Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device
    41.
    发明授权
    Refractory metal silicide target, method of manufacturing the target, refractory metal silicide thin film, and semiconductor device 有权
    耐火金属硅化物靶,制造靶材的方法,难熔金属硅化物薄膜和半导体器件

    公开(公告)号:US06352628B2

    公开(公告)日:2002-03-05

    申请号:US09846370

    申请日:2001-05-02

    IPC分类号: C23C1434

    摘要: A refractory metal silicide target is characterized by comprising a fine mixed structure composed of MSi2 (where M: refractory metal) grains and Si grains, wherein the number of MSi2 grains independently existing in a cross section of 0.01 mm2 of the mixed structure is not greater than 15, the MSi2 grains have an average grain size not greater than 10 &mgr;m, whereas free Si grains existing in gaps of the MSi2 grains have a maximum grain size not greater than 20 &mgr;m. The target has a high density, high purity fine mixed structure with a uniform composition and contains a small amount of impurities such as oxygen etc. The employment of the target can reduce particles produced in sputtering, the change of a film resistance in a wafer and the impurities in a film and improve yield and reliability when semiconductors are manufactured.

    摘要翻译: 难熔金属硅化物靶的特征在于包括由MSi2(其中M:难熔金属)晶粒和Si晶粒组成的精细混合结构,其中独立存在于混合结构的0.01mm 2的横截面中的MSi2晶粒的数目不大 超过15,MSi2晶粒的平均粒径不大于10um,而存在于MSi2晶粒间隙中的游离Si晶粒的最大晶粒尺寸不大于20μm。 该靶具有均匀成分的高密度,高纯度的微细混合结构,并且含有少量杂质如氧等。使用目标可以减少溅射中产生的颗粒,晶片中的膜电阻的变化和 膜中的杂质,并且在制造半导体时提高产率和可靠性。

    Motor and method for producing the same
    42.
    发明授权
    Motor and method for producing the same 失效
    电动机及其制造方法

    公开(公告)号:US6081056A

    公开(公告)日:2000-06-27

    申请号:US101268

    申请日:1998-06-23

    摘要: The invention relates to a motor which comprises a drive system which has a stator (10) and a rotor (14), and a control system which controls the drive system and has circuit boards (21), (22), both being housed in a casing (2), wherein the casing (2) has a first conductive pin (25) for flowing a current to input power to the control system and a second conductive pin (26) for flowing a current to output from the control system to respective phases of a coil, and the circuit boards are supported by the first and second conductive pins. And, the invention relates to a method of manufacturing a motor which comprises the steps of using a first die (101) and a second die (102) which are mutually connected with a die split face (104) therebetween and a third die (103) which is inserted in the middle of the first and second dies, inserting and fixing a motor stator, a metallic cylinder and embedding members into a cavity formed by the first, second and third dies, and pouring a molten resin to effect resin molding.

    摘要翻译: PCT No.PCT / JP97 / 00661 Sec。 371日期1998年6月23日第 102(e)日期1998年6月23日PCT 1997年3月4日PCT公布。 公开号WO97 / 33359 日期1997年12月9日本发明涉及一种电动机,其包括具有定子(10)和转子(14)的驱动系统,以及控制驱动系统并具有电路板(21),(22)的控制系统, 两者都容纳在壳体(2)中,其中壳体(2)具有用于使电流流向控制系统的输入电力的第一导电引脚(25)和用于使电流流过输出的第二导电引脚(26) 从控制系统到线圈的各相,并且电路板由第一和第二导电引脚支撑。 本发明涉及一种制造电动机的方法,该方法包括以下步骤:使用与其间的模具分离面(104)相互连接的第一模具(101)和第二模具(102),以及第三模具(103) ),其插入第一和第二模具的中间,将电动机定子,金属圆筒和嵌入构件插入和固定到由第一,第二和第三模具形成的空腔中,并且浇注熔融树脂以实现树脂模制。

    Bonded pipe and method for bonding pipes
    43.
    发明授权
    Bonded pipe and method for bonding pipes 失效
    粘合管和粘合管的方法

    公开(公告)号:US5875954A

    公开(公告)日:1999-03-02

    申请号:US687487

    申请日:1996-08-06

    摘要: A bonded pipe produced by using the liquid phase diffusion process in which the pipe ends of pipes to be bonded are butted with an insert material lower in melting point than the pipe material against each other, wherein the thickness is increased in such a manner that the outside diameter of the butted portion is expanded and the inside diameter thereof is reduced. A method for bonding pipes in which pipe ends of the pipes are butted through an insert material lower in melting point than the pipe material against each other, and the butted portion is heated to and held at a holding temperature higher than the melting point of the insert material, whereby the insert material is diffused in liquid phase into the pipe material, characterized in that at the time point when the outer pipe face temperature of the above-mentioned butted portion reaches a value which is not less than the A.sub.1 critical temperature of the pipe material and not more than the holding temperature in the process for raising the temperature of the pipe material, the application of a pressure in the pipe axial direction capable of plastically deforming the butted portion to the above-mentioned butted portion is started to increase the thickness of the butted portion.

