公开(公告)号：US20060244467A1

公开(公告)日：2006-11-02

申请号：US11375625

申请日：2006-03-14

Applicant: Fayez Abboud ,  Sriram Krishnaswami ,  Benjamin Johnston ,  Hung Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John White ,  Shinichi Kurita ,  James Hunter

Inventor： Fayez Abboud ,  Sriram Krishnaswami ,  Benjamin Johnston ,  Hung Nguyen ,  Matthias Brunner ,  Ralf Schmid ,  John White ,  Shinichi Kurita ,  James Hunter

IPC: G01R31/302

CPC classification number: H01L21/67748 ,  H01J2237/2811 ,  H01J2237/2817 ,  H01L21/67201 ,  H01L21/67236

Abstract: A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

公开(公告)号：US07123399B2

公开(公告)日：2006-10-17

申请号：US11054056

申请日：2005-02-09

Applicant: Christopher Gudeman ,  James Hunter ,  Richard Yeh ,  David T. Amm

Inventor： Christopher Gudeman ,  James Hunter ,  Richard Yeh ,  David T. Amm

IPC: G02B26/00

CPC classification number: B81C1/00111 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81C2201/0109 ,  G02B26/0808

Abstract: A MEM device in accordance with the invention comprises one or more movable micro-structures which are preferably ribbon structures or cantilever structures. The ribbon structures or cantilever structures are preferably coupled to a substrate structure through one or more support regions comprising a plurality of anchor support features and a plurality of post support features. The MEM device is preferably an optical MEM device with a plurality of movable ribbon structures each being supported by opposing ends through support regions each comprising a plurality of anchor support features and a plurality of post support features. In accordance with the method of the embodiments, the positions of the anchor and post support features, the number of anchor and support features and the spacings between the support features can selected during fabrication of the device to determine an operating condition of the MEM device.

Abstract translation: 根据本发明的MEM装置包括优选带状结构或悬臂结构的一个或多个可移动微结构。 带状结构或悬臂结构优选地通过包括多个锚固支撑特征和多个支撑支撑特征的一个或多个支撑区域耦合到基底结构。 MEM装置优选地是具有多个可移动带结构的光学MEM装置，每个可移动带结构各自由相对的端部支撑，每个支撑区域包括多个锚固支撑特征和多个支撑支撑特征。 根据实施例的方法，可以在制造装置期间选择锚和支柱特征的位置，锚固和支撑特征的数量以及支撑特征之间的间隔，以确定MEM装置的操作状态。

公开(公告)号：US20060158438A1

公开(公告)日：2006-07-20

申请号：US11313264

申请日：2005-12-21

Applicant: James Hunter

Inventor： James Hunter

IPC: G09G5/00

CPC classification number: G06F8/38

Abstract: A software interface that is installable on a processor for interfacing with an electrically or electronically controllable device. The software comprises means for receiving input from a user remotely via a network and a means for translating the network communicated user input into at least one of a control signal and a configuration signal. The software interface further comprises means for communicating a control signal to control software. Such control software, which is already known in the art, is configured in controlling relation to at least one of an electrically or electronically controllable device through a hardware interface. Further, means are included for translating a configuration signal into a user interface application between the control software and an indicator displayable to the user; means rendering a dynamic user interface in response to changes in connected devices; and means for ensuring the reliable relay of command and configuration signals across unreliable networks susceptible to limited bandwidths and communication interruptions.

公开(公告)号：US20050212540A1

公开(公告)日：2005-09-29

申请号：US11084671

申请日：2005-03-18

Applicant: James Nulty ,  James Hunter ,  Alexander Herrera

Inventor： James Nulty ,  James Hunter ,  Alexander Herrera

IPC: G01R1/073 ,  G01R31/26

CPC classification number: G01R1/07314 ,  G01R1/0735 ,  G01R1/07371 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49153 ,  Y10T29/49155

Abstract: In one embodiment, a probe card for testing dice on a wafer includes a substrate, a number of cantilevers formed on a surface thereof, and a number of probes extending from unsupported ends of the cantilevers. The unsupported ends of the cantilevers project over cavities on the surface of the substrate. The probes have tips to contact pads on the dice under test. The probe card may include a compressive layer above the surface of the substrate with a number of holes through which the probes extend.

