Resonant structure-based display
    41.
    发明申请
    Resonant structure-based display 失效
    基于结构的共振显示

    公开(公告)号:US20070152938A1

    公开(公告)日:2007-07-05

    申请号:US11325432

    申请日:2006-01-05

    Abstract: A display of wavelength elements can be produced from resonant structures that emit light (and other electromagnetic radiation having a dominant frequency higher than that of microwave) when exposed to a beam of charged particles, such as electrons from an electron beam. An exemplary display with three wavelengths per pixel utilizes three resonant structures per pixel. The spacings and lengths of the fingers of the resonant structures control the light emitted from the wavelength elements. Alternatively, multiple resonant structures per wavelength can be used as well.

    Abstract translation: 当暴露于带电粒子束(例如来自电子束的电子)时,可以从发出光的谐振结构(和具有高于微波的主频的其他电磁辐射)产生波长元件的显示。 每像素具有三个波长的示例性显示器每像素使用三个谐振结构。 谐振结构的指状物的间距和长度控制从波长元件发射的光。 或者,也可以使用每个波长的多个谐振结构。

    Method of patterning ultra-small structures
    42.
    发明申请
    Method of patterning ultra-small structures 审中-公开
    图案超小结构的方法

    公开(公告)号:US20070034518A1

    公开(公告)日:2007-02-15

    申请号:US11203407

    申请日:2005-08-15

    CPC classification number: C25D5/18 C25D5/022

    Abstract: We describe a process to produce ultra-small structures of between ones of nanometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished with pulsed electroplating techniques using ultra-short pulses in a controlled and predictable manner.

    Abstract translation: 我们描述了一种制造尺寸为纳米至数百微米之间的超小结构的方法,其中结构是紧凑的,无孔的并且呈现平滑的垂直表面。 使用脉冲电镀技术以受控和可预测的方式使用超短脉冲来实现这种处理。

    Patterning thin metal films by dry reactive ion etching
    43.
    发明申请
    Patterning thin metal films by dry reactive ion etching 审中-公开
    通过干式反应离子蚀刻来形成薄金属薄膜

    公开(公告)号:US20060035173A1

    公开(公告)日:2006-02-16

    申请号:US10917511

    申请日:2004-08-13

    CPC classification number: H01L21/32136 H01L21/32139

    Abstract: We describe a new method for etching patterns in silver, copper, or gold, or other plate metal thin films. A pattern of a hard mask is placed onto the surface of the thin film, followed by a step of reactive ion etching using a plasma formed using a gas feed of some combination of some amounts of methane (CH4) and hydrogen (H2), and some or no amount of Argon (Ar). The areas of silver, copper or gold not covered by the hard mask are etched while the hard mask protects those areas that will form the raised portions of thin film in the final structure.

    Abstract translation: 我们描述了一种蚀刻银,铜或金或其他板金属薄膜图案的新方法。 将硬掩模的图案放置在薄膜的表面上,然后使用使用一些组合的一些量的甲烷(CH 3 SO 4)的气体进料形成的等离子体进行反应离子蚀刻的步骤 )和氢(H 2 H 2),以及一些或不含氩量(Ar)。 蚀刻没有被硬掩模覆盖的银,铜或金的区域,而硬掩模保护在最终结构中将形成薄膜的凸起部分的那些区域。

    Mireau interference objective lens v3
    44.
    发明申请
    Mireau interference objective lens v3 失效
    Mireau干涉物镜v3

    公开(公告)号:US20060007557A1

    公开(公告)日:2006-01-12

    申请号:US10886817

    申请日:2004-07-08

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G02B21/02 G02B27/0068

    Abstract: A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.

    Abstract translation: 通过并入玻璃校正物镜,对分光镜和反射镜支撑窗所引起的球面和其它像差校正Mireau干涉显微镜。 用于分束器和反射镜的支撑窗口具有在玻璃校正物镜的调节范围内的组合厚度。

    Interference scatterometer
    46.
    发明申请
    Interference scatterometer 有权
    干涉散射仪

    公开(公告)号:US20050046855A1

    公开(公告)日:2005-03-03

    申请号:US10647742

    申请日:2003-08-25

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G03F7/70633 G01J3/453 G01N21/95684

    Abstract: An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.

    Abstract translation: 干涉光谱仪可以同时测量多个波长和角度上的镜面散射。 光谱仪器包括由科勒照明器照明的干涉显微镜和摄像机,其用于对显微镜物镜的后焦面进行成像,同时路径长度差在参考路径和对象路径之间变化。 多通道傅里叶分析将合成的强度信息转换为镜面反射率数据作为波长的函数。 这种大量的测量数据提供了一种更敏感的散射测量工具,在测量半导体器件上的小图案以及测量这些器件上的覆盖层方面具有卓越的性能。

    Mini-optics solar energy concentrator
    47.
    发明授权
    Mini-optics solar energy concentrator 失效
    迷你光学太阳能集中器

    公开(公告)号:US06843573B2

    公开(公告)日:2005-01-18

    申请号:US10424267

    申请日:2003-04-28

    Abstract: This invention deals with the broad general concept for focussing light. A mini-optics tracking and focusing system is presented for solar power conversion that ranges from an individual's portable system to solar conversion of electrical power that can be used in large scale power plants for environmentally clean energy. It can be rolled up, transported, and attached to existing man-made, or natural structures. It allows the solar energy conversion system to be low in capital cost and inexpensive to install as it can be attached to existing structures since it does not require the construction of a superstructure of its own. This novel system is uniquely distinct and different from other solar tracking and focusing processes allowing it to be more economical and practical. Furthermore, in its capacity as a power producer, it can be utilized with far greater safety, simplicity, economy, and efficiency in the conversion of solar energy.

