Method of manufacturing a multi-degree-of-freedom manipulator
    4.
    发明授权
    Method of manufacturing a multi-degree-of-freedom manipulator 失效
    制造多自由度机械手的方法

    公开(公告)号:US5679216A

    公开(公告)日:1997-10-21

    申请号:US518260

    申请日:1995-08-23

    IPC分类号: A61B1/005 H01L21/00

    CPC分类号: A61B1/0058

    摘要: A multi-degree-of-freedom manipulator includes a flexible tube having a plurality of flex portions provided therealong, a plurality of actuators made of shape memory alloy and respectively provided near the flex portions to correspond to the flex portions, for flexing the flex portions, two common energy transmission paths, extending along the flexible tube, for transmitting an energy to the actuators, and selective energy supply members, provided between the common energy transmission paths and the actuators in series, for controlling the energy supplied from the common energy transmission path to the actuators, thereby respectively independently driving the actuators to bend the flexible tube. The manipulator is made by forming electronic circuits in a plurality of regions on a semiconductor substrate, forming wiring regions to connect the electronic circuits with flexible wiring portions, and removing a region of the semiconductor substrate other than a region thereof on which the electronic circuits are formed, thereby forming an actuator controlled chip array, used in the manipulator.

    摘要翻译: 多自由度操纵器包括具有设置在其上的多个柔性部分的柔性管,由形状记忆合金制成的多个致动器,并且分别设置在柔性部分附近以对应于柔性部分,用于使柔性部分弯曲 ,沿着柔性管延伸的用于将能量传递到致动器的两个公共能量传输路径,以及设置在公共能量传输路径和致动器之间的选择性能量供应构件,用于控制从公共能量传输提供的能量 从而分别独立地驱动致动器来弯曲柔性管。 机械手是通过在半导体基板上的多个区域中形成电子电路而形成的,形成布线区域以将电子电路与柔性布线部分连接起来,以及除去其上电子电路的区域以外的半导体基板的区域 从而形成用于机械手的致动器控制芯片阵列。