Three-dimensional semiconductor memory devices and methods of operating the same

    公开(公告)号:US10971238B2

    公开(公告)日:2021-04-06

    申请号:US16714941

    申请日:2019-12-16

    Abstract: Three-dimensional semiconductor memory devices are provided. A three-dimensional semiconductor memory device includes a plurality of word line blocks including a plurality of cell strings that are connected in parallel between a bit line and a common source line. Each of the cell strings includes a plurality of memory cell transistors that are stacked on a substrate in a vertical direction, a plurality of ground selection transistors that are connected in series between the plurality of memory cell transistors and the substrate, and a string selection transistor that is between the plurality of memory cell transistors and the bit line. In each of the cell strings, at least one of the plurality of ground selection transistors has a first threshold voltage, and remaining ones of the ground selection transistors have a second threshold voltage different from the first threshold voltage. Related methods of operating three-dimensional semiconductor memory devices are also provided.

    Vertical variable resistance memory devices

    公开(公告)号:US12193343B2

    公开(公告)日:2025-01-07

    申请号:US17192093

    申请日:2021-03-04

    Abstract: A vertical variable resistance memory device including gate electrodes spaced apart from each other in a first direction on a substrate, each of the gate electrodes including graphene and extending in a second direction, the first direction being substantially perpendicular to an upper surface of the substrate and the second direction being substantially parallel to the upper surface of the substrate; first insulation patterns between the gate electrodes, each of the first insulation patterns including boron nitride (BN); and at least one pillar structure extending in the first direction through the gate electrodes and the first insulation patterns on the substrate, wherein the at least one pillar structure includes a vertical gate electrode extending in the first direction; and a variable resistance pattern on a sidewall of the vertical gate electrode.

    Semiconductor devices including semiconductor pattern

    公开(公告)号:US12191136B2

    公开(公告)日:2025-01-07

    申请号:US18098174

    申请日:2023-01-18

    Abstract: A semiconductor device includes a first conductive line and a second conductive line spaced apart from the first conductive line. A semiconductor pattern is disposed between the first conductive line and the second conductive line. The semiconductor pattern includes a first semiconductor pattern having first-conductivity-type impurities disposed adjacent to the first conductive line. A second semiconductor pattern having second-conductivity-type impurities is disposed adjacent to the second conductive line. A third semiconductor pattern is disposed between the first semiconductor pattern and the second semiconductor pattern. The third semiconductor pattern includes a first region disposed adjacent to the first semiconductor pattern and a second region disposed between the first region and the second semiconductor pattern. At least one of the first region and the second region comprises an intrinsic semiconductor layer. A first gate line crosses the first region and a second gate line crosses the second region.

    SEMICONDUCTOR MEMORY DEVICE
    46.
    发明公开

    公开(公告)号:US20240276713A1

    公开(公告)日:2024-08-15

    申请号:US18537987

    申请日:2023-12-13

    Abstract: A semiconductor memory device includes a memory cell that extends in a first horizontal direction, a second horizontal direction that intersects the first horizontal direction, and a vertical direction. The memory cell includes a first transistor including a first channel structure, a second transistor including a second channel structure, a charge storage element electrically connected to a first end of the second channel structure and adjacent to the first channel structure a first bit line electrically connected to a first end of the first channel structure and that extends in the second horizontal direction, a selection line electrically connected to a second end of the first channel structure and that extends in the second horizontal direction, a second bit line electrically connected to a second end of the second channel structure and that extends in the second horizontal direction, and a gate line that extends in the vertical direction.

    SEMICONDUCTOR  MEMORY  DEVICE
    47.
    发明公开

    公开(公告)号:US20240224494A1

    公开(公告)日:2024-07-04

    申请号:US18414893

    申请日:2024-01-17

    CPC classification number: H10B12/00

    Abstract: A semiconductor memory device includes: a first word line extending in a vertical direction; a second word line spaced apart from the first word line in a first horizontal direction and extending in the vertical direction; a first semiconductor pattern of a ring-shaped horizontal cross-section surrounding the first word line and constituting a portion of a first cell transistor; a second semiconductor pattern of a ring-shaped horizontal cross-section surrounding the second word line and constituting a portion of a second cell transistor; a cell capacitor between the first semiconductor pattern and the second semiconductor pattern and including a first electrode, a second electrode, and a capacitor dielectric film; a first bit line opposite the cell capacitor with respect to the first semiconductor pattern and extending in a second horizontal direction; and a second bit line opposite the cell capacitor with respect to the second semiconductor pattern.

    SEMICONDUCTOR DEVICE
    49.
    发明公开

    公开(公告)号:US20240099015A1

    公开(公告)日:2024-03-21

    申请号:US18368067

    申请日:2023-09-14

    CPC classification number: H10B51/20 H10B80/00

    Abstract: A semiconductor device includes a substrate. A plurality of horizontal structures is stacked on the substrate and spaced apart from each other. A plurality of vertical structures penetrates through the plurality of horizontal structures. Each of the plurality of vertical structures includes a vertical source line, a vertical bit line, a channel layer, and a dielectric layer. The channel layer is in direct contact with the vertical source line and the vertical bit line. The dielectric layer is disposed between the plurality of horizontal structures and the channel layer. Each of the plurality of horizontal structures includes a first conductive layer, a ferroelectric layer surrounding at least a portion of the first conductive layer, and a second conductive layer disposed between the ferroelectric layer and the dielectric layer.

    Semiconductor memory device
    50.
    发明授权

    公开(公告)号:US11917805B2

    公开(公告)日:2024-02-27

    申请号:US17541584

    申请日:2021-12-03

    CPC classification number: H10B12/00

    Abstract: A semiconductor memory device includes: a first word line extending in a vertical direction; a second word line spaced apart from the first word line in a first horizontal direction and extending in the vertical direction; a first semiconductor pattern of a ring-shaped horizontal cross-section surrounding the first word line and constituting a portion of a first cell transistor; a second semiconductor pattern of a ring-shaped horizontal cross-section surrounding the second word line and constituting a portion of a second cell transistor; a cell capacitor between the first semiconductor pattern and the second semiconductor pattern and including a first electrode, a second electrode, and a capacitor dielectric film; a first bit line opposite the cell capacitor with respect to the first semiconductor pattern and extending in a second horizontal direction; and a second bit line opposite the cell capacitor with respect to the second semiconductor pattern.

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