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41.发明申请THREAD GROOVE PUMP MECHANISM, VACUUM PUMP INCLUDING THREAD GROOVE PUMP MECHANISM, AND ROTOR, OUTER CIRCUMFERENCE SIDE STATOR, AND INNER CIRCUMFERENCE SIDE STATOR USED IN THREAD GROOVE PUMP MECHANISM 审中-公开螺旋泵机构，包括螺旋泵机构的真空泵，以及转子，外圆周侧定子和在螺旋泵机构中使用的内循环侧定子公开(公告)号：US20160222971A1
公开(公告)日：2016-08-04
申请号：US15021499
申请日：2014-09-01
Applicant: EDWARDS JAPAN LIMITED
Inventor： Yoshiyuki Sakaguchi , Akihiko Wada , Takashi Kabasawa
IPC: F04D19/04
CPC classification number: F04D19/042 , F04D19/044 , F04D19/046
Abstract: The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
Abstract translation: 本发明提供了一种螺纹槽泵机构，其抑制螺纹槽泵机构中的气体的回流，并且减小在螺纹槽泵机构的出口附近的泵径向的压力差，从而提高排气性能和压缩 性能。 本发明还提供了一种真空泵，其包括螺纹槽泵机构，以及在螺纹槽泵机构中使用的转子，外周侧定子和内周侧定子。 螺纹槽泵机构包括在与转子缸部相对的外周侧定子的相对面上雕刻的外周侧螺纹槽部和内周侧螺纹槽部中刻刻的排气性能改善单元 在与转子筒部相对的内周侧定子的相对面上。
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公开(公告)号：US20160069350A1
公开(公告)日：2016-03-10
申请号：US14787377
申请日：2014-03-07
Applicant: Edwards Japan Limited
Inventor： Manabu Nonaka , Takashi Kabasawa
CPC classification number: F04D17/168 , F04D19/046 , F04D29/30 , F04D29/444
Abstract: A stator disk includes a connection hole for improving exhaust efficiency in a vacuum pump including a Seigbahn type molecular pump portion, and a vacuum pump including the stator disk. The vacuum pump according to an embodiment includes a Seigbahn type molecular pump portion and includes, in a stator disk disposed therein, a connection hole that connects an upper space (an inlet port side region, an upstream side region) with a lower space (an outlet port side region, a downstream side region) in the axial direction of the stator disk.
Abstract translation: 定子盘包括用于提高包括Seigbahn型分子泵部分的真空泵的排气效率的连接孔和包括定子盘的真空泵。 根据实施例的真空泵包括Seigbahn型分子泵部分，并且在其中设置的定子盘中包括连接孔，该连接孔将上部空间（入口侧区域，上游侧区域）与下部空间（ 出口侧侧区域，下游侧区域）。
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公开(公告)号：US20240337266A1
公开(公告)日：2024-10-10
申请号：US18700064
申请日：2022-11-09
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
CPC classification number: F04D19/042 , F04D19/044 , F04D29/5853
Abstract: A vacuum pump and a heat insulating member for the vacuum pump are provided that improve the rigidity and heat insulating effect of a heat insulating portion and facilitate the control of intended temperatures of components within the pump. A turbomolecular pump having at least a cooling function includes a heat insulator that is disposed on a threaded spacer and has a hollow structure including cavities extending in the axial direction.
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公开(公告)号：US20230250826A1
公开(公告)日：2023-08-10
申请号：US18004989
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa , Kengo Saegusa
CPC classification number: F04D19/042 , F04D29/023 , F04D29/5853 , F04D19/044 , F04D19/048 , F04D29/321 , F05C2201/0466 , F05C2201/0412 , F05C2203/08 , F05C2251/048
Abstract: A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.
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公开(公告)号：US20230213044A1
公开(公告)日：2023-07-06
申请号：US18000750
申请日：2021-06-04
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
CPC classification number: F04D29/701 , F04D19/042 , F04D27/001
Abstract: A vacuum pump is provided that can remove deposits without overhauling and also detect completion of removal of deposits. A cleaning function portion for a cleaning function that performs cleaning of a deposit in a vacuum pump and a deposition sensor for a deposition detection function that detects the deposit are provided. A reading circuit portion and a cleaning completion determination circuit portion for a cleaning completion determination function that determines completion of cleaning are provided. The cleaning completion determination circuit portion outputs a cleaning completion signal indicating completion of the cleaning, based on a detection result of the deposition sensor.
