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    Catadioptric projection objective with mirror group
    42.
    发明授权
    Catadioptric projection objective with mirror group 有权
    反射折射投影物镜与镜组

    公开(公告)号：US08363315B2

    公开(公告)日：2013-01-29

    申请号：US11578101

    申请日：2005-04-07

    申请人： Alexander Epple ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Hans-Juergen Mann ,  David Shafer

    发明人： Alexander Epple ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Hans-Juergen Mann ,  David Shafer

    IPC分类号： G02B17/00

    CPC分类号： G02B17/0804 ,  G02B17/0808 ,  G02B17/0812 ,  G02B17/0816 ,  G02B17/0836 ,  G02B17/0844 ,  G02B17/0848 ,  G02B17/086 ,  G02B17/0892 ,  G03F7/70058 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70341

    摘要： A catadioptric projection objective for imaging an off-axis object field arranged in an object surface of the projection objective onto an off-axis image field arranged in an image surface of the projection objective has a front lens group, a mirror group comprising four mirrors and having an object side mirror group entry, an image side mirror group exit, and a mirror group plane aligned transversely to the optical axis and arranged geometrically between the mirror group entry and the mirror group exit; and a rear lens group. The mirrors of the mirror group are arranged such that at least one intermediate image is positioned inside the mirror group between mirror group entry and mirror group exit, and that radiation coming from the mirror group entry passes at least four times through the mirror group plane and is reflected at least twice on a concave mirror surface of the mirror group prior to exiting the mirror group at the mirror group exit. The mirror group entry is positioned in a region where radiation exiting the front lens group has an entry chief ray height. A second reflecting area is positioned in a region where radiation impinging on the second mirror has a second chief ray height deviating from the entry chief ray height in a first direction; and a fourth reflecting area is positioned in a region where radiation impinging on the fourth mirror has a fourth chief ray height deviating from the entry chief ray height in a second direction opposite to the first direction.

    摘要翻译： 用于将布置在投影物镜的物体表面中的离轴物体场成像到布置在投影物镜的图像表面中的离轴图像场的反射折射投射物镜具有前透镜组，包括四个反射镜的镜组和 具有物体侧反射镜组入口，图像侧反射镜组出口和反射镜组平面，其横向于光轴对准并且几何地布置在反射镜组入口和反射镜组出口之间; 和后透镜组。 反射镜组的镜子被布置成使得至少一个中间图像位于反射镜组入口和反射镜组出口之间的反射镜组内，并且来自镜组入口的辐射至少穿过镜组平面四次， 在镜组出口处离开镜组之前，在镜组的凹面镜面上反射至少两次。 反射镜组入口位于离开前透镜组的辐射具有入射主光线高度的区域中。 第二反射区域位于辐射入射在第二反射镜上的第一主光线高度偏离第一方向上的入射光线高度的区域中; 并且第四反射区域位于与第一反射镜相反的第二方向上具有偏离入射光线高度的第四主光线高度的入射在第四反射镜上的辐射区域。

    Catoptric objectives and systems using catoptric objectives
    45.
    发明授权
    Catoptric objectives and systems using catoptric objectives 有权
    使用反射目标的目标和系统

    公开(公告)号：US08004755B2

    公开(公告)日：2011-08-23

    申请号：US12700169

    申请日：2010-02-04

    申请人： Hans-Juergen Mann ,  David Shafer ,  Wilhelm Ulrich

    发明人： Hans-Juergen Mann ,  David Shafer ,  Wilhelm Ulrich

    IPC分类号： G02B17/06

    CPC分类号： G03F7/70233 ,  G02B13/143 ,  G02B17/061 ,  G02B17/0652 ,  G02B17/0657

    摘要： In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

    摘要翻译： 通常，在一个方面，本发明的特征在于设置成将从物体平面到图像平面的辐射成像的目标，包括布置成将来自物体平面的辐射引导到图像平面的多个元件，其中物镜具有图像 侧面数值孔径大于0.55，最大像侧场尺寸大于1 mm，目标是一个反射目标。

    CATADIOPTRIC PROJECTION OBJECTIVE
    47.
    发明申请
    CATADIOPTRIC PROJECTION OBJECTIVE 有权
    目标投影目标

    公开(公告)号：US20100253999A1

    公开(公告)日：2010-10-07

    申请号：US12817628

    申请日：2010-06-17

    申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

    发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

    IPC分类号： G02B17/08

    CPC分类号： G02B17/0804 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0844 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70225

    摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

    摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的反射折射投射物镜包括：用于将设置在物平面中的图案成像为第一中间图像的第一物镜部分; 第二目标部分，用于将第一中间成像成像成第二中间图像; 用于将第二中间成像直接成像到图像平面上的第三目标部分; 其中具有第一连续镜面的第一凹面镜和具有第二连续镜面的至少一个第二凹面镜布置在所述第二中间图像的上游; 瞳孔表面形成在物平面与第一中间图像之间，第一和第二中间图像之间以及第二中间图像与图像平面之间; 并且所有凹面反射镜光学地远离光瞳表面布置。 该系统具有中等透镜材料质量消耗的非常高的数值孔径的潜力。

    Catoptric Objectives And Systems Using Catoptric Objectives
    48.
    发明申请
    Catoptric Objectives And Systems Using Catoptric Objectives 有权
    使用图解目标的图解目标和系统

    公开(公告)号：US20100134908A1

    公开(公告)日：2010-06-03

    申请号：US12700169

    申请日：2010-02-04

    申请人： Hans-Jurgen Mann ,  David Shafer ,  Wilhelm Ulrich

    发明人： Hans-Jurgen Mann ,  David Shafer ,  Wilhelm Ulrich

    IPC分类号： G02B5/10

    CPC分类号： G03F7/70233 ,  G02B13/143 ,  G02B17/061 ,  G02B17/0652 ,  G02B17/0657

    摘要： In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

    摘要翻译： 通常，在一个方面，本发明的特征在于设置成将从物体平面到图像平面的辐射成像的目标，包括布置成将来自物体平面的辐射引导到图像平面的多个元件，其中物镜具有图像 侧面数值孔径大于0.55，最大像侧场尺寸大于1 mm，目标是一个反射目标。

    Catoptric objectives and systems using catoptric objectives
    49.
    发明授权
    Catoptric objectives and systems using catoptric objectives 失效
    使用反射目标的目标和系统

    公开(公告)号：US07682031B2

    公开(公告)日：2010-03-23

    申请号：US11317851

    申请日：2005-12-22

    申请人： Hans-Jurgen Mann ,  David Shafer ,  Wilhelm Ulrich

    发明人： Hans-Jurgen Mann ,  David Shafer ,  Wilhelm Ulrich

    IPC分类号： G02B5/10

    CPC分类号： G03F7/70233 ,  G02B13/143 ,  G02B17/061 ,  G02B17/0652 ,  G02B17/0657

    摘要： In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

    摘要翻译： 通常，在一个方面，本发明的特征在于设置成将从物体平面到图像平面的辐射成像的目标，包括布置成将来自物体平面的辐射引导到图像平面的多个元件，其中物镜具有图像 侧面数值孔径大于0.55，最大像侧场尺寸大于1 mm，目标是一个反射目标。

    ROBOTIC SURGICAL TOOLS FOR LASER MARKING AND LASER CUTTING
    50.
    发明申请
    ROBOTIC SURGICAL TOOLS FOR LASER MARKING AND LASER CUTTING 审中-公开
    用于激光标记和激光切割的机械手术工具

    公开(公告)号：US20090248041A1

    公开(公告)日：2009-10-01

    申请号：US12060112

    申请日：2008-03-31

    申请人： Matthew Reagan Williams ,  Gregory William Dachs, II ,  David Shafer

    发明人： Matthew Reagan Williams ,  Gregory William Dachs, II ,  David Shafer

    IPC分类号： A61B19/00

    CPC分类号： A61B18/22 ,  A61B8/12 ,  A61B8/445 ,  A61B8/4488 ,  A61B34/30 ,  A61B34/37 ,  A61B34/71 ,  A61B90/30 ,  A61B90/361 ,  A61B2017/00477 ,  A61B2018/2025 ,  A61B2034/305 ,  A61B2090/3614 ,  A61B2090/371 ,  A61B2090/378

    摘要： In one embodiment of the invention, a robotic surgical system includes a combined laser imaging robotic surgical tool, a control console, and a laser generator/controller. The tool is mounted to a first robotic arm of a patient side cart. The tool has a wristed joint and an end effector coupled together. The end effector has a laser-emitting device to direct a laser beam onto tissue in a surgical site and an image-capturing device to capture images of the tissue in the surgical site. The control console, in communication with the tool, receives the captured images of tissue in the surgical site and displays the captured images on a display device to a user. The laser generator/controller is coupled to the tool and the control console to control the emission of the laser beam onto tissue of the surgical site.

    摘要翻译： 在本发明的一个实施例中，机器人手术系统包括组合的激光成像机器人手术工具，控制台和激光发生器/控制器。 该工具安装到患者侧推车的第一机器臂上。 该工具具有连接在一起的腕关节和末端执行器。 末端执行器具有用于将激光束引导到外科手术部位的组织上的激光发射装置和用于捕获手术部位中的组织的图像的图像捕获装置。 与该工具通信的控制台接收外科手术部位中所拍摄的组织的图像，并将所捕获的图像显示在用户的显示装置上。 激光发生器/控制器耦合到工具和控制台以控制激光束在外科手术部位的组织上的发射。