Electro-optical phase modulator
    473.
    发明授权

    公开(公告)号:US11822164B2

    公开(公告)日:2023-11-21

    申请号:US17009468

    申请日:2020-09-01

    Inventor: Stephane Monfray

    Abstract: An electro-optical phase modulator includes a waveguide made from a stack of strips. The stack includes a first strip made of a doped semiconductor material of a first conductivity type, a second strip made of a conductive material or of a doped semiconductor material of a second conductivity type, and a third strip made of a doped semiconductor material of the first conductivity type. The second strip is separated from the first strip by a first interface layer made of a dielectric material, and the third strip is separated from the second strip by a second interface layer made of a dielectric material.

    METHOD FOR MANUFACTURING MICROLENSES
    474.
    发明公开

    公开(公告)号:US20230361151A1

    公开(公告)日:2023-11-09

    申请号:US18298781

    申请日:2023-04-11

    CPC classification number: H01L27/14685 H01L27/14627

    Abstract: In accordance with an embodiment, a method for manufacturing an optical device on a support substrate includes: forming first microlens structures on the support substrate using a first photolithography process such that the first microlens structures are separated from one another; deforming the first microlens structures so as to give the first microlens structures a curved shape, wherein the first microlens structures are separated from one another by spacer regions after deformation; forming second microlens structures substrate using a second photolithography process such that the second microlens structures extend over the first microlens structures; and deforming the second microlens structures such that the second microlens structures have a curved form matching the curved shape of the first microlens structures and extend partly into the spacer regions between the first microlens structures.

    Capacitive optical modulator
    479.
    发明授权

    公开(公告)号:US11686992B2

    公开(公告)日:2023-06-27

    申请号:US17476668

    申请日:2021-09-16

    CPC classification number: G02F1/2257 G02F1/025 G02F1/035 G02F2202/103

    Abstract: A capacitive electro-optical modulator includes a silicon layer having a cavity having sidewalls and a floor. A germanium or silicon-germanium strip overlies the silicon layer within the cavity. A silicon strip overlies the germanium or silicon-germanium strip within the cavity. The silicon strip is wider than the germanium or silicon-germanium strip. An insulator fills the cavity laterally adjacent the germanium or silicon-germanium strip and the silicon strip and extending between the sidewalls of the cavity. An upper insulating layer overlies the silicon strip and the insulator. A layer of III-V material overlies the upper insulating layer. The layer of III-V material formed as a third strip is arranged facing the silicon strip and separated therefrom by a portion of the upper insulating layer.

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