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公开(公告)号:US12134271B2
公开(公告)日:2024-11-05
申请号:US18182577
申请日:2023-03-13
Applicant: SEMES CO., LTD.
Inventor: Dong Hwa Lee , Dai Geon Yoon , Bong Man Choi , Jong Suk Won , Hyeong Jun Cho
Abstract: Provided is a pressure control device for stably controlling the internal air pressure of a reservoir. The pressure control device includes: an input terminal receiving source air pressure; an intake valve connected between the input terminal and an output terminal; an exhaust valve connected to the output terminal; a pressure sensor connected to the output terminal and generating a sensed value by sensing pressure at the output terminal; and a controller simultaneously operating the intake valve and the exhaust valve by simultaneously operating a first control loop for adjusting the degree of opening of the intake valve by comparing the sensed value with a first target value and a second control loop for adjusting the degree of opening of the exhaust valve by comparing the sensed value with a second target value.
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402.
公开(公告)号:US12134268B2
公开(公告)日:2024-11-05
申请号:US17868080
申请日:2022-07-19
Applicant: SEMES CO., LTD.
Inventor: Dong Hyun Jun , Woon Sang Baek , Sang Hyuk Yun , Keun Hwa Yang , Hyung Suk Lee , Cheol Hyung Cho
IPC: B41J2/045
Abstract: The inventive concept provides an inkjet printing method. The inkjet printing method for discharging an ink on a substrate using a head having a plurality of nozzles formed thereon includes determining a grade of nozzles by measuring a discharge performance of the nozzles, which is a grading step; selecting a use nozzle that can participate in printing the substrate among the nozzles based on the grade determined at the grading step, which is a nozzle selecting step; and discharging the ink on the substrate using at least one nozzle among use nozzles, which is a printing step.
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公开(公告)号:US20240360634A1
公开(公告)日:2024-10-31
申请号:US18643124
申请日:2024-04-23
Applicant: SEMES CO., LTD.
Inventor: Hyuksoon Im
CPC classification number: E01D19/106 , B66F11/044
Abstract: A walkway structure includes a first frame spaced apart from the ground in a vertical direction and extending in a first horizontal direction, a footboard located on a side surface of the first frame and comprising at least one first hole, at least one bracket coupled to the footboard and the first frame, and a first coupler configured to couple the bracket to the first frame, wherein the bracket includes a first plate coupled to the footboard, a second plate coupled to the first plate, and a third plate coupled to the second plate, wherein a lower surface of the third plate is in contact with an upper surface of the first frame.
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公开(公告)号:US12131918B2
公开(公告)日:2024-10-29
申请号:US17667459
申请日:2022-02-08
Applicant: SEMES CO., LTD.
Inventor: Sang Min Lee , Seung Hoon Oh , Yong Joon Im , Hyo Won Yang
CPC classification number: H01L21/67028 , H01L21/67023 , B08B3/04 , F26B5/005 , H01L21/6719
Abstract: A substrate processing apparatus includes a process chamber including a first body and a second body that are coupled to each other to form a processing space therein, a clamping member configured to clamp the first body and the second body, and an anti-friction member mounted in a groove formed in a contact region between the first body or the second body and the clamping member.
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405.
公开(公告)号:US12112960B2
公开(公告)日:2024-10-08
申请号:US17474469
申请日:2021-09-14
Applicant: SEMES CO., LTD.
Inventor: Ohyeol Kwon , Soo Yeon Shin , Hyun Hoo Kim , Myung Chan Cho
CPC classification number: H01L21/67253 , G06N3/045 , G06T7/0004 , G06T2207/20081 , G06T2207/20084 , G06T2207/30148
Abstract: The inventive concept provides a method to determine whether a substrate treatment process is normal using a deep learning model. The method comprising receiving input on a substrate treatment process video, preprocessing the inputted video, using the deep learning model to study a preprocessed video, and determining whether the substrate treatment process is normal by comparing the trained model and a real time substrate treatment process video.
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公开(公告)号:US20240316923A1
公开(公告)日:2024-09-26
申请号:US18439488
申请日:2024-02-12
Applicant: SEMES CO., LTD.
Inventor: Sang Hyun PARK , Moo Hyung YI , Sung Ho CHOI
Abstract: The present disclosure provides a method and apparatus for forming a film, capable of for forming a film on an image in which a plurality of shapes overlap, wherein the method for forming a film includes setting a first shape within a target region; setting a second shape, at least partially overlapping the first shape; setting an edge processing profile applied to an edge portion of the first shape and an edge portion of the second shape; and forming a film on the edge portion of the first shape and the edge portion of the second shape, based on the edge processing profile.
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407.
公开(公告)号:US12097525B2
公开(公告)日:2024-09-24
申请号:US17960394
申请日:2022-10-05
Applicant: SEMES CO., LTD.
Inventor: Cheon Su Cho
CPC classification number: B05C11/00 , B05C5/0208
Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a head unit configured to discharge an ink to a substrate; a supply unit configured to supply the ink to the head unit and including a reservoir having an inner space; and a pressure adjusting unit configured to adjust a pressure of the inner space, and wherein the pressure adjusting unit comprises: a first pressure adjusting unit; and a second pressure adjusting unit in which a size for changing a pressure of the inner space per unit time is greater than the first pressure adjusting unit.
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公开(公告)号:US12094706B2
公开(公告)日:2024-09-17
申请号:US17901904
申请日:2022-09-02
Applicant: SEMES CO., LTD.
Inventor: Myung Chan Cho
CPC classification number: H01L21/02101 , H01L21/67023 , H01L21/67109 , H01L21/67248
Abstract: Provided is a substrate treating method. The substrate treating method includes: a first supercritical processing operation of loading a first substrate into a supercritical chamber and supercritically processing the first substrate in the supercritical chamber; a resting operation of maintaining the supercritical chamber in an empty state for a first time until a temperature in the supercritical chamber becomes a preset temperature by opening the supercritical chamber after the first substrate is unloaded from the supercritical chamber; and a second supercritical processing operation of loading a second substrate into the supercritical chamber and supercritically processing the second substrate in the supercritical chamber.
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公开(公告)号:US12082313B2
公开(公告)日:2024-09-03
申请号:US17531798
申请日:2021-11-21
Applicant: SEMES CO., LTD.
Inventor: Soon Hyun Kim , Byung Geun Kim , Byoung Chan Lee
IPC: H01L21/67 , F28D21/00 , H01L21/683 , H05B1/02 , H05B3/06
CPC classification number: H05B1/0233 , F28D21/0015 , H01L21/67144 , H05B3/06 , H01L21/6838
Abstract: A heater assembly includes a housing having an accommodation space therein and having a cooling gas inlet communicating with the accommodation space, a heater coupled to the housing, and a porous block disposed in the accommodation space.
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公开(公告)号:US20240281313A1
公开(公告)日:2024-08-22
申请号:US18582808
申请日:2024-02-21
Applicant: SEMES CO., LTD.
Inventor: Hojune LEE , Donghyun JUN
CPC classification number: G06F11/0751 , G06F11/3072
Abstract: An operating method of a system for analyzing abnormal data includes generating an anomaly detection model by using a training data set including a plurality of pieces of multivariate time-series data, comparing first time-series data input to the anomaly detection model with second time-series data output from the anomaly detection model through an operation on the first time-series data, determining whether or not the first time-series data includes abnormal data, on the basis of the comparison between the first time-series data and the second time-series data, comparing a first plurality of data elements included in the first time-series data with a second plurality of data elements included in the second time-series data, and detecting at least one data element on the basis of a result of comparing the first plurality of data elements with the second plurality of data elements.
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