ELECTRIC GRADIENT FORCE DRIVE AND SENSE MECHANISM FOR A MICRO-ELECTRO-MECHANICAL-SYSTEM GYROSCOPE
    42.
    发明申请
    ELECTRIC GRADIENT FORCE DRIVE AND SENSE MECHANISM FOR A MICRO-ELECTRO-MECHANICAL-SYSTEM GYROSCOPE 有权
    电子机械系统陀螺仪的电动力驱动和感应机构

    公开(公告)号:US20150000401A1

    公开(公告)日:2015-01-01

    申请号:US13930769

    申请日:2013-06-28

    CPC classification number: G01C19/5755 G01C19/5726 G01P15/125

    Abstract: An apparatus for driving and sensing motion in a gyroscope including a dielectric mass, an anchor, a spring coupled between the anchor and the dielectric mass, a substrate adjacent the dielectric mass, an insulator layer on the substrate, and a first electrode and a second electrode on the insulator layer. When an alternating current voltage is applied between the first and second electrodes, an electric field gradient is generated in the dielectric mass and causes the dielectric mass to move relative to the anchor. When the dielectric mass has motion relative to the anchor and a voltage is applied between the first and second electrodes, the movement of the dielectric mass generates a current at the first and second electrodes proportional to the motion.

    Abstract translation: 一种用于在陀螺仪中驱动和感测运动的装置,包括介电质量块,锚固体,耦合在锚固体和电介质块之间的弹簧,与介电质量块相邻的衬底,衬底上的绝缘体层,以及第一电极和第二电极 绝缘体层上的电极。 当在第一和第二电极之间施加交流电压时,在电介质中产生电场梯度,并使介质质量相对于锚移动。 当介电质量具有相对于锚的运动并且在第一和第二电极之间施加电压时,电介质的运动在第一和第二电极处产生与运动成比例的电流。

    High stability angular sensor
    43.
    发明授权

    公开(公告)号:US11506493B1

    公开(公告)日:2022-11-22

    申请号:US16745285

    申请日:2020-01-16

    Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

    High dynamic range gyroscope
    46.
    发明授权

    公开(公告)号:US10697772B1

    公开(公告)日:2020-06-30

    申请号:US16277610

    申请日:2019-02-15

    Abstract: A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.

    High dynamic range gyroscope
    47.
    发明授权

    公开(公告)号:US10444014B1

    公开(公告)日:2019-10-15

    申请号:US15253694

    申请日:2016-08-31

    Abstract: An angular sensor. The angular sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first pair of normal modes including a first normal mode and a second normal mode and a second pair of normal modes including a third normal mode and a fourth normal mode. The angular sensor further includes a coarse readout circuit configured to drive the first pair of modes, measure the motion of the first pair of modes, and derive from the measured motion of the first pair of modes a coarse measurement of an angular rate of the resonator. The angular sensor further includes and a fine readout circuit configured to derive a measurement of the difference between the true angular rate of the resonator and the coarse measurement.

    FM demodulation system for quartz MEMS magnetometer

    公开(公告)号:US10175307B1

    公开(公告)日:2019-01-08

    申请号:US14997203

    申请日:2016-01-15

    Abstract: A magnetometer system has a magnetometer, an interface circuit and an electronic demodulator, the interface circuit being coupled to sense electrodes disposed on the magnetometer and the demodulator being coupled to the interface circuit. Preferably, the magnetometer has a loop electrode which follows an outline of the shape of an active portion of the magnetometer and wherein the electronic demodulator has an output for driving the loop electrode of the magnetometer. Preferably, the magnetometer includes a quartz plate with flexural and thickness shear vibratory modes and wherein the flexural vibratory mode is driven, in use, into vibration by the electronic demodulator and wherein the thickness shear vibratory mode is driven, in use, into vibration by the interface circuit.

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