Abstract:
A polymer for lithographic purposes has at least a repeating structural unit represented by following General Formula (I). In Formula (I), R1, R3, R4, and R6 each independently represent hydrogen atom, a halogen atom, cyano group, an alkyl group, or a haloalkyl group; R2 and R5 each independently represent hydrogen atom, cyano group, etc.; X1 and X2 each independently represent single bond, or a substituted or unsubstituted bivalent alkylene, alkenylene, or cycloalkylene group, etc.; X3 and X4 each independently represent single bond or —CO—; R7, R8, R9, and R10 each independently represent hydrogen atom, an alkyl group, or a cycloalkyl group. The polymer for lithographic purposes shows good balance between line edge roughness (LER) and etching resistance and allows very fine and uniform patterning.
Abstract translation:用于光刻目的的聚合物至少具有由以下通式(I)表示的重复结构单元。 在式(I)中,R 1,R 3,R 4和R 6各自独立地表示氢原子,卤素原子,氰基,烷基或卤代烷基; R2和R5各自独立地表示氢原子,氰基等; X1和X2各自独立地表示单键,或取代或未取代的二价亚烷基,亚烯基或亚环烷基等; X 3和X 4各自独立地表示单键或-CO-; R 7,R 8,R 9和R 10各自独立地表示氢原子,烷基或环烷基。 用于光刻目的的聚合物在线边缘粗糙度(LER)和耐蚀刻性之间具有良好的平衡,并且允许非常精细和均匀的图案化。
Abstract:
Disclosed is a polycyclic ester containing a cyano group and a lactone skeleton, represented by following Formula (1): wherein Ra represents, for example, a hydrogen atom or an alkyl group having one to six carbon atoms which may have a halogen atom; R1s each represent, for example, a halogen atom or an alkyl or haloalkyl group having one to six carbon atoms; “m” is the number of R1s; “n” is the number of cyano groups; and CH2═C(Ra)COO— group may have either of an endo conformation and an exo conformation. Accordingly, there is provided a novel polycyclic ester containing a cyano group and a lactone skeleton which is useful typically as a monomeric component for highly functional polymers. A polymer, for example, derived from this compound is highly soluble in an organic solvent while remaining stable typically to chemicals and exhibits improved hydrolyzability and/or improved solubility in water after hydrolysis.
Abstract:
Disclosed is a polycyclic ester containing a cyano group and a lactone skeleton, represented by following Formula (1): wherein Ra represents, for example, a hydrogen atom or an alkyl group having one to six carbon atoms which may have a halogen atom; R1s each represent, for example, a halogen atom or an alkyl or haloalkyl group having one to six carbon atoms; “m” is the number of R1s; “n” is the number of cyano groups; and CH2═C(Ra)COO— group may have either of an endo conformation and an exo conformation. Accordingly, there is provided a novel polycyclic ester containing a cyano group and a lactone skeleton which is useful typically as a monomeric component for highly functional polymers. A polymer, for example, derived from this compound is highly soluble in an organic solvent while remaining stable typically to chemicals and exhibits improved hydrolyzability and/or improved solubility in water after hydrolysis.
Abstract:
Disclosed is a polycyclic ester containing a cyano group and a lactone skeleton, represented by following Formula (1): wherein Ra represents, for example, a hydrogen atom or an alkyl group having one to six carbon atoms which may have a halogen atom; R1s each represent, for example, a halogen atom or an alkyl or haloalkyl group having one to six carbon atoms; “m” is the number of R1s; “n” is the number of cyano groups; and CH2═C(Ra)COO— group may have either of an endo conformation and an exo conformation. Accordingly, there is provided a novel polycyclic ester containing a cyano group and a lactone skeleton which is useful typically as a monomeric component for highly functional polymers. A polymer, for example, derived from this compound is highly soluble in an organic solvent while remaining stable typically to chemicals and exhibits improved hydrolyzability and/or improved solubility in water after hydrolysis.
Abstract translation:公开了含有由下式(1)表示的氰基和内酯骨架的多环酯:其中,Ra表示例如可以具有卤素原子的氢原子或碳原子数1〜6的烷基, R 1各自表示例如卤素原子或具有1〜6个碳原子的烷基或卤代烷基; “m”是R1的数量; “n”是氰基的数目; 和CH2-C(Ra)COO-基团可以具有内部构象和外部构象。 因此,提供了含有氰基和内酯骨架的新型多环酯,其通常用作高官能聚合物的单体组分。 例如,衍生自该化合物的聚合物高度可溶于有机溶剂,同时通常保持稳定化学品,并且在水解后表现出改善的水解性和/或改善的在水中的溶解性。
Abstract:
Disclosed is an oxetane-containing vinyl ether compound including one or more aromatic or non-aromatic carbocycles and/or two or more vinyl ether structures, such as a compound of Formula: wherein Ring Z1 is non-aromatic carbocycle; Ra is vinyl group of Formula: wherein each of R1, R2, and R3 is hydrogen or C1-C4 alkyl; Wa is single bond or organic group having a valence of (m+1); X1 is, for example, hydrocarbon; “m” and “q” are each 1 or 2; and “p” is 0 to 5. Also disclosed is an alicyclic epoxy-containing vinyl ether compound of Formula: wherein Ring Z2 is non-aromatic carbocycle; Rb is vinyl group of Formula: wherein R4, R5 and R6 are each hydrogen or C1-C4 alkyl; Wb is single bond or organic group having a valence of (r+1); Rc and Rd are hydrogen or alkyl; and “r” and “s” are 1 or 2.