Abstract translation: 在一个实施例中，用于在晶片上测试骰子的探针卡包括基底，在其表面上形成的多个悬臂以及从悬臂的未支撑的端部延伸的多个探针。 悬臂的未支撑的端部突出在基板表面上的空腔上。 探针具有接触被测试骰子上的垫的提示。 探针卡可以包括在衬底的表面上方的压缩层，其具有探针延伸穿过的多个孔。

公开(公告)号：US20050212004A1

公开(公告)日：2005-09-29

申请号：US11087230

申请日：2005-03-23

Applicant: Alexander Payne ,  James Hunter ,  David Amm

Inventor： Alexander Payne ,  James Hunter ,  David Amm

IPC: G02B26/08 ,  H01L29/24

CPC classification number: G02B26/0808

Abstract: A light modulator and a method of manufacturing the same are provided having a substrate with reflectivity enhancing layers formed thereon. The layers include at least a top surface for receiving incident light, a first layer overlying the substrate, and a second layer between the top surface and the first layer, the second layer overlying and abutting the first layer. The second layer has a predetermined thickness selected in relation to an index of refraction of the second layer and to a wavelength of the incident light such that the light reflecting off an interface between the first and second layers constructively interferes with light reflected from the top surface. Preferably, the first layer also has a predetermined thickness selected such that the light reflecting off an interface between the first layer and the substrate constructively interferes with light reflected from the top surface.

Abstract translation: 提供一种光调制器及其制造方法，具有在其上形成有反射增强层的基板。 这些层至少包括用于接收入射光的顶表面，覆盖衬底的第一层，以及顶表面和第一层之间的第二层，第二层覆盖并邻接第一层。 第二层具有相对于第二层的折射率和入射光的波长选择的预定厚度，使得从第一和第二层之间的界面反射的光建构性地干扰从顶表面反射的光 。 优选地，第一层还具有选择的预定厚度，使得从第一层和衬底之间的界面反射的光构造地干扰从顶表面反射的光。

公开(公告)号：US06896822B2

公开(公告)日：2005-05-24

申请号：US10321342

申请日：2002-12-16

Applicant: David T. Amm ,  Jahja Trisnadi ,  James Hunter ,  Christopher Gudeman ,  Dinesh Maheshwari

Inventor： David T. Amm ,  Jahja Trisnadi ,  James Hunter ,  Christopher Gudeman ,  Dinesh Maheshwari

IPC: G02B5/18 ,  G02B26/08 ,  B29D11/00 ,  H01L21/00

CPC classification number: G02B26/0808

Abstract: A light modulator includes elongated elements arranged parallel to each other. In a first diffraction mode, the light modulator operates to diffract an incident light into at least two diffraction orders. In a second diffraction mode, the light modulator operates to diffract the incident light into a single diffraction order. Each of the elongated elements comprises a blaze profile, which preferably comprises a reflective stepped profile across a width of each of the elongated elements and which produces an effective blaze at a blaze angle. Alternatively, the blaze profile comprises a reflective surface angled at the blaze angle. Each of selected ones of the elongated elements comprise a first conductive element. The elongated elements produce the first diffraction when a first electrical bias is applied between the first conductive elements and a substrate. A relative height of the blazed portions are adjusted to produce the second diffraction when a second electrical bias is applied between the first conductive elements and the substrate. In an alternative embodiment, each of the elongated elements includes the first conductive element and multiple elongated elements are arranged in groupings, where each of the groupings includes at least three of the elongated elements. When the multiple elongated elements are at a first height, the incident light reflects from the elongated elements. When relative heights of the multiple elongated elements are adjusted by applying individual electrical biases between the first conductive elements and the substrate, the incident light diffracts into the single diffraction order.