    摘要翻译: PCT No.PCT / JP96 / 01198 Sec。 371日期:1996年8月6日 102(e)日期1996年8月6日PCT提交1996年5月1日PCT公布。 公开号WO96 / 34717 日期:1996年11月7日通过使用液相扩散法制造的粘结管,其中待粘合的管的管端与熔接点低于管材的插入材料彼此对接,其中厚度增加 使对接部的外径膨胀,内径减小的方式。 一种用于接合管道的管道的方法,其中管道的管端通过彼此熔点低于管材的插入材料彼此对接,并且对接部分被加热并保持在比所述管道的熔点高的保持温度 插入材料,由此插入材料以液相扩散到管材中,其特征在于,在上述对接部分的外管面温度达到不低于A1临界温度的值的时间点 在材料升温过程中不超过保持温度的管材,能够将对接部分塑性变形到上述对接部分的管轴向压力的施加开始增加 对接部分的厚度。

    Plating current automatic compensating apparatus
    46.
    发明授权
    Plating current automatic compensating apparatus 失效
    电镀电流自动补偿装置

    公开(公告)号:US4765878A

    公开(公告)日:1988-08-23

    申请号:US4563

    申请日:1987-01-20

    IPC分类号: C25D7/06 C25D21/12 C25D17/00

    CPC分类号: C25D21/12

    摘要: An apparatus for automatically maintaining plating current density within a predetermined range while controlling plating current to produce a desired plating thickness includes means for energizing only the number of plating cells required to maintain plating current density within the predetermined range. The total plating current required to produce the desired plating thickness is distributed among the energized plating cells. Decreases in the number of energized plating cells is made at speed values which are less by a hysteresis value than speeds at which the number of energized plating cells is increased to avoid instability due to normal speed reading variations.

    摘要翻译: 用于在控制电镀电流以产生期望的镀层厚度的同时自动维持电镀电流密度在预定范围内的装置包括仅将维持电镀电流密度所需的电镀电池数量激励在预定范围内的装置。 产生所需电镀厚度所需的总电镀电流分布在通电电镀单元中。 通电电镀单元的数量的减少是以比通电电镀单元的数量增加的速度低滞后值的速度值,以避免由于正常速度读数变化引起的不稳定性。

    Plating current automatic compensating apparatus
    47.
    发明授权
    Plating current automatic compensating apparatus 失效
    电镀电流自动补偿装置

    公开(公告)号:US4749460A

    公开(公告)日:1988-06-07

    申请号:US4564

    申请日:1987-01-20

    IPC分类号: C25D21/12 G05D5/02 C25D17/00

    CPC分类号: C25D21/12 G05D5/02

    摘要: An apparatus in which plating currents of a plurality of successive plating cells are normally automatically controlled in accordance with line speed to maintain uniform plating thickness, and in which the number of energized plating cells is increased or decreased in accordance with line speed to maintain plating current density within a predetermined range, includes tracking or timing facilities for progressively changing plating currents of plating cells in correspondence with movement of the strip being plated through the cells after the number of energized cells has been increased or decreased so as to reduce plating thickness variation on the portion of the strip within the plating cells at the time of the change in the number of energized cells.

    摘要翻译: 通常根据线速度自动控制多个连续电镀单元的电镀电流以保持均匀的电镀厚度,并且其中通电电镀单元的数量根据线速度增加或减少以保持电镀电流的装置 密度在预定范围内,包括跟踪或定时设备,用于随着通电电池数量的增加或减少,电镀细胞的电镀电流逐渐改变,以适应于通过电池被电镀的条带的移动,以减少电镀厚度变化 在通电电池数量变化时,电镀槽内的条带部分。

    Traverse motion for use with apparatus for winding continuous elongate
elements
    48.
    发明授权
    Traverse motion for use with apparatus for winding continuous elongate elements 失效
    横穿运动,用于缠绕连续细长元件的设备

