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公开(公告)号:US11575029B2
公开(公告)日:2023-02-07
申请号:US17324183
申请日:2021-05-19
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alexander M. Derrickson , Richard F. Taylor, III , Mankyu Yang , Alexander L. Martin , Judson R. Holt , Jagar Singh
IPC: H01L27/082 , H01L27/12 , H01L29/78 , H01L21/84 , H01L21/8238 , H01L21/768 , H01L29/735 , H01L29/739 , H01L29/66 , H01L29/08 , H01L29/10
Abstract: Disclosed is a semiconductor structure including at least one bipolar junction transistor (BJT), which is uniquely configured so that fabrication of the BJT can be readily integrated with fabrication of complementary metal oxide semiconductor (CMOS) devices on an advanced silicon-on-insulator (SOI) wafer. The BJT has an emitter, a base, and a collector laid out horizontally across an insulator layer and physically separated. Extension regions extend laterally between the emitter and the base and between the base and the collector and are doped to provide junctions between the emitter and the base and between the base and the collector. Gate structures are on the extension regions. The emitter, base, and collector are contacted. Optionally, the gate structures and a substrate below the insulator layer are contacted and can be biased to optimize BJT performance. Optionally, the structure further includes one or more CMOS devices. Also disclosed is a method of forming the structure.
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公开(公告)号:US20220376093A1
公开(公告)日:2022-11-24
申请号:US17324183
申请日:2021-05-19
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alexander M. Derrickson , Richard F. Taylor, III , Mankyu Yang , Alexander L. Martin , Judson R. Holt , Jagar Singh
IPC: H01L29/735 , H01L21/84 , H01L29/739 , H01L29/66 , H01L27/12 , H01L29/10 , H01L29/08
Abstract: Disclosed is a semiconductor structure including at least one bipolar junction transistor (BJT), which is uniquely configured so that fabrication of the BJT can be readily integrated with fabrication of complementary metal oxide semiconductor (CMOS) devices on an advanced silicon-on-insulator (SOI) wafer. The BJT has an emitter, a base, and a collector laid out horizontally across an insulator layer and physically separated. Extension regions extend laterally between the emitter and the base and between the base and the collector and are doped to provide junctions between the emitter and the base and between the base and the collector. Gate structures are on the extension regions. The emitter, base, and collector are contacted. Optionally, the gate structures and a substrate below the insulator layer are contacted and can be biased to optimize BJT performance. Optionally, the structure further includes one or more CMOS devices. Also disclosed is a method of forming the structure.
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公开(公告)号:US11387353B2
公开(公告)日:2022-07-12
申请号:US16907600
申请日:2020-06-22
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Jagar Singh , Sudarshan Narayanan , Alvin J. Joseph , William J. Taylor, Jr. , Jeffrey B. Johnson
IPC: H01L29/68 , H01L29/08 , H01L29/06 , H01L29/10 , H01L27/112
Abstract: A structure includes a first source/drain region and a second source/drain region in a semiconductor body; and a trench isolation between the first and second source/drain regions in the semiconductor body. A first doping region is about the first source/drain region, a second doping region about the second source/drain region, and the trench isolation is within the second doping region. A third doping region is adjacent to the first doping region and extend partially into the second doping region to create a charge trap section. A gate conductor of a gate structure is over the trench isolation and the first, second, and third doping regions. The charge trap section creates a charge controlled e-fuse operable by applying a stress voltage to the gate conductor.
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公开(公告)号:US11276770B2
公开(公告)日:2022-03-15
申请号:US16674432
申请日:2019-11-05
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Mankyu Yang , Jagar Singh , Alexander Martin , John J. Ellis-Monaghan
IPC: H01L29/735 , H01L29/737 , H01L29/06 , H01L29/417 , H01L29/10
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to gate controlled transistors and methods of manufacture. The structure includes: an emitter region; a collector region; base regions on opposing sides of the emitter region and the collector region; and a gate structure composed of a body region and leg regions, the body region being located between the base regions on opposing sides of the emitter region and the collector region, and the leg regions isolating the base regions from both the emitter region and the collector region.
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公开(公告)号:US11127843B2
公开(公告)日:2021-09-21
申请号:US16733528
申请日:2020-01-03
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Judson Holt , Alexander Derrickson , Ryan Sporer , George R. Mulfinger , Alexander Martin , Jagar Singh
IPC: H01L29/737 , H01L29/06 , H01L29/66 , H01L21/3065 , H01L29/10
Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.