Abstract translation: 光调制器包括彼此平行布置的细长元件。 在第一衍射模式中，光调制器用于将入射光衍射为至少两个衍射级。 在第二衍射模式中，光调制器操作以将入射光衍射成单个衍射级。 每个细长元件包括火焰型材，其优选地包括穿过每个细长元件的宽度的反射阶梯型面，并且在火焰角度产生有效的火焰。 或者，火焰轮廓包括在火焰角度处成角度的反射表面。 细长元件中的每一个都包括第一导电元件。 当在第一导电元件和衬底之间施加第一电偏压时，细长元件产生第一衍射。 当在第一导电元件和基板之间施加第二电偏压时，调整闪耀部分的相对高度以产生第二衍射。 在替代实施例中，每个细长元件包括第一导电元件，并且多个细长元件被分组地布置，其中每个组包括至少三个细长元件。 当多个细长元件处于第一高度时，入射光从细长元件反射。 当通过在第一导电元件和衬底之间施加单独的电偏压来调节多个细长元件的相对高度时，入射光衍射成单个衍射级。

公开(公告)号：US06835616B1

公开(公告)日：2004-12-28

申请号：US10059823

申请日：2002-01-29

Applicant: Mira Ben-Tzur ,  Krishnaswamy Ramkumar ,  James Hunter ,  Thurman J. Rodgers ,  Mike Bruner ,  Klyoko Keuchi

Inventor： Mira Ben-Tzur ,  Krishnaswamy Ramkumar ,  James Hunter ,  Thurman J. Rodgers ,  Mike Bruner ,  Klyoko Keuchi

IPC: H01L218242

CPC classification number: H01L23/5222 ,  H01L21/7682 ,  H01L21/76885 ,  H01L23/5227 ,  H01L23/53223 ,  H01L23/53238 ,  H01L28/87 ,  H01L2924/0002 ,  Y10S257/924 ,  H01L2924/00

Abstract: In one embodiment, a sacrificial layer is deposited over a base layer. The sacrificial layer is used to define a subsequently formed floating metal structure. The floating metal structure may be anchored into the base layer. Once the floating metal structure is formed, the sacrificial layer surrounding the floating metal structure is etched to create a unity-k dielectric region separating the floating metal structure from the base layer. The unity-k dielectric region also separates the floating metal structure from another floating metal structure. In one embodiment, a noble gas fluoride such as xenon difluoride is used to etch a sacrificial layer of polycrystalline silicon.

Abstract translation: 在一个实施例中，牺牲层沉积在基底层上。 牺牲层用于限定随后形成的浮动金属结构。 浮动金属结构可以锚定到基层中。 一旦形成了浮动金属结构，则蚀刻围绕浮动金属结构的牺牲层，以产生将浮动金属结构与基底层分开的单位k介电区域。 unity-k电介质区域还将浮动金属结构与另一个浮动金属结构分离。 在一个实施方案中，使用惰性气体氟化物如二氟化氙来蚀刻多晶硅的牺牲层。

公开(公告)号：US06822797B1

公开(公告)日：2004-11-23

申请号：US10159715

申请日：2002-05-31

Applicant: Clinton B. Carlisle ,  Jahia I. Trisnadi ,  James Hunter

Inventor： Clinton B. Carlisle ,  Jahia I. Trisnadi ,  James Hunter

IPC: G02B518

CPC classification number: G02B26/0808

Abstract: An optical system provides high-contrast operation by collecting zero order light. The optical system comprises a light modulator and a collector. The light modulator is preferably a grating light valve™ light modulator including a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of an incident light beam. The plurality of elements in the first mode reflect light along a return path, where the plurality of elements in the second mode direct light away from the return path. The collector is coupled to the light modulator to collect zero order light along the return path while the plurality of elements are in the first mode and to collect zero order light along the return path while the plurality of elements are in the second mode.

