Remover of Static Charges on Surfaces of Substrates of Semiconductors and Liquid Crystals in the Processes of Their Manufacture
    41.
    发明申请
    Remover of Static Charges on Surfaces of Substrates of Semiconductors and Liquid Crystals in the Processes of Their Manufacture 审中-公开
    半导体衬底和液晶在其制造过程中表面的静电消除

    公开(公告)号:US20080278880A1

    公开(公告)日:2008-11-13

    申请号:US12090316

    申请日:2005-10-21

    IPC分类号: H05F3/00

    CPC分类号: H05F3/06 G02F1/1303

    摘要: A remover that removes the static charges on surfaces of substrates of semiconductors and liquid crystals in the processes for manufacturing them is provided. A cylindrical filter in the remover cannot be affected by soft X-rays, and the X-rays cannot leak outside the guiding vessel.A portion 1 for generating purified air that comprises a cylindrical filter 5, a portion 2 for irradiation of soft X-rays 19, and a portion 3 for blowing out the ionized purified air, are arranged in the direction of the air flow in a guiding vessel 4. Also, a shield 23 prevents the portion 1 for generating purified air from being exposed to the irradiation. Further, the portion 3 has a construction wherein the ionized purified air 35 is blown at an equal rate of flow along the longitudinal direction of the remover and prevents the soft X-rays 19 from leaking outside the guiding vessel 4.

    摘要翻译: 提供了一种在其制造方法中除去半导体和液晶的衬底的表面上的静电荷的去除剂。 去除剂中的圆柱形过滤器不会受到软X射线的影响,X射线不能在引导管外部泄漏。 用于产生净化空气的部分1包括圆柱形过滤器5,用于照射软X射线19的部分2和用于吹出电离净化空气的部分3沿空气流动方向布置在引导 而且,屏蔽23防止产生净化空气的部分1暴露于照射。 此外,部分3具有这样的结构,其中离子化净化空气35沿着除去器的纵向以相同的流速吹送,并且防止软X射线19泄漏到引导容器4的外部。

    Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system
    43.
    发明授权
    Air-curtain forming apparatus for wafer hermetic container in semiconductor-fabrication equipment of minienvironment system 失效
    微型环境系统半导体制造设备中的晶片密封容器的气幕成型装置

    公开(公告)号:US07416998B2

    公开(公告)日:2008-08-26

    申请号:US10537133

    申请日:2003-02-27

    IPC分类号: H01L21/00 B65B69/00 B01D50/00

    CPC分类号: H01L21/67017 H01L21/67772

    摘要: In a semiconductor-fabrication equipment of a minienvironment system, ambient air is prevented from entering a gap between an opening of the semiconductor-fabrication equipment and a wafer gateway of a hermetic container to prevent dust entrained in the ambient air from adhering to wafers in the hermetic container. Clean air is injected from a clean-air injection device (1), which is connected to an air-supply device (2) through an air-supply tube (3), and which is provided with filter means (6a) in the from of rectangular frame formed with cylindrically-shaped filters connected to each other, to form an air curtain at the gap (96) between the gateway (74) of the hermetic container (71) through which wafers (73) are taken out of or put in the hermetic container (71) and the opening (98) of a loading part (78) attached to a front panel (77) of the semiconductor-fabrication equipment (76), thereby shutting off the ambient air that would otherwise enter the hermetic container (71) through the gap (96) between the gateway (74) of the hermetic container (71) and the opening (98) of the loading part (78) attached to the semiconductor-fabrication equipment (76) when a lid (75) of the hermetic container (71) is opened into the semiconductor-fabrication equipment (76).

    摘要翻译: 在微环境系统的半导体制造设备中,防止环境空气进入半导体制造设备的开口和密封容器的晶片网关之间的间隙,以防止夹带在周围空气中的灰尘粘附到 密封容器。 清洁空气从通过供气管(3)连接到供气装置(2)的清洁空气注入装置(1)注入,并在其中设置有过滤装置(6a) 从形成有彼此连接的圆柱形过滤器的矩形框架形成在密封容器(71)的网关(74)之间的间隙(96)处形成空气幕,晶片(73)通过该间隙被取出或 放入安装在半导体制造设备(76)的前面板(77)上的装载部分(78)的密封容器(71)和开口(98)中,从而切断否则将进入 通过密封容器(71)的网关(74)之间的间隙(96)与安装在半导体制造设备(76)上的装载部件(78)的开口(98)之间的密封容器(71) 密封容器(71)的开口(75)打开到半导体制造设备中 t(76)。

