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公开(公告)号：US10444749B2
公开(公告)日：2019-10-15
申请号：US11877058
申请日：2007-10-23
IPC分类号： G06F15/00 , G05B99/00 , G05B15/02 , G05B19/418 , G05B23/02 , G06T7/00 , H01L21/67 , H01L21/677
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US08950998B2
公开(公告)日：2015-02-10
申请号：US12106975
申请日：2008-04-21
申请人： Peter van der Meulen
发明人： Peter van der Meulen
IPC分类号： H01L21/67 , B65G25/02 , B25J9/16 , G05B19/418 , B65G37/00 , H01L21/677 , H01L21/687
CPC分类号： B65G25/02 , B25J9/161 , B65G37/00 , G05B19/41865 , H01L21/67167 , H01L21/67276 , H01L21/67742 , H01L21/68707 , Y10S414/139 , Y10S706/904
摘要： A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits single-substrate pick-and-place operations while the batch end effector permits batch handling of substrates within a vacuum environment.
摘要翻译： 基板处理真空机器人包括具有单基板端部执行器的第一机器人臂和具有批尾端执行器的第二机器臂。 单衬底端部执行器允许单衬底拾取和放置操作，而批处理末端执行器允许在真空环境内批处理衬底。
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公开(公告)号：US08424703B2
公开(公告)日：2013-04-23
申请号：US12434330
申请日：2009-05-01
申请人： Peter van der Meulen
发明人： Peter van der Meulen
CPC分类号： H01L21/67376 , H01L21/67373 , Y10T70/596
摘要： A system of moving magnets for sealing a container may include a plurality of moveable magnets disposed near a perimeter of a container door and a rotatable linkage hub positioned within the perimeter of the container door. In addition, the system may include a plurality of control linkages connecting each of the plurality of moveable magnets to the linkage hub so that rotating the linkage hub causes the control linkages to move the moveable magnets between a sealed position and an open position. Alternatively, the moveable magnets may be connected to each other by a magnet positioning mechanism to physically move the magnets along a path near the perimeter. A plurality of static magnets may be disposed near an opening sized to receive the container door and positioned to form a magnetic seal with the moveable magnets when the moveable magnets are positioned at the sealed position.
摘要翻译： 用于密封容器的移动磁体的系统可以包括设置在容器门的周边附近的多个可移动磁体和位于容器门的周边内的可旋转连接毂。 此外，该系统可以包括将多个可移动磁体中的每一个连接到连接轮毂的多个控制联动件，使得旋转连接轮毂使得控制连杆将可移动磁体移动到密封位置和打开位置之间。 或者，可移动磁体可以通过磁体定位机构彼此连接，以沿着靠近周边的路径物理地移动磁体。 多个静磁体可以设置在开口大小附近，以便接收容器门并定位成当可移动磁体位于密封位置时与可移动磁体形成磁密封。
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公开(公告)号：US08403613B2
公开(公告)日：2013-03-26
申请号：US11681822
申请日：2007-03-05
申请人： Peter van der Meulen
发明人： Peter van der Meulen
IPC分类号： B65G49/07
CPC分类号： B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792
摘要： A bypass thermal adjuster, which may be placed between two robots, provides a chamber for isolation and thermal control of wafers while permitting other wafers to be passed through the adjuster by the robots.
摘要翻译： 可以放置在两个机器人之间的旁路热调节器提供用于隔离和热控制晶片的室，同时允许其他晶片通过机器人通过调节器。
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公开(公告)号：US08029225B2
公开(公告)日：2011-10-04
申请号：US12206382
申请日：2008-09-08
申请人： Peter van der Meulen
发明人： Peter van der Meulen
IPC分类号： B65G49/07
CPC分类号： H01L21/67167 , B25J9/042 , H01L21/67126 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67253 , H01L21/67259 , H01L21/67706 , H01L21/67727 , H01L21/67733 , H01L21/67736 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/67757 , H01L21/67781 , H01L21/68 , H01L21/68707 , H01L21/68735 , Y10S414/135 , Y10S414/137 , Y10S414/139 , Y10T74/20305
摘要： Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The system may include one or more vertically stacked load locks or vertically stacked process modules.
摘要翻译： 为基于真空的半导体处理系统提供了方法和系统。 该系统可以是具有用于在系统中移动材料的四链接机器人SCARA臂的线性系统。 该系统可以包括一个或多个垂直堆叠的加载锁或垂直堆叠的过程模块。
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公开(公告)号：US20080298936A1
公开(公告)日：2008-12-04
申请号：US12131024
申请日：2008-05-30
申请人： Peter van der Meulen
发明人： Peter van der Meulen
CPC分类号： H01L21/67751 , H01L21/67126 , H01L21/67353 , H01L21/67376
摘要： A two piece shell is employed for intermediate and long term storage of substrates. The shell is formed of two halves that can be juxtaposed in vacuum and externally vented, with the internal vacuum retaining the halves in vacuum-sealed engagement. One of the halves also provides a vacuum-sealing perimeter for selectively sealing to a process chamber during loading and/or unloading of the shell with a substrate. A vacuum monitor or the like may be employed to monitor pressure during storage and provide alerts if the vacuum within the sealed shell is compromised.
摘要翻译： 采用两片外壳用于中间和长期储存基材。 外壳由两个半部形成，可以在真空中并排并外部排放，内部真空将半部保持在真空密封接合状态。 其中一半还提供真空密封周边，用于在用基底装载和/或卸载壳体期间选择性地密封到处理室。 可以使用真空监测器等来监测储存期间的压力，并且如果密封壳体内的真空受损，则可提供警报。
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公开(公告)号：US20080226429A1
公开(公告)日：2008-09-18
申请号：US12030707
申请日：2008-02-13
申请人： Peter van der Meulen
发明人： Peter van der Meulen
IPC分类号： H01L21/677
CPC分类号： B65G25/02 , B65G37/00 , H01L21/67161 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/68792 , Y10S414/139
摘要： Modular wafer transport and handling facilities are combined in a variety of ways deliver greater levels of flexibility, utility, efficiency, and functionality in a vacuum semiconductor processing system. Various processing and other modules may be interconnected with tunnel-and-cart transportation systems to extend the distance and versatility of the vacuum environment. Other improvements such as bypass thermal adjusters, buffering aligners, batch processing, multifunction modules, low particle vents, cluster processing cells, and the like are incorporated to expand functionality and improve processing efficiency.
摘要翻译： 模块化晶片输送和处理设备以各种方式组合，在真空半导体处理系统中提供更高水平的灵活性，效用，效率和功能。 各种加工和其他模块可以与隧道和车辆运输系统相互连接，以延长真空环境的距离和通用性。 引入诸如旁路热调节器，缓冲取向器，分批处理，多功能模块，低粒子通风口，集束处理单元等的其它改进以扩展功能并提高处理效率。
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公开(公告)号：US20080163096A1
公开(公告)日：2008-07-03
申请号：US11877264
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G06F17/5009 , G05B19/4069 , G05B2219/32339 , G05B2219/35488 , G05B2219/36025 , G05B2219/45031 , H01L21/67751 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080163095A1
公开(公告)日：2008-07-03
申请号：US11877180
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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公开(公告)号：US20080155445A1
公开(公告)日：2008-06-26
申请号：US11877191
申请日：2007-10-23
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
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