    公开(公告)号:US4415126A

    公开(公告)日:1983-11-15

    申请号:US332146

    申请日:1981-12-18

    IPC分类号: B65H54/28 B65H54/30

    CPC分类号: B65H54/2812 B65H2701/31

    摘要: Apparatus for reciprocating a yarn guide to wind yarn on a bobbin including a rotating scroll cam provided with an endless helical cam groove and a second cam groove in superposed relationship with the endless cam groove and having a greater lead angle than the endless cam groove over a predetermined distance adjacent each turning point. The yarn guide is provided with an elongate ship-shaped cam follower slidably fitted into the endless cam groove and pivotable with respect to the yarn guide and a cylindrical cam follower slidably fitted into the second cam groove. The width of the portion of the endless cam groove adjacent each turning point is gradually increased toward the turning point so as to permit the elongate cam follower to smoothly reverse its direction when it passes the turning point.

    摘要翻译: 用于使纱线引导件在包括设置有环形螺旋形凸轮槽的旋转涡旋凸轮和与环形凸轮槽重叠的关系中的第二凸轮槽的线轴上进行往复运动的装置,并且具有比环形凸轮槽更大的导程角, 与每个转折点相邻的预定距离。 纱线引导件设置有可滑动地装配到环形凸轮槽中并相对于导纱器可枢转的细长的船形凸轮从动件和可滑动地装配到第二凸轮槽中的圆柱形凸轮从动件。 与各转折点相邻的环形凸轮槽的部分的宽度朝向转折点逐渐增大,从而允许细长凸轮从动件在通过转向点时平滑地反转其方向。

    VIBRATION MONITORING APPARATUS AND VIBRATION MONITORING METHOD
    49.
    发明申请
    VIBRATION MONITORING APPARATUS AND VIBRATION MONITORING METHOD 有权
    振动监测装置和振动监测方法

    公开(公告)号:US20110154900A1

    公开(公告)日:2011-06-30

    申请号:US12677999

    申请日:2008-09-12

    IPC分类号: G01H1/06 G01N29/04 G01H1/08

    摘要: The present invention provides a vibration monitoring apparatus that monitors vibration of a jet pump disposed in a reactor pressure vessel using ultrasonic wave, including: an ultrasonic sensor that is attached to an outside the reactor pressure vessel, and transmits and receives ultrasonic wave; a reflector that is mounted on a surface of a riser pipe of the jet pump, and includes a planar reflecting surface that can reflect ultrasonic wave; and a signal processing unit that performs signal processing of the ultrasonic wave transmitted by the ultrasonic sensor, reflected by the reflecting surface of the reflector, and received by the ultrasonic sensor, and measures a vibration amplitude of the riser pipe and calculates a vibration waveform.

    摘要翻译: 本发明提供了一种使用超声波监测设置在反应堆压力容器中的喷射泵的振动的振动监测装置,包括:超声波传感器,其附接到反应堆压力容器的外部,并且发送和接收超声波; 安装在喷射泵的提升管的表面上的反射器,包括能够反射超声波的平面反射面; 以及信号处理单元,执行由超声波传感器发送的超声波的信号处理,由反射器的反射面反射并由超声波传感器接收,并且测量提升管的振幅并计算振动波形。

    ULTRASONIC STRESS MEASURING APPARATUS
    50.
    发明申请
    ULTRASONIC STRESS MEASURING APPARATUS 审中-公开
    超声应变测量装置

    公开(公告)号:US20080047347A1

    公开(公告)日:2008-02-28

    申请号:US11843375

    申请日:2007-08-22

    IPC分类号: G01H5/00

    摘要: After a probe control means causes a longitudinal wave probe to carry out transmission and reception, it slides a shear wave probe to the same position. The probe control means rotates the shear wave probe at each predetermined angle and rotates it 180° while causing it to carry out the transmission and the reception at each rotating position. A measured data analyzer 16 calculates the constant of texture induced anisotropy in a test piece from echo data when both the probes carry out the transmission and the reception. With this arrangement, it is possible to measure the residual stress of a material, in which both texture induced anisotropy and residual stress induced anisotropy mixedly exist with pinpoint accuracy by separating only the texture induced anisotropy from the material.

    摘要翻译: 探头控制装置使纵波探头进行发射和接收后,将剪切波探头滑动到同一位置。 探头控制装置以每个预定角度旋转剪切波探头,并使其旋转180°,同时使其在每个旋转位置执行发送和接收。 测量数据分析器16当两个探头进行发送和接收时,从回波数据计算测试片中纹理感应各向异性的常数。 通过这种布置,可以通过仅从材料中分离纹理诱导的各向异性来测量材料的残余应力,其中结构诱导的各向异性和残余应力诱导的各向异性两者以精确的精度混合存在。