    Abstract translation: 本发明涉及聚焦光的广泛的概念。 提出了一种用于太阳能转换的微型光学跟踪和聚焦系统,从个人的便携式系统到可用于环境清洁能源的大型发电厂的电力的太阳能转换。 它可以卷起,运输,并附着在现有的人造或天然结构上。 它允许太阳能转换系统的资本成本低,并且安装成本低廉,因为它可以附着到现有的结构上,因为它不需要构造自己的上部结构。 这种新颖的系统是独特的,不同于其他太阳能跟踪和聚焦过程,使其更经济实用。 此外,作为电力生产企业,太阳能转换的安全性,简便性,经济性和效率都可以得到更大的利用。

    Aplanatic microlens and method for making same
    48.
    发明授权
    Aplanatic microlens and method for making same 失效
    微波微透镜及其制作方法

    公开(公告)号:US5282088A

    公开(公告)日:1994-01-25

    申请号:US963064

    申请日:1992-10-19

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G02B6/3834 G02B3/00 G02B6/2552 G02B6/4206

    Abstract: An aplanatic microlens consisting of a sphere which is less than one millimeters in diameter. The sphere is made of a transparent material and has a plane surface ground into it so that the radial distance from the center of the sphere to the nearest point on the plane surface is equal to the radius of the sphere divided by the ratio of the index of refraction of the transparent material and the index of refraction of the medium which will surround the lens in use.

    Abstract translation: 由直径小于1毫米的球体组成的微细微透镜。 球体由透明材料制成,并具有一个平面表面磨合成平面,使得从球体中心到平面上最近点的径向距离等于球体的半径除以指数的比值 透明材料的折射率和在使用中将围绕透镜的介质的折射率。

    LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION
    49.
    发明申请
    LOW COHERENCE INTERFEROMETRY WITH SCAN ERROR CORRECTION 有权
    低相干干涉与扫描误差校正

    公开(公告)号:US20130155413A1

    公开(公告)日:2013-06-20

    申请号:US13765936

    申请日:2013-02-13

    Abstract: A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source. The system includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light, a multi-element detector positioned at the image plane and configured to record the interference pattern for each of a series of OPD increments and to generate multiple interferometry signals each having a fringe carrier frequency indicative of changes in the OPD as the OPD is scanned, where there is phase diversity among the interferometry signals, and an electronic processor coupled to the multi-element detector and scanning stage and configured to process the interference signals based on the phase diversity to determine information about the OPD increments having sensitivity to perturbations to the OPD increments at frequencies greater than the fringe carrier frequency.

    Abstract translation: 一种系统包括具有一个或多个光学元件的干涉显微镜,该光学元件被布置成通过将来自测试对象的测试光与来自参考对象的参考光组合在一起而在图像平面上形成干涉图案来将测试对象图像成像平面,其中测试 参考光源自普通宽带光源。 该系统包括被配置为扫描测试和参考光之间的光程差(OPD)的扫描级,位于图像平面处的多元件检测器,并且被配置为记录一系列OPD增量中的每一个的干涉图案,并且 生成多个干涉测量信号,每个干涉测量信号具有指示在扫描OPD时OPD变化的边缘载波频率,其中在干涉测量信号之间存在相位分集,以及耦合到多元件检测器和扫描级的电子处理器并且被配置为处理 基于相位分集的干扰信号以确定关于具有对大于边缘载波频率的频率的对OPD的扰动敏感度的OPD增量的信息。

    Fiber-based interferometer system for monitoring an imaging interferometer
    50.
    发明授权
    Fiber-based interferometer system for monitoring an imaging interferometer 有权
    用于监测成像干涉仪的基于光纤的干涉仪系统

    公开(公告)号:US08379218B2

    公开(公告)日:2013-02-19

    申请号:US12551308

    申请日:2009-08-31

    Abstract: Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system, that includes a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between a first portion and a second portion of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the first and second portions of the light to provide output light, a detector configured to detect the output light from the interferometric sensor, a fiber waveguide configured to direct light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity in a path of the light from the sensor light source and the interferometric sensor, and an electronic controller in communication with the detector, the electronic controller being configured to determine information related to the OPD based on the detected output light.

    Abstract translation: 装置包括显微镜,其包括物镜和用于相对于物镜定位测试对象的台,该台可相对于物镜移动;以及传感器系统,其包括传感器光源,干涉测量传感器,其被配置为从 所述传感器光源在所述光的第一部分和所述第二部分之间引入光程差(OPD),所述OPD与所述物镜与所述台之间的距离有关,并且将所述第一和第二部分 提供输出光的光,被配置为检测来自干涉测量传感器的输出光的检测器,配置成在传感器光源,干涉测量传感器和检测器之间引导光的光纤波导,在光的路径中的可调光学腔 来自传感器光源和干涉测量传感器以及与检测器通信的电子控制器,该电子控制器是共同的 根据检测到的输出光确定与OPD相关的信息。

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