主体和位于相对侧上的销，用于将组件安装到工具框架上。 提升和旋转组件可拆卸地枢转地安装到框架的暴露的外表面。 提升和旋转组件具有主体，可移动地连接到主体的过程头，以及安装在主体内并被配置为相对于主体移动过程头的控制部件。 一个实施例中的提升和旋转组件可定位在身体相邻于框架的向前的操作位置中，并且在倾斜的使用位置，其中身体从框架倾斜。