Method for examining a specimen in a particle beam instrument
    41.
    发明授权
    Method for examining a specimen in a particle beam instrument 失效
    在粒子束仪器中检查样品的方法

    公开(公告)号:US4954705A

    公开(公告)日:1990-09-04

    申请号:US416996

    申请日:1989-10-02

    摘要: For localization of the defects on mask and wafers generated by particle occupation, electron-optical imaging methods have been developed where the subject to be examined is scanned with a focused electron beam. Since the signal-to-noise ratio needed for a reliable defect recognition limits the scan rate, the throughput of inspected subjects remains low. It is therefore proposed that the subject be scanned with a line-shaped electron probe and that the triggered secondary electons be imaged onto a detector with the assistance of an electron optics comprising an immersion lens, whereby one line element of the surface region illuminated by the electron probe is assigned to each detector element.

    摘要翻译: 为了对由颗粒占据产生的掩模和晶片上的缺陷进行定位,已经开发了电子 - 光学成像方法,其中将用聚焦电子束扫描要检查的对象。 由于可靠的缺陷识别所需的信噪比限制了扫描速率,检测对象的吞吐量保持较低。 因此,提出用线形电子探针扫描对象,并且借助于包括浸没透镜的电子光学器件将触发的次级电极成像到检测器上,由此由表面区域的一个线元件被 电子探针被分配给每个检测器元件。

    Method for testing conductor networks
    42.
    发明授权
    Method for testing conductor networks 失效
    导体网络测试方法

    公开(公告)号:US4841242A

    公开(公告)日:1989-06-20

    申请号:US161758

    申请日:1988-02-29

    申请人: Matthias Brunner

    发明人: Matthias Brunner

    IPC分类号: G01R31/02 G01R31/306

    CPC分类号: G01R31/306

    摘要: A method of testing conductor networks on printed circuit boards and wiring modules comprising charging various points on the conductor network with one or more charging beams while simultaneously irridating the conductor network with a large area holding beam which compensates for charge losses during the charge detecting period which determines whether shorts or open circuits occur in the network.

    摘要翻译: 一种在印刷电路板和布线模块上测试导体网络的方法,包括用一个或多个充电波束对导体网络上的各个点进行充电,同时用大面积的保持波束对导体网络进行充电,该大面积的保持波束在电荷检测期间补偿电荷损失, 确定网络中是否发生短路或开路。

    Detector for charged particles
    43.
    发明授权
    Detector for charged particles 失效
    带电粒子检测器

    公开(公告)号:US4831267A

    公开(公告)日:1989-05-16

    申请号:US147338

    申请日:1988-01-22

    申请人: Matthias Brunner

    发明人: Matthias Brunner

    摘要: A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.

    摘要翻译: 用于带电粒子的检测器包括大致平行于样品表面布置的三个栅格电极,并通过绝缘间隔物彼此分离,以及几乎完全覆盖样品的带电粒子敏感部分。 颗粒敏感部件包括多个棒状闪烁体或者位于高电位的光导体,用于二次粒子的后加速并且位于大致平行于样品表面的平面中。

    Drive apparatus with improved testing properties
    44.
    发明授权
    Drive apparatus with improved testing properties 有权
    具有改进测试性能的驱动装置

    公开(公告)号:US08208114B2

    公开(公告)日:2012-06-26

    申请号:US12355698

    申请日:2009-01-16

    申请人: Matthias Brunner

    发明人: Matthias Brunner

    IPC分类号: G02F1/1345

    CPC分类号: G09G3/006 G02F1/1309

    摘要: Embodiments of the present invention relate to a drive electronics for driving a display with a matrix 101 of picture elements. The drive circuit 102x and 102y for generating signals for driving the pixels via control lines 103 is provided with signals at the input terminals 110 via contact areas 104. In addition to the contact areas used for the generation of arbitrary pictures, there exist contact areas 105 used within the framework of a testing method. These contact areas for the testing method are also connected with the input terminals 110 of the drive circuit and are used for generating a test pattern.

