Abstract:
A display of wavelength elements can be produced from resonant structures that emit light (and other electromagnetic radiation having a dominant frequency higher than that of microwave) when exposed to a beam of charged particles, such as electrons from an electron beam. An exemplary display with three wavelengths per pixel utilizes three resonant structures per pixel. The spacings and lengths of the fingers of the resonant structures control the light emitted from the wavelength elements. Alternatively, multiple resonant structures per wavelength can be used as well.
Abstract:
We describe a process to produce ultra-small structures of between ones of nanometers to hundreds of micrometers in size, in which the structures are compact, nonporous and exhibit smooth vertical surfaces. Such processing is accomplished with pulsed electroplating techniques using ultra-short pulses in a controlled and predictable manner.
Abstract:
We describe a new method for etching patterns in silver, copper, or gold, or other plate metal thin films. A pattern of a hard mask is placed onto the surface of the thin film, followed by a step of reactive ion etching using a plasma formed using a gas feed of some combination of some amounts of methane (CH4) and hydrogen (H2), and some or no amount of Argon (Ar). The areas of silver, copper or gold not covered by the hard mask are etched while the hard mask protects those areas that will form the raised portions of thin film in the final structure.
Abstract translation:我们描述了一种蚀刻银,铜或金或其他板金属薄膜图案的新方法。 将硬掩模的图案放置在薄膜的表面上,然后使用使用一些组合的一些量的甲烷(CH 3 SO 4)的气体进料形成的等离子体进行反应离子蚀刻的步骤 )和氢(H 2 H 2),以及一些或不含氩量(Ar)。 蚀刻没有被硬掩模覆盖的银,铜或金的区域,而硬掩模保护在最终结构中将形成薄膜的凸起部分的那些区域。
Abstract:
A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.
Abstract:
A conveyor is disclosed suitable for conveying objects such as containers to a processing station. The conveyor includes a plurality of connected links, and at least one gripping member extending from each of the links. Each gripping member is movable relative to its respective link for gripping a container by the neck of the container. A guide structure is disposed on the link for mating a component of the processing station to the neck of the container for processing the container. The processing station may be a filler such as a rotary filler, a capper, or a rinser. Related individual links, conveying systems, and filler components are also disclosed.
Abstract:
An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.
Abstract:
This invention deals with the broad general concept for focussing light. A mini-optics tracking and focusing system is presented for solar power conversion that ranges from an individual's portable system to solar conversion of electrical power that can be used in large scale power plants for environmentally clean energy. It can be rolled up, transported, and attached to existing man-made, or natural structures. It allows the solar energy conversion system to be low in capital cost and inexpensive to install as it can be attached to existing structures since it does not require the construction of a superstructure of its own. This novel system is uniquely distinct and different from other solar tracking and focusing processes allowing it to be more economical and practical. Furthermore, in its capacity as a power producer, it can be utilized with far greater safety, simplicity, economy, and efficiency in the conversion of solar energy.
Abstract:
An aplanatic microlens consisting of a sphere which is less than one millimeters in diameter. The sphere is made of a transparent material and has a plane surface ground into it so that the radial distance from the center of the sphere to the nearest point on the plane surface is equal to the radius of the sphere divided by the ratio of the index of refraction of the transparent material and the index of refraction of the medium which will surround the lens in use.
Abstract:
A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source. The system includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light, a multi-element detector positioned at the image plane and configured to record the interference pattern for each of a series of OPD increments and to generate multiple interferometry signals each having a fringe carrier frequency indicative of changes in the OPD as the OPD is scanned, where there is phase diversity among the interferometry signals, and an electronic processor coupled to the multi-element detector and scanning stage and configured to process the interference signals based on the phase diversity to determine information about the OPD increments having sensitivity to perturbations to the OPD increments at frequencies greater than the fringe carrier frequency.
Abstract:
Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system, that includes a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between a first portion and a second portion of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the first and second portions of the light to provide output light, a detector configured to detect the output light from the interferometric sensor, a fiber waveguide configured to direct light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity in a path of the light from the sensor light source and the interferometric sensor, and an electronic controller in communication with the detector, the electronic controller being configured to determine information related to the OPD based on the detected output light.