公开(公告)号：US09799545B2

公开(公告)日：2017-10-24

申请号：US14397297

申请日：2013-03-22

Applicant: TOCALO CO., LTD.

Inventor： Ryo Yamasaki ,  Mitsuharu Inaba ,  Kensuke Taguchi

IPC: H01L21/683 ,  C23C4/12 ,  H02N13/00 ,  H01L21/67 ,  C23C4/11 ,  C23C4/01

CPC classification number: H01L21/6833 ,  C23C4/01 ,  C23C4/11 ,  C23C4/12 ,  H01L21/67103 ,  H01L21/6831 ,  H02N13/00

Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

公开(公告)号：US09421570B2

公开(公告)日：2016-08-23

申请号：US14376647

申请日：2012-10-26

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Kenichiro Togoe

IPC: C23C4/04 ,  B05D1/02 ,  C23C4/02 ,  B05B7/20

CPC classification number: B05D1/02 ,  B05B7/205 ,  B05D2350/33 ,  C23C4/02 ,  C23C4/04 ,  Y10T428/12056 ,  Y10T428/24372 ,  Y10T428/24413

Abstract: [Problem] To provide a fluoride spray coating covered member adhered with a fluoride spray coating having excellent properties on quality by suppressing a thermal decomposition reaction and an oxide reaction, and to propose a method for forming a cover by firmly adhering the coating.[Solution] A method for forming a fluoride spray coating in an implantation structure onto a substrate surface by spraying particles of a fluoride spraying material onto a substrate surface or a pretreated substrate surface, if necessary through an undercoat layer or spray particle dotted parts of carbide cermet, at a flying velocity of particles of not less than 500 m/sec with an inert gas as a working gas for coating formation at an inert gas temperature of 600° C.-1300° C. as well as a fluoride spray coating covered member.

Abstract translation: [问题]通过抑制热分解反应和氧化反应来提供通过抑制热分解反应和氧化物反应而具有优异质量性质的氟化物喷涂的氟喷涂层覆盖部件，并提出通过牢固地粘合涂层来形成盖的方法。 [解决方案]通过将氟化物喷涂材料的颗粒喷涂到基材表面或预处理的基材表面上，如果需要，通过底涂层或喷涂颗粒的碳化物的点部分将喷涂结构中的氟化物喷涂形成形成在基材表面上的方法 金属陶瓷以不小于500m / sec的颗粒的飞行速度，在惰性气体温度为600℃-1300℃下以惰性气体作为用于涂层形成的工作气体，以及覆盖氟化物喷涂层 会员。

公开(公告)号：US09238863B2

公开(公告)日：2016-01-19

申请号：US14373505

申请日：2013-01-16

Applicant: TOCALO CO., LTD.

Inventor： Yoshio Harada ,  Takema Teratani ,  Shinya Miki ,  Kenichiro Togoe

IPC: B32B3/00 ,  C23C14/48 ,  C23C4/04 ,  C23C4/18

CPC classification number: C23C14/48 ,  C23C4/04 ,  C23C4/18 ,  Y10T428/24802

Abstract: This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

Abstract translation: 本发明提供一种具有优异的抗卤素腐蚀性和耐等离子体侵蚀性的氟喷涂层覆盖部件，并显示字母，数字，图形，图案，公司名称，序列号等识别符号。 在本发明中，将选自含氟气体，氧气和惰性气体的一种或多种注入气体离子注入到形成在基材表面上的白色氟化物喷涂层上，由此白色表面的至少一部分 氟化物喷涂改为黑色，形成黑色离子注入层。

公开(公告)号：US20150116889A1

公开(公告)日：2015-04-30

申请号：US14397297

申请日：2013-03-22

Applicant: TOCALO CO., LTD.

Inventor： Ryo Yamasaki ,  Mitsuharu Inaba ,  Kensuke Taguchi

IPC: H01L21/683 ,  C23C4/12

CPC classification number: H01L21/6833 ,  C23C4/01 ,  C23C4/11 ,  C23C4/12 ,  H01L21/67103 ,  H01L21/6831 ,  H02N13/00

Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

Abstract translation: 公开了一种静电卡盘和制造方法，其中不存在使用粘合剂的缺点，自由度高。 静电卡盘包括构成主卡盘主体的基板部分，形成在基板部分表面上的喷涂层的第一绝缘层，通过将导电浆料涂敷到第一绝缘层的表面而形成的电导体的加热器部分 层，形成在第一绝缘层的表面上以覆盖加热器部分的喷涂层的第二绝缘层，通过热喷涂形成于第二绝缘层的表面上的电极部分和喷涂层的介电层 形成到第二层的表面，以便覆盖电极部分，并且在不使用粘合剂的情况下降低体积电阻率。

公开(公告)号：US08896210B2

公开(公告)日：2014-11-25

申请号：US13705712

申请日：2012-12-05

Applicant: Tokyo Electron Limited ,  Tocalo Co., Ltd.

