公开(公告)号：US20100159154A1

公开(公告)日：2010-06-24

申请号：US12341866

申请日：2008-12-22

申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, JR. ,  Yuan Yao

发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Vladimir Nikitin ,  Trevor W. Olson ,  John Bruce Piggott, JR. ,  Yuan Yao

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： A method in one embodiment includes forming a layer of a nonmagnetic material above an upper surface of a substrate; forming a resist structure above the layer of nonmagnetic material, wherein the resist structure has an undercut; removing a portion of the layer of nonmagnetic material not covered by the resist structure; depositing a layer of magnetic material above the substrate adjacent a remaining portion of the layer of nonmagnetic material such that at least portions of the layer of magnetic material and the remaining portion of the layer of nonmagnetic material lie in a common plane; removing the resist structure; and forming a write pole above the layer of magnetic material and the remaining portion of the layer of nonmagnetic material. Additional methods are also presented.

摘要翻译： 一个实施例中的方法包括在衬底的上表面上方形成非磁性材料层; 在非磁性材料层之上形成抗蚀剂结构，其中抗蚀剂结构具有底切; 去除未被抗蚀剂结构覆盖的非磁性材料层的一部分; 在所述基板的上方邻近所述非磁性材料层的剩余部分沉积一层磁性材料，使得所述磁性材料层和所述非磁性材料层的剩余部分的至少部分位于公共平面中; 去除抗蚀剂结构; 以及在磁性材料层和非磁性材料层的剩余部分之上形成写入极。 还介绍了其他方法。

公开(公告)号：US20090152235A1

公开(公告)日：2009-06-18

申请号：US11956292

申请日：2007-12-13

申请人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Hieu Lam ,  Vladimir Nikitin ,  Sue Siyang Zhang ,  Yi Zheng

IPC分类号： B44C1/22

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for manufacturing a magnetic write head having a stepped trailing shield. The stepped trailing shield is formed by forming a non-magnetic bump over a write pole prior to electroplating a wrap-around magnetic shield. The method allows the location of the front edge of the bump relative to the back edge of the wrap-around shield to be monitored by measuring the electrical resistance of an electrical lapping guide formed concurrently with these features. This concurrent formation of a lapping guide can be used to define the relative location of other features as well, such as the location of a back edge of a wrap-around shield relative to a flare point of a write pole.

摘要翻译： 一种用于制造具有阶梯式后挡板的磁写头的方法。 在电镀环绕磁屏蔽之前，通过在写入极上形成非磁性凸块来形成阶梯式后屏蔽。 该方法允许通过测量与这些特征同时形成的电研磨引导件的电阻来监测凸块的前边缘相对于环绕护罩的后边缘的位置。 研磨引导件的这种同时形成也可以用于限定其它特征的相对位置，例如环绕屏蔽件的后边缘相对于写入极点的扩张点的位置。

公开(公告)号：US07505226B2

公开(公告)日：2009-03-17

申请号：US10857286

申请日：2004-05-28

申请人： Wen-Chien David Hsiao ,  Vladimir Nikitin

发明人： Wen-Chien David Hsiao ,  Vladimir Nikitin

IPC分类号： G11B5/127

CPC分类号： G11B5/3116

摘要： A method and apparatus for providing a pole tip structure having a shape for preventing over saturation of the pole tip structure is disclosed. A cap layer having a tail structure for reducing the saturation of the cap layer is formed over the pole structure. The tail structure includes an angled surface that can vary between approximately 15° and 65°.

摘要翻译： 公开了一种用于提供具有防止极尖结构的过饱和形状的极尖结构的方法和装置。 在极结构上形成具有用于降低盖层的饱和度的尾部结构的盖层。 尾部结构包括可在大约15°和65°之间变化的成角度的表面。

公开(公告)号：US07881019B2

公开(公告)日：2011-02-01

申请号：US11391835

申请日：2006-03-28

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Vladimir Nikitin

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Vladimir Nikitin

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116

摘要： A magnetic structure for use in a magnetic head for avoiding stray field writing. The magnetic structure can be for example a magnetic shield or could be a magnetic pole of a write head and is particularly advantageous for use in a perpendicular recording system, because such perpendicular recording systems are especially susceptible to stray field writing. The magnetic structure includes a forward protruding portion that extends toward the air bearing surface (ABS) of the head also includes first and second wing portions that extend laterally from the forward protruding portion. The wing portions each have includes an inner constant recess portion, and an outer tapered portion. The inner constant recess portion of each wing prevents stray field writing while also preventing magnetic saturation, the outer tapered portions, which taper away from the ABS as they extend laterally outward, further prevent stray field writing by removing the outer corners of the shield away from the ABS.

