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54 条记录 (耗时 0.028 秒)

    Micromechanical electronic device
    41.
    发明授权
    Micromechanical electronic device 失效
    微机电电子设备

    公开(公告)号：US6091125A

    公开(公告)日：2000-07-18

    申请号：US204517

    申请日：1998-12-02

    申请人： Paul M. Zavracky

    发明人： Paul M. Zavracky

    IPC分类号： B81B3/00 ,  H01H59/00 ,  H01L29/82

    CPC分类号： B81B3/0021 ,  H01H59/0009 ,  B81B2203/0118 ,  B81B2203/0361

    摘要： The present invention is an active micromechanical electronic device of extremely small physical size, such that the device can take advantage of the quantum-mechanical phenomenon of electron tunneling. The device is produced using Scanning Electron Microscope (SEM) electron beam lithography. In operation, the gap between the tip of the beam and the drain contact is small enough (typically tens of angstroms) that electron tunneling occurs across the gap between the tip of the beam and the drain contact occurs, with the amount of resulting electron flow dependent on the width of the gap between the tip and the drain contact. The device acts as a controlled current source whose output is dependent on the mechanical position of the beam tip with respect to the drain contact. The tip to drain spacing varies due to the electrostatic force presented between the beam and the gate contact.

    摘要翻译： 本发明是一种极小物理尺寸的有源微机电式电子器件，使器件能够利用电子隧穿的量子力学现象。 该装置使用扫描电子显微镜（SEM）电子束光刻制造。 在操作中，光束的尖端与漏极接触之间的间隙足够小（通常为几十埃），电子隧穿发生在光束的尖端和漏极接触之间的间隙，产生的电子流量 取决于尖端和漏极接触之间的间隙的宽度。 该装置用作受控电流源，其输出取决于束尖相对于漏极接触的机械位置。 顶端到排水间距由于梁和门接触之间的静电力而变化。

    Method and apparatus for reducing defects in SOI structures
    42.
    发明授权
    Method and apparatus for reducing defects in SOI structures 失效
    减少SOI结构缺陷的方法和装置

    公开(公告)号：US5120509A

    公开(公告)日：1992-06-09

    申请号：US608559

    申请日：1990-11-02

    申请人： Paul M. Zavracky ,  Thomas P. Ford ,  Lisa P. Allen

    发明人： Paul M. Zavracky ,  Thomas P. Ford ,  Lisa P. Allen

    IPC分类号： C30B13/00 ,  C30B13/16

    CPC分类号： C30B29/06 ,  C30B13/16

    摘要： A method and apparatus for reducing branching, reducing defects, and improving the overall surface morphology of silicon on insulator (SOI) structures produced by Zone Melting and Recrystallization (ZMR) is described. A special heater for use in preparing SOI structures formed by ZMR comprises a graphite mass having corrugations extending along one or more side walls and which may be periodic. The heater provides concentrated regions of heat which vary periodically across the length of the molten zone of the SOI structure. Alternatively, the heater comprises a stationary lower heater member upon which the wafer is placed and a movable upper heater member having corrugations. ZMR is achieved by translating the corrugated upper heater member past the wafer. In yet another alternative, a well known strip heater having a uniformly shaped movable upper member is improved by replacing the upper member with a movable upper heater member having corrugations.

    摘要翻译： 描述了通过区域熔融和重结晶（ZMR）产生的减少分支，减少缺陷和改善绝缘体上硅（SOI）结构的整体表面形态的方法和装置。 用于制备由ZMR形成的SOI结构的专用加热器包括具有沿着一个或多个侧壁延伸并且可以是周期性的波纹的石墨块。 加热器提供在SOI结构的熔融区域的长度上周期性变化的集中区域。 或者，加热器包括固定的下部加热器构件，晶片被放置在该下部加热器构件上，以及具有波纹的可移动上部加热器构件。 通过将波纹状上部加热器部件平移通过晶片来实现ZMR。 在另一替代方案中，通过用具有波纹的可移动的上部加热器构件替换上部构件，改进了具有均匀形状的可移动上部构件的公知的带式加热器。

    Micromechanical electric shunt and encoding devices made therefrom
    46.
    发明授权
    Micromechanical electric shunt and encoding devices made therefrom 失效
    由其制造的微机电分流器和编码装置

    公开(公告)号：US4959515A

    公开(公告)日：1990-09-25

    申请号：US12092

    申请日：1987-02-06

    申请人： Paul M. Zavracky ,  Richard H. Morrison, Jr.

    发明人： Paul M. Zavracky ,  Richard H. Morrison, Jr.

    IPC分类号： B81B3/00 ,  G06K19/067 ,  H01H1/00 ,  H01H59/00

    CPC分类号： H01H59/0009 ,  G06K19/067 ,  H01H1/0036

    摘要： A micromechanical electric shunt is fabricated by micromachining according to recent IC fabrication procedures. A plurality of such shunts is incorporated on a single substrate to form novel process station or post identification or signature encoding apparatus for use on a telecommunications bus or the equivalent. Such identification of signature encoding apparatus may be configured for conventional binary coding. Both frequency and current derivative mode apparatus are disclosed.