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Patent Agency Ranking
公开(公告)号：US11428237B2
公开(公告)日：2022-08-30
申请号：US17253364
申请日：2019-06-13
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: The present invention provides a vacuum pump that measures the temperature of a rotating portion accurately and at low cost, a stator column of the vacuum pump, a base, and an exhaust system of the vacuum pump at low cost. The vacuum pump according to the present embodiment, the thread groove-type seal for causing some of the purge gas to flow back toward the temperature sensor unit is provided on the downstream side of the purge gas flow path in which the temperature sensor unit is disposed, thereby increasing the pressure of the purge gas in the vicinity of the temperature sensor unit. Thus, with the small amount of purge gas, the gas pressure around the temperature sensor unit can create an intermediate flow or a viscous flow. Consequently, the total amount of purge gas to be supplied can be saved, resulting in cost reduction.
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公开(公告)号：US20210262484A1
公开(公告)日：2021-08-26
申请号：US17253364
申请日：2019-06-13
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: The present invention provides a vacuum pump that measures the temperature of a rotating portion accurately and at low cost, a stator column of the vacuum pump, a base, and an exhaust system of the vacuum pump at low cost. The vacuum pump according to the present embodiment, the thread groove-type seal for causing some of the purge gas to flow back toward the temperature sensor unit is provided on the downstream side of the purge gas flow path in which the temperature sensor unit is disposed, thereby increasing the pressure of the purge gas in the vicinity of the temperature sensor unit. Thus, with the small amount of purge gas, the gas pressure around the temperature sensor unit can create an intermediate flow or a viscous flow. Consequently, the total amount of purge gas to be supplied can be saved, resulting in cost reduction.
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公开(公告)号：US11009029B2
公开(公告)日：2021-05-18
申请号：US15781942
申请日：2016-12-08
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
Abstract: A reflection mechanism is disposed above a rotor blade. A chamfered surface of the rotor blade is formed to gradually open wide by 0 to 10 degrees toward the downstream side in the rotational direction, from an imaginary line passing through a rotational direction-side tip end point of a horizontal surface and drawn parallel to a rotating shaft. In the reflection mechanism, inclined plates, inclined at a predetermined angle, are arranged radially in the radial direction from a central disc portion. A particle reflected on the chamfered surface of the rotor blade collides with each inclined plate of the reflection mechanism and is then re-reflected and falls in the downstream direction. Since the particle can securely be reflected toward the reflection mechanism, the particle can be prevented from exiting through an inlet port to flow back toward a chamber.
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公开(公告)号：US10253777B2
公开(公告)日：2019-04-09
申请号：US15021499
申请日：2014-09-01
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Akihiko Wada , Takashi Kabasawa
IPC: F04D19/04
Abstract: The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
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公开(公告)号：US20180363662A1
公开(公告)日：2018-12-20
申请号：US15781942
申请日：2016-12-08
Applicant: Edwards Japan Limited
Inventor： Takashi Kabasawa
IPC: F04D19/04 , F04D17/16 , F04D29/058 , F04D29/08 , F16C32/04
Abstract: A reflection mechanism is disposed above a rotor blade. A chamfered surface of the rotor blade is formed to gradually open wide by 0 to 10 degrees toward the downstream side in the rotational direction, from an imaginary line passing through a rotational direction-side tip end point of a horizontal surface and drawn parallel to a rotating shaft. In the reflection mechanism, inclined plates, inclined at a predetermined angle, are arranged radially in the radial direction from a central disc portion. A particle reflected on the chamfered surface of the rotor blade collides with each inclined plate of the reflection mechanism and is then re-reflected and falls in the downstream direction. Since the particle can securely be reflected toward the reflection mechanism, the particle can be prevented from exiting through an inlet port to flow back toward a chamber.
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