摘要翻译： 用于磁头的磁结构，用于避免杂散场写入。 磁性结构可以是例如磁屏蔽或者可以是写入磁头的磁极，并且对于在垂直记录系统中使用是特别有利的，因为这样的垂直记录系统特别容易受到杂散磁场写入的影响。 磁性结构包括朝向头部的空气支承表面（ABS）延伸的向前突出部分还包括从前突出部分横向延伸的第一和第二翼部分。 翼部各自包括内部恒定凹部和外锥形部。 每个翼的内部恒定凹部防止杂散场写入，同时也防止磁饱和，当锥形横向向外延伸时，远离ABS逐渐变细的外锥形部分进一步防止杂散场写入，通过将屏蔽的外角除去 ABS。

公开(公告)号：US20100157470A1

公开(公告)日：2010-06-24

申请号：US12341893

申请日：2008-12-22

申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Trevor W. Olson ,  Yuan Yao

发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Trevor W. Olson ,  Yuan Yao

IPC分类号： G11B5/187

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method in one embodiment includes forming a resist structure above an upper surface of a substrate, wherein a portion of the upper surface of the substrate is a shaping layer, wherein the resist structure has an undercut; depositing a layer of magnetic material above exposed regions of the substrate, wherein a portion of the layer of magnetic material tapers towards the substrate as it approaches the undercut; removing the resist structure; and forming a write pole above the layer of magnetic material. Additional methods are disclosed.

摘要翻译： 在一个实施例中的方法包括在基板的上表面上方形成抗蚀剂结构，其中基板的上表面的一部分是成形层，其中抗蚀剂结构具有底切; 在衬底的暴露区域上方沉积一层磁性材料，其中磁性材料层的一部分在接近底切时朝着衬底逐渐变细; 去除抗蚀剂结构; 并在磁性材料层之上形成写入极。 公开了另外的方法。

公开(公告)号：US07538976B2

公开(公告)日：2009-05-26

申请号：US11412017

申请日：2006-04-25

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin

IPC分类号： G11B5/127

CPC分类号： G11B5/3146 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic structure for use in a magnetic head for avoiding wide angle track erasure and other forms of adjacent track interference. The magnetic structure includes a trailing shield having a specially configured back edge opposite the air bearing surface ABS. The magnetic shield has a shallow substantially constant throat height at a center portion. Then, the back edge of the shield tapers back away from the ABS in first and second intermediate portion located at either side of the center portion. These intermediate portions lead to first and second outer portions that have substantially constant throat heights that are larger than the throat height at the center region. The throat height at each of the laterally outer portions can be 1.5 to 5 times the throat height of the center portion. This configuration, chokes off stray fields that might be picked up by the outer portions of the shield preventing excessive magnetic flux from reaching the central portion of the shield where it might affect writing. In addition, the limited throat height of the outer portion (ie. the back edge of the outer portions does not keep tapering back away from the ABS) prevents the outer portions from picking up too much stray magnetic field, while also ensuring that sufficient magnetic material will be present to absorb desired magnetic field from the write pole during use.

