摘要:
For localization of the defects on mask and wafers generated by particle occupation, electron-optical imaging methods have been developed where the subject to be examined is scanned with a focused electron beam. Since the signal-to-noise ratio needed for a reliable defect recognition limits the scan rate, the throughput of inspected subjects remains low. It is therefore proposed that the subject be scanned with a line-shaped electron probe and that the triggered secondary electons be imaged onto a detector with the assistance of an electron optics comprising an immersion lens, whereby one line element of the surface region illuminated by the electron probe is assigned to each detector element.
摘要:
A method of testing conductor networks on printed circuit boards and wiring modules comprising charging various points on the conductor network with one or more charging beams while simultaneously irridating the conductor network with a large area holding beam which compensates for charge losses during the charge detecting period which determines whether shorts or open circuits occur in the network.
摘要:
A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.
摘要:
Embodiments of the present invention relate to a drive electronics for driving a display with a matrix 101 of picture elements. The drive circuit 102x and 102y for generating signals for driving the pixels via control lines 103 is provided with signals at the input terminals 110 via contact areas 104. In addition to the contact areas used for the generation of arbitrary pictures, there exist contact areas 105 used within the framework of a testing method. These contact areas for the testing method are also connected with the input terminals 110 of the drive circuit and are used for generating a test pattern.
摘要:
The invention relates to a method for securing an airbag (25) to a motor vehicle. Said method consists of the following steps: an airbag (25) that comprises a securing lug (20) and that can be filled with a gas is secured to a securing device (10) that comprises a plate (11) and an attachment device (16) that is secured to the plate. Said plate comprises a first plate section (12) having a first opening (14) provided with a screw thread (15) and a second plate section (13). Said attachment device (16) is secured to the first plate section (12) and the airbag is secured to the securing device (10) by bending the second plate section (13) in such a manner that the first plate section (12) and the second plate section (13) at least partially surround the securing lug (20) on both sides. The invention also relates to a securing device for an airbag, an airbag module and a motor vehicle.
摘要:
The present invention comprises a system and method for transferring a substrate into and out of a chamber configured to accommodate multiple substrates. In one embodiment, the system comprises a chamber housing that includes a first substrate support tray and a second substrate support tray independently movable along a vertical axis, and a substrate conveyor movable into and out of the chamber housing. The first substrate support tray and the second substrate support tray are movable to a position where a portion of the second substrate support tray is received in the first substrate support tray.
摘要:
A method and apparatus for identifying a location of a short between two or more signal lines on a substrate having a plurality of thin film transistors and a plurality of pixels associated with the thin film transistors. The method includes locating the two or more signal lines having the short, locating one or more defective pixels disposed between the two or more signal lines having the short, and identifying the defective pixels as the location of the short.
摘要:
A method and apparatus for identifying a location of a short between two or more signal lines on a substrate having a plurality of thin film transistors and a plurality of pixels associated with the thin film transistors. The method includes locating the two or more signal lines having the short, locating one or more defective pixels disposed between the two or more signal lines having the short, and identifying the defective pixels as the location of the short.
摘要:
A clutch lever arrangement for a clutch, especially for a commercial motor vehicle clutch, having a clutch lever pivotably supported on a bearing point on a stationary component. The lever has a force-application section for introducing an actuating force by way of an actuating element and a force-transmission section for transmitting the actuating force to a clutch-release bearing, which is mounted with freedom to slide axially back and forth in the pivot plane of the clutch lever. To reduce undesirable vibrations of the clutch lever, the lever is guided in its pivot plane by a guide means.
摘要:
A release mechanism for actuating a friction clutch is concentric to a center axis of a guide sleeve mounted in turn on a transmission shaft. The release mechanism includes a clutch release bearing and a device for compensating for the tilt of the center axis of the friction clutch with respect to the center axis of the guide sleeve and/or for the wobbling eccentricity of the release spring. The clutch release bearing includes an inner ring, an outer ring, and an adjusting sleeve. One of the inner ring or outer ring communicates with a release spring of the friction clutch. The device for compensating for the tilt of the center axis of the friction clutch with respect to the center axis of the guide sleeve and/or for the wobbling eccentricity of the release spring includes a release ring and a load ring. The release ring is in contact with a finger of the release spring of the friction clutch and includes a spherical surface having a center on the axis of the transmission shaft. A load ring cooperates with the spherical surface of the release ring and communicates with the adjusting sleeve for placing the one of the inner ring and outer ring in communication with the release spring. Preferably the release ring is curved and the load ring is a circular cross-sectioned wire to reduce wear.