Abstract translation: 光学系统通过收集零级光提供高对比度的操作。 光学系统包括光调制器和收集器。 光调制器优选地是包括可以在第一模式和第二模式中选择性地操作的多个元件的光栅光阀调制器，其中相邻元件之间的间隙等于或小于入射光束的波长。 第一模式中的多个元件沿着返回路径反射光，其中第二模式中的多个元件将光远离返回路径。 收集器耦合到光调制器以沿着返回路径收集零级光，同时多个元件处于第一模式，并且当多个元件处于第二模式时沿着返回路径收集零级光。

公开(公告)号：US06813059B2

公开(公告)日：2004-11-02

申请号：US10187159

申请日：2002-06-28

Applicant: James Hunter ,  Bryan Staker

Inventor： James Hunter ,  Bryan Staker

IPC: G02B2600

CPC classification number: G02B26/0841 ,  G02B26/0808

Abstract: A device comprising movable micro-structures configured to contact a substrate is disclosed. The substrate has a metal-insulator-metal construction with an upper metal layer and an insulator being patterned to provide substrate contact regions to a lower metal layer. The micro-structures have metal under layers for providing ribbon contact regions and non-contact regions. In use, a bias voltage is applied across the micro-structures and the top metal layer of the substrate causing the micro-structures and the substrate to contact through the contact regions. During contact, the contact regions are maintained at a potential that is substantially less than the applied bias voltage, thereby reducing the formation of asperities and/or sticking between contacting parts. The micro-structures are preferably ribbon structures in an optical MEM device configured to modulate light.

Abstract translation: 公开了一种包括被配置为接触衬底的可移动微结构的器件。 衬底具有金属 - 绝缘体 - 金属结构，其具有上金属层，并且绝缘体被图案化以向下金属层提供衬底接触区域。 微结构具有用于提供带状接触区域和非接触区域的金属层。 在使用中，跨越微结构和衬底的顶部金属层施加偏置电压，导致微结构和衬底通过接触区域接触。 在接触期间，接触区域保持在基本上小于所施加的偏置电压的电位，从而减少接触部件之间的粗糙和/或粘附的形成。 微结构优选是配置成调制光的光学MEM器件中的带状结构。

公开(公告)号：US06387723B1

公开(公告)日：2002-05-14

申请号：US09765922

申请日：2001-01-19

Applicant: Alexander Payne ,  Christopher Gudeman ,  James Hunter ,  Michael Bruner ,  Clinton Carroll

Inventor： Alexander Payne ,  Christopher Gudeman ,  James Hunter ,  Michael Bruner ,  Clinton Carroll

IPC: H01L2100

CPC classification number: G02B26/0808 ,  B81B7/0012

Abstract: A method of treating silicon-based surfaces for reducing charge migration is disclosed. In accordance with the method, a silicon-based surface is treated with Nitrogen-rich pacifying gas environment, after the surface is actuated. The surface is actuated in a drying step, wherein residual water or moisture is removed from the surfaces at an elevated temperature and a reduced pressure. The method of the instant invention is particularly useful for the treatment of ribbon surfaces in grating light valve device, wherein after the ribbon surfaces are treated according to the current invention, surface charging remains low for several days, even in open air conditions.

Abstract translation: 公开了一种处理硅基表面以减少电荷迁移的方法。 根据该方法，在表面被致动之后，用富含氮气的安抚气体环境处理硅基表面。 表面在干燥步骤中致动，其中在升高的温度和减压下从表面去除残留的水或水分。 本发明的方法对于光栅光阀装置中的色带表面的处理特别有用，其中在根据本发明对色带表面进行处理之后，即使在露天条件下，表面充电也保持低数天。