Abstract translation:公开了包含一种或多种芳族或非芳族碳环和/或两个或多个乙烯基醚结构的含氧杂环丁烷的乙烯基醚化合物,例如下式的化合物:其中环Z 1是非 - 芳香碳环 R a是乙烯基,其中R 1,R 2和R 3各自为氢 或C 1 -C 4烷基; 化合物是单键或化合价(m + 1)的有机基团。 X 1是例如烃; “m”和“q”分别为1或2; 并且“p”为0至5.还公开了下式的脂环族环氧基乙烯基醚化合物:其中Z 2是非芳族碳环; R b是下式的乙烯基:其中R 4,R 5和R 6各自是氢或C 1 -C 1-4烷基; W是单键或化合价(r + 1)的有机基团。 R d和R d是氢或烷基; “r”和“s”为1或2。
Abstract:
A novel phospholipase A1 (PLA1) having a substrate specificity to phosphatidic acid (PA); a peptide or a polypeptide originating in the above novel PLA1; a polynucleotide encoding the peptide or polypeptide originating in the novel PLA1; a process for producing the peptide or polypeptide originating in the novel PLA1; an antibody against the peptide or polypeptide originating in the novel PLA1; a method of identifying an inhibitor, an antagonist or an activator of the novel PLA1 by using the same; compounds identified by the above method; and medicinal compositions and diagnostic methods by using the same.
Abstract:
A process of the present invention produces a hydroxylactone by subjecting an unsaturated carboxylic acid having a double bond not conjugated to a carboxyl group or an ester thereof to (i) a reaction with hydrogen peroxide in the presence of a metallic compound containing a metallic element selected from W, Mo, V and Mn or (ii) a reaction with a peroxide containing the metallic element to thereby yield a corresponding hydroxylactone having a hydroxyl group combined with one of carbon atoms constituting the double bond and being cyclized at the other carbon atom position. The metallic compound may be one selected from oxides, oxoacids and salts thereof. The unsaturated carboxylic acid includes, for example, β,γ-unsaturated carboxylic acids, γ,δ-unsaturated carboxylic acids, and δ,ε-unsaturated carboxylic acids. The process can produce hydroxylactones in high yields at low cost.
Abstract:
A polymeric compound includes at least one monomeric unit of the following formula (I): wherein R1 is a hydrogen atom or a methyl group; and each of R2 and R3 is independently a hydrogen atom or a hydroxyl group. The polymeric compound may include the monomeric unit and at least one monomeric unit selected from monomeric units represented by the following formulae (IIa) and (IIb): wherein R1 is a hydrogen atom or a methyl group; each of R4 and R5 is, for example, a hydrogen atom, a hydroxyl group, an oxo group, or a carboxyl group, wherein R4 and R5 are not concurrently hydrogen atoms; and each of R7 and R8 is independently a hydrogen atom, a hydroxyl group, or an oxo group. The polymeric compound have a high etching resistance in addition to satisfactory transparency, alkali-solubility, and adhesion.
Abstract translation:聚合化合物包括至少一种下式(I)的单体单元:其中R1是氢原子或甲基; R2和R3各自独立地为氢原子或羟基。 聚合化合物可以包括单体单元和选自下式(IIa)和(IIb)表示的单体单元的至少一种单体单元:其中R 1是氢原子或甲基; R4和R5各自为例如氢原子,羟基,氧代基或羧基,其中R4和R5不同时为氢原子; R 7和R 8各自独立地为氢原子,羟基或氧代基。 除了令人满意的透明性,碱溶性和粘合性之外,高分子化合物具有高的耐蚀刻性。
Abstract:
Lane change guidance information is output based on data for the next guide intersection on a route calculated in advance and on detection of the driving lane in which the vehicle is currently driven. The system includes present position detection, direction of advance determination for guide intersections along the preset route, driving lane determination, and guidance information output for instructing the driver when direction to be taken at a guide intersection does not match the current driving lane, whereby adequate guidance information is provided the driver regarding lane changes when the vehicle is driven on a road having two or more lanes.