Method and apparatus for measuring the size of free air balls on a wire bonder
    42.
    发明授权
    Method and apparatus for measuring the size of free air balls on a wire bonder 失效
    用于测量引线接合机上游离气球尺寸的方法和装置

    公开(公告)号:US07523848B2

    公开(公告)日:2009-04-28

    申请号:US11148540

    申请日:2005-06-09

    Abstract: A system for measuring the size of free air balls for use with a wire bonder having a wire bonding tool and an Electric Flame Off (EFO) device is provided. The system includes an imager disposed above a first image plane, a prism disposed below the imager, and at least one lens positioned between the first image plane and the prism in a first optical path. The at least one lens is positioned between the prism and the imager in a second optical path, where the second optical path is different from the first optical path. An image of the free air ball disposed at a lower portion of the wire bonding tool is provided to the imager via the prism and the at least one lens.

    Abstract translation: 提供了一种用于测量与具有引线接合工具和电火焰熄灭(EFO)装置的引线接合器一起使用的自由空气球的尺寸的系统。 该系统包括设置在第一图像平面上方的成像器,设置在成像器下方的棱镜以及位于第一光路中的第一像面与棱镜之间的至少一个透镜。 所述至少一个透镜位于所述棱镜和所述成像器之间的第二光路中,其中所述第二光路不同于所述第一光路。 设置在引线接合工具的下部的自由空气球的图像通过棱镜和至少一个透镜被提供给成像器。

    Method and apparatus for measuring the size of free air balls on a wire bonder
    43.
    发明申请
    Method and apparatus for measuring the size of free air balls on a wire bonder 失效
    用于测量引线接合机上游离气球尺寸的方法和装置

    公开(公告)号:US20050284914A1

    公开(公告)日:2005-12-29

    申请号:US11148540

    申请日:2005-06-09

    Abstract: A system for measuring the size of free air balls for use with a wire bonder having a wire bonding tool and an Electric Flame Off (EFO) device is provided. The system includes an imager disposed above a first image plane, a prism disposed below the imager, and at least one lens positioned between the first image plane and the prism in a first optical path. The at least one lens is positioned between the prism and the imager in a second optical path, where the second optical path is different from the first optical path. An image of the free air ball disposed at a lower portion of the wire bonding tool is provided to the imager via the prism and the at least one lens.

    Abstract translation: 提供了一种用于测量与具有引线接合工具和电火焰熄灭(EFO)装置的引线接合器一起使用的自由空气球的尺寸的系统。 该系统包括设置在第一图像平面上方的成像器,设置在成像器下方的棱镜以及位于第一光路中的第一像面与棱镜之间的至少一个透镜。 所述至少一个透镜位于所述棱镜和所述成像器之间的第二光路中,其中所述第二光路不同于所述第一光路。 设置在引线接合工具的下部的自由空气球的图像通过棱镜和至少一个透镜被提供给成像器。

Patent Agency Ranking