NONVOLATILE PROGRAMMABLE SWITCH DEVICE USING PHASE-CHANGE MEMORY DEVICE AND METHOD OF MANURACTURING THE SAME
    41.
    发明申请
    NONVOLATILE PROGRAMMABLE SWITCH DEVICE USING PHASE-CHANGE MEMORY DEVICE AND METHOD OF MANURACTURING THE SAME 有权
    使用相变存储器件的非易失性可编程开关器件及其制造方法

    公开(公告)号:US20100108977A1

    公开(公告)日:2010-05-06

    申请号:US12428628

    申请日:2009-04-23

    Abstract: A nonvolatile programmable switch device using a phase-change memory device and a method of manufacturing the same are provided. The switch device includes a substrate, a first metal electrode layer disposed on the substrate and including a plurality of terminals, a phase-change material layer disposed on the substrate and having a self-heating channel structure, the phase-change material layer having a plurality of introduction regions electrically contacting the terminals of the first metal electrode layer and a channel region interposed between the introduction regions, an insulating layer disposed on the first metal electrode layer and the phase-change material layer, a via hole disposed on the first metal electrode layer, and a second metal electrode layer disposed to fill the via hole. The switch device performs memory operations using resistive heating of a phase-change material without an additional heater electrode, thereby minimizing thermal loss due to thermal conductivity of a metal electrode to reduce power consumption of the switch device.

    Abstract translation: 提供了一种使用相变存储器件的非易失性可编程开关器件及其制造方法。 开关装置包括基板,设置在基板上的多个端子的第一金属电极层,设置在基板上并具有自加热沟道结构的相变材料层,相变材料层具有 与第一金属电极层的端子和介于导入区域之间的沟道区域电接触的多个导入区域,设置在第一金属电极层和相变材料层上的绝缘层,设置在第一金属 电极层和设置成填充通孔的第二金属电极层。 开关装置利用相变材料的电阻加热来执行存储器操作,而不需要额外的加热器电极,从而最小化由于金属电极的热导率导致的热损失,从而降低开关器件的功耗。

    PHASE CHANGE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
    42.
    发明申请
    PHASE CHANGE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME 有权
    相变存储器件及其制造方法

    公开(公告)号:US20090184307A1

    公开(公告)日:2009-07-23

    申请号:US12240013

    申请日:2008-09-29

    Abstract: A phase change memory device and a method of fabricating the same are provided. A phase change material layer of the phase change memory device is formed of germanium (Ge)-antimony (Sb)-Tellurium (Te)-based Ge2Sb2+xTe5 (0.12≦x≦0.32), so that the crystalline state is determined as a stable single phase, not a mixed phase of a metastable phase and a stable phase, in phase transition between crystalline and amorphous states of a phase change material, and the phase transition according to increasing temperature directly transitions to the single stable phase from the amorphous state. As a result, set operation stability and distribution characteristics of set state resistances of the phase change memory device can be significantly enhanced, and an amorphous resistance can be maintained for a long time at a high temperature, i.e., around crystallization temperature, and thus reset operation stability and rewrite operation stability of the phase change memory device can be significantly enhanced.

    Abstract translation: 提供了一种相变存储器件及其制造方法。 相变存储器件的相变材料层由锗(Ge) - 锑(Sb) - 碲(Te)基Ge2Sb2 + xTe5(0.12 <= x <= 0.32)形成,从而确定晶体状态 作为稳定的单相,不是相变材料的晶态和非晶态之间的相转变中的亚稳相和稳定相的混合相,并且根据升温的相变随着温度的升高直接转变为单稳态 非晶态。 结果,可以显着提高相变存储器件的设定状态电阻的设定操作稳定性和分布特性,并且可以在高温下(即,结晶温度附近)长时间保持非晶形电阻,并因此复位 可以显着提高相变存储器件的操作稳定性和重写操作的稳定性。

    Semiconductor device having heat release structure using SOI substrate and fabrication method thereof
    47.
    发明授权
    Semiconductor device having heat release structure using SOI substrate and fabrication method thereof 有权
    具有使用SOI衬底的放热结构的半导体器件及其制造方法

    公开(公告)号:US06759714B2

    公开(公告)日:2004-07-06

    申请号:US10322232

    申请日:2002-12-17

    Abstract: Provided is a semiconductor fabrication technology; and, more particularly, to a semiconductor device having a heat release structure that uses a silicon-on-insulator (SOI) substrate, and a method for fabricating the semiconductor device. The device and method of the present research provides a semiconductor device having a high heat-release structure and high heat-release structure, and a fabrication method thereof. In the research, the heat and high-frequency noises that are generated in the integrated circuit are released outside of the substrate through the tunneling region quickly by forming an integrated circuit on a silicon-on-insulator (SOI) substrate, aiid removing a buried insulation layer under the integrated circuit to form a tunneling region. The heat-release efficiency can be enhanced much more, when unevenness is formed on the surfaces of the upper and lower parts of the tunneling region, or when the air or other gases having excellent heat conductivity is flown into the tunneling region.

    Abstract translation: 提供半导体制造技术; 更具体地说,涉及具有使用绝缘体上硅(SOI)衬底的散热结构的半导体器件,以及制造半导体器件的方法。 本研究的装置和方法提供了具有高散热结构和高放热结构的半导体器件及其制造方法。 在研究中,通过在绝缘体上硅(SOI)衬底上形成集成电路,快速地通过隧道区域在衬底外部释放集成电路中产生的热和高频噪声,除去埋入 集成电路下的绝缘层形成隧道区。 当在隧道区域的上部和下部的表面上形成不均匀时,或者当具有优良导热性的空气或其它气体流入隧道区域时,可以进一步提高散热效率。

    Transparent nonvolatile memory thin film transistor and method of manufacturing the same
    49.
    发明授权
    Transparent nonvolatile memory thin film transistor and method of manufacturing the same 有权
    透明非易失性存储器薄膜晶体管及其制造方法

    公开(公告)号:US08476106B2

    公开(公告)日:2013-07-02

    申请号:US13469558

    申请日:2012-05-11

    CPC classification number: H01L21/28291 H01L29/78391 H01L29/7869

    Abstract: Provided are a transparent nonvolatile memory thin film transistor (TFT) and a method of manufacturing the same. The memory TFT includes source and drain electrodes disposed on a transparent substrate. A transparent semiconductor thin layer is disposed on the source and drain electrodes and the transparent substrate interposed between the source and drain electrodes. An organic ferroelectric thin layer is disposed on the transparent semiconductor thin layer. A gate electrode is disposed on the organic ferroelectric thin layer in alignment with the transparent semiconductor thin layer. Thus, the transparent nonvolatile memory TFT employs the organic ferroelectric thin layer, the oxide semiconductor thin layer, and auxiliary insulating layers disposed above and below the organic ferroelectric thin layer, thereby enabling low-cost manufacture of a transparent nonvolatile memory device capable of a low-temperature process.

    Abstract translation: 提供了一种透明非易失性存储器薄膜晶体管(TFT)及其制造方法。 存储TFT包括设置在透明基板上的源极和漏极。 透明半导体薄层设置在源电极和漏电极之间,并且透明基板设置在源极和漏极之间。 有机铁电薄层设置在透明半导体薄层上。 栅电极与透明半导体薄层对准地设置在有机铁电薄层上。 因此,透明非易失性存储器TFT采用有机铁电薄层,氧化物半导体薄层和设置在有机铁电薄层之上和之下的辅助绝缘层,从而能够低成本地制造能够低的透明非易失性存储器件 温度过程。

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