    Air-purifying device for a front-opening unified pod
    44.
    发明授权
    Air-purifying device for a front-opening unified pod 有权
    用于前开口统一舱的空气净化装置

    公开(公告)号:US07335244B2

    公开(公告)日:2008-02-26

    申请号:US11027439

    申请日:2004-12-30

    IPC分类号: B01D46/00

    CPC分类号: B01D53/0407 B01D2257/80

    摘要: An air-purifying device for a front-opening unified pod to purify the air in it is provided. The air in the front-opening unified pod 51 is sucked through one of its breathing holes 58a and directed into an air-purifying device (M) that includes a fan-driving means 1, a dust-filtering means 2, and a chemical-filtering means 3. The moisture, chemical gases, and dust in the air are removed by the air-purifying device (M), and then the purified air is forced into the front-opening unified pod 51 through the other breathing hole 58b. Thus the air in the front-opening unified pod 51 is purified, and its purity is maintained by circulating the air.

    摘要翻译: 提供一种用于净化其中的空气的用于前开口的统一荚的空气净化装置。 前开口统一箱51中的空气通过其呼吸孔58a中的一个被吸入并引导到包括风扇驱动装置1,除尘装置2和化学品的空气净化装置(M) 过滤装置3。 通过空气净化装置(M)除去空气中的水分,化学气体和灰尘,然后净化的空气通过另一个呼吸孔58b被迫进入前开口统一的容器51中。 因此,前开口统一容器51中的空气被净化,并且通过使空气循环来维持其纯度。

    Processing device with reconfigurable circuit, integrated circuit device and processing method using these devices
    46.
    发明申请
    Processing device with reconfigurable circuit, integrated circuit device and processing method using these devices 审中-公开
    具有可重构电路的处理器件,集成电路器件和使用这些器件的处理方法

    公开(公告)号:US20070038971A1

    公开(公告)日:2007-02-15

    申请号:US10573970

    申请日:2004-07-09

    IPC分类号: G06F17/50

    CPC分类号: G06F15/7867

    摘要: In the processing device in accordance with the present invention, a plurality of divided circuits obtained by dividing one circuit are successively configured on a reconfigurable circuit, an operation is executed by the divided circuits by feeding back an output of one divided circuit to a next divided circuit, and an output is taken out from the last configured divided circuit. As a feedback path, a path portion is formed, which connects the output of the reconfigurable circuit to its input. By successively configuring the divided circuits, one circuit as a whole can be implemented.

    摘要翻译: 在根据本发明的处理装置中,通过划分一个电路获得的多个分割电路被连续地配置在可重新配置电路上,通过将一个划分电路的输出反馈到下一个被划分的电路 电路,并从最后配置的分频电路中取出输出。 作为反馈路径,形成路径部分,其将可重构电路的输出连接到其输入。 通过连续配置划分的电路,可以实现一个电路作为整体。

    Personal information environment system
    47.
    发明授权
    Personal information environment system 失效
    个人信息环境系统

    公开(公告)号:US5995098A

    公开(公告)日:1999-11-30

    申请号:US775438

    申请日:1996-12-31

    IPC分类号: G06Q10/10 G06F3/00

    CPC分类号: G06Q10/10

    摘要: An information processing apparatus with which a user can establish a personal information environment in a group work by enabling the user to individually control information from his viewpoint, which is distributedly controlled by respective unique control methods in a variety of systems concerning the group work, and user can arrange information freely and without any distinction between files managed by a group and personal local documents.

    摘要翻译: 一种信息处理装置,用户可以通过使用户能够通过使用户能够单独地控制来自他的视点的信息来单独地控制组织工作中的个人信息环境,所述视点由关于组工作的各种系统中的各种独特控制方法分散控制,以及 用户可以自由地安排信息,不需要区分由组管理的文件和个人本地文档。

    Cherry tree Rootstock Bio Six
    49.
    植物专利

    公开(公告)号:USPP7924P

    公开(公告)日:1992-07-28

    申请号:US483857

    申请日:1990-02-23

    摘要: A cherry tree rootstock characterized by wide and strong root anchorage, easy vegetative propagation, a thicker shoot and a harder root than the known variety "Colt", a more compact tree shape and darker green leaves than the Colt variety, and a hexaploid (2n=48) chromosome structure as compared to the triploid (2n=24) chromosome structure in the Colt variety.