公开(公告)号：US08490483B2

公开(公告)日：2013-07-23

申请号：US12834953

申请日：2010-07-13

Applicant: Martin Wrede ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

Inventor： Martin Wrede ,  Johannes Classen ,  Torsten Ohms ,  Carsten Geckeler ,  Burkhard Kuhlmann ,  Jens Frey ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712 ,  G01C19/5747

Abstract: A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.

Abstract translation: 一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件， 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。

公开(公告)号：US20120186345A1

公开(公告)日：2012-07-26

申请号：US13266408

申请日：2010-04-06

Applicant: Wolfram Bauer ,  Johannes Classen ,  Rainer Willig ,  Matthias Meier ,  Burkhard Kuhlmann ,  Matthias Mathias Reimann ,  Ermin Esch ,  Hans-Dieter Schwarz ,  Michael Veith ,  Christoph Lang ,  Udo-Martin Gomez

Inventor： Wolfram Bauer ,  Johannes Classen ,  Rainer Willig ,  Matthias Meier ,  Burkhard Kuhlmann ,  Matthias Mathias Reimann ,  Ermin Esch ,  Hans-Dieter Schwarz ,  Michael Veith ,  Christoph Lang ,  Udo-Martin Gomez

IPC: G01C19/00

CPC classification number: G01C25/00 ,  G01C19/56 ,  G01C19/5726

Abstract: A yaw rate sensor (10) includes a movable mass structure (12) and a drive component (13) which is suitable for setting the movable mass structure (12) in motion (14), and an analysis component (15) which is suitable for detecting a response (40) of the movable mass structure (12) to a yaw rate (Ω). A method for functional testing of a yaw rate sensor (10) includes the following steps: driving a movable mass structure (12), feeding a test signal (42) into a quadrature control loop (44) at a feed point (48) of the quadrature control loop (44), feeding back a deflection (40) of the movable mass structure (12), detecting a measure of the feedback of the movable mass structure (12), and reading out the response signal (47) from the quadrature control loop (44). In the yaw rate sensor (10) and also in the method, the readout of the response signal (47) in relation to a processing direction (45) of the test signal (42) is provided between a feed point (48) for a test signal (42) and an actuator (38) for feeding back a deflection (40) of the movable mass structure (12).

Abstract translation: 横摆率传感器（10）包括可移动质量结构（12）和适于设置可移动质量结构（12）运动（14）的驱动部件（13），以及适合的分析部件（15） 用于将所述可移动质量结构（12）的响应（40）检测到偏航率（＆lt; OHgr）。 一种用于横摆角速度传感器（10）的功能测试的方法包括以下步骤：驱动可移动质量结构（12），将测试信号（42）馈送到正交控制回路（44） 正交控制回路（44），反馈可移动质量结构（12）的偏转（40），检测可移动质量结构（12）的反馈的测量值，并从 正交控制回路（44）。 在偏航率传感器（10）中，并且在该方法中，响应信号（47）相对于测试信号（42）的处理方向（45）的读出被提供在用于 测试信号（42）和用于反馈可移动质量结构（12）的偏转（40）的致动器（38）。

公开(公告)号：US20110174076A1

公开(公告)日：2011-07-21

申请号：US12308632

申请日：2007-11-14

Applicant: Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

Inventor： Johannes Classen ,  Axel Franke ,  Dietrich Schubert ,  Kersten Kehr ,  Ralf Reichenbach

IPC: G01P15/02

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/084

Abstract: A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.

Abstract translation: 微机械加速度传感器包括基板，平行于基板平面延伸并且部分地连接到基板的弹性隔膜，并且具有可以垂直于基板平面偏转的表面区域，以及地震块的中心 重力位于弹性隔膜的平面之外。 地震质量在位于弹性膜片的区域之外的衬底区域上延伸一段距离，其包括由多个电极组成的系统，每个电极与地震质量体的相对定位的区域在电路中形成电容器。 在其中心区域，抗震块附着在弹性隔膜的表面区域中的弹性隔膜，弹性隔膜可能垂直于基板平面偏转。

公开(公告)号：US20110154899A1

公开(公告)日：2011-06-30

申请号：US12736609

申请日：2009-04-01

Applicant: Johannes Classen ,  Lars Tebje

Inventor： Johannes Classen ,  Lars Tebje

IPC: G01P15/125

CPC classification number: G01P15/18 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0831

Abstract: A micromechanical component comprising a substrate, a seismic mass, and first and second detection means, the substrate having a main extension plane and the first detection means being provided for detection of a substantially translational first deflection of the seismic mass along a first direction substantially parallel to the main extension plane, and the second detection means further being provided for detection of a substantially rotational second deflection of the seismic mass about a first rotation axis parallel to a second direction substantially perpendicular to the main extension plane. The seismic mass can be embodied as an asymmetrical rocker, with the result that accelerations can be sensed as rotations. Detection can be accomplished via capacitive sensors.