    摘要翻译: 本发明的实施例涉及一种用于利用图像元素的矩阵101驱动显示器的驱动电子装置。 用于通过控制线103产生用于驱动像素的信号的驱动电路102x和102y在接收区域104处在输入端110处被提供有信号。除了用于产生任意图像的接触区域之外还存在接触区域105 在测试方法的框架内使用。 用于测试方法的这些接触区域也与驱动电路的输入端子110连接,并用于产生测试图案。

    METHOD AND DEVICE FOR FASTENING AN AIRBAG IN A MOTOR VEHICLE
    45.
    发明申请
    METHOD AND DEVICE FOR FASTENING AN AIRBAG IN A MOTOR VEHICLE 失效
    用于在汽车中紧急安全气囊的方法和装置

    公开(公告)号:US20100230936A1

    公开(公告)日:2010-09-16

    申请号:US12438912

    申请日:2007-08-22

    IPC分类号: B60R21/20 F16B37/04 B23P11/00

    摘要: The invention relates to a method for securing an airbag (25) to a motor vehicle. Said method consists of the following steps: an airbag (25) that comprises a securing lug (20) and that can be filled with a gas is secured to a securing device (10) that comprises a plate (11) and an attachment device (16) that is secured to the plate. Said plate comprises a first plate section (12) having a first opening (14) provided with a screw thread (15) and a second plate section (13). Said attachment device (16) is secured to the first plate section (12) and the airbag is secured to the securing device (10) by bending the second plate section (13) in such a manner that the first plate section (12) and the second plate section (13) at least partially surround the securing lug (20) on both sides. The invention also relates to a securing device for an airbag, an airbag module and a motor vehicle.

    摘要翻译: 本发明涉及一种将气囊(25)固定到机动车辆上的方法。 所述方法包括以下步骤:包括固定凸耳(20)并可填充有气体的气囊(25)固定到固定装置(10)上,所述固定装置包括板(11)和附接装置 16)固定到板上。 所述板包括具有设置有螺纹(15)和第二板部(13)的第一开口(14)的第一板部分(12)。 所述附接装置(16)固定到第一板部分(12),并且气囊通过使第二板部分(13)弯曲而固定到固定装置(10),使得第一板部分(12)和 第二板部分(13)至少部分地围绕两侧的固定凸耳(20)包围。 本发明还涉及一种用于气囊,气囊模块和机动车辆的固定装置。

    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES
    46.
    发明申请
    SYSTEM AND METHOD FOR TRANSFERRING A SUBSTRATE INTO AND OUT OF A REDUCED VOLUME CHAMBER ACCOMMODATING MULTIPLE SUBSTRATES 审中-公开
    将基板输入和输出到减少容积的多个基板的系统和方法

    公开(公告)号:US20080251019A1

    公开(公告)日:2008-10-16

    申请号:US11871510

    申请日:2007-10-12

    IPC分类号: B05C11/00 H01L21/02

    摘要: The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.

    摘要翻译: 本发明包括用于将衬底转入和移出被配置为容纳多个衬底的室的系统和方法。 在一个实施例中,系统包括腔室壳体,其包括第一衬底支撑托盘和可沿着垂直轴线独立移动的第二衬底支撑托盘以及可移入和移出腔室壳体的衬底输送器。 第一基板支撑托盘和第二基板支撑托盘可移动到第二基板支撑托盘的一部分被容纳在第一基板支撑托盘中的位置。

    Line short localization in LCD pixel arrays
    47.
    发明授权
    Line short localization in LCD pixel arrays 有权
    LCD像素阵列的线路短路定位

    公开(公告)号:US07317325B2

    公开(公告)日:2008-01-08

    申请号:US11290932

    申请日:2005-11-29

    IPC分类号: G01R31/00

    摘要: A method and apparatus for identifying a location of a short between two or more signal lines on a substrate having a plurality of thin film transistors and a plurality of pixels associated with the thin film transistors. The method includes locating the two or more signal lines having the short, locating one or more defective pixels disposed between the two or more signal lines having the short, and identifying the defective pixels as the location of the short.

    摘要翻译: 一种用于识别具有多个薄膜晶体管和与该薄膜晶体管相关联的多个像素的衬底上的两条或更多条信号线之间的短路位置的方法和装置。 该方法包括定位两条或更多条信号线,该信号线具有设置在具有短路的两条或多条信号线之间的一个或多个缺陷像素,并且识别缺陷像素作为短路的位置。

    Line short localization in LCD pixel arrays
    48.
    发明申请
    Line short localization in LCD pixel arrays 有权
    LCD像素阵列的线路短路定位

    公开(公告)号:US20060125510A1

    公开(公告)日:2006-06-15

    申请号:US11290932

    申请日:2005-11-29

    IPC分类号: G01R31/00

    摘要: A method and apparatus for identifying a location of a short between two or more signal lines on a substrate having a plurality of thin film transistors and a plurality of pixels associated with the thin film transistors. The method includes locating the two or more signal lines having the short, locating one or more defective pixels disposed between the two or more signal lines having the short, and identifying the defective pixels as the location of the short.

