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    ELECTRON BEAM EMISSION DEVICE
    422.
    发明申请
    ELECTRON BEAM EMISSION DEVICE 有权

    公开(公告)号：US20170263411A1

    公开(公告)日：2017-09-14

    申请号：US15508932

    申请日：2014-12-19

    Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

    Inventor： Eun Goo KANG ,  Seok Woo LEE ,  Hon Zong CHOI

    IPC: H01J29/84 ,  H01J29/00 ,  H01J29/04

    CPC classification number: H01J29/84 ,  H01J29/00 ,  H01J29/006 ,  H01J29/04 ,  H01J37/063 ,  H01J2229/0069 ,  H01J2229/4831

    Abstract: Disclosed is an electron beam emission device comprising a housing which defines a space in which electron beams are accelerated, and has an opening at the other side thereof through which the electron beams are emitted; a cathode which is disposed at one side in the housing, and emits the electrons; an anode which is positioned in the housing so as to be spaced apart from the cathode toward the other side, and accelerates the electrons emitted from the cathode; and an insulation holder which insulates a portion between the cathode and the housing, and fixes the cathode, wherein the cathode has a surface which faces the anode and is formed concavely to have a gradient, and a rim of the surface of the cathode, which has the gradient, is formed to be rounded.

    MULTI-FUNCTION SPECTROSCOPIC DEVICE
    423.
    发明申请
    MULTI-FUNCTION SPECTROSCOPIC DEVICE 有权

    公开(公告)号：US20170234674A1

    公开(公告)日：2017-08-17

    申请号：US15518875

    申请日：2015-10-05

    Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

    Inventor： Ho Jae LEE ,  Sang Seon LEE

    IPC: G01B9/02 ,  G01N21/45 ,  G01B11/24 ,  G01B11/06

    CPC classification number: G01B9/02044 ,  G01B11/06 ,  G01B11/0625 ,  G01B11/2441 ,  G01B11/30 ,  G01N21/45 ,  G01N21/8422 ,  G01N2201/068

    Abstract: The present invention relates to a multi-function spectroscopic device which includes a first lens installed in an emission direction of parallel light emitted by a parallel light generation part and configured to focus the light in a center portion thereof with respect to a light axis of the parallel light, a second lens disposed to face the first lens and configured to convert light which moves through a first focus of the first lens and is diffused into parallel light, a reference mirror installed to face the second lens to reflect light which moves through the second lens, a beam splitter installed between the first lens and the second lens and disposed to reflect some of the light which moves through the first lens in a direction intersecting a light axis of the first lens and to transmit the remaining light toward the second lens, a third lens configured to focus light which moves through the beam splitter onto a measurement object, a fourth lens configured to focus light which is reflected by the measurement object and reversely moves through the third mirror and the beam splitter, a fifth lens configured to convert light which is diffused through a second focus of the fourth lens into parallel light, and a diffraction grating obliquely disposed with respect to a light axis of the fifth lens and configured to diffract parallel light which moves through the fifth lens and split the parallel light. Such a multi-function spectroscopic device provides an advantage in that a film thickness, a surface shape, and a refractive index can be measured by using a desired measurement method using an integrated optical system.

    Reaction Chamber For Chemical Vapor Apparatus
    424.
    发明申请
    Reaction Chamber For Chemical Vapor Apparatus 审中-公开

    公开(公告)号：US20170233869A1

    公开(公告)日：2017-08-17

    申请号：US15518758

    申请日：2015-10-13

    Applicant: Korea Institute Of Industrial Technology

    Inventor： Chul Soo BYUN ,  Man Cheol HAN

    IPC: C23C16/455 ,  C23C16/46 ,  C23C16/458

    Abstract: Provided is a reaction chamber for a chemical vapor apparatus. The reaction chamber for a chemical vapor apparatus according to the exemplary embodiment of the present invention includes: a housing having an internal space; a susceptor disposed in the internal space and provided so that a substrate is loaded on an upper surface thereof; a showerhead disposed in the internal space to be placed above the susceptor and provided to spray a process gas toward the substrate side; an inner barrel formed in a hollow shape having an open top, an open bottom, and a predetermined height, and being disposed in the internal space so that an upper edge thereof is positioned at a periphery of the showerhead to enclose the substrate and the susceptor; and a driving part connected to the inner barrel via a power transmission part as a medium, wherein, in case of replacing the susceptor and the substrate, a state of the inner barrel is changed into an open state in which the substrate and the susceptor disposed in the inner barrel are exposed to the outside of the inner barrel by an operation of the driving part.

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