公开(公告)号：US10209269B2

公开(公告)日：2019-02-19

申请号：US14858563

申请日：2015-09-18

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro Tocchio

IPC: G01P15/02 ,  G01P15/125 ,  G01C19/5712 ,  B81B7/00 ,  G01P15/08

Abstract: Described herein is a microelectromechanical detection structure, provided with: a substrate having a top surface extending in a plane; a detection-electrode arrangement; an inertial mass, suspended above the substrate and the detection-electrode arrangement; and elastic elements, coupling the inertial mass to a central anchorage element fixed with respect to the substrate, in such a way that it is free to rotate about an axis of rotation as a function of a quantity to be detected along a vertical axis, the central anchorage element being arranged at the axis of rotation. A suspension structure is coupled to the detection-electrode arrangement for supporting it, suspended above the substrate and underneath the inertial mass, and is anchored to the substrate via at least one first anchorage region; the fixed-electrode arrangement is anchored to the suspension structure via at least one second anchorage region.

公开(公告)号：US09970958B2

公开(公告)日：2018-05-15

申请号：US14672575

申请日：2015-03-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Marco Castellano ,  Pierluigi Montinari ,  Salvatore Poli ,  Alessandro Tocchio ,  Giovanni Carlo Tripoli

IPC: G01P21/00 ,  G01C25/00 ,  G01P15/125

CPC classification number: G01P21/00 ,  G01C25/00 ,  G01P15/125

Abstract: A method for compensating non-linearities of a read signal generated by a variable-capacitance inertial sensor including a first fixed electrode and a second fixed electrode and a mobile electrode, which is spatially arranged between the first and second fixed electrodes and is capacitively coupled to the first and second fixed electrodes, said method comprising the steps of: acquiring the read signal; identifying a first linear component and at least one first nonlinear component of the read signal; a generating a compensated output signal by subtracting the first nonlinear component from the read signal.

公开(公告)号：US20180094929A1

公开(公告)日：2018-04-05

申请号：US15466722

申请日：2017-03-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: G01C19/574

Abstract: A MEMS device including a main die that may be coupled to a secondary die, which forms a frame, and at least one first mobile mass elastically coupled to the frame, the main die forming: a driving stage that drives the first mobile mass so that it oscillates, parallel to a first direction, with frequency-modulated displacements; and a processing stage, which generates an output signal indicating an angular velocity of the MEMS device as a function of displacements parallel to a second direction that are made by the first mobile mass, when driven by the driving stage, on account of a Coriolis force.

公开(公告)号：US20170285064A1

公开(公告)日：2017-10-05

申请号：US15265111

申请日：2016-09-14

Applicant: STMicroelectronics S.R.L.

Inventor： Alessandro Tocchio ,  Gabriele Gattere

IPC: G01P15/125 ,  B81B3/00

Abstract: A MEMS accelerometric sensor includes a bearing structure and a suspended region that is made of semiconductor material, mobile with respect to the bearing structure. At least one modulation electrode is fixed to the bearing structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency. At least one variable capacitor is formed by the suspended region and by the modulation electrode in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal. A sensing assembly generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal indicating the position of the suspended region with respect to the bearing structure and includes a frequency-modulated component that is a function of the acceleration and of the first frequency.

公开(公告)号：US20170234940A1

公开(公告)日：2017-08-17

申请号：US15584672

申请日：2017-05-02

Applicant: STMicroelectronics S.r.l.

Inventor： Giacomo Langfelder ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/028 ,  G01R33/02 ,  G01R33/00 ,  H01L41/08 ,  H01L41/113

CPC classification number: G01R33/0283 ,  G01R33/0064 ,  G01R33/0213 ,  G01R33/028 ,  G01R33/0286 ,  G01R33/038 ,  H01L41/08 ,  H01L41/1132

Abstract: A magnetic field sensor includes a die and a current generator in the die. The current generator generates a driving current. A Lorentz force transducer is also formed in the die and coupled to the current generator to obtain measurements of a magnetic field based upon the Lorentz force. The magnetic field has a resonance frequency and the current generator drives the Lorentz force sensor with the driving current having a non-zero frequency different from the resonance frequency.

公开(公告)号：US20150377624A1

公开(公告)日：2015-12-31

申请号：US14750840

申请日：2015-06-25

Applicant: STMICROELECTRONICS, S.R.L.

Inventor： Luca Giuseppe Falorni ,  Carlo Valzasina ,  Roberto Carminati ,  Alessandro Tocchio

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  B81B3/0018 ,  B81B3/0086 ,  B81B2201/025 ,  B81B2203/0163 ,  G01C19/5733 ,  G01C19/5747

Abstract: MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.

Abstract translation: MEMS器件具有通过第一弹性元件弹性地携带悬挂质量的支撑区域。 调谐动态吸收器弹性耦合到悬挂质量并且被配置为在动态吸收体的固有振荡频率下抑制作用在悬浮质量上的正交力。 调谐动态吸收器由通过第二弹性元件联接到悬挂质量的阻尼物质形成。 在一个实施例中，悬挂质量和阻尼质量形成在相同的结构层中，例如半导体材料，并且阻尼块被悬挂质量包围。

公开(公告)号：US20150035526A1

公开(公告)日：2015-02-05

申请号：US14446248

申请日：2014-07-29

Applicant: STMicroelectronics S.r.l.

Inventor： Giacomo Langfelder ,  Alessandro Tocchio ,  Dario Paci

IPC: G01R33/028

CPC classification number: G01R33/0283 ,  G01R33/0064 ,  G01R33/0213 ,  G01R33/028 ,  G01R33/0286 ,  G01R33/038 ,  H01L41/08 ,  H01L41/1132

Abstract: A magnetic-field sensor, including: a die, a current generator in the die. The current generator generating a driving current. A Lorentz force transducer also in the die and being configured to obtain measurements of magnetic field based upon the Lorentz force is coupled to the current generator. The transducer having a resonance frequency. The current generator is such that the driving current has a non-zero frequency different from the resonance frequency.

Abstract translation: 一种磁场传感器，包括：模具，模具中的电流发生器。 电流发生器产生驱动电流。 也在模具中并被配置为基于洛伦兹力获得磁场的测量值的洛伦兹力传感器耦合到电流发生器。 换能器具有共振频率。 电流发生器使得驱动电流具有与谐振频率不同的非零频率。