    摘要翻译: 一种用于识别具有多个薄膜晶体管和与该薄膜晶体管相关联的多个像素的衬底上的两条或更多条信号线之间的短路位置的方法和装置。 该方法包括定位两条或更多条信号线,该信号线具有设置在具有短路的两条或多条信号线之间的一个或多个缺陷像素,并且识别缺陷像素作为短路的位置。

    Clutch lever arrangement
    49.
    发明申请
    Clutch lever arrangement 失效
    离合器杆装置

    公开(公告)号:US20060076211A1

    公开(公告)日:2006-04-13

    申请号:US11241335

    申请日:2005-09-30

    IPC分类号: F16D23/12

    CPC分类号: F16D23/12 F16D2023/141

    摘要: A clutch lever arrangement for a clutch, especially for a commercial motor vehicle clutch, having a clutch lever pivotably supported on a bearing point on a stationary component. The lever has a force-application section for introducing an actuating force by way of an actuating element and a force-transmission section for transmitting the actuating force to a clutch-release bearing, which is mounted with freedom to slide axially back and forth in the pivot plane of the clutch lever. To reduce undesirable vibrations of the clutch lever, the lever is guided in its pivot plane by a guide means.

    摘要翻译: 一种用于离合器的离合器杆装置,特别是用于商用汽车离合器,其具有可枢转地支撑在固定部件上的支承点上的离合器杆。 杠杆具有用于通过致动元件引导致动力的力施加部分和用于将致动力传递到离合器释放轴承的力传递部分,该离合器释放轴承安装成可自由地沿轴向前后滑动 离合器杆的枢转平面。 为了减少离合器杆的不期望的振动,杠杆通过引导装置在其枢转平面中被引导。

    Release mechanism with a device for compensating for inaccuracies in a friction clutch of a motor vehicle
    50.
    发明授权
    Release mechanism with a device for compensating for inaccuracies in a friction clutch of a motor vehicle 失效
    具有用于补偿机动车辆的摩擦离合器中的不准确性的装置的释放机构

    公开(公告)号:US06845856B2

    公开(公告)日:2005-01-25

    申请号:US10449954

    申请日:2003-05-30

    IPC分类号: F16D13/75 F16D23/14

    CPC分类号: F16D23/146 F16D13/755

    摘要: A release mechanism for actuating a friction clutch is concentric to a center axis of a guide sleeve mounted in turn on a transmission shaft. The release mechanism includes a clutch release bearing and a device for compensating for the tilt of the center axis of the friction clutch with respect to the center axis of the guide sleeve and/or for the wobbling eccentricity of the release spring. The clutch release bearing includes an inner ring, an outer ring, and an adjusting sleeve. One of the inner ring or outer ring communicates with a release spring of the friction clutch. The device for compensating for the tilt of the center axis of the friction clutch with respect to the center axis of the guide sleeve and/or for the wobbling eccentricity of the release spring includes a release ring and a load ring. The release ring is in contact with a finger of the release spring of the friction clutch and includes a spherical surface having a center on the axis of the transmission shaft. A load ring cooperates with the spherical surface of the release ring and communicates with the adjusting sleeve for placing the one of the inner ring and outer ring in communication with the release spring. Preferably the release ring is curved and the load ring is a circular cross-sectioned wire to reduce wear.

    摘要翻译: 用于致动摩擦离合器的释放机构与安装在传动轴上的引导套筒的中心轴线同心。 释放机构包括离合器分离轴承和用于补偿摩擦离合器的中心轴线相对于导向套筒的中心轴线的倾斜和/或用于释放弹簧的摆动偏心的装置。 离合器分离轴承包括内圈,外圈和调节套。 内环或外环中的一个与摩擦离合器的释放弹簧连通。 用于补偿摩擦离合器的中心轴线相对于导向套筒的中心轴线倾斜的装置和/或用于释放弹簧的摆动偏心的装置包括释放环和负载环。 释放环与摩擦离合器的释放弹簧的手指接触,并且包括在传动轴的轴线上具有中心的球面。 负载环与释放环的球面配合,并与调节套相连,用于将内圈和外圈中的一个与释放弹簧连通。 优选地,释放环是弯曲的,并且负载环是圆形横截面的线以减少磨损。