Inventor： Masaru Nishino ,  Masatsugu Makabe ,  Nobuyuki Nagayama ,  Tatsuya Handa ,  Ryotaro Midorikawa ,  Keigo Kobayashi ,  Tetsuya Niya

IPC: H01J7/24 ,  H05H1/46 ,  H01J37/32

CPC classification number: H05H1/46 ,  H01J37/32477 ,  H01J37/32495

Abstract: A plasma processing apparatus includes a processing chamber; a lower electrode serving as a mounting table for mounting thereon a target object; and an upper electrode or an antenna electrode provided to be opposite to the lower electrode. The apparatus further includes a gas supply source for introducing a gas including a halogen-containing gas and an oxygen gas into the processing chamber and a high frequency power supply for applying a high frequency power for generating plasma to at least one of the upper electrode, the antenna electrode, or the lower electrode. Among inner surfaces of the processing chamber which are exposed to the plasma, at least a part of or all of the surfaces between a mounting position of the target object and the upper electrode, or the antenna electrode; or at least a part of or all of the surfaces of the upper electrode or the antenna electrode are coated with a fluorinated compound.

Abstract translation: 等离子体处理装置包括处理室; 用作安装台的下电极，用于安装目标物体; 以及设置成与下电极相对的上电极或天线电极。 该装置还包括用于将包含含卤素气体和氧气的气体引入处理室的气体供给源和用于将高频电力施加到上部电极中的至少一个的高频电源， 天线电极或下电极。 在暴露于等离子体的处理室的内表面中，目标物体的安装位置与上部电极或天线电极之间的至少一部分或全部表面; 或上部电极或天线电极的至少一部分或全部表面涂覆有氟化合物。

公开(公告)号：US12046459B2

公开(公告)日：2024-07-23

申请号：US18057187

申请日：2022-11-18

Applicant: TOCALO CO., LTD.

Inventor： Shikou Abukawa ,  Kensuke Taguchi ,  Yu Asakimori ,  Ryutaro Kawamura

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B1/02 ,  H05B3/03 ,  H05B3/28

CPC classification number: H01J37/32724 ,  H01L21/6833 ,  H01L21/68757 ,  H05B1/0233 ,  H05B3/03 ,  H05B3/283 ,  H01J2237/3341 ,  H05B2203/013

Abstract: A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.

公开(公告)号：US11955360B2

公开(公告)日：2024-04-09

申请号：US17642083

申请日：2020-12-24

Applicant: TOCALO Co., Ltd. ,  HITACHI HIGH-TECH CORPORATION

Inventor： Takeshi Takabatake ,  Tomohiro Nakasuji ,  Akira Itoh ,  Kentaro Seto ,  Yutaka Omoto ,  Hiroho Kitada ,  Kazuumi Tanaka

IPC: H01L21/683 ,  H01J37/32 ,  H01L21/687

CPC classification number: H01L21/6833 ,  H01J37/32715 ,  H01L21/68757

Abstract: A Johnsen-Rahbek force type electrostatic chuck including: a metal substrate; an electrode for electrostatic attraction provided on the metal substrate with an insulating layer interposed between the metal substrate and the electrode for electrostatic attraction; and a dielectric layer constituting an electrostatic attraction surface in contact with a workpiece. The dielectric layer includes a ceramic spray coating and a sealing component with which pores of the ceramic spray coating are filled, and the sealing component contains a metal organic salt containing a rare earth element.

公开(公告)号：US20230220531A1

公开(公告)日：2023-07-13

申请号：US17796886

申请日：2021-03-04

Applicant: TOCALO CO., LTD.

Inventor： Kazuo HAMASHIMA ,  Masashi MORISASA ,  Shinsuke ANAI

IPC: C23C4/06 ,  H01J37/32

CPC classification number: C23C4/06 ,  H01J37/32495 ,  C23C4/134

Abstract: To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating.
A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.

公开(公告)号：US20230079853A1

公开(公告)日：2023-03-16

申请号：US18057187

申请日：2022-11-18

Applicant: TOCALO CO., LTD.

Inventor： Shikou ABUKAWA ,  Kensuke TAGUCHI ,  Yu ASAKIMORI ,  Ryutaro KAWAMURA

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B1/02 ,  H05B3/03 ,  H05B3/28

Abstract: A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.

公开(公告)号：US20220090251A1

公开(公告)日：2022-03-24

申请号：US17272281

申请日：2019-07-23

Applicant: TOCALO CO., LTD.

Inventor： Shinya MIKI ,  Masaya NAGAI

IPC: C23C4/10 ,  C23C4/129

Abstract: Provided is a method for forming a thermal sprayed coating, including a step of spraying a non-oxide ceramic material on a substrate to form a coating by a high velocity oxy-fuel spraying process. An average particle size of the non-oxide ceramic material is 0.1 to 5.0 μm, and a particle size distribution of the non-oxide ceramic material contains one or more peaks in each of: a particle size range of 0.1 μm or more and less than 1.0 μm; and a particle size range of 1.0 μm or more and less than 10.0 μm. The non-oxide ceramic material is dispersed in a solvent to prepare slurry 11, and the slurry 11 is fed from the exterior to flame 10 jetted from a thermal spray gun 2 to form a dense thermal sprayed coating structure.