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公开(公告)号:US11094805B2
公开(公告)日:2021-08-17
申请号:US16745833
申请日:2020-01-17
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alexander Derrickson , Edmund K. Banghart , Alexander Martin , Ryan Sporer , Jagar Singh , Katherina Babich , George R. Mulfinger
IPC: H01L29/737 , H01L29/08 , H01L21/324 , H01L29/165 , H01L29/66 , H01L21/02 , H01L29/10
Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A first portion of a first semiconductor layer defines an emitter, a first portion of a second semiconductor layer defines a collector, and a base includes respective second portions of the first and second semiconductor layers that are laterally positioned between the first portion of the first semiconductor layer and the first portion of the second semiconductor layer. The first portion of the first semiconductor layer has a first thickness, and the first portion of the second semiconductor layer has a second thickness that is greater than the first thickness. The first portion and the second portion of the first semiconductor layer adjoin at a first junction having the first thickness. The first portion and the second portion of the second semiconductor layer adjoin at a second junction having the second thickness.
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公开(公告)号:US11049955B2
公开(公告)日:2021-06-29
申请号:US16727453
申请日:2019-12-26
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Shesh Mani Pandey , Jagar Singh , Judson R. Holt
IPC: H01L29/66 , H01L29/165 , H01L29/78 , H01L29/06 , H01L29/417
Abstract: One illustrative device disclosed herein includes a transistor formed above a semiconductor-on-insulator (SOI) substrate, wherein the transistor comprises a gate structure, a sidewall spacer and source/drain regions, openings formed in the active layer in the source/drain regions adjacent the sidewall spacer, recesses formed in a buried insulation layer of the SOI substrate in the source/drain regions of the transistor, wherein the recesses extend laterally under a portion of the active layer, and an epi semiconductor material positioned in at least the recesses in the buried insulation layer.
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公开(公告)号:US20210126126A1
公开(公告)日:2021-04-29
申请号:US16662276
申请日:2019-10-24
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Jagar Singh , Luigi Pantisano , Anvitha Shampur , Frank Scott Johnson , Srikanth Balaji Samavedam
IPC: H01L29/78 , H01L21/8238 , H01L27/092 , H01L29/66
Abstract: A semiconductor device is disclosed including a semiconductor layer, a first well doped with dopants of a first conductivity type defined in the semiconductor layer, a second well doped with dopants of a second conductivity type different than the first conductivity type defined in the semiconductor layer adjacent the first well to define a PN junction between the first and second wells, and an isolation structure positioned in the second well. The semiconductor device also includes a first source/drain region positioned in the first well, a second source/drain region positioned in the second well adjacent a first side of the isolation structure, a doped region positioned in the second well adjacent a second side of the isolation structure, and a gate structure positioned above the semiconductor layer, wherein the gate structure vertically overlaps a portion of the doped region.
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公开(公告)号:US20210091212A1
公开(公告)日:2021-03-25
申请号:US16733528
申请日:2020-01-03
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Judson Holt , Alexander Derrickson , Ryan Sporer , George R. Mulfinger , Alexander Martin , Jagar Singh
IPC: H01L29/737 , H01L29/06 , H01L29/10 , H01L21/3065 , H01L29/66
Abstract: Structures for a heterojunction bipolar transistor and methods of forming a structure for a heterojunction bipolar transistor. A base layer is positioned in a cavity in a semiconductor layer, a first terminal is coupled to the base layer, and a second terminal is coupled to a portion of the semiconductor layer. The second terminal is laterally spaced from the first terminal, and the portion of the semiconductor layer is laterally positioned between the second terminal and the base layer.
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公开(公告)号:US11967635B2
公开(公告)日:2024-04-23
申请号:US17533805
申请日:2021-11-23
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Jagar Singh , Randy L. Wolf
IPC: H01L29/735 , H01L29/06 , H01L29/161 , H01L29/66
CPC classification number: H01L29/735 , H01L29/0646 , H01L29/0649 , H01L29/161 , H01L29/6625
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region within a semiconductor substrate material; a shallow trench isolation structure extending into the semiconductor substrate material and bounding the extrinsic base region; an emitter region adjacent to the shallow trench isolation structure and on a side of the extrinsic base region; and a collector region adjacent to the shallow trench isolation structure and on an opposing side of the extrinsic base region.
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