Abstract:
An electron emission device with conductive layers for preventing accumulation of static charges on an insulating layer of the device is shown that does not require an independent driving circuit. The device includes cathode electrodes formed on a substrate and separated from gate electrodes by an insulating layer formed over the cathode electrodes, all inside a partial vacuum chamber. Crossings of cathode and gate electrodes form the display areas while in the non-display areas of the insulating layer, that are susceptible to accumulation of electrostatic charge, conductive layers are formed parallel to the cathode or gate electrodes, for the most part separated from these electrodes by the insulating layer. Outside the device chamber, the conductive layers are electrically coupled to their corresponding electrodes. Conductive layers thus formed and coupled discharge accumulated static charge over the insulating layers inside the device to the outside circuit.
Abstract:
An electron emission device can include gate electrodes formed on a substrate and cathode electrodes insulated from the gate electrodes with an insulating layer interposed between them. Each cathode electrode can have a receptor at a peripheral side. Electron emission regions may be formed within the receptors and in contact with the cathode electrodes. Counter electrodes can face the cathode electrodes, can be coplanar with the cathode electrodes, and can be coupled to the gate electrodes. The shortest distance between the electron emission region and the counter electrode may be smaller than the shortest distance between the cathode electrode and the counter electrode.
Abstract:
Disclosed is an electron emission device and an electron emission display using the same, wherein the electron emission device has an improved structure for focusing an electron beam. The electron emission device comprises: first and second electrodes formed on a plate and spaced from each other by a predetermined distance; an insulator formed on the entire area of the plate and formed with an opening through which a portion of the first electrode between the first and second electrodes is at least partially exposed; an electron emitter formed on a predetermined region of the first electrode and exposed through the opening; and a third electrode formed on the insulator and connected to the second electrode, wherein a voltage difference between the first and second electrodes causes the electron emitter to emit an electron and the emitted electron is focused by the third electrode.
Abstract:
An object of the present invention is to suppress measurement errors caused by the fact that the shrink amount due to scan of an electron beam differs pattern by pattern. To accomplish this object, according to the invention, functions indicative of a process of change of pattern dimension when the electron beam is irradiated on a sample are prepared in respect of the kinds of sample patterns, and dimension values of a particular pattern measured by scanning the electron beam on the particular pattern are fitted to a function prepared for the particular pattern to calculate a dimension of the particular pattern before it changes.
Abstract:
An electron emission device includes first and second substrates facing each other, first and second electrodes and electron emission regions formed on the first substrate, and an anode electrode and phosphor layers formed on the second substrate. A correction electrode is disposed between the first and second substrates that has a first sub-electrode with comb tooth portions arranged on one side of the electron emission regions, and a second sub-electrode with comb tooth portions on the opposite side.
Abstract:
A cold cathode device (20) includes a grid (24), a cold cathode (21) positioned under the grid, and a shield electrode (26) positioned above and parallel to the grid. A vacuum gauge includes a shell (32), a collector (39), an anode (38), and the cold cathode device of the present invention. The cold cathode device and the collector are positioned symmetrically relative to the anode. The collector, the grid and the cold cathode device are received in the shell. The shield electrode can shield an electric field of the grid for preventing from disturbing a symmetrical saddle field in the vacuum gauge. Electrons produced by the cold cathode device can obtain a long electron track because the electron vibration in the saddle field is symmetrical. Thus, the vacuum gauge has an improved sensitivity, and can be widely used to measure pressure in ultra-high and extremely high vacuum conditions.
Abstract:
A cathode structure of a field emission device includes a gate electrode that is protected by a passivation layer. In one method for manufacturing such a field emission device, an emitter hole is formed through an insulating layer such that the passivation layer overhangs the gate layer, which overhangs an insulating layer. When used in a display system, the gate layer is exposed to an emitter electrode but shielded from an anode.
Abstract:
A negative hole is formed by etching a dielectric layer that includes at least a lower dielectric sublayer and an upper dielectric sublayer. The lower dielectric sublayer and the upper dielectric sublayer have substantially the same permittivity, and the lower dielectric sublayer may have a higher etching rate lower than the upper dielectric sublayer. The negative hole formed in the upper and lower dielectric sublayers has an etched profile with a protruded portion protruding from at least the boundary between the lower dielectric sublayer and the upper dielectric sublayer. With various embodiments of the disclosed invention, resistance between the cathode and the gate may be secured to prevent arc generation and signal distortion.
Abstract:
An electron emission device includes first and second substrates opposing one another with a gap therebetween. Cathode electrodes are formed on the first substrate. An insulation layer is formed covering the cathode electrodes and having apertures. Gate electrodes are formed on the insulation layer and have apertures at locations corresponding to the locations of the apertures of the insulation layer so as to expose the cathode electrodes. Electron emission regions are formed in the apertures on the cathode electrodes. An anode electrode is formed on the second substrate. An outer surface of the electron emission regions is formed with a shape similar to a shape of equipotential lines formed when there is no electron emission region in the apertures, and predetermined drive voltages are applied to the electrodes.
Abstract:
A field emission device having a focusing control electrode, and a field emission display (FED) including the same. The field emission device includes a substrate, a cathode electrode formed on the substrate, a focusing control insulating layer formed on the cathode electrode, and having a first cavity that exposes a portion of the cathode electrode, an electron emission source disposed on the cathode electrode that is exposed by the first cavity, a focusing control electrode formed on the focusing control insulating layer and including a focusing control hole aligned with the first cavity, the focusing control electrode controlling the focus of an electron beam emitted from the electron emission source upon applying to the focusing control electrode a voltage that is lower than the potential of the cathode electrode, a gate insulating layer formed on the focusing control electrode, and having a second cavity aligned with the first cavity, and a gate electrode formed on the gate insulating layer, and having a gate hole aligned with the second cavity.