    摘要翻译： 根据最近的IC制造程序通过微加工制造微机电分流器。 多个这样的分流器被并入单个基板上以形成用于在电信总线上或其等效物上使用的新的处理站或站点标识或签名编码设备。 签名编码装置的这种识别可以被配置用于传统的二进制编码。 公开了频率和电流导数模式装置。

    Light modulating device
    47.
    发明授权
    Light modulating device 失效
    光调制装置

    公开(公告)号：US06381022B1

    公开(公告)日：2002-04-30

    申请号：US09626678

    申请日：2000-07-27

    申请人： Paul M. Zavracky

    发明人： Paul M. Zavracky

    IPC分类号： G01B902

    CPC分类号： G02B26/001 ,  G01J3/0256 ,  G01J3/10 ,  G01J3/26

    摘要： The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

    摘要翻译： 本发明涉及微制造的光谱仪，其包括制造和使用它们的方法。 显微光谱仪可以在单个芯片中形成，其中检测器和光源可以单片集成。 显微光谱仪可以集成到传感器系统中，以测量固体和流体的光学和物理性能。

    Method of forming plastically deformable microstructures
    48.
    发明授权
    Method of forming plastically deformable microstructures 有权
    形成塑性变形微结构的方法

    公开(公告)号：US06261494B1

    公开(公告)日：2001-07-17

    申请号：US09176789

    申请日：1998-10-22

    申请人： Paul M. Zavracky ,  Rick H. Morrison ,  Keith Warner ,  Nicol E. McGruer

    发明人： Paul M. Zavracky ,  Rick H. Morrison ,  Keith Warner ,  Nicol E. McGruer

    IPC分类号： C04B3500

    CPC分类号： G02B26/0841 ,  B81B3/0021 ,  B81B2201/042 ,  G01P15/0802

    摘要： A method of creating plastically deformed devices which have a three dimensional aspect. Micromechanical structures are created from a material which is plastically deformable and then a section of the structure is bent to an out-of-plane position and can be maintained there without being supported by other mechanical devices such as latches or hinges. The bending of the structures may be done mechanically, by electrostatic forces or by magnetic forces. The bending can also be done in a batch mode where a plurality of devices are bent at the same time as part of the same process. Fuses can be utilized to allow only a predetermined number of devices to be bent in batch mode. The fuses are later blown, thereby providing a plurality of devices which are relatively parallel to the substrate as well as a plurality of devices which are generally out-of-plane with respect to the substrate.

    摘要翻译： 一种产生具有三维方面的塑性变形装置的方法。 微机械结构由塑性变形的材料制成，然后将结构的一部分弯曲到平面外的位置，并且可以保持在其上，而不被诸如闩锁或铰链的其它机械装置支撑。 结构的弯曲可以通过静电力或磁力机械地进行。 弯曲也可以以分批模式进行，其中多个装置同时作为相同工艺的一部分而弯曲。 可以使用保险丝来仅允许以批量模式弯曲预定数量的装置。 熔丝随后被吹制，从而提供多个与基板相对平行的装置，以及多个相对于基板超出平面的装置。

    Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate
    49.
    发明授权
    Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate 失效
    具有牺牲层的显微光谱仪与集成电路集成在同一基板上

    公开(公告)号：US6147756A

    公开(公告)日：2000-11-14

    申请号：US232391

    申请日：1994-04-25

    申请人： Paul M. Zavracky ,  John R. Martin

    发明人： Paul M. Zavracky ,  John R. Martin

    IPC分类号： G01J3/26 ,  G01B9/02

    CPC分类号： G01J3/26 ,  G01J3/0256

    摘要： The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

    摘要翻译： 本发明涉及微制造的光谱仪，其包括制造和使用它们的方法。 显微光谱仪可以在单个芯片中形成，其中检测器和光源可以单片集成。 显微光谱仪可以集成到传感器系统中，以测量固体和流体的光学和物理性质。

    Method of monolithically fabricating a microspectrometer with integrated detector
    50.
    发明授权
    Method of monolithically fabricating a microspectrometer with integrated detector 失效
    用集成检测器单片制造显微光谱仪的方法

    公开(公告)号：US5909280A

    公开(公告)日：1999-06-01

    申请号：US197112

    申请日：1994-02-16

    申请人： Paul M. Zavracky

    发明人： Paul M. Zavracky

    IPC分类号： G01J3/10 ,  G01J3/26 ,  G02B26/00 ,  G01B9/02

    CPC分类号： G02B26/001 ,  G01J3/10 ,  G01J3/26 ,  G01J3/0256

    摘要： The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

    摘要翻译： 本发明涉及微制造的光谱仪，其包括制造和使用它们的方法。 显微光谱仪可以在单个芯片中形成，其中检测器和光源可以单片集成。 显微光谱仪可以集成到传感器系统中，以测量固体和流体的光学和物理性质。