Abstract translation: 一种微机械部件，包括基板，地震块以及第一和第二检测装置，所述基板具有主延伸平面，并且所述第一检测装置被提供用于检测所述地震块沿着基本平行的第一方向的基本平移的第一偏转 并且第二检测装置还被设置用于检测围绕平行于基本上垂直于主延伸平面的第二方向的第一旋转轴线的地震质量的基本上旋转的第二偏转。 地震质量可以被体现为不对称的摇杆，结果可以将加速度感测为旋转。 可以通过电容式传感器进行检测。

公开(公告)号：US20110088469A1

公开(公告)日：2011-04-21

申请号：US12513834

申请日：2007-11-08

Applicant: Reinhard Neul ,  Johannes Classen ,  Sebastian Gracki ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Kersten Kehr ,  Christian Gerhardt

Inventor： Reinhard Neul ,  Johannes Classen ,  Sebastian Gracki ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Kersten Kehr ,  Christian Gerhardt

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A method and system are provided including a rotation-rate sensor having a substrate, a bearing, a vibrating structure suspended on the bearing by springs in a rotatable manner for performing a planar driving vibration motion, and drive means for producing the planar driving vibration motion of the vibrating structure. The rotation-rate sensor has first evaluation means for detecting a rotation in a first axis of rotation and second evaluation means for detecting a rotation in a second axis of rotation.

Abstract translation: 提供了一种方法和系统，其包括旋转速率传感器，其具有基板，轴承，以可旋转的方式由弹簧悬挂在轴承上的振动结构，用于执行平面驱动振动运动;以及驱动装置，用于产生平面驱动振动运动 的振动结构。 旋转速率传感器具有用于检测第一旋转轴线的旋转的第一评估装置和用于检测第二旋转轴线的旋转的第二评估装置。

公开(公告)号：US07878061B2

公开(公告)日：2011-02-01

申请号：US12323653

申请日：2008-11-26

Applicant: Johannes Classen ,  Arnd Kaelberer ,  Patrick Wellner ,  Dietrich Schubert ,  Lars Tebje

Inventor： Johannes Classen ,  Arnd Kaelberer ,  Patrick Wellner ,  Dietrich Schubert ,  Lars Tebje

IPC: H01L21/76

CPC classification number: G01P15/125 ,  G01P15/0802

Abstract: A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.

Abstract translation: 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。

公开(公告)号：US20080141774A1

公开(公告)日：2008-06-19

申请号：US11985254

申请日：2007-11-13

Applicant: Johannes Classen ,  Markus Heitz ,  Lars Tebje ,  Fouad Bennini

Inventor： Johannes Classen ,  Markus Heitz ,  Lars Tebje ,  Fouad Bennini

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802

Abstract: An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.

Abstract translation: 加速度传感器包括悬挂在基板上方的弹簧上并且可以在垂直于基板的表面的方向上偏转的地震质量。 为了减少由于干扰加速度导致的地震质体沿着衬底表面的偏转，这导致了垂直于衬底表面的地震质量偏转测量的伪造，弹簧包括两个弯曲杆 通过横档相互连接。

公开(公告)号：US07313958B2

公开(公告)日：2008-01-01

申请号：US10471635

申请日：2002-09-25

Applicant: Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

Inventor： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

Abstract translation: 提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

公开(公告)号：US09266720B2

公开(公告)日：2016-02-23

申请号：US14059202

申请日：2013-10-21

Applicant: Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Axel Franke ,  Jens Frey ,  Heribert Weber ,  Frank Fischer ,  Patrick Wellner ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: B81C1/00

CPC classification number: B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

Abstract: A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

Abstract translation: 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。

公开(公告)号：US09261363B2

公开(公告)日：2016-02-16

申请号：US12303443

申请日：2007-06-06

Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01C19/56 ,  G01C19/5762 ,  G01C19/5747

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测到检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。