摘要翻译： 用于磁头的磁结构，用于避免广角跟踪擦除和其他形式的相邻轨道干扰。 磁性结构包括后挡板，其具有与空气轴承表面ABS相对的特殊配置的后边缘。 磁屏蔽件在中心部分具有浅实质上恒定的喉部高度。 然后，屏蔽件的后边缘在位于中心部分两侧的第一和第二中间部分中从ABS逐渐变细。 这些中间部分导致第一和第二外部部分具有大于喉部高度在中心区域处大致恒定的喉部高度。 每个横向外部部分的喉部高度可以是中心部分的喉部高度的1.5至5倍。 这种构造可以消除可能由屏蔽外部拾取的杂散场，防止过多的磁通量到达屏蔽的中心部分，从而可能影响写入。 此外，外部部分的限制喉部高度（即，外部部分的后边缘不保持从ABS退回）防止外部部分拾取太多的杂散磁场，同时还确保足够的磁 将存在材料以在使用期间从写入极吸收期望的磁场。

公开(公告)号：US07506431B2

公开(公告)日：2009-03-24

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US20080271308A1

公开(公告)日：2008-11-06

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  C23C14/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US08066893B2

公开(公告)日：2011-11-29

申请号：US12343044

申请日：2008-12-23

申请人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Yinshi Liu ,  Vladimir Nikitin ,  Trevor W. Olson ,  Hicham Moulay Sougrati ,  Yuan Yao

发明人： Amanda Baer ,  Wen-Chien David Hsiao ,  John I. Kim ,  Yinshi Liu ,  Vladimir Nikitin ,  Trevor W. Olson ,  Hicham Moulay Sougrati ,  Yuan Yao

IPC分类号： B44C1/22 ,  B23P15/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A method for manufacturing a magnetic write head having a stepped, recessed, high magnetic moment pole connected with a write pole. The stepped pole structure helps to channel magnetic flux to the write pole without leaking write field to the magnetic medium. This allows the write head to maintain a high write field strength at very small bit sizes. The method includes depositing a dielectric layer and a first CMP layer over substrate that can include a magnetic shaping layer. A mask is formed over the dielectric layer, the mask having an opening to define the stepped pole structure. The image of the mask is transferred into the dielectric layer. A high magnetic moment material is deposited and a chemical mechanical polishing is performed to planarize the magnetic material and dielectric layer.

摘要翻译： 一种用于制造具有与写入极连接的阶梯式，凹入的高磁矩极的磁性写入头的方法。 阶梯式极点结构有助于将磁通量传递到写入极，而不会将写入场泄漏到磁性介质。 这允许写头在非常小的位尺寸下保持高的写场强度。 该方法包括在可包括磁性成形层的衬底上沉积介电层和第一CMP层。 在电介质层上形成掩模，掩模具有限定阶梯极结构的开口。 掩模的图像被转移到电介质层中。 沉积高磁矩材料并执行化学机械抛光以使磁性材料和电介质层平坦化。

公开(公告)号：US07748103B2

公开(公告)日：2010-07-06

申请号：US11379969

申请日：2006-04-24

申请人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek

发明人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Wen-Chien David Hsiao ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek

IPC分类号： G11B5/187 ,  G11B5/23

CPC分类号： G11B5/1278 ,  G11B5/11 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3163 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A perpendicular magnetic recording write head has a write pole, a trapezoidal-shaped trailing shield notch, and a metal gap layer between the write pole and notch. The write pole has a trailing edge that has a width substantially defining the track width and that faces the front edge of the notch but is spaced from it by the gap layer. The write head is fabricated by reactive ion beam etching of a thin mask film above the write pole to remove the mask film and widen the opening at the edges of the write pole. The gap layer and notch are deposited into the widened opening above the write pole. The write pole has nonmagnetic filler material, such as alumina, surrounding it except at its trailing edge, where it is in contact with the gap layer, which is formed of a different material than the surrounding filler material.

摘要翻译： 垂直磁记录写头具有写极，梯形后屏蔽切口和写极和凹口之间的金属间隙层。 写入极具有后缘，其具有基本上限定轨道宽度的宽度并且面向凹口的前边缘，但是通过间隙层与其间隔开。 写头通过在写极上方的薄掩模膜的反应离子束蚀刻来制造，以去除掩模膜并加宽写入极的边缘处的开口。 间隙层和凹口沉积在写柱上方的加宽开口中。 写极具有非磁性填充材料，例如氧化铝，除了其后缘外围，其与间隙层接触，间隙层由与周围